US5660255A — Stiff actuator active vibration isolation system

Claim 1

Independent Claim 224 words

An active vibration isolation system for isolating a payload mass falling within a predetermined range of payload masses from a source of vibration, comprising: a small mass which is at least one order of magnitude less than said predetermined range of payload masses; at least one stiff actuator having first and second opposed surfaces and a variable length in between said surfaces which is in alignment with an axis, said first surface of said stiff actuator coupled to said small mass and said second surface of said stiff actuator coupled to the source of vibration; a passive isolator interposed between said small mass and said payload mass, wherein said stiff actuator, said small mass and said passive isolator are interposed between said payload mass and the source of vibration; a sensor coupled to said small mass and adaptable to generate a sensor signal which is a function of the movement of said small mass; and circuitry coupling said sensor to said stiff actuator and adaptable to receive said sensor signal, said circuitry including compensation circuitry to alter said sensor signal such that said system will be stable over a predetermined range of vibration frequencies and payload masses, said circuitry further including control circuitry coupled to said stiff actuator for varying the length of said stiff actuator as a function of said altered sensor signal.

Claim 2

Dependent Claim 224 words

An active vibration isolation system for isolating a payload mass falling within a predetermined range of payload masses from a source of vibration, comprising: a small mass which is at least one order of magnitude less than said predetermined range of payload masses; at least one stiff actuator having first and second opposed surfaces and a variable length in between said surfaces which is in alignment with an axis, said first surface of said stiff actuator coupled to said small mass and said second surface of said stiff actuator coupled to the source of vibration; a passive isolator interposed between said small mass and said payload mass, wherein said stiff actuator, said small mass and said passive isolator are interposed between said payload mass and the source of vibration; a sensor coupled to said small mass and adaptable to generate a sensor signal which is a function of the movement of said small mass; and circuitry coupling said sensor to said stiff actuator and adaptable to receive said sensor signal, said circuitry including compensation circuitry to alter said sensor signal such that said system will be stable over a predetermined range of vibration frequencies and payload masses, said circuitry further including control circuitry coupled to said stiff actuator for varying the length of said stiff actuator as a function of said altered sensor signal.

Claim 3

Dependent Claim 15 words

The active vibration system of claim 1, wherein said stiff actuator is a piezoelectric motor.

Claim 4

Dependent Claim 27 words

The active vibration isolation system of claim 1, wherein the ratio of said small mass to said payload mass is in the range of 1/50 to 1/200.

Claim 5

Dependent Claim 17 words

The active vibration isolation system of claim 1, wherein said passive isolator is formed of an elastomer.

Claim 6

Dependent Claim 123 words

The active vibration isolation system of claim 1, wherein said stiff actuator is one of at least first, second and third stiff actuators each having first and second opposed surfaces and respective variable lengths between said opposed surfaces, each of said first, second and third stiff actuators being in alignment with a respective axis which is at an angle to the axes associated with the remaining ones of said first, second and third stiff actuators, first surfaces of each of said stiff actuators coupled to said small mass and second surfaces of each of said stiff actuators coupled to said support wherein said stiff actuators are operable to isolate said payload mass from said source of vibration along each of said three axes.

Claim 7

Dependent Claim 16 words

The active vibration isolation system of claim 5, wherein said axes are orthogonal to each other.

Claim 8

Dependent Claim 38 words

The active vibration isolation system of claim 5, wherein said first surface of said first stiff actuator is coupled to said small mass by a shear decoupler interposed between the last said first surface and said small mass.

Claim 9

Dependent Claim 70 words

The active vibration isolation system of claim 5, wherein said sensor is one of first, second and third sensors each coupled to said small mass, each of said sensors sensing the movement of said small mass in a direction parallel to a respective one of said axes; and first, second and third compensation circuits coupling ones of said sensors to respective ones of said first, second and third stiff actuators.

Claim 10

Dependent Claim 57 words

The active vibration isolation system of claim 1, wherein said sensor signal is a velocity signal indicating velocity of said small mass, said circuitry including a velocity integrator for integrating said velocity signal to derive a displacement signal and having an output for said displacement signal, said compensation circuitry coupled to said output of said velocity integrator.

