Patent US5656943A successfully refreshed from Google Patents.
US5656943A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for forming a test stack for semiconductor wafer probing and method for using the same
Assignee: NXP USA Inc
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Filing: 1995-10-30
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Granted: 1997-08-12
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Expires: 2015-10-30
Abstract
Abstract A semiconductor wafer to be tested is placed inside a prober. A probe card (20') is placed inside a specially designed cavity (32) of a prober interface plate (24) that is pre-mounted superjacent to a head plate of the prober. The bottom surface (34) of the cavity provides solid and uniform support for the probe card. The probe card can be lifted out of the cavity whenever a probe card changeover is required. A tester interface plate (60) is pre-mounted to a test head. The tester interface plate has interlocking alignment pins (68 & 68') which are self-aligned into mating chamfered alignment holes (40 & 40') in the prober interface plate. Additionally, these two interface plates have mating interlocking features (46 & 70) for increased stability. The test stack allows the probe card to contact, typically through cantilevered pins; the active surface of the semiconductor wafer, and electrical probing or testing may then be performed on the semiconductor wafer.
Inventors
- 👤 Thomas T. Montoya
- 👤 K. David Woodliff
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 08:53
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/28; G01R31/282; G01R31/2831; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/073; G01R1/07307; G01R1/07342; G01R1/04; G01R1/0408
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
231 words
An apparatus for holding a probe card in a semiconductor wafer testing system comprising: a tester interface plate having a carrier rim containing first means for mounting the tester interface plate to a test head, an interlocking alignment pin extending outwardly at approximately a right angle from a prober interface plate mating surface, a plurality of socket holes for male electrical sockets which plug into the test head for sending and receiving electrical signals from the test head, and a defined area for a pogo pin assembly; and a prober interface plate having a first cavity, the first cavity having a support surface for holding the probe card, a locating pin disposed on the support surface of the first cavity for alignment of the probe card, an alignment hole outside the first cavity for mating to the tester interface plate, wherein the interlocking alignment pin on the tester interface plate is positioned to fit into the alignment hole to interlock the tester interface and the prober interface plates, a sidewall ring having a height, said sidewall ring enclosing the first cavity and the alignment hole, to form a second cavity wherein a portion of the tester interface plate lies within the second cavity when the tester interface plate is mated to the prober interface plate; and a carrier rim containing second means for mounting the prober interface plate to a prober.
Claim 2
Independent Claim
231 words
An apparatus for holding a probe card in a semiconductor wafer testing system comprising: a tester interface plate having a carrier rim containing first means for mounting the tester interface plate to a test head, an interlocking alignment pin extending outwardly at approximately a right angle from a prober interface plate mating surface, a plurality of socket holes for male electrical sockets which plug into the test head for sending and receiving electrical signals from the test head, and a defined area for a pogo pin assembly; and a prober interface plate having a first cavity, the first cavity having a support surface for holding the probe card, a locating pin disposed on the support surface of the first cavity for alignment of the probe card, an alignment hole outside the first cavity for mating to the tester interface plate, wherein the interlocking alignment pin on the tester interface plate is positioned to fit into the alignment hole to interlock the tester interface and the prober interface plates, a sidewall ring having a height, said sidewall ring enclosing the first cavity and the alignment hole, to form a second cavity wherein a portion of the tester interface plate lies within the second cavity when the tester interface plate is mated to the prober interface plate; and a carrier rim containing second means for mounting the prober interface plate to a prober.
Claim 3
Dependent Claim
33 words
The apparatus of claim 1, wherein the prober interface plate has a cut-out located at a side of the first cavity for removing the probe card by its edge from the first cavity.
Claim 4
Dependent Claim
38 words
The apparatus of claim 1, wherein the alignment hole outside the first cavity in the prober interface plate is chamfered so that the mating interlocking alignment pin on the tester interface plate has a lead-in for alignment purposes.
