Optical fiber sensor for measuring pressure or displacement

Claim 2

An optical fiber sensor, comprising: a target for reflecting laser beams, having a first portion which is displaced by a measured pressure and a second portion which is not displaced by the measured pressure; a laser beam generation means for generating a laser beam; an optical coupler for dividing said laser beam; a first optical fiber for directing a laser beam to the first portion of said target; a second optical fiber for directing a laser beam to the second portion of said target; a body formed unitarily with said target and having the same coefficient of thermal expansion as said target, for supporting a tip portion of said first optical fiber and a tip portion of said second optical fiber; a first optical coupler for directing a laser beam divided from said optical coupler to said first optical fiber, and dividing an interference beam formed from a first reflected laser beam which has been reflected by an end surface of said first optical fiber and a second reflected laser beam which has been emitted from the end surface of said first optical fiber and reflected by said first portion of said target to be incident upon the end surface of said first optical fiber; a first measurement circuit for detecting, from said interference beam divided by said first optical coupler, an interference condition between said first reflected laser beam and said second reflected laser beam, in order to measure a distance between the end surface of said first optical fiber and said first portion of said target; a second optical coupler for directing another laser beam divided from said optical coupler to said second optical fiber, and dividing an interference beam formed from a first reflected laser beam which has been reflected by an end surface of said second optical fiber and a second reflected laser beam which has been emitted from the end surface of said second optical fiber and reflected by said second portion of said target to be incident upon the end surface of said second optical fiber; a second measurement circuit for detecting, from said interference beam divided by said second optical coupler, an interference condition between said first reflected laser beam and said second reflected laser beam, in order to measure a distance between the end surface of said second optical fiber and said second portion of said target; and a processing circuit for determining a difference between measurement results of said first measurement circuit and said second measurement circuit.

Claim 3

An optical fiber sensor according to claim 1, further comprising: memory means wherein temperature change data determined from changes in distance between said end surface of the said second optical fiber and said second portion of said target measured by said second measurement circuit are pre-stored as correction coefficients for each temperature; and temperature compensation means for reading out a correction coefficient from said memory means based on temperature data determined from a distance between said end surface of said second optical fiber and said second portion of said target measured by said second measurement circuit, and determining a temperature-compensated difference value by applying said correction coefficient to the difference in measurement results between said first measurement circuit and said second measurement circuit determined by said processing circuit.

Claim 4

An optical fiber sensor according to claim 1, wherein end portions of gradient refractive index optical fibers are coupled to the end portions of said first optical fiber and said second optical fiber.

Claim 5

An optical fiber-sensor, comprising: a target for reflecting laser beams, having a first portion which is displaced by a measured pressure and a second portion which is not displaced by the measured pressure; a laser beam generation means for generating a laser beam; an optical coupler for dividing said laser beam; a laser drive means for applying a frequency modulation to said laser beam; a first optical fiber for directing a laser beam to the first portion of said target; a second optical fiber for directing a laser beam to the second portion of said target; a body formed unitarily with said target and having the same coefficient of thermal expansion as said target, for supporting a tip portion of said first optical fiber and a tip portion of said second optical fiber; a first optical coupler for directing a laser beam divided from said optical coupler to said first optical fiber, and dividing an interference beam formed from a first reflected laser beam which has been reflected by an end surface of said first optical fiber and a second reflected laser beam which has been emitted from the end surface of said first optical fiber and reflected by said first portion of said target to be incident upon the end surface of said first optical fiber; a first measurement circuit for detecting, from said interference beam divided by said first optical coupler, a beat frequency between said first reflected laser beam and said second reflected laser beam, in order to measure a distance between the end surface of said first optical fiber and said first portion of said target; a second optical coupler for directing another laser beam divided from said optical coupler to said second optical fiber, and dividing an interference beam formed from a first reflected laser beam which has been reflected by an end surface of said second optical fiber and a second reflected laser beam which has been emitted from the end surface of said second optical fiber and reflected by said second portion of said target to be incident upon the end surface of said second optical fiber; a second measurement circuit for detecting, from said interference beam divided by said second optical coupler, a beat frequency between said first reflected laser beam and said second reflected laser beam, in order to measure a distance between the end surface of said second optical fiber and said second portion of said target; and a processing circuit for determining a difference between measurement results of said first measurement circuit and said second measurement circuit.

