Patent US5643056A successfully refreshed from Google Patents.
US5643056A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Revolving drum polishing apparatus
Assignee: Ebara Corp
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Filing: 1995-10-30
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Granted: 1997-07-01
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Expires: 2015-10-30
Abstract
Abstract A drum-type polishing apparatus for producing a flat mirror polish on an object such as a semiconductor wafer, is capable of three degrees of freedom of movement of a drum member with respect to the wafer. The relative movements can be made, successively or simultaneously, at right angles to an axis of the drum, parallel to the surface of the wafer, as well as at any desired angular orientations. Combined with a follower device to provide automatic compensation for unevenness in pressing pressure applied to the wafer during polishing, the polishing apparatus offers outstanding uniformity in polishing quality and high productivity, even for large diameter wafers, with a comparatively modest investment in both facility space and equipment cost.
Inventors
- 👤 Masayoshi Hirose
- 👤 Seiji Ishikawa
- 👤 Norio Kimura
- 👤 Yoshimi Sasaki
- 👤 Kouki Yamada
- 👤 Fujio Aoyama
- 👤 Noburu Shimizu
- 👤 Katsuya Okumura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 10:48
CPC Classifications
B; B24; B24B; B24B7/00; B24B7/20; B24B7/22; B24B7/228; H; H10; H10P; H10P52/00; B24B29/00; B24B29/02; B24B37/00; B24B37/04
Claims Analysis
Total Claims: 44
Claim 1
Independent Claim
157 words
A polishing apparatus for polishing a surface of an object to a uniform polish, said apparatus comprising: a seat member to support an object to be polished; a revolving drum confronting said seat member and a surface of the object, said drum having mounted on an outer circumferential surface thereof a polishing material; revolving means for revolving said drum; a pressing device to cause said polishing material on said drum and the surface of the object to be in pressing contact; supply means for supplying a polishing solution to said polishing material, thereby to achieve polishing of the surface of the object; first moving means for moving one of said drum and said seat member in a direction orthogonal to an axis of said drum; second moving means for moving one of said drum and said seat member in a direction parallel to said drum axis; and rotation means for rotating said seat member and the object.
Claim 2
Dependent Claim
157 words
A polishing apparatus for polishing a surface of an object to a uniform polish, said apparatus comprising: a seat member to support an object to be polished; a revolving drum confronting said seat member and a surface of the object, said drum having mounted on an outer circumferential surface thereof a polishing material; revolving means for revolving said drum; a pressing device to cause said polishing material on said drum and the surface of the object to be in pressing contact; supply means for supplying a polishing solution to said polishing material, thereby to achieve polishing of the surface of the object; first moving means for moving one of said drum and said seat member in a direction orthogonal to an axis of said drum; second moving means for moving one of said drum and said seat member in a direction parallel to said drum axis; and rotation means for rotating said seat member and the object.
Claim 3
Dependent Claim
29 words
An apparatus as claimed in claim 1, wherein said first moving means is operable to reciprocate said one of said drum and said seat member in said orthogonal direction.
Claim 4
Dependent Claim
29 words
An apparatus as claimed in claim 1, wherein said second moving means is operable to reciprocate said one of said drum and said seat member in said parallel direction.
Claim 5
Dependent Claim
22 words
An apparatus as claimed in claim 1, wherein said rotation means is operable to oscillatingly rotate said seat member and the object.
Claim 6
Dependent Claim
28 words
An apparatus as claimed in claim 4, wherein said moving means is operable to reciprocate said one of said drum and said seat member in said orthogonal direction.
Claim 7
Dependent Claim
47 words
An apparatus as claimed in claim 1, further comprising control means for controlling pressing contact between said polishing material on said drum and the surface of the object so that a pressing pressure therebetween corresponds to a length of a substantially rectilinear interface region of contact therebetween.
Claim 8
Dependent Claim
53 words
An apparatus as claimed in claim 1, further comprising control means for controlling said revolving means such that a speed of revolving of said drum provides a constant rate of polishing while a length of a substantially rectilinear region of interface contact between said polishing material and the surface of the object varies.
