US5642441A — Separation apparatus and method for measuring foc…

Claim 1

Independent Claim 84 words

A method for evaluating a condition of an optical system comprising the steps of: (a) acquiring a plurality of images of a test pattern at different focus positions; (b) processing the plurality of images to compute a plurality of center of gravity vectors, one center of gravity vector for each one of the plurality of images; (c) computing a focal plane separation from the plurality of center of gravity vectors; and (d) relating the condition of the optical system to the focal plane separation.

Claim 2

Independent Claim 84 words

A method for evaluating a condition of an optical system comprising the steps of: (a) acquiring a plurality of images of a test pattern at different focus positions; (b) processing the plurality of images to compute a plurality of center of gravity vectors, one center of gravity vector for each one of the plurality of images; (c) computing a focal plane separation from the plurality of center of gravity vectors; and (d) relating the condition of the optical system to the focal plane separation.

Claim 3

Dependent Claim 26 words

The method of claim 1 further comprising the step of calculating an eccentricity of a point spread function from the plurality of center of gravity vectors.

Claim 4

Dependent Claim 119 words

The method of claim 2 further comprising the steps of: (a) calculating a first parameter, r -- COG -- norm, by dividing a value of one of the plurality of center of gravity vectors, r -- COG, for each image in a Z panning sequence by a mean resolution, mean -- res, for that image to yield a normalized value for eccentricity according to r.sub.-- COG.sub.-- norm=r.sub.-- COG/mean.sub.-- res; (b) calculating a second parameter, Sum r -- COG -- norm, as a summation of r -- COG -- norm over all images in the Z panning sequence according to ##EQU12## (c) relating a high value of Sum r -- COG -- norm to eccentricity in the point spread function.

Claim 5

Dependent Claim 31 words

The method of claim 3 further comprising the step of computing a PASS/FAIL threshold for Sum -- r -- COG -- norm by measuring astigmatism of lens systems with known astigmatism.

Claim 6

Dependent Claim 73 words

The method of claim 1 further including the step of finding a focus range comprising the steps of: (a) determining vertical motion limits for a Z panning sequence through a Z panning range by obtaining a plurality of focus images; (b) computing a resolution measure for each of the plurality of focus images; and (c) determining a vertical position yielding a best overall resolution for a middle position of the Z panning range.

Claim 7

Dependent Claim 57 words

The method of claim 1, wherein the optical system includes a stage, wherein the step of acquiring a plurality of images further comprises the step of acquiring the plurality of images, beginning at a lower limit of the stage elevation, passing through a plane of best focus, and extending to an upper limit of the stage elevation.

Claim 8

Dependent Claim 50 words

The method of claim 1 further comprising the steps of: (a) edge enhancing the plurality of images in a first direction; and (b) lowpass filtering the plurality of images in a second direction wherein the first direction is orthogonal to the second direction to substantially equalize the plurality of images.

Claim 9

Dependent Claim 102 words

The method of claim 1 wherein the step of computing a focal plane separation comprises the steps of: (a) computing a first derivative of one of the plurality of images to convey a location and a sharpness of boundaries in one of the plurality of images; (b) summing derivative values for each pixel belonging to a given boundary and placing a resultant summation into an array indexed by boundary angle, so as to build the array indexed by boundary angle with a plurality of summed derivatives; and (c) using the summed derivatives from the array to compute a center of gravity vector.

Claim 10

Dependent Claim 73 words

The method of claim 1 wherein the step of computing a focal plane separation from the plurality of filtered test pattern images further comprises the steps of: (a) summing the magnitude of the center of gravity vector over the set of images from the Z panning sequence; and (b) comparing the summation of the magnitude of the center of gravity vector against a threshold as a first estimate of the severity of astigmatism.

Claim 11

Dependent Claim 32 words

The method of claim 9 wherein the threshold is an empirically derived fraction of the mean residue values integrated over all boundaries in the plurality of images in the Z panning sequence.

Claim 12

Dependent Claim 248 words

The method of claim 9 wherein the step of determining a magnitude of a center of gravity vector for the plurality of images further comprises the steps of: (a) initially centering the test pattern; (b) finding an exact center of the test pattern to align test pattern objects with preassigned bins; (c) computing a plurality of X-Gradients and a plurality of Y-Gradients for each filtered test pattern image to produce a plurality of gradient image pixels; (d) sorting the plurality of gradient image pixels into bins by boundary angle; (e) rejecting each one of the plurality of gradient image pixels outside a predetermined region; (f) rejecting each one of the plurality of gradient image pixels with low gradient scores; (g) squaring each one of the plurality of gradient image pixels to produce a plurality of squared gradient values; (h) summing the squares of the plurality of X -- gradients and the plurality of Y -- gradients to produce a sum of squares; (i) checking the sum of squares against a threshold; (j) adding the squared gradient values to a bin for each gradient image pixel's boundary angle, if threshold requirement is met; (k) computing a mean residue for each boundary angle to produce a result; (l) normalizing the result by dividing by the average number of pixels per bin; (m) computing a third array by taking a quadratic sum of the two gradients; and (n) computing the magnitude of the center of gravity vector from the third array.

