Active vibration isolation system

Claim 2

A vibration isolation system comprising: a payload mass; a support; a passive isolation system for supporting said payload mass on said support; a velocity transducer for sensing vibrational movement of said payload mass relative to said support and for producing a velocity transducer output signal that varies as a function of the velocity of said payload mass as it undergoes vibrational motion relative to said support; control circuit means responsive to said velocity transducer output signal for modifying said velocity transducer output signal so that the effective resonant frequency of said velocity transducer is substantially lower than the resonant frequency of said passive isolation system; a force transducer for applying a force to said payload mass in response to an input signal; and signal applying means for applying said modified velocity transducer output signal as said input signal to said force transducer so as to cause said force transducer to apply a force to said payload mass in a direction opposite to the direction of movement of said mass as it vibrates.

Claim 3

A vibration isolation system according to claim 1 wherein said control circuit means modifies said velocity transducer output signal so that the effective resonant frequency of said velocity transducer is lower than the resonant frequency of said passive isolation system by at least one decade.

Claim 4

A vibration isolation system according to claim 1 wherein said control circuit means and said signal applying means form a feedback loop having a feedback gain of substantially zero at dc.

Claim 5

A vibration isolation system according to claim 3 wherein said feedback loop has a relatively small feedback gain at frequencies above 200 Hz.

Claim 6

A vibration isolation system according to claim 1 wherein said control circuit means and said signal applying means form a negative feedback loop between said velocity transducer and said force transducer, and said loop is characterized by a gain of substantially zero at dc and at frequencies above about 200 Hz.

Claim 7

A vibration isolation system according to claim 1 wherein said control circuit means comprises at least two series-connected lag-lead stages for controlling signal gain and phase as a function of frequency.

Claim 8

A vibration isolation system according to claim 6 wherein each lag-lead stage comprises an operational amplifier having first and second input terminals and an output terminal, a lag-lead feedback network coupling its output terminal to its first input terminal, and further including means for applying the output signal of said velocity transducer to the second input terminal of the operational amplifier of the first in series of said lag-lead stages; and further wherein said signal applying means is arraged to couple the output signal appearing on the output terminal of the operational amplifier of the last in series of said lag-lead stages to input terminal of said force transducer.

Claim 9

A vibration isolation system according to claim 7 wherein said control circuit means comprises three of said lag-lead stages.

Claim 10

A vibration isolation system according to claim 1 wherein said velocity transducer is a geophone.

Claim 11

A vibration isolation system according to claim 9 wherein said geophone comprises a case, a proof mass suspended in said case, and means for sensing the velocity of said proof mass relative to said case and for producing said velocity transducer output signal, and further including means for applying said velocity transducer output signal to said control circuit means, and a resistor connected between said last-mentioned means and ground for damping said velocity transducer output signal, said resistor having a value such that the overall fraction of critical damping is unity.

Claim 12

A vibration isolation system according to claim 1 wherein said force transducer is an electromatnetic device and comprises a speaker magnet voice coil assembly having a first magnetic structure defining an annular air gap and a second coil-supporting structure mounted in said air gap so as to permit substantially frictionless relative motion between said first and second structures in response to said modified velocity transducer output signal.

Claim 13

A vibration isolation system comprising: a payload; a support; a passive isolation system for supporting said payload on said support; a geophone disposed so as to sense vibrational movement of said payload relative to said support, said geophone comprising a case, a proof mass suspended within the case, and means for measuring the relative velocity of the proof mass relative to the case and for producing an output signal that is proportional to said relative velocity by the expression S(X-Z), where S is the Laplace operator, X is the displacement of the case relative to said support, and Z is the displacement of the proof mass as the payload undergoes vibrational movement; circuit means coupled to said geophone for modifying said geophone output signal so that it is more nearly proportional to the actual velocity shown by the expression SX of said case and payload; a force transducer for applying a force to said payload in response to an input signal; and means for applying said modified geophone output signal as an input signal to said force transducer so as to cause said force transducer to apply a force to said payload in a direction in opposition to the direction of movement of said payload as it vibrates.