Claim 11

Dependent Claim 24 words

The active vibration isolation system of claim 1, wherein said compensation circuitry includes a DC blocking circuit for blocking DC voltage from said sensor.

Claim 12

Dependent Claim 35 words

The active vibration isolation system of claim 10, wherein said DC blocking circuit has the transfer function ##EQU11## where S is the LaPlace transform operator and W 1 is a frequency of about 0.3 hertz.

Claim 13

Dependent Claim 17 words

The active vibration isolation system of claim 11, wherein said DC blocking circuit is an analog stage.

Claim 14

Dependent Claim 57 words

The active vibration isolation system of claim 1, wherein said compensation circuitry includes a low-frequency compensation circuit with a transfer function ##EQU12## wherein S is the Laplace transform operator, T c1 is a preselected first time constant and T c2 is a preselected second time constant which is about twenty times shorter than said first time constant.

Claim 15

Dependent Claim 24 words

The active vibration isolation system of claim 13, wherein said sensor has a suspension frequency, T c1 being approximately matched to said suspension frequency.

Claim 16

Dependent Claim 19 words

The active vibration isolation system of claim 1, wherein said predetermined range of masses is 500 to 2,000 pounds.

Claim 17

Dependent Claim 29 words

The system of claim 1, wherein said compensation circuitry includes a lead phase increase circuit which adds phase lead in the frequency region of resonance of said passive isolator.

Claim 18

Dependent Claim 28 words

The system of claim 16, wherein said lead phase increase circuit causes a phase shift of said sensor signal in said frequency region of at least forty degrees.

Claim 19

Dependent Claim 24 words

The system of claim 16, wherein said lead phase increase circuit comprises two series-connected analog lead lag stages having two poles and two zeroes.

Claim 20

Dependent Claim 53 words

The system of claim 1, wherein said compensation circuitry comprises a high frequency gain reduction circuit operating on said sensor signal to reduce the gain thereof to unity at a point in the frequency domain substantially less than the resonance frequency formed by spring constant of said stiff actuator and said small mass.

Claim 21

Dependent Claim 36 words

The system of claim 19, wherein said high frequency gain reduction circuit has a transfer function ##EQU13## where S is the LaPlace Transform Operator and 1/T c3 is said unity gain point in the frequency domain.

Claim 22

Dependent Claim 16 words

The system of claim 19, wherein said high frequency gain reduction circuit is an analog circuit.

Claim 23

Dependent Claim 44 words

The system of claim 21, wherein said high frequency gain reduction circuit comprises two series-connected lag lead circuits each having a pole at a first frequency prior to said unit gain point and a zero at a second frequency after said unity gain point.

Claim 24

Dependent Claim 27 words

The system of claim 19, wherein said resonance frequency is about 1500 hertz, said unity gain point in the frequency domain preselected to be about 350 hertz.

Claim 25

Dependent Claim 39 words

The system of claim 1, wherein said compensation circuitry includes a notch filter circuit having a notch of low gain at a resonance frequency caused by the interaction of said small mass, said payload mass and said passive isolator.

Claim 26

Dependent Claim 17 words

The system of claim 24, wherein said notch filter circuit has a notch at about 300 hertz.

Claim 27

Dependent Claim 16 words

The system of claim 24, wherein said notch filter has a DC gain of near unity.

Claim 28

Dependent Claim 229 words

An active vibration isolation system for isolating a payload mass falling within a predetermined range of payload masses from a vibrating base on which the payload mass is supported, comprising: a small mass which is at least one order of magnitude less than said predetermined range; at least one stiff actuator having first and second faces and a variable length between said first and second faces, said stiff actuator changing said variable length responsive to receiving an actuator control signal, said first face of said stiff actuator coupled to said small mass and disposed in parallel to an axis passing through said small mass and said second face of said stiff actuator coupled to the base; a passive isolator interposed between said small mass and said payload mass and disposed in axial opposition to said stiff actuator, wherein said stiff actuator, said small mass and said passive isolator are interposed between said payload mass and the source of vibration; and a geophone mounted on said small mass for measuring the absolute velocity thereof and generating a velocity signal, circuitry coupled to said geophone and said stiff actuator for receiving said velocity signal, integrating said velocity signal to obtain a displacement signal, and generating said actuator control signal as a function of said displacement signal, wherein said active vibration system is interposed between said payload mass and a vibration source.