Claim 9
Dependent Claim
58 words
An apparatus as claimed in claim 1, further comprising control means for controlling at least one of said first moving means and said second moving means such that a relative speed of movement between said polishing material and the surface of the object varies inversely of variation in length of a substantially rectilinear region of interface contact therebetween.
Claim 10
Dependent Claim
160 words
A polishing apparatus for polishing a surface of an object to a uniform polish, said apparatus comprising: a seat member to support an object to be polished; a revolving drum confronting said seat member and a surface of the object, said drum having mounted on an outer circumferential surface thereof a polishing material; revolving means for revolving said drum; a pressing device to cause said polishing material on said drum and the surface of the object to be in pressing contact; supply means for supplying a polishing solution to said polishing material, thereby to achieve polishing of the surface of the object; moving means for moving one of said drum and said seat member in a direction orthogonal to an axis of said drum; and a sacrificial member on said seat member at a position to be disposed about an outer periphery of the object and having an upper surface to be substantially coplanar with the surface of the object.
Claim 11
Dependent Claim
160 words
A polishing apparatus for polishing a surface of an object to a uniform polish, said apparatus comprising: a seat member to support an object to be polished; a revolving drum confronting said seat member and a surface of the object, said drum having mounted on an outer circumferential surface thereof a polishing material; revolving means for revolving said drum; a pressing device to cause said polishing material on said drum and the surface of the object to be in pressing contact; supply means for supplying a polishing solution to said polishing material, thereby to achieve polishing of the surface of the object; moving means for moving one of said drum and said seat member in a direction orthogonal to an axis of said drum; and a sacrificial member on said seat member at a position to be disposed about an outer periphery of the object and having an upper surface to be substantially coplanar with the surface of the object.
Claim 12
Dependent Claim
22 words
An apparatus as claimed in claim 9, further comprising an elastic support member disposed between said seat member and said sacrificial member.
Claim 13
Dependent Claim
28 words
An apparatus as claimed in claim 9, wherein said moving means is operable to reciprocate said one of said drum and said seat member in said orthogonal direction.
Claim 14
Dependent Claim
30 words
An apparatus as claimed in claim 9, further comprising another moving means for moving one of said drum and said seat member in a direction parallel to said drum axis.
Claim 15
Dependent Claim
29 words
An apparatus as claimed in claim 12, wherein said another moving means is operable to reciprocate said one of said drum and said seat member in said parallel direction.
Claim 16
Dependent Claim
19 words
An apparatus as claimed in claim 9, further comprising rotation means for rotating said seat member and the object.
Claim 17
Dependent Claim
22 words
An apparatus as claimed in claim 14, wherein said rotation means is operable to oscillatingly rotate said seat member and the object.
Claim 18
Dependent Claim
22 words
An apparatus as claimed in claim 15, wherein said rotation means is operable to oscillatingly rotate said seat member and the object.
Claim 19
Dependent Claim
47 words
An apparatus as claimed in claim 9, further comprising control means for controlling pressing contact between said polishing material on said drum and the surface of the object so that a pressing pressure therebetween corresponds to a length of a substantially rectilinear interface region of contact therebetween.
Claim 20
Dependent Claim
53 words
An apparatus as claimed in claim 9, further comprising control means for controlling said revolving means such that a speed of revolving of said drum provides a constant rate of polishing while a length of a substantially rectilinear region of interface contact between said polishing material and the surface of the object varies.
Claim 21
Dependent Claim
48 words
An apparatus as claimed in claim 9, further comprising control means for controlling said moving means such that a relative speed of movement between said polishing material and the surface of the object varies inversely of variation in length of a substantially rectilinear region of interface contact therebetween.