Claim 6

An optical fiber-sensor, comprising: a target for reflecting laser beams, having a first portion which is displaced by a measured pressure and a second portion which is not displaced by the measured pressure; a laser beam generation means for generating a laser beam; an optical coupler for dividing said laser beam; a laser drive means for applying a frequency modulation to said laser beam; a first optical fiber for directing a laser beam to the first portion of said target; a second optical fiber for directing a laser beam to the second portion of said target; a body formed unitarily with said target and having the same coefficient of thermal expansion as said target, for supporting a tip portion of said first optical fiber and a tip portion of said second optical fiber; a first optical coupler for directing a laser beam divided from said optical coupler to said first optical fiber, and dividing an interference beam formed from a first reflected laser beam which has been reflected by an end surface of said first optical fiber and a second reflected laser beam which has been emitted from the end surface of said first optical fiber and reflected by said first portion of said target to be incident upon the end surface of said first optical fiber; a first measurement circuit for detecting, from said interference beam divided by said first optical coupler, a beat frequency between said first reflected laser beam and said second reflected laser beam, in order to measure a distance between the end surface of said first optical fiber and said first portion of said target; a second optical coupler for directing another laser beam divided from said optical coupler to said second optical fiber, and dividing an interference beam formed from a first reflected laser beam which has been reflected by an end surface of said second optical fiber and a second reflected laser beam which has been emitted from the end surface of said second optical fiber and reflected by said second portion of said target to be incident upon the end surface of said second optical fiber; a second measurement circuit for detecting, from said interference beam divided by said second optical coupler, a beat frequency between said first reflected laser beam and said second reflected laser beam, in order to measure a distance between the end surface of said second optical fiber and said second portion of said target; and a processing circuit for determining a difference between measurement results of said first measurement circuit and said second measurement circuit.

Claim 7

An optical fiber sensor according to claim 4, further comprising: memory means wherein temperature change data determined from changes in distance between said end surface of the said second optical fiber and said second portion of said target measured by said second measurement circuit are pre-stored as correction coefficients for each temperature; and temperature compensation means for reading out a correction coefficient from said memory means based on temperature data determined from a distance between said end surface of said second optical fiber and said second portion of said target measured by said second measurement circuit, and determining a temperature-compensated difference value by applying said correction coefficient to the difference in measurement results between said first measurement circuit and said second measurement circuit determined by said processing circuit.