Claim 29

Dependent Claim 229 words

An active vibration isolation system for isolating a payload mass falling within a predetermined range of payload masses from a vibrating base on which the payload mass is supported, comprising: a small mass which is at least one order of magnitude less than said predetermined range; at least one stiff actuator having first and second faces and a variable length between said first and second faces, said stiff actuator changing said variable length responsive to receiving an actuator control signal, said first face of said stiff actuator coupled to said small mass and disposed in parallel to an axis passing through said small mass and said second face of said stiff actuator coupled to the base; a passive isolator interposed between said small mass and said payload mass and disposed in axial opposition to said stiff actuator, wherein said stiff actuator, said small mass and said passive isolator are interposed between said payload mass and the source of vibration; and a geophone mounted on said small mass for measuring the absolute velocity thereof and generating a velocity signal, circuitry coupled to said geophone and said stiff actuator for receiving said velocity signal, integrating said velocity signal to obtain a displacement signal, and generating said actuator control signal as a function of said displacement signal, wherein said active vibration system is interposed between said payload mass and a vibration source.

Claim 30

Dependent Claim 22 words

The active vibration isolation system of claim 27, wherein said stiff actuator is interposed between said small mass and said vibration source.

Claim 31

Dependent Claim 27 words

The active vibration isolation system of claim 28, wherein the ratio of said small mass to said payload mass is in the range of 1/50 to 1/200.

Claim 32

Dependent Claim 234 words

An active vibration isolation system, comprising: a passive isolator mount adaptable to support a payload having a payload mass falling within a predetermined range of masses, said payload exerting a force on said passive isolator mount along a first axis; at least one payload velocity sensor coupled to said payload for sensing an absolute velocity of said payload in a direction parallel to said first axis; a small mass supporting said passive isolator mount and disposed in opposition to said payload mass, said small mass preselected to be at least one order of magnitude less than said predetermined range of masses; at least one small mass velocity sensor coupled to said small mass for sensing an absolute velocity of said small mass in a direction parallel to said first axis; at least a first stiff actuator disposed adjacent said small mass and in opposition to said passive isolator mount, a length of said first stiff actuator aligned with said first axis and variable as a function of a control signal applied thereto; and a controller having inputs coupled to said sensors and at least one output which is coupled to said first stiff actuator, said controller operable to control said first stiff actuator to compensate for vibration of said payload with said control signal, said control signal generated by said controller as a function of input signals appearing on said inputs from said sensors.

Claim 33

Dependent Claim 234 words

An active vibration isolation system, comprising: a passive isolator mount adaptable to support a payload having a payload mass falling within a predetermined range of masses, said payload exerting a force on said passive isolator mount along a first axis; at least one payload velocity sensor coupled to said payload for sensing an absolute velocity of said payload in a direction parallel to said first axis; a small mass supporting said passive isolator mount and disposed in opposition to said payload mass, said small mass preselected to be at least one order of magnitude less than said predetermined range of masses; at least one small mass velocity sensor coupled to said small mass for sensing an absolute velocity of said small mass in a direction parallel to said first axis; at least a first stiff actuator disposed adjacent said small mass and in opposition to said passive isolator mount, a length of said first stiff actuator aligned with said first axis and variable as a function of a control signal applied thereto; and a controller having inputs coupled to said sensors and at least one output which is coupled to said first stiff actuator, said controller operable to control said first stiff actuator to compensate for vibration of said payload with said control signal, said control signal generated by said controller as a function of input signals appearing on said inputs from said sensors.

Claim 34

Dependent Claim 43 words

The active vibration isolation system of claim 30, wherein said controller includes an integrator for integrating said small mass velocity signal to obtain a small mass displacement signal, said controller generating said control signal as a function of said small mass displacement signal.

Claim 35

Dependent Claim 16 words

The active vibration isolation system of claim 30, wherein said stiff actuator is a piezoelectric motor.