Claim 22
Dependent Claim
192 words
A polishing apparatus for polishing a surface of an object to a uniform polish, said apparatus comprising: a seat member to support an object to be polished; a revolving drum confronting said seat member and a surface of the object, said drum having mounted on an outer circumferential surface thereof a polishing material; revolving means for revolving said drum; a pressing device to cause said polishing material on said drum and the surface of the object to be in pressing contact; supply means for supplying a polishing solution to said polishing material, thereby to achieve polishing of the surface of the object; moving means for moving one of said drum and said seat member in a direction orthogonal to an axis of said drum; and follower means, comprising a rod-shaped support member having an axis extending orthogonal to an axis of said drum and parallel to a top surface of said seat member, for supporting said seat member and to produce a follower action in an interface contact region between the surface of the object and a contact surface of said polishing material providing equalized pressing pressure across said interface contact region.
Claim 23
Dependent Claim
192 words
A polishing apparatus for polishing a surface of an object to a uniform polish, said apparatus comprising: a seat member to support an object to be polished; a revolving drum confronting said seat member and a surface of the object, said drum having mounted on an outer circumferential surface thereof a polishing material; revolving means for revolving said drum; a pressing device to cause said polishing material on said drum and the surface of the object to be in pressing contact; supply means for supplying a polishing solution to said polishing material, thereby to achieve polishing of the surface of the object; moving means for moving one of said drum and said seat member in a direction orthogonal to an axis of said drum; and follower means, comprising a rod-shaped support member having an axis extending orthogonal to an axis of said drum and parallel to a top surface of said seat member, for supporting said seat member and to produce a follower action in an interface contact region between the surface of the object and a contact surface of said polishing material providing equalized pressing pressure across said interface contact region.
Claim 24
Dependent Claim
30 words
An apparatus as claimed in claim 20, further comprising another moving means for moving one of said drum and said seat member in a direction parallel to said drum axis.
Claim 25
Dependent Claim
29 words
An apparatus as claimed in claim 21, wherein said another moving means is operable to reciprocate said one of said drum and said seat member in said parallel direction.
Claim 26
Dependent Claim
19 words
An apparatus as claimed in claim 20, further comprising rotation means for rotating said seat member and the object.
Claim 27
Dependent Claim
47 words
An apparatus as claimed in claim 20, further comprising control means for controlling pressing contact between said polishing material on said drum and the surface of the object so that a pressing pressure therebetween corresponds to a length of a substantially rectilinear interface region of contact therebetween.
Claim 28
Dependent Claim
53 words
An apparatus as claimed in claim 20, further comprising control means for controlling said revolving means such that a speed of revolving of said drum provides a constant rate of polishing while a length of a substantially rectilinear region of interface contact between said polishing material and the surface of the object varies.
Claim 29
Dependent Claim
48 words
An apparatus as claimed in claim 20, further comprising control means for controlling said moving means such that a relative speed of movement between said polishing material and the surface of the object varies inversely of variation in length of a substantially rectilinear region of interface contact therebetween.
Claim 30
Dependent Claim
187 words
A polishing apparatus for polishing a surface of an object to a uniform polish, said apparatus comprising: a seat member to support an object to be polished; a revolving drum confronting said seat member and a surface of the object, said drum having mounted on an outer circumferential surface thereof a polishing material; revolving means for revolving said drum; a pressing device to cause said polishing material on said drum and the surface of the object to be in pressing contact; supply means for supplying a polishing solution to said polishing material, thereby to achieve polishing of the surface of the object; moving means for moving one of said drum and said seat member in a direction orthogonal to an axis of said drum; and said pressing device comprising a diaphragm member connected to one of said seat member and said drum, and pneumatic cushion means for providing uniform pressure to said diaphragm member to produce a follower action in an interface contact region between the surface of the object and a contact surface of said polishing material providing equalized pressing pressure across said interface contact region.
Claim 31
Dependent Claim
187 words
A polishing apparatus for polishing a surface of an object to a uniform polish, said apparatus comprising: a seat member to support an object to be polished; a revolving drum confronting said seat member and a surface of the object, said drum having mounted on an outer circumferential surface thereof a polishing material; revolving means for revolving said drum; a pressing device to cause said polishing material on said drum and the surface of the object to be in pressing contact; supply means for supplying a polishing solution to said polishing material, thereby to achieve polishing of the surface of the object; moving means for moving one of said drum and said seat member in a direction orthogonal to an axis of said drum; and said pressing device comprising a diaphragm member connected to one of said seat member and said drum, and pneumatic cushion means for providing uniform pressure to said diaphragm member to produce a follower action in an interface contact region between the surface of the object and a contact surface of said polishing material providing equalized pressing pressure across said interface contact region.