Claim 8

An optical fiber sensor, comprising: a plurality of first targets for reflecting laser beams, each having a first portion which is displaced by a measured pressure and a second portion which is not displaced by the measured pressure; a plurality of second targets for reflecting laser beams, each having a first portion which is displaced by a measured pressure and a second portion which is not displaced by the measured pressure; a laser beam generation means for generating a laser beam; an optical coupler for dividing said laser beam; a plurality of first optical fibers for directing laser beams respectively to the first portions of said first targets and the first portions of said second targets; a plurality of second optical fibers for directing laser beams respectively to the second portions of said first targets; a plurality of first bodies formed respectively unitarily with said plurality of first targets and respectively having the same coefficients of thermal expansion as said plurality of first targets, for respectively supporting tip portions of said plurality of first optical fibers corresponding to said plurality of first targets and tip portions of said plurality of second optical fibers; a plurality of second bodies formed respectively unitarily with said plurality of second targets and respectively having the same coefficients of thermal expansion as said plurality of second targets, for respectively supporting tip portions of said plurality of first optical fibers corresponding to said plurality of second targets; a plurality of first optical couplers for directing respective laser beams divided from said optical coupler to said first optical fibers, and dividing each interference beam respectively formed from a first reflected laser beam which has been reflected by a respective end surface of said plurality of first optical fibers and a second reflected laser beam which has been emitted from a respective end surface of said plurality of first optical fibers and respectively reflected by said first portions of said plurality of first and second targets to be incident upon respective end surfaces of said plurality of first optical fibers; at least one first measurement circuit for detecting, from said interference beams respectively divided by said first optical coupler, interference conditions between said first reflected laser beams and said second reflected laser beams, in order to measure respective distances between the end surfaces of said plurality of first optical fibers and said first portions of said plurality of first and second targets; a plurality of second optical couplers for directing respective laser beams divided from said optical coupler to said second optical fibers, and dividing each interference beam respectively formed from a first reflected laser beam which has been reflected by a respective end surface of said plurality of second optical fibers and a second reflected laser beam which has been emitted from a respective end surface of said plurality of second optical fibers and respectively reflected by said second portions of said plurality of first targets to be incident upon respective end surfaces of said plurality of second optical fibers; at least one second measurement circuit for detecting, from said interference beams respectively divided by said second optical coupler, interference conditions between said first reflected laser beams and said second reflected laser beams, in order to measure distances between the end surfaces of at least one of said plurality of second optical fibers and the second portions of corresponding first targets; and at least one processing circuit for determining a difference between measurement results of said first measurement circuit and said second measurement circuit.

Claim 9

An optical fiber sensor, comprising: a plurality of first targets for reflecting laser beams, each having a first portion which is displaced by a measured pressure and a second portion which is not displaced by the measured pressure; a plurality of second targets for reflecting laser beams, each having a first portion which is displaced by a measured pressure and a second portion which is not displaced by the measured pressure; a laser beam generation means for generating a laser beam; an optical coupler for dividing said laser beam; a plurality of first optical fibers for directing laser beams respectively to the first portions of said first targets and the first portions of said second targets; a plurality of second optical fibers for directing laser beams respectively to the second portions of said first targets; a plurality of first bodies formed respectively unitarily with said plurality of first targets and respectively having the same coefficients of thermal expansion as said plurality of first targets, for respectively supporting tip portions of said plurality of first optical fibers corresponding to said plurality of first targets and tip portions of said plurality of second optical fibers; a plurality of second bodies formed respectively unitarily with said plurality of second targets and respectively having the same coefficients of thermal expansion as said plurality of second targets, for respectively supporting tip portions of said plurality of first optical fibers corresponding to said plurality of second targets; a plurality of first optical couplers for directing respective laser beams divided from said optical coupler to said first optical fibers, and dividing each interference beam respectively formed from a first reflected laser beam which has been reflected by a respective end surface of said plurality of first optical fibers and a second reflected laser beam which has been emitted from a respective end surface of said plurality of first optical fibers and respectively reflected by said first portions of said plurality of first and second targets to be incident upon respective end surfaces of said plurality of first optical fibers; at least one first measurement circuit for detecting, from said interference beams respectively divided by said first optical coupler, interference conditions between said first reflected laser beams and said second reflected laser beams, in order to measure respective distances between the end surfaces of said plurality of first optical fibers and said first portions of said plurality of first and second targets; a plurality of second optical couplers for directing respective laser beams divided from said optical coupler to said second optical fibers, and dividing each interference beam respectively formed from a first reflected laser beam which has been reflected by a respective end surface of said plurality of second optical fibers and a second reflected laser beam which has been emitted from a respective end surface of said plurality of second optical fibers and respectively reflected by said second portions of said plurality of first targets to be incident upon respective end surfaces of said plurality of second optical fibers; at least one second measurement circuit for detecting, from said interference beams respectively divided by said second optical coupler, interference conditions between said first reflected laser beams and said second reflected laser beams, in order to measure distances between the end surfaces of at least one of said plurality of second optical fibers and the second portions of corresponding first targets; and at least one processing circuit for determining a difference between measurement results of said first measurement circuit and said second measurement circuit.