Claim 36

Dependent Claim 27 words

The active vibration isolation system of claim 30, wherein the ratio of said small mass to said payload mass is in the range of 1/50 to 1/200.

Claim 37

Dependent Claim 172 words

The system of claim 30, and further comprising at least one radial stiff actuator physically in communication with said small mass along a second axis disposed at an angle to said first axis, a length of said radial stiff actuator along said second axis variable as a function of a second control signal applied thereto; a second payload sensor coupled to said payload mass for sensing a second absolute velocity of said payload in a direction parallel to said second axis and generating a second payload velocity signal; a second small mass velocity sensor coupled to said small mass for sensing a second velocity of said small mass in a direction parallel to said second axis and generating a second small mass velocity signal; and said controller operable to receive said second payload and small mass velocity signals and to transmit said second control signal as a function thereof, said radial stiff actuator controlled by said second control signal to compensate for vibration occurring in a direction parallel to said second axis.

Claim 38

Dependent Claim 13 words

The system of claim 34, wherein said axes are normal to each other.

Claim 39

Dependent Claim 74 words

The system of claim 34, and further comprising a radial shear decoupler disposed adjacent said radial stiff actuator and a first shear decoupler disposed adjacent said first stiff actuator, said radial shear decoupler acting to reduce shear forces experienced by said radial stiff actuator in directions normal to the second axis; and said first shear decoupler acting to reduce shear forces experienced by said first stiff actuators in directions normal to the first axis.

Claim 40

Dependent Claim 173 words

The system of claim 34, and further comprising a second radial stiff actuator in physical communication with said small mass and disposed along a third axis disposed at an angle to said first and second axes, a length of said second radial stiff actuator aligned with said third axis and variable as a function of a third control signal applied thereto; a third payload mass velocity sensor coupled to said payload mass for sensing a third velocity of said payload mass in a direction parallel to said third axis; a third small mass velocity sensor coupled to said small mass for sensing a third velocity of said small mass in a direction parallel to said third axis; and said controller operable to receive third velocity signal from said third small mass and payload mass sensors and, said controller generating said third control signal as a function of said third velocity signals, said second radial stiff actuator compensating for vibration in parallel with said third axis in response to receiving said third control signal.

Claim 41

Dependent Claim 21 words

The system of claim 37, wherein said third axis is normal to at least one of said first and second axes.

Claim 42

Dependent Claim 37 words

The system of claim 37, wherein said second radial stiff actuator is a piezoelectric motor, said system further comprising means for placing said second radial stiff actuator in compression in a direction parallel to said third axis.

Claim 43

Dependent Claim 35 words

The system of claim 34, wherein said radial stiff actuator is a piezoelectric motor, said system further comprising means for placing said radial stiff actuator in compression in a direction parallel to said second axis.

Claim 44

Dependent Claim 52 words

The system of claim 30, and further comprising a shear decoupler interposed between said first stiff actuator and a selected one of said small mass and a source of vibration, said shear decoupler acting to reduce shear force applied to said first stiff actuator in a direction normal to said first axis.

Claim 45

Dependent Claim 32 words

The system of claim 41, wherein said shear decoupler includes a thin disk of elastomeric material having a radial stiffness at least one order of magnitude less than a vertical stiffness thereof.

Claim 46

Dependent Claim 24 words

The system of claim 42, wherein said decoupler further includes two rigid disks disposed adjacent opposite faces of said thin disk of elastomeric material.

Claim 47

Dependent Claim 11 words

The system of claim 30, wherein said velocity sensors are geophones.

Claim 48

Dependent Claim 150 words

In an active vibration isolation system which uses a plurality of stiff actuators, each responsive to an electrical control signal, to isolate a payload mass from a vibrating base on at least two axes formed at an angle to each other, each stiff actuator having opposed first and second faces and a variable length between said faces, said length having a value which is a function of at least one of said electrical control signals, the improvement comprising: for each one of the stiff actuators, a shear decoupler disposed adjacent said first face thereof, said shear decoupler comprising a first rigid disk disposed adjacent said first face, a second rigid disk disposed remotely from said first face, and an elastomeric disk interposed between said first and second rigid disks, said shear decoupler acting to reduce force on said one of the stiff actuators in any direction normal to said length.