Claim 32
Dependent Claim
28 words
An apparatus as claimed in claim 27, wherein said moving means is operable to reciprocate said one of said drum and said seat member in said orthogonal direction.
Claim 33
Dependent Claim
30 words
An apparatus as claimed in claim 27, further comprising another moving means for moving one of said drum and said seat member in a direction parallel to said drum axis.
Claim 34
Dependent Claim
29 words
An apparatus as claimed in claim 29, wherein said another moving means is operable to reciprocate said one of said drum and said seat member in said parallel direction.
Claim 35
Dependent Claim
19 words
An apparatus as claimed in claim 27, further comprising rotation means for rotating said seat member and the object.
Claim 36
Dependent Claim
22 words
An apparatus as claimed in claim 31, wherein said rotation means is operable to oscillatingly rotate said seat member and the object.
Claim 37
Dependent Claim
47 words
An apparatus as claimed in claim 27, further comprising control means for controlling pressing contact between said polishing material on said drum and the surface of the object so that a pressing pressure therebetween corresponds to a length of a substantially rectilinear interface region of contact therebetween.
Claim 38
Dependent Claim
53 words
An apparatus as claimed in claim 27, further comprising control means for controlling said revolving means such that a speed of revolving of said drum provides a constant rate of polishing while a length of a substantially rectilinear region of interface contact between said polishing material and the surface of the object varies.
Claim 39
Dependent Claim
48 words
An apparatus as claimed in claim 27, further comprising control means for controlling said moving means such that a relative speed of movement between said polishing material and the surface of the object varies inversely of variation in length of a substantially rectilinear region of interface contact therebetween.
Claim 40
Independent Claim
123 words
A method for polishing a surface of an object to a uniform polish, said method comprising: positioning said object in a seat member; providing a drum having on an outer circumferential surface thereof a polishing material; revolving said drum while maintaining pressing contact between said polishing material and said surface of said object; supplying a polishing solution to said polishing material, thereby achieving polishing of said surface of said object; moving one of said drum and said seat member in a direction orthogonal to an axis of said drum; moving one of said drum and said seat member in a direction parallel to said drum axis; and rotating said seat member and said object about an axis of rotation of said seat member.
Claim 41
Independent Claim
123 words
A method for polishing a surface of an object to a uniform polish, said method comprising: positioning said object in a seat member; providing a drum having on an outer circumferential surface thereof a polishing material; revolving said drum while maintaining pressing contact between said polishing material and said surface of said object; supplying a polishing solution to said polishing material, thereby achieving polishing of said surface of said object; moving one of said drum and said seat member in a direction orthogonal to an axis of said drum; moving one of said drum and said seat member in a direction parallel to said drum axis; and rotating said seat member and said object about an axis of rotation of said seat member.
Claim 42
Dependent Claim
42 words
A method as claimed in claim 36, further comprising controlling said pressing contact between said polishing material and said surface of said object so that a pressing pressure therebetween corresponds to a length of a substantially rectilinear interface region of contact therebetween.
Claim 43
Dependent Claim
45 words
A method as claimed in claim 36, further comprising controlling speed of revolving of said drum to provide a constant rate of polishing while a length of a substantially rectilinear region of interface contact between said polishing material and said surface of said object varies.
Claim 44
Dependent Claim
43 words
A method as claimed in claim 36, further comprising controlling said moving so that relative speed of movement between said polishing material and said surface of said object varies inversely of variation in length of a substantially rectilinear region of interface contact therebetween.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-06-30 | 2000-12-30 | 2001-07-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-06-30 | 2004-12-30 | 2005-07-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-06-30 | 2008-12-30 | 2009-07-01 | $7700.00 | Window Closed / Lapsed |