Claim 14

A vibration isolation system comprising: a payload; a support; a passive isolation system for supporting said payload on said support; a geophone disposed so as to sense vibrational movement of said payload relative to said support, said geophone comprising a case, a proof mass suspended within the case, and means for measuring the relative velocity of the proof mass relative to the case and for producing an output signal that is proportional to said relative velocity by the expression S(X-Z), where S is the Laplace operator, X is the displacement of the case relative to said support, and Z is the displacement of the proof mass as the payload undergoes vibrational movement; circuit means coupled to said geophone for modifying said geophone output signal so that it is more nearly proportional to the actual velocity shown by the expression SX of said case and payload; a force transducer for applying a force to said payload in response to an input signal; and means for applying said modified geophone output signal as an input signal to said force transducer so as to cause said force transducer to apply a force to said payload in a direction in opposition to the direction of movement of said payload as it vibrates.

Claim 15

A vibration isolation system according to claim 12 wherein said circuit means modifies said geophone output signal so that the effective resonant frequency of said geophone is lower than the resonant frequency of said passive isolation system by at least one decade.

Claim 16

A vibration isolation system comprising: a payload mass; a support; a passive isolation system supporting said payload mass on said support; a geophone for sensing vibrational movement of said payload mass relative to said support and for producing an output signal in response to said movement, said geophone comprising a case adapted to vibrate with said payload mass, a proof mass suspended in said case so as to be capable of displacement relative to said case as said case undergoes vibrational movement, and means for measuring said relative displacement and providing in response thereto a geophone output signal that is represented approximately by the following equation using Laplacian notation: ##EQU11## where E v (s) represents the geophone transfer function, β=gain in units of volts per inch per second, S=the Laplace operator, X is the displacement of the geophone case, Z is the displacement of the proof mass, S(X-Z) is the relative velocity of the proof mass relative to the geophone case, ξ g is the geophone fraction of critical damping, and w g is the proof mass resonant frequency; control circuit means responsive to said geophone output signal for modifying said geophone output signal so that the effective resonant frequency of said geophone is lower than the resonant frequency of said passive isolation system by at least one decade; a force transducer for applying a force to said payload mass in response to an input signal; and means for applying said modified geophone output signal as an input signal to said force transducer so as to cause said force transducer to apply a force to said payload mass in a direction in opposition to the direction of movement of said payload mass as it vibrates.

Claim 17

A vibration isolation system comprising: a payload mass; a support; a passive isolation system supporting said payload mass on said support; a geophone for sensing vibrational movement of said payload mass relative to said support and for producing an output signal in response to said movement, said geophone comprising a case adapted to vibrate with said payload mass, a proof mass suspended in said case so as to be capable of displacement relative to said case as said case undergoes vibrational movement, and means for measuring said relative displacement and providing in response thereto a geophone output signal that is represented approximately by the following equation using Laplacian notation: ##EQU11## where E v (s) represents the geophone transfer function, β=gain in units of volts per inch per second, S=the Laplace operator, X is the displacement of the geophone case, Z is the displacement of the proof mass, S(X-Z) is the relative velocity of the proof mass relative to the geophone case, ξ g is the geophone fraction of critical damping, and w g is the proof mass resonant frequency; control circuit means responsive to said geophone output signal for modifying said geophone output signal so that the effective resonant frequency of said geophone is lower than the resonant frequency of said passive isolation system by at least one decade; a force transducer for applying a force to said payload mass in response to an input signal; and means for applying said modified geophone output signal as an input signal to said force transducer so as to cause said force transducer to apply a force to said payload mass in a direction in opposition to the direction of movement of said payload mass as it vibrates.