Claim 10

An optical fiber sensor according to claim 6, further comprising: memory means wherein temperature change data determined from changes in distance between said end surfaces of the said second optical fibers and said second portions of said targets measured by said second measurement circuit are pre-stored as correction coefficients for each temperature; and temperature compensation means for reading out a correction coefficient from said memory means based on temperature data determined from the distances between said end surfaces of said second optical fibers and said second portions of said targets measured by said second measurement circuit, and determining a temperature-compensated difference value by applying said correction coefficient to the difference in measurement results between said first measurement circuit and said second measurement circuit determined by said processing circuit.

Claim 11

An optical fiber sensor, comprising: a first target for reflecting laser beams, having a first portion which is displaced by a measured pressure and a second portion which is not displaced by the measured pressure; a second target for reflecting laser beams; laser beam generation means for generating a laser beam; an optical coupler for dividing said laser beam; laser drive means for applying a frequency modulation to said laser beam; a first optical fiber for directing a laser beam to the first portion of said first target; a second optical fiber for directing a laser beam to the second portion of said first target; a third optical fiber for directing a laser beam to the surface of said second target; a first optical coupler for directing a laser beam divided from said optical coupler to said first optical fiber, and dividing an interference beam formed from a first reflected laser beam which has been reflected by an end surface of said first optical fiber and a second reflected laser beam which has been emitted from the end surface of said first optical fiber and reflected by said first portion of said first target to be incident upon the end surface of said first optical fiber; a first measurement circuit for detecting, from said interference beam divided by said first optical coupler, a beat frequency between said first reflected laser beam and said second reflected laser beam, in order to measure a distance between the end surface of said first optical fiber and said first portion of said first target; a second optical coupler for directing a laser beam divided from said optical coupler to said second optical fiber, and dividing an interference beam formed from a first reflected laser beam which has been reflected by an end surface of said second optical fiber and a second reflected laser beam which has been emitted from the end surface of said second optical fiber and reflected by said second portion of said first target to be incident upon the end surface of said second optical fiber; a second measurement circuit for detecting, from said interference beam divided by said second optical coupler, a beat frequency between said first reflected laser beam and said second reflected laser beam, in order to measure a distance between the end surface of said second optical fiber and said second portion of said first target; a third optical coupler for directing a laser beam divided from said optical coupler to said third optical fiber, and dividing an interference beam formed from a first reflected laser beam which has been reflected by an end surface of said third optical fiber and a second reflected laser beam which has been emitted from the end surface of said third optical fiber and reflected by the surface of said second target to be incident upon the end surface of said third optical fiber; a third measurement circuit for detecting, from said interference beam divided by said third optical coupler, a beat frequency between said first reflected laser beam and said second reflected laser beam; control means for controlling said laser beam drive means such that the beat frequency detected by said third measurement circuit is held constant; and a processing circuit for determining a difference between measurement results of said first measurement circuit and said second measurement circuit.

Claim 12

An optical fiber sensor, comprising: a first target for reflecting laser beams, having a first portion which is displaced by a measured pressure and a second portion which is not displaced by the measured pressure; a second target for reflecting laser beams; laser beam generation means for generating a laser beam; an optical coupler for dividing said laser beam; laser drive means for applying a frequency modulation to said laser beam; a first optical fiber for directing a laser beam to the first portion of said first target; a second optical fiber for directing a laser beam to the second portion of said first target; a third optical fiber for directing a laser beam to the surface of said second target; a first optical coupler for directing a laser beam divided from said optical coupler to said first optical fiber, and dividing an interference beam formed from a first reflected laser beam which has been reflected by an end surface of said first optical fiber and a second reflected laser beam which has been emitted from the end surface of said first optical fiber and reflected by said first portion of said first target to be incident upon the end surface of said first optical fiber; a first measurement circuit for detecting, from said interference beam divided by said first optical coupler, a beat frequency between said first reflected laser beam and said second reflected laser beam, in order to measure a distance between the end surface of said first optical fiber and said first portion of said first target; a second optical coupler for directing a laser beam divided from said optical coupler to said second optical fiber, and dividing an interference beam formed from a first reflected laser beam which has been reflected by an end surface of said second optical fiber and a second reflected laser beam which has been emitted from the end surface of said second optical fiber and reflected by said second portion of said first target to be incident upon the end surface of said second optical fiber; a second measurement circuit for detecting, from said interference beam divided by said second optical coupler, a beat frequency between said first reflected laser beam and said second reflected laser beam, in order to measure a distance between the end surface of said second optical fiber and said second portion of said first target; a third optical coupler for directing a laser beam divided from said optical coupler to said third optical fiber, and dividing an interference beam formed from a first reflected laser beam which has been reflected by an end surface of said third optical fiber and a second reflected laser beam which has been emitted from the end surface of said third optical fiber and reflected by the surface of said second target to be incident upon the end surface of said third optical fiber; a third measurement circuit for detecting, from said interference beam divided by said third optical coupler, a beat frequency between said first reflected laser beam and said second reflected laser beam; control means for controlling said laser beam drive means such that the beat frequency detected by said third measurement circuit is held constant; and a processing circuit for determining a difference between measurement results of said first measurement circuit and said second measurement circuit.