Claim 5
Dependent Claim
26 words
The apparatus of claim 1, wherein the first cavity in the prober interface plate has a chamfered sidewall for alignment of a printed circuit board assembly.
Claim 6
Dependent Claim
15 words
The apparatus of claim 1, wherein the prober interface plate is composed of stainless steel.
Claim 7
Dependent Claim
15 words
The apparatus of claim 1, wherein the tester interface plate is composed of anodized aluminum.
Claim 8
Dependent Claim
36 words
The apparatus of claim 1, wherein the first and second means for mounting include screw holes for screwing the tester interface plate to the test head and for screwing the prober interface plate to the prober.
Claim 9
Dependent Claim
21 words
The apparatus of claim 1, wherein the first cavity has a shape selected from a group consisting of rectangular and circular.
Claim 10
Dependent Claim
58 words
The apparatus of claim 1, wherein the tester interface plate has a lock button located at a perimeter of the carrier rim of the tester interface plate, and the sidewall ring of the prober interface plate has an interlocking keyhole through a thickness of the sidewall ring for interlocking with the lock button on the tester interface plate.
Claim 11
Independent Claim
208 words
An apparatus for testing a semiconductor wafer, comprising: a semiconductor wafer prober; a prober interface plate overlying the semiconductor wafer prober and mounted to the semiconductor wafer prober, the prober interface plate having a first cavity and a second cavity formed therein, the first cavity having a support surface and a locating pin, wherein the locating pin lies on the support surface; a probe card lying within the first cavity of the prober interface plate and abutting the underlying support surface of the first cavity, wherein the locating pin in the first cavity aligns the probe card; a printed circuit board assembly overlying the probe card, the printed circuit board assembly having a plurality of pogo pins; a tester interface plate overlying the printed circuit board assembly and the prober interface plate, the tester interface plate having a pogo pin assembly area and a socket area, wherein a portion of the tester interface plate extends into the second cavity of the prober interface plate such that the tester interface plate exerts a uniform force on the underlying probe card and compresses the plurality of pogo pins; and a tester having a test head, the test head overlying the tester interface plate and mounted to the tester interface plate.
Claim 12
Independent Claim
208 words
An apparatus for testing a semiconductor wafer, comprising: a semiconductor wafer prober; a prober interface plate overlying the semiconductor wafer prober and mounted to the semiconductor wafer prober, the prober interface plate having a first cavity and a second cavity formed therein, the first cavity having a support surface and a locating pin, wherein the locating pin lies on the support surface; a probe card lying within the first cavity of the prober interface plate and abutting the underlying support surface of the first cavity, wherein the locating pin in the first cavity aligns the probe card; a printed circuit board assembly overlying the probe card, the printed circuit board assembly having a plurality of pogo pins; a tester interface plate overlying the printed circuit board assembly and the prober interface plate, the tester interface plate having a pogo pin assembly area and a socket area, wherein a portion of the tester interface plate extends into the second cavity of the prober interface plate such that the tester interface plate exerts a uniform force on the underlying probe card and compresses the plurality of pogo pins; and a tester having a test head, the test head overlying the tester interface plate and mounted to the tester interface plate.
Claim 13
Dependent Claim
15 words
The apparatus of claim 10, wherein the prober interface plate is composed of stainless steel.
Claim 14
Dependent Claim
44 words
The apparatus of claim 10, wherein the prober interface plate has a chamfered alignment hole and the tester interface plate has an interlocking alignment pin disposed to fit into the chamfered alignment hole to interlock the prober interface plate and the tester interface plate.
Claim 15
Dependent Claim
15 words
The apparatus of claim 10, wherein the tester interface plate is composed of anodized aluminum.
Claim 16
Dependent Claim
37 words
The apparatus of claim 10, wherein the tester interface plate has screw holes through a thickness of the tester interface plate so that the tester interface plate can be screwed to the test head of the tester.
Claim 17
Dependent Claim
32 words
The apparatus of claim 10, wherein the prober interface plate has screw holes located outside the second cavity so that the prober interface plate can be screwed to the semiconductor wafer prober.