Claim 18

A vibration isolation system according to claim 14 wherein said control circuit means has a transfer function which is approximately as follows: ##EQU12## where: g(s) is the transfer function of said control circuit means, w g is the geophone resonant frequency, S is the Laplace operator and T g is a time constant= ##EQU13##

Claim 19

A vibration isolation system according to claim 15 wherein said circuit means modifies said geophone output signal so that the effective resonant frequency of said geophone is lower than the resonant frequency of said passive isolation system by at least one decade;

Claim 20

A vibration isolation system according to claim 15 wherein said circuit means comprises a plurality of leg-lead amplifier stages adapted to provide substantially zero gain at dc and high gain greater than unity at the frequencies of said vibrational motion except that the gain is substantially less than unity for all frequencies at open loop phase angles of ±180 degrees.

Claim 21

A vibration isolation system comprising: a payload mass; a support means supporting said payload mass so that said payload mass is subject to vibrational motion and will respond to application of a force opposing said vibrational motion, said support means comprising a passive isolation system; a geophone for sensing vibrational movement of said mass relative to said support and for producing a transducer output signal that varies as a function of the velocity of said payload mass as it undergoes vibrational motion relative to said support; circuit means responsive to said geophone output signal for modifying said geophone output signal; an electromagnetic force transducer for applying a force to said payload mass in response to an input signal; and means for applying said modified geophone output signal as an input signal to said force transducer so as to cause said force transducer to apply a force to said payload mass in a direction in opposition to the direction of movement of said payload mass as it vibrates; said circuit means being adapted to modify the output signal of said geophone so as to as to provide a compensated geophone transfer function represented as follows: ##EQU14## where: F(s) is the geophone transfer function, g(s) is the transfer function of said circuit means, T g is the geophone time constant, and S is the Laplace operator.

Claim 22

A vibration isolation system comprising: a payload mass; a support means supporting said payload mass so that said payload mass is subject to vibrational motion and will respond to application of a force opposing said vibrational motion, said support means comprising a passive isolation system; a geophone for sensing vibrational movement of said mass relative to said support and for producing a transducer output signal that varies as a function of the velocity of said payload mass as it undergoes vibrational motion relative to said support; circuit means responsive to said geophone output signal for modifying said geophone output signal; an electromagnetic force transducer for applying a force to said payload mass in response to an input signal; and means for applying said modified geophone output signal as an input signal to said force transducer so as to cause said force transducer to apply a force to said payload mass in a direction in opposition to the direction of movement of said payload mass as it vibrates; said circuit means being adapted to modify the output signal of said geophone so as to as to provide a compensated geophone transfer function represented as follows: ##EQU14## where: F(s) is the geophone transfer function, g(s) is the transfer function of said circuit means, T g is the geophone time constant, and S is the Laplace operator.

Claim 23

An active vibration isolation system comprising: a payload mass supported so as to be subject to vibrational motion and to respond to application of a force opposing said vibrational motion; a geophone for producing a velocity signal in response to vibrational motion of said payload mass; an electrically operated force transducer for applying a force to said payload mass in response to an input signal; circuit means responsive to said velocity signal for producing a control signal that provides a compensated geophone transfer function as follows: ##EQU15## where F(s) is the transfer function of the geophone, g(s) is the transfer function of the circuit means, T g =is the time constant for the geophone, and S is the Laplace operator; and means for applying said control signal as an input signal to said force transducer.

Claim 24

An active vibration isolation system comprising: a payload mass supported so as to be subject to vibrational motion and to respond to application of a force opposing said vibrational motion; a geophone for producing a velocity signal in response to vibrational motion of said payload mass; an electrically operated force transducer for applying a force to said payload mass in response to an input signal; circuit means responsive to said velocity signal for producing a control signal that provides a compensated geophone transfer function as follows: ##EQU15## where F(s) is the transfer function of the geophone, g(s) is the transfer function of the circuit means, T g =is the time constant for the geophone, and S is the Laplace operator; and means for applying said control signal as an input signal to said force transducer.