Claim 49

Dependent Claim 150 words

In an active vibration isolation system which uses a plurality of stiff actuators, each responsive to an electrical control signal, to isolate a payload mass from a vibrating base on at least two axes formed at an angle to each other, each stiff actuator having opposed first and second faces and a variable length between said faces, said length having a value which is a function of at least one of said electrical control signals, the improvement comprising: for each one of the stiff actuators, a shear decoupler disposed adjacent said first face thereof, said shear decoupler comprising a first rigid disk disposed adjacent said first face, a second rigid disk disposed remotely from said first face, and an elastomeric disk interposed between said first and second rigid disks, said shear decoupler acting to reduce force on said one of the stiff actuators in any direction normal to said length.

Claim 50

Dependent Claim 17 words

The system of claim 45, wherein said shear decoupler has a shape factor of at least 8.

Claim 51

Dependent Claim 14 words

The system of claim 45, wherein said first and second rigid disks comprise metal.

Claim 52

Dependent Claim 50 words

The system of claim 45, wherein the ratio of stiffness of at least one stiff actuator to a respective shear decoupler in a respective axial direction is about ten times the ratio of stiffness of said stiff actuator to said decoupler in a radial direction orthogonal to said axial direction.

Claim 53

Dependent Claim 229 words

An active vibration isolation system for isolating a payload from vibrations in a support, comprising: an external case having sidewalls defining a cavity; a small mass dimensioned to be at least partially received in said cavity such that said case is spaced from said small mass on all sides, said small mass being preselected to be at least one order of magnitude smaller than a preselected range of payload masses, said small mass adaptable to be coupled to a payload mass; passive isolator coupling said small mass with said payload mass; at least first and second axes disposed at an angle to each other and intersecting said sidewalls and a load axis; for each of said first axis, said second axis and said load axis, at least one stiff actuator having a variable length which varies according to a control signal applied thereto, said stiff actuator disposed such that said variable length thereof is parallel to a respective axis, said stiff actuator used in spacing said mass from said case; for each axis, a sensor joined to said small mass and operable to produce a velocity signal; and compensation circuitry for receiving said velocity signals from said sensors and generating a respective plurality of control signals in response thereto, said compensation circuitry applying said control signals to respective ones of said stiff actuators to change the variable lengths thereof.

Claim 54

Dependent Claim 229 words

An active vibration isolation system for isolating a payload from vibrations in a support, comprising: an external case having sidewalls defining a cavity; a small mass dimensioned to be at least partially received in said cavity such that said case is spaced from said small mass on all sides, said small mass being preselected to be at least one order of magnitude smaller than a preselected range of payload masses, said small mass adaptable to be coupled to a payload mass; passive isolator coupling said small mass with said payload mass; at least first and second axes disposed at an angle to each other and intersecting said sidewalls and a load axis; for each of said first axis, said second axis and said load axis, at least one stiff actuator having a variable length which varies according to a control signal applied thereto, said stiff actuator disposed such that said variable length thereof is parallel to a respective axis, said stiff actuator used in spacing said mass from said case; for each axis, a sensor joined to said small mass and operable to produce a velocity signal; and compensation circuitry for receiving said velocity signals from said sensors and generating a respective plurality of control signals in response thereto, said compensation circuitry applying said control signals to respective ones of said stiff actuators to change the variable lengths thereof.

Claim 55

Dependent Claim 36 words

The system of claim 49, wherein a plurality of said stiff actuators have lengths which are parallel to each other, said plurality of stiff actuators actuating in parallel in response to one of said control signals.

Claim 56

Dependent Claim 15 words

The system of claim 49, wherein three of said axes are orthogonal to each other.

Claim 57

Dependent Claim 77 words

The system of claim 49, and further comprising: for each stiff actuator, a shear decoupler interposed between (a) a selected one of said mass and said case and (b) the last said stiff actuator, a stiffness of said shear decoupler in a direction parallel to the axis of the last said stiff actuator being at least two orders of magnitude greater than a stiffness of said shear decoupler in a direction orthogonal to the last said axis.