Claim 13

An optical fiber sensor according to claim 8, wherein the end portion of said third optical fiber and said second target are provided within a vacuum structure so that an optical path length between the end portion of said third optical fiber and the surface of said second target is not influenced by refractive index changes due to atmospheric fluctuations.

Claim 14

An optical fiber sensor according to claim 8, wherein the end portion of said third optical fiber and said second target are provided within a thermostatic apparatus which is held at a constant temperature so that an optical path length between the end portion of said third optical fiber and the surface of said second target is only minutely influenced by refractive index changes due to atmospheric fluctuations.

Claim 15

An optical fiber sensor, comprising: a first target for reflecting laser beams, having a first portion which is displaced by a measured pressure and a second portion which is not displaced by the measured pressure; a second target for reflecting laser beams; laser beam generation means for generating a laser beam; an optical coupler for dividing said laser beam; laser drive means for applying a frequency modulation to said laser beam; a first optical fiber for directing a laser beam to the first portion of said first target; a second optical fiber for directing a laser beam to the second portion of said first target; a third optical fiber for directing a laser beam to the surface of said second target; a first optical coupler for directing a laser beam divided from said optical coupler to said first optical fiber, and dividing an interference beam formed from a first reflected laser beam which has been reflected by an end surface of said first optical fiber and a second reflected laser beam which has been emitted from the end surface of said first optical fiber and reflected by said first portion of said first target to be incident upon the end surface of said first optical fiber; a first measurement circuit for detecting, from said interference beam divided by said first optical coupler, a beat frequency between said first reflected laser beam and said second reflected laser beam, in order to measure a distance between the end surface of said first optical fiber and said first portion of said first target; a second optical coupler for directing a laser beam divided from said optical coupler to said second optical fiber, and dividing an interference beam formed from a first reflected laser beam which has been reflected by an end surface of said second optical fiber and a second reflected laser beam which has been emitted from the end surface of said second optical fiber and reflected by said second portion of said first target to be incident upon the end surface of said second optical fiber; a second measurement circuit for detecting, from said interference beam divided by said second optical coupler, a beat frequency between said first reflected laser beam and said second reflected laser beam, in order to measure a distance between the end surface of said second optical fiber and said second portion of said first target; a third optical coupler for directing a laser beam divided from said optical coupler to said third optical fiber, and dividing an interference beam formed from a first reflected laser beam which has been reflected by an end surface of said third optical fiber and a second reflected laser beam which has been emitted from the end surface of said third optical fiber and reflected by the surface of said second target to be incident upon the end surface of said third optical fiber; a third measurement circuit for detecting, from said interference beam divided by said third optical coupler, a beat frequency between said first reflected laser beam and said second reflected laser beam; and a correction processing circuit for performing correction calculations of the difference in measurement results between said first measurement circuit and said second measurement circuit based on data relating to said beat frequency detected by said third measurement circuit.

