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Patent US5656519A successfully refreshed from Google Patents.
US5656519A
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Method for manufacturing salicide semiconductor device
Assignee: NEC Corp
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Filing: 1996-02-13
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Granted: 1997-08-12
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Expires: 2016-02-13
Abstract
Abstract In a method for manufacturing a salicide MOS device, a gate insulating layer and a polycrystalline silicon gate electrode layer are formed on a monocrystalline silicon substrate. A sidewall insulating layer is formed on a sidewall of the gate electrode layer, and impurities are introduced into the substrate with a mask of the sidewall insulating layer and the gate electrode layer, thus forming impurity diffusion regions in the substrate. Then, an upper portion of the gate electrode layer is etched out. Finally, a metal layer is formed on the entire surface, and a heating operation is carried out, so that metal silicide layers are formed on upper portions of the gate electrodes and the impurity diffusion regions. In an alternative embodiment, the gate further comprises an intervening metal nitride layer.
Inventors
- 👤 Tohru Mogami
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 13:22
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/01; H10D30/021; H10D30/0223; H10D30/0227; H10D30/0212; H10D64/00; H10D64/01; H10D64/013; H10D64/01302; H10D64/01304; H10D64/01306; H10D64/01308; H10D64/0131; H10D84/00; H10D84/01; H10D84/0123; H10D84/0126; H10D84/0165; H10D84/0172; H10D84/0174; H10D84/02; H10D84/03; H10D84/038; H10D64/017; Y; Y10; Y10S; Y10S438/00; Y10S438/97
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
160 words
A method for manufacturing a semiconductor device comprising the steps of: forming a gate insulating layer on a monocrystalline silicon substrate; forming a polycrystalline silicon gate electrode layer on said gate insulating layer; forming a sidewall insulating layer on a sidewall of said polycrystalline silicon gate electrode layer; introducing first impurities into said monocrystalline silicon substrate with a mask of said sidewall insulating layer and said polycrystalline silicon gate electrode layer to form impurity diffusion regions in said monocrystalline silicon substrate; selectively removing an upper portion of said polycrystalline silicon gate electrode layer after said impurity diffusion regions are formed; forming a metal layer on said etched polycrystalline silicon gate electrode layer and said impurity diffusion regions; performing a heating operation upon said metal layer so that said metal layer is reacted with said etched polycrystalline silicon gate layer and said impurity diffusion regions to form metal silicide layers; and removing a portion of said metal layer which is unreacted.
Claim 2
Independent Claim
160 words
A method for manufacturing a semiconductor device comprising the steps of: forming a gate insulating layer on a monocrystalline silicon substrate; forming a polycrystalline silicon gate electrode layer on said gate insulating layer; forming a sidewall insulating layer on a sidewall of said polycrystalline silicon gate electrode layer; introducing first impurities into said monocrystalline silicon substrate with a mask of said sidewall insulating layer and said polycrystalline silicon gate electrode layer to form impurity diffusion regions in said monocrystalline silicon substrate; selectively removing an upper portion of said polycrystalline silicon gate electrode layer after said impurity diffusion regions are formed; forming a metal layer on said etched polycrystalline silicon gate electrode layer and said impurity diffusion regions; performing a heating operation upon said metal layer so that said metal layer is reacted with said etched polycrystalline silicon gate layer and said impurity diffusion regions to form metal silicide layers; and removing a portion of said metal layer which is unreacted.
Claim 3
Dependent Claim
27 words
The method as set forth in claim 1, wherein said selectively removing step etches said polycrystalline silicon layer by a vapor phase etching process using chlorine gas.
Claim 4
Dependent Claim
28 words
The method as set forth in claim 2, wherein said vapor phase etching process is carried out at a substrate temperature of about 740° C. to 800° C.
Claim 5
Dependent Claim
65 words
The method as set forth in claim 1, further comprising a step of introducing second impurities into said polycrystalline silicon gate electrode and said impurity diffusion regions of said monocrystalline silicon substrate so that a part of said polycrystalline silicon gate electrode and a part of said impurity diffusion regions become amorphous, after the upper portion of said polycrystalline silicon gate electrode is selectively removed.
Claim 6
Dependent Claim
23 words
The method as set forth in claim 4, wherein said second impurities are at least arsenic ions, BF 2 ions and silicon ions.
Claim 7
Dependent Claim
43 words
The method as set forth in claim 1, further comprising a step of forming a silicon layer including second impurities on said polycrystalline silicon gate electrode and said impurity diffusion regions, after the upper portion of said polycrystalline silicon gate is selectively removed.
Claim 8
Dependent Claim
29 words
The method as set forth in claim 6, wherein said silicon layer forming step forms said silicon layer by a vapor phase process using one of silane and disilane.
Claim 9
Dependent Claim
27 words
The method as set forth in claim 6, wherein a density of said second impurities in said silicon layer is less than approximately 10 19 /cubic cm.