Claim 58

Dependent Claim 40 words

The system of claim 52, wherein each said shear decoupler comprises a wafer of elastomer sandwiched between first and second components made of a relatively inflexible material in comparison with said elastomer, said first component disposed adjacent said stiff actuator.

Claim 59

Dependent Claim 119 words

The system of claim 53, wherein a first of said stiff actuators has its variable length disposed along said first axis, a compressive force applied to said first of said stiff actuators along said first axis, a respective one of said shear decoupler disposed between said first of said stiff actuators and said small mass; at least one of the remaining two axes being resident in a plane orthogonal to said first axis, said system adaptable to receive said payload mass on one side of said plane, the location of the elastomer of said respective one of said shear decoupler being substantially in said plane or on the other side of said plane in opposition to said payload mass.

Claim 60

Dependent Claim 101 words

The system of claim 52, further comprising, for at least one of said stiff actuators, a spring disposed on the axis of said at least one of said stiff actuators so as to exert compressive force between said case and the last said stiff actuator; another shear decoupler interposed on the last said axis between said spring and said small mass, a modulus of elasticity of said decoupler in a direction parallel to said axis being at least two orders of magnitude stiffer than a modulus of elasticity of said second decoupler in a direction orthogonal to the last said axis.

Claim 61

Dependent Claim 35 words

The system of claim 49, wherein said stiff actuators are piezoelectric motors, said system including means for exerting a compressive force on said piezoelectric motors in directions parallel to their respective axes at all times.

Claim 62

Dependent Claim 24 words

The system of claim 56, wherein said payload weight exerts compressive force on at least one of said piezoelectric motors through said small mass.

Claim 63

Dependent Claim 35 words

The system of claim 56, wherein said payload mass is disposed above said small mass, said payload mass exerting compressive force on said at least one of said piezoelectric motors through the force of gravity.

Claim 64

Dependent Claim 46 words

The system of claim 49, and further comprising, for at least one of said stiff actuators, a spring disposed on the axis of said at least one of said stiff actuators so as to exert compressive force between said case and the last said stiff actuator.

Claim 65

Dependent Claim 50 words

The system of claim 59, wherein the axis for the last said stiff actuator extends through one sidewall, through said small mass, and through an opposed sidewall, said spring disposed around the last said axis to be adjacent said small mass and to be opposite the last said stiff actuator.

Claim 66

Dependent Claim 43 words

The system of claim 59, and further comprising a bore in said external case formed around said axis in said opposed sidewall, a retainer plate attached to said opposed sidewall, said spring exerting compressive force between said small mass and said retainer plate.

Claim 67

Dependent Claim 14 words

The system of claim 59, wherein said spring includes at least one belleville washer.

Claim 68

Dependent Claim 35 words

The system of claim 62, wherein said spring comprises at least first and second belleville washers, an external rim of said first of said washers mating an external rim of the second of said washers.

Claim 69

Dependent Claim 9 words

The system of claim 49, wherein said axes intersect.

Claim 70

Independent Claim 128 words

A method of actively isolating a payload from vibration, comprising the steps of: resting the payload on a passive isolator; coupling the passive isolator to a small mass which is at least one order of magnitude smaller than a predetermined range of payload masses; supporting the small mass from a base susceptible to vibration by at least one stiff actuator; sensing the movement of the small mass; generating a small mass sensor signal which is a function of the movement of the small mass; generating a control signal which is a function of the small mass sensor signal; applying the control signal to the stiff actuator; and responsive to said step of applying, varying a length of the stiff actuator, thereby reducing the vibration experienced by the payload.

Claim 71

Independent Claim 128 words

A method of actively isolating a payload from vibration, comprising the steps of: resting the payload on a passive isolator; coupling the passive isolator to a small mass which is at least one order of magnitude smaller than a predetermined range of payload masses; supporting the small mass from a base susceptible to vibration by at least one stiff actuator; sensing the movement of the small mass; generating a small mass sensor signal which is a function of the movement of the small mass; generating a control signal which is a function of the small mass sensor signal; applying the control signal to the stiff actuator; and responsive to said step of applying, varying a length of the stiff actuator, thereby reducing the vibration experienced by the payload.

Claim 72

Dependent Claim 19 words

The method of claim 65, wherein the sensor signal is a function of the velocity of the small mass.