Claim 25

A system according to claim 19 wherein said payload mass is supported by a passive vibration isolation means.

Claim 26

A system according to claim 20 wherein said circuit means modifies said velocity signal so as to lower the effective resonant frequency of said geophone to approximately a decade below the resonant frequency of said passive vibration isolation means.

Claim 27

A system according to claim 19 wherein said circuit means modifies said velocity signal so that effectively the response of said geophone is equivalent to that of a geophone having a resonant frequency about 10 times lower than the resonant frequency of said first-mentioned geophone.

Claim 28

An active vibration control system for a payload that is supported relative to a supporting structure and is subject to undesirable vibration in a plurality of degrees of freedom comprising: a plurality of geophones mounted on said payload, each of said geophones being oriented to sense a velocity component of said payload in a predetermined one of several degrees of freedom and adapted to produce a geophone electrical output signal that varies as a function of the velocity component in said predetermined one degree of freedom; a plurality of force actuators each operable in response to an individual input signal for applying a force to said payload in opposition to vibrational motion of said payload in one of said degrees of freedom; a plurality of channel circuit means each adapted to produce a channel electrical output signal in response to an input signal; a plurality of means for applying said geophone output signals as input signals to said channel circuit means; and means for applying said channel output signals to said force actuators; said channel circuit means being adapted to modify said geophone output signals so that each of said channel circuit means output signals provides a compensated geophone transfer function that is represented approximately as follows: ##EQU16## where F(s) is the transfer function of one of said geophones, g(s) is the transfer function of the channel circuit means to which the output signal of said one geophone is applied, T g = is the time constant for said one geophone, and S is the Laplace operator.

Claim 29

An active vibration control system for a payload that is supported relative to a supporting structure and is subject to undesirable vibration in a plurality of degrees of freedom comprising: a plurality of geophones mounted on said payload, each of said geophones being oriented to sense a velocity component of said payload in a predetermined one of several degrees of freedom and adapted to produce a geophone electrical output signal that varies as a function of the velocity component in said predetermined one degree of freedom; a plurality of force actuators each operable in response to an individual input signal for applying a force to said payload in opposition to vibrational motion of said payload in one of said degrees of freedom; a plurality of channel circuit means each adapted to produce a channel electrical output signal in response to an input signal; a plurality of means for applying said geophone output signals as input signals to said channel circuit means; and means for applying said channel output signals to said force actuators; said channel circuit means being adapted to modify said geophone output signals so that each of said channel circuit means output signals provides a compensated geophone transfer function that is represented approximately as follows: ##EQU16## where F(s) is the transfer function of one of said geophones, g(s) is the transfer function of the channel circuit means to which the output signal of said one geophone is applied, T g = is the time constant for said one geophone, and S is the Laplace operator.

Claim 30

A system according to claim 23 wherein each of said channel circuit means effectively lowers the natural resonant frequency of one of said geophones to approximately a decade below the natural resonant frequency of said passive vibration isolation means.

Claim 31

A system according to claim 23 wherein each of said channel circuit means modifies the output signal of one of said geophones so that it is equivalent to the signal produced by a geophone having a resonant frequency approximately ten time less than the actual resonant frequent of said one geophone.

Claim 32

A system according to claim 23 wherein each of said channel circuit means comprises a plurality of lag-lead amplifier stages for controlling gain and phase as a function of frequency.

Claim 33

A system according to claim 23 wherein said payload is supported on said base by a plurality of passive vibration isolation systems so that said payload has said several degrees of freedom.

Claim 34

A system according to claim 27 wherein said channel circuit means effectively lower the natural resonant frequency of said geophones to approximately a decade below the natural resonant frequency of said passive vibration isolation means.

Claim 35

A system according to claim 23 wherein said force transducers are electromagnetic devices.