Claim 10
Dependent Claim
58 words
The method as set forth in claim 6, further comprising a step of introducing second impurities into said polycrystalline silicon gate electrode and said impurity diffusion regions of said monocrystalline silicon substrate so that a part of said polycrystalline silicon gate electrode and a part of said impurity diffusion regions become amorphous, after said silicon layer is formed.
Claim 11
Dependent Claim
23 words
The method as set forth in claim 9, wherein said second impurities are at least arsenic ions, BF 2 ions and silicon ions.
Claim 12
Dependent Claim
17 words
The method as set forth in claim 1, wherein said metal layer is made of refractory metal.
Claim 13
Dependent Claim
49 words
The method as set forth in claim 1, further comprising a step of forming second impurities into said monocrystalline silicon substrate with a mask of said polycrystalline silicon gate electrode layer to form impurity diffusion regions in said monocrystalline silicon substrate, after said polycrystalline silicon gate electrode is formed.
Claim 14
Independent Claim
173 words
A method for manufacturing a semiconductor device comprising the steps of: forming a gate insulating layer on a monocrystalline silicon substrate; forming a first polycrystalline silicon layer on said gate insulating layer; forming a metal nitride layer on said first polycrystalline silicon layer; forming a second polycrystalline silicon layer on said metal nitride layer; forming a sidewall insulating layer on a sidewall of said second polycrystalline silicon layer said metal nitride layer and said first polycrystalline silicon layer; introducing first impurities into said monocrystalline silicon substrate with a mask of said sidewall insulating layer and said second polycrystalline silicon layer to form impurity diffusion regions in said monocrystalline silicon substrate; removing said second polycrystalline silicon layer after said impurity diffusion regions are formed; forming a metal layer on said metal nitride layer and said impurity diffusion regions; performing a heating operation upon said metal layer so that said metal layer is reacted with said impurity diffusion regions to form metal silicide layers; and removing a portion of said metal layer which is unreacted.
Claim 15
Independent Claim
173 words
A method for manufacturing a semiconductor device comprising the steps of: forming a gate insulating layer on a monocrystalline silicon substrate; forming a first polycrystalline silicon layer on said gate insulating layer; forming a metal nitride layer on said first polycrystalline silicon layer; forming a second polycrystalline silicon layer on said metal nitride layer; forming a sidewall insulating layer on a sidewall of said second polycrystalline silicon layer said metal nitride layer and said first polycrystalline silicon layer; introducing first impurities into said monocrystalline silicon substrate with a mask of said sidewall insulating layer and said second polycrystalline silicon layer to form impurity diffusion regions in said monocrystalline silicon substrate; removing said second polycrystalline silicon layer after said impurity diffusion regions are formed; forming a metal layer on said metal nitride layer and said impurity diffusion regions; performing a heating operation upon said metal layer so that said metal layer is reacted with said impurity diffusion regions to form metal silicide layers; and removing a portion of said metal layer which is unreacted.
Claim 16
Dependent Claim
23 words
The method as set for the in claim 13, further comprising a step of forming a metal layer on said metal nitride layer.
Claim 17
Dependent Claim
26 words
The method as set forth in claim 13, wherein said metal nitride layer is made of tungsten nitride, and said metal layer is made of tungsten.
Claim 18
Dependent Claim
42 words
The method as set forth in claim 13, wherein said selectively removing step etches said second polycrystalline silicon layer by a vapor phase etching process using chlorine gas, said metal nitride layer serving as an etching stopper of said vapor etching process.
Claim 19
Dependent Claim
28 words
The method as set forth in claim 16, wherein said vapor phase etching process is carried out at a substrate temperature of about 740° C. to 800° C.
Claim 20
Dependent Claim
45 words
The method as set forth in claim 13, further comprising a step of introducing second impurities into said impurity diffusion regions of said monocrystalline silicon substrate so that a part of said impurity diffusion regions become amorphous, after said second polycrystalline silicon layer is removed.
Claim 21
Dependent Claim
23 words
The method as set forth in claim 18, wherein said second impurities are at least arsenic ions, BF 2 ions and silicon ions.
Claim 22
Dependent Claim
17 words
The method as set forth in claim 13, wherein said metal layer is made of refractory metal.
Claim 23
Dependent Claim
55 words
The method as set forth in claim 13, further comprising forming second impurities into said monocrystalline silicon substrate with a mask of said second polycrystalline silicon layer, said metal nitride layer and said first polycrystalline silicon layer to form impurity diffusion regions in said monocrystalline silicon substrate, after said second polycrystalline silicon layer is formed.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2000-08-11 | 2001-02-10 | 2001-08-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-08-11 | 2005-02-10 | 2005-08-12 | $3760.00 | Window Closed / Lapsed |
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