Claim 73

Dependent Claim 36 words

The method of claim 66, and further comprising the steps of: integrating the sensor signal to obtain a small mass displacement signal; and deriving the control signal as a function of the small mass displacement signal.

Claim 74

Dependent Claim 42 words

The method of claim 65, and further comprising the steps of: modifying the sensor signal to compensate for at least one resonant frequency of the active vibration isolation apparatus; and generating the control signal as a function of the modified sensor signal.

Claim 75

Dependent Claim 47 words

The method of claim 65, and further comprising the steps of: sensing the movement of the payload; generating a payload sensor signal as a function of movement of the payload; and generating the control signal as a function of the sensor signal and the payload sensor signal.

Claim 76

Independent Claim 181 words

A method of actively isolating a payload from vibration, comprising the steps of: coupling a payload to at least first and second stiff actuators, each stiff actuator having a variable length aligned with a respective axis, the axes disposed at an angle to each other; sensing a movement of the payload in each of first and second directions respectively parallel to ones of the axes; generating a first control signal as a function of the movement in the first direction; generating a second control signal as a function of the movement in the second direction; applying the first and second control signals, respectively, to the first and second stiff actuators; responsive to said step of applying, varying the lengths of said first and second stiff actuators by amounts equivalent to the amounts of movement sensed in the first and second directions, respectively; decoupling the shear force on the first stiff actuator caused by varying the length of the second stiff actuator; and decoupling the shear force on the second stiff actuator caused by varying the length of the first stiff actuator.

Claim 77

Independent Claim 181 words

A method of actively isolating a payload from vibration, comprising the steps of: coupling a payload to at least first and second stiff actuators, each stiff actuator having a variable length aligned with a respective axis, the axes disposed at an angle to each other; sensing a movement of the payload in each of first and second directions respectively parallel to ones of the axes; generating a first control signal as a function of the movement in the first direction; generating a second control signal as a function of the movement in the second direction; applying the first and second control signals, respectively, to the first and second stiff actuators; responsive to said step of applying, varying the lengths of said first and second stiff actuators by amounts equivalent to the amounts of movement sensed in the first and second directions, respectively; decoupling the shear force on the first stiff actuator caused by varying the length of the second stiff actuator; and decoupling the shear force on the second stiff actuator caused by varying the length of the first stiff actuator.

Claim 78

Dependent Claim 38 words

The method of claim 70, and further comprising the step of coupling the payload to the stiff actuators via a small mass which is at least one order of magnitude smaller than a predetermined range of payload masses.

Claim 79

Dependent Claim 22 words

The method of claim 71, and further comprising the step of coupling the small mass to the payload with a passive isolator.

Claim 80

Dependent Claim 23 words

The method of claim 70, and further comprising the step of coupling the payload mass to the stiff actuators via a passive isolator.

Claim 81

Dependent Claim 12 words

The method of claim 70, wherein said stiff actuators are piezoelectric motors.

Claim 82

Dependent Claim 156 words

The method of claim 70, and further comprising the steps of: coupling a third stiff actuator to the payload, the third stiff actuator having a variable length aligned with a third axis disposed at an angle to said first and second axes; sensing a movement related to said payload in a third direction which is parallel to the third axis; generating a third control signal as a function of said movement in the third direction; applying the third control signal to the third stiff actuator; responsive to the last said step of applying, varying the length of the third stiff actuator by an amount equivalent to the movement sensed in the third direction; decoupling the shear forces caused by varying the lengths of the first and second stiff actuators from the third stiff actuator; and decoupling the shear forces on the first and second stiff actuators caused by varying the length of the third stiff actuator.

Claim 83

Dependent Claim 159 words

An active vibration isolation system for isolating a payload, comprising: at least first and second stiff actuators having variable lengths aligned with respective first and second axes, said first and second axes disposed at an angle to each other, first ends of said first and second stiff actuators coupled to said payload, second ends of said first and second stiff actuators coupled to a base susceptible to vibration; first and second sensors coupled to said payload mass and operable to sense movement related to said payload mass in first and second directions, respectively, said first direction parallel with said first axis, said second direction parallel to said second axis, said first and second sensors respectively generating first and second sensor signals; and circuitry coupled to said first and second sensors for generating a first control signal as a function of said first sensor signal and for generating a second control signal as a function of said second sensor signal.