Claim 16

An optical fiber sensor, comprising: a first target for reflecting laser beams, having a first portion which is displaced by a measured pressure and a second portion which is not displaced by the measured pressure; a second target for reflecting laser beams; laser beam generation means for generating a laser beam; an optical coupler for dividing said laser beam; laser drive means for applying a frequency modulation to said laser beam; a first optical fiber for directing a laser beam to the first portion of said first target; a second optical fiber for directing a laser beam to the second portion of said first target; a third optical fiber for directing a laser beam to the surface of said second target; a first optical coupler for directing a laser beam divided from said optical coupler to said first optical fiber, and dividing an interference beam formed from a first reflected laser beam which has been reflected by an end surface of said first optical fiber and a second reflected laser beam which has been emitted from the end surface of said first optical fiber and reflected by said first portion of said first target to be incident upon the end surface of said first optical fiber; a first measurement circuit for detecting, from said interference beam divided by said first optical coupler, a beat frequency between said first reflected laser beam and said second reflected laser beam, in order to measure a distance between the end surface of said first optical fiber and said first portion of said first target; a second optical coupler for directing a laser beam divided from said optical coupler to said second optical fiber, and dividing an interference beam formed from a first reflected laser beam which has been reflected by an end surface of said second optical fiber and a second reflected laser beam which has been emitted from the end surface of said second optical fiber and reflected by said second portion of said first target to be incident upon the end surface of said second optical fiber; a second measurement circuit for detecting, from said interference beam divided by said second optical coupler, a beat frequency between said first reflected laser beam and said second reflected laser beam, in order to measure a distance between the end surface of said second optical fiber and said second portion of said first target; a third optical coupler for directing a laser beam divided from said optical coupler to said third optical fiber, and dividing an interference beam formed from a first reflected laser beam which has been reflected by an end surface of said third optical fiber and a second reflected laser beam which has been emitted from the end surface of said third optical fiber and reflected by the surface of said second target to be incident upon the end surface of said third optical fiber; a third measurement circuit for detecting, from said interference beam divided by said third optical coupler, a beat frequency between said first reflected laser beam and said second reflected laser beam; and a correction processing circuit for performing correction calculations of the difference in measurement results between said first measurement circuit and said second measurement circuit based on data relating to said beat frequency detected by said third measurement circuit.

Claim 17

An optical fiber sensor according to claim 11, wherein the end portion of said third optical fiber and said second target are provided within a vacuum structure so that an optical path length between the end portion of said third optical fiber and the surface of said second target is not influenced by refractive index changes due to atmospheric fluctuations.

Claim 18

An optical fiber sensor according to claim 11, wherein the end portion of said third optical fiber and said second target are provided within a thermostatic apparatus which is held at a constant temperature so that an optical path length between the end portion of said third optical fiber and the surface of said second target is only minutely influenced by refractive index changes due to atmospheric fluctuations.