Claim 18
Dependent Claim
63 words
The apparatus of claim 10, wherein the tester interface plate has a locking feature located at a periphery of the tester interface plate which mates to a keyhole located in a sidewall ring of the prober interface plate to securely lock the tester interface plate against the prober interface plate such that the probe card is restrained from movement within the first cavity.
Claim 19
Independent Claim
293 words
A method for testing a semiconductor wafer comprising the steps of: providing a prober having a prober interface plate mounted to the prober, wherein the prober interface plate has an alignment hole, a first cavity, and a second cavity, the first cavity having a support surface, a locating pin, and a substantially central aperture, wherein the locating pin lies on the support surface; placing a probe card into the first cavity of the prober interface plate, wherein the probe card abuts the underlying support surface of the first cavity and the locating pin aligns the probe card; placing a semiconductor wafer having an active die surface into the prober, wherein the active die surface is contactable by the probe card through the substantially central aperture in the first cavity of the prober interface plate; providing a tester interface plate, the tester interface plate having a printed circuit board assembly mounted thereto, the printed circuit board assembly underlying the tester interface plate and having conductive traces and a plurality of pogo pins thereon to send electrical signals to the probe card, wherein the tester interface plate has an interlocking alignment pin disposed in a location so as to align to the alignment hole in the prober interface plate; inserting the interlocking alignment pin on the tester interface plate into the alignment hole in the prober interface plate so that the tester interface plate overlies the prober interface plate and a portion of the tester interface plate extends into the second cavity of the prober interface plate and the plurality of pogo pins make electrical contact with the probe card; forming an electrical contact between the probe card and the active surface of the semiconductor wafer; and performing an electrical test on the semiconductor wafer.
Claim 20
Independent Claim
293 words
A method for testing a semiconductor wafer comprising the steps of: providing a prober having a prober interface plate mounted to the prober, wherein the prober interface plate has an alignment hole, a first cavity, and a second cavity, the first cavity having a support surface, a locating pin, and a substantially central aperture, wherein the locating pin lies on the support surface; placing a probe card into the first cavity of the prober interface plate, wherein the probe card abuts the underlying support surface of the first cavity and the locating pin aligns the probe card; placing a semiconductor wafer having an active die surface into the prober, wherein the active die surface is contactable by the probe card through the substantially central aperture in the first cavity of the prober interface plate; providing a tester interface plate, the tester interface plate having a printed circuit board assembly mounted thereto, the printed circuit board assembly underlying the tester interface plate and having conductive traces and a plurality of pogo pins thereon to send electrical signals to the probe card, wherein the tester interface plate has an interlocking alignment pin disposed in a location so as to align to the alignment hole in the prober interface plate; inserting the interlocking alignment pin on the tester interface plate into the alignment hole in the prober interface plate so that the tester interface plate overlies the prober interface plate and a portion of the tester interface plate extends into the second cavity of the prober interface plate and the plurality of pogo pins make electrical contact with the probe card; forming an electrical contact between the probe card and the active surface of the semiconductor wafer; and performing an electrical test on the semiconductor wafer.
Claim 21
Dependent Claim
29 words
The method of claim 17, wherein the step of placing the semiconductor wafer places a wafer containing devices selected from a group consisting of: microprocessor, microcontroller, memory, and bipolar.
Claim 22
Dependent Claim
28 words
The method of claim 17, wherein the step of placing the probe card places a card having a shape selected from a group consisting of rectangular and circular.
Claim 23
Dependent Claim
47 words
The method of claim 17, further comprising the step of locking the tester interface plate against the prober interface plate by fitting a lock button located at a periphery of the tester interface plate into a keyhole located in a sidewall ring on the prober interface plate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-08-11 | 2001-02-10 | 2001-08-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-08-11 | 2005-02-10 | 2005-08-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-08-11 | 2009-02-10 | 2009-08-12 | $7700.00 | Window Closed / Lapsed |