Claim 84

Dependent Claim 159 words

An active vibration isolation system for isolating a payload, comprising: at least first and second stiff actuators having variable lengths aligned with respective first and second axes, said first and second axes disposed at an angle to each other, first ends of said first and second stiff actuators coupled to said payload, second ends of said first and second stiff actuators coupled to a base susceptible to vibration; first and second sensors coupled to said payload mass and operable to sense movement related to said payload mass in first and second directions, respectively, said first direction parallel with said first axis, said second direction parallel to said second axis, said first and second sensors respectively generating first and second sensor signals; and circuitry coupled to said first and second sensors for generating a first control signal as a function of said first sensor signal and for generating a second control signal as a function of said second sensor signal.

Claim 85

Independent Claim 158 words

A method of isolating a payload from vibration of a base which supports the payload, the method comprising the steps of: coupling a passive isolator between the payload and a small mass; coupling at least one stiff actuator between the small mass and the base wherein said stiff actuator, said small mass and said passive isolator are interposed between said payload mass and the base, the stiff actuator having a variable length aligned with an axis; using a geophone to sense a velocity related to the payload in a direction parallel to the axis; responsive to said step of using the geophone, generating a velocity signal; integrating the velocity signal to obtain a displacement signal; generating a control signal as a function of the displacement signal; applying the control signal to the stiff actuator; and responsive to said step of applying, varying the length of the stiff actuator in order to decrease the vibration experienced by the payload.

Claim 86

Independent Claim 158 words

A method of isolating a payload from vibration of a base which supports the payload, the method comprising the steps of: coupling a passive isolator between the payload and a small mass; coupling at least one stiff actuator between the small mass and the base wherein said stiff actuator, said small mass and said passive isolator are interposed between said payload mass and the base, the stiff actuator having a variable length aligned with an axis; using a geophone to sense a velocity related to the payload in a direction parallel to the axis; responsive to said step of using the geophone, generating a velocity signal; integrating the velocity signal to obtain a displacement signal; generating a control signal as a function of the displacement signal; applying the control signal to the stiff actuator; and responsive to said step of applying, varying the length of the stiff actuator in order to decrease the vibration experienced by the payload.

Claim 87

Dependent Claim 22 words

The method of claim 77, and further comprising the step of using the geophone to sense the velocity of the small mass.

Claim 88

Dependent Claim 145 words

An active vibration isolation system, comprising: a passive isolator adapted for supporting a payload; a small mass which is at least one order of magnitude smaller than a predetermined range of payload masses, said small mass coupled to said passive isolator and disposed in opposition to said payload; a sensor coupled to said small mass and generating a small mass sensor signal as a function of the movement of the small mass; circuitry coupled to said sensor and adaptable to generate a control signal as a function of the small mass sensor signal; and at least one stiff actuator interposed between a source of vibration and said small mass, said circuitry coupled to said stiff actuator for applying said control signal thereto, a length of said stiff actuator varying as a function of said control signal to thereby lessen the vibration experienced by said payload.

Claim 89

Dependent Claim 145 words

An active vibration isolation system, comprising: a passive isolator adapted for supporting a payload; a small mass which is at least one order of magnitude smaller than a predetermined range of payload masses, said small mass coupled to said passive isolator and disposed in opposition to said payload; a sensor coupled to said small mass and generating a small mass sensor signal as a function of the movement of the small mass; circuitry coupled to said sensor and adaptable to generate a control signal as a function of the small mass sensor signal; and at least one stiff actuator interposed between a source of vibration and said small mass, said circuitry coupled to said stiff actuator for applying said control signal thereto, a length of said stiff actuator varying as a function of said control signal to thereby lessen the vibration experienced by said payload.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	2000-08-25	2001-02-24	2001-08-26	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2004-08-25	2005-02-24	2005-08-26	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2008-08-25	2009-02-24	2009-08-26	$7700.00	Window Closed / Lapsed

Stiff actuator active vibration isolation system

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