Claim 19

An optical fiber sensor, comprising: a first target for reflecting laser beams, having a first portion which is displaced by a measured pressure and a second portion which is not displaced by the measured pressure; a second target for reflecting laser beams; laser beam generation means for generating a laser beam; an optical coupler for dividing said laser beam; laser drive means for applying a frequency modulation to said laser beam; a first optical fiber for directing a laser beam to the first portion of said first target; a second optical fiber for directing a laser beam to the second portion of said first target; a third optical fiber for directing a laser beam to the surface of said second target; a first optical coupler for directing a laser beam divided from said optical coupler to said first optical fiber, and dividing an interference beam formed from a first reflected laser beam which has been reflected by an end surface of said first optical fiber and a second reflected laser beam which has been emitted from the end surface of said first optical fiber and reflected by said first portion of said first target to be incident upon the end surface of said first optical fiber; a first measurement circuit for detecting, from said interference beam divided by said first optical coupler, a beat frequency between said first reflected laser beam and said second reflected laser beam, in order to measure a distance between the end surface of said first optical fiber and said first portion of said first target; a second optical coupler for directing a laser beam divided from said optical coupler to said second optical fiber, and dividing an interference beam formed from a first reflected laser beam which has been reflected by an end surface of said second optical fiber and a second reflected laser beam which has been emitted from the end surface of said second optical fiber and reflected by said second portion of said first target to be incident upon the end surface of said second optical fiber; a second measurement circuit for detecting, from said interference beam divided by said second optical coupler, a beat frequency between said first reflected laser beam and said second reflected laser beam, in order to measure a distance between the end surface of said second optical fiber and said second portion of said first target; a third optical coupler for directing a laser beam divided from said optical coupler to said third optical fiber, and dividing an interference beam formed from a first reflected laser beam which has been reflected by an end surface of said third optical fiber and a second reflected laser beam which has been emitted from the end surface of said third optical fiber and reflected by the surface of said second target to be incident upon the end surface of said third optical fiber; a third measurement circuit for detecting, from said interference beam divided by said third optical coupler, a beat frequency between said first reflected laser beam and said second reflected laser beam; and a correction processing circuit for performing correction calculations of the measurement results of said first measurement circuit based on data relating to said beat frequency detected by said third measurement circuit.

Claim 20

An optical fiber sensor, comprising: a first target for reflecting laser beams, having a first portion which is displaced by a measured pressure and a second portion which is not displaced by the measured pressure; a second target for reflecting laser beams; laser beam generation means for generating a laser beam; an optical coupler for dividing said laser beam; laser drive means for applying a frequency modulation to said laser beam; a first optical fiber for directing a laser beam to the first portion of said first target; a second optical fiber for directing a laser beam to the second portion of said first target; a third optical fiber for directing a laser beam to the surface of said second target; a first optical coupler for directing a laser beam divided from said optical coupler to said first optical fiber, and dividing an interference beam formed from a first reflected laser beam which has been reflected by an end surface of said first optical fiber and a second reflected laser beam which has been emitted from the end surface of said first optical fiber and reflected by said first portion of said first target to be incident upon the end surface of said first optical fiber; a first measurement circuit for detecting, from said interference beam divided by said first optical coupler, a beat frequency between said first reflected laser beam and said second reflected laser beam, in order to measure a distance between the end surface of said first optical fiber and said first portion of said first target; a second optical coupler for directing a laser beam divided from said optical coupler to said second optical fiber, and dividing an interference beam formed from a first reflected laser beam which has been reflected by an end surface of said second optical fiber and a second reflected laser beam which has been emitted from the end surface of said second optical fiber and reflected by said second portion of said first target to be incident upon the end surface of said second optical fiber; a second measurement circuit for detecting, from said interference beam divided by said second optical coupler, a beat frequency between said first reflected laser beam and said second reflected laser beam, in order to measure a distance between the end surface of said second optical fiber and said second portion of said first target; a third optical coupler for directing a laser beam divided from said optical coupler to said third optical fiber, and dividing an interference beam formed from a first reflected laser beam which has been reflected by an end surface of said third optical fiber and a second reflected laser beam which has been emitted from the end surface of said third optical fiber and reflected by the surface of said second target to be incident upon the end surface of said third optical fiber; a third measurement circuit for detecting, from said interference beam divided by said third optical coupler, a beat frequency between said first reflected laser beam and said second reflected laser beam; and a correction processing circuit for performing correction calculations of the measurement results of said first measurement circuit based on data relating to said beat frequency detected by said third measurement circuit.

Claim 21

An optical fiber sensor according to claim 14, wherein the end portion of said third optical fiber and said second target are provided within a vacuum structure so that an optical path length between the end portion of said third optical fiber and the surface of said second target is not influenced by refractive index changes due to atmospheric fluctuations.

Claim 22

An optical fiber sensor according to claim 14, wherein the end portion of said third optical fiber and said second target are provided within a thermostatic apparatus which is held at a constant temperature so that an optical path length between the end portion of said third optical fiber and the surface of said second target is only minutely influenced by refractive index changes due to atmospheric fluctuations.