Claim 13

Dependent Claim 29 words

The method of claim 11 wherein the step of computing the magnitude of the center of gravity vector further comprises the operators, ##EQU13## where MAG(φ) is the residue value.

Claim 14

Dependent Claim 66 words

The method of claim 11 wherein the steps of computing a plurality of X -- Gradients and Y -- Gradients summing the squares of the gradients, and sorting into boundary angle bins comprise the operators Grad.sub.X [i,j]=ABS(A[i+1] [j]-A[i] [j]), and Grad.sub.Y [i,j]=ABS(A[i] [j+1]-A[i] [j]), ##EQU14## where pixels [i,j] lie on the boundary at angle φ, ##EQU15## where pixels [i,j] lie on the boundary at angle φ.

Claim 15

Dependent Claim 63 words

The method of claim 1 wherein the step of measuring a focal plane separation further comprises the steps of: (a) finding a first dominant angle for a first focal plane; (b) finding a second dominant angle for a second focal plane; (c) computing the focal plane separation of the first focal plane from the second focal plane to generate a focal plane separation.

Claim 16

Dependent Claim 99 words

The method of claim 14 wherein the steps of finding the first and second dominant angles comprises: (a) locating a plane of least confusion by finding an image in the Z panning sequence yielding the least value of the magnitude of the center of gravity vector; (b) computing the angle of the center of gravity vector for an image offset below the plane of least confusion to yield the first dominant angle; and (c) computing the angle of the center of gravity vector for an image offset above the plane of least confusion to yield the second dominant angle.

Claim 17

Dependent Claim 21 words

The method of claim 15 wherein the computation of the angle of the center of gravity vector comprises the operator ##EQU16##

Claim 18

Dependent Claim 71 words

The method of claim 14 wherein the step of finding the separation of focal planes comprises the steps of: (a) finding a first Z panning position with the highest resolution for the first dominant angle; (b) finding a second Z panning position with the highest resolution for the second angle; and (c) computing the absolute value of the difference between the first Z panning position and the second Z panning position.

Claim 19

Dependent Claim 27 words

The method of claim 1 wherein the test pattern image is initially centered during system calibration and an initial center location of the test pattern is stored.

Claim 20

Dependent Claim 26 words

The method of claim 18 wherein the exact center of the test pattern is found from the initial center of the test pattern by morphological operations.

Claim 21

Independent Claim 247 words

A method for qualifying an optical system for compliance with a standard for low astigmatism, comprising the steps of: (a) finding a best focus position for an image of a test pattern; (b) centering the test pattern; (c) acquiring a set of images of the test pattern; (d) determining vertical motion limits for a Z panning sequence through a Z panning range by obtaining a series of images on the test pattern and examining them for overall resolution; (e) determining a vertical position yielding a best overall resolution for the middle of the z-panning range; (f) acquiring the set of images, beginning at a lower limit of the stage elevation, passing through a plane of best focus, and extending to an upper limit of the stage elevation; (g) filtering the set of images to generate a set of filtered test pattern images; (h) computing an estimate of the sharpness of each of a set of boundaries disposed at various angles; (i) finding the angle of highest resolution for each image in a z-panning sequence; (j) computing an estimate of the severity of eccentricity of the point spread function for each image in a Z panning sequence; (k) finding the two angles of best resolution, called the dominant angles, displaced above and below the plane of least confusion; (l) measuring a focal plane separation based on the z-dependent resolution for boundaries at the two dominant angles; and (m) applying test criteria to the outcome of the astigmatism measurement.

Claim 22

Independent Claim 247 words

A method for qualifying an optical system for compliance with a standard for low astigmatism, comprising the steps of: (a) finding a best focus position for an image of a test pattern; (b) centering the test pattern; (c) acquiring a set of images of the test pattern; (d) determining vertical motion limits for a Z panning sequence through a Z panning range by obtaining a series of images on the test pattern and examining them for overall resolution; (e) determining a vertical position yielding a best overall resolution for the middle of the z-panning range; (f) acquiring the set of images, beginning at a lower limit of the stage elevation, passing through a plane of best focus, and extending to an upper limit of the stage elevation; (g) filtering the set of images to generate a set of filtered test pattern images; (h) computing an estimate of the sharpness of each of a set of boundaries disposed at various angles; (i) finding the angle of highest resolution for each image in a z-panning sequence; (j) computing an estimate of the severity of eccentricity of the point spread function for each image in a Z panning sequence; (k) finding the two angles of best resolution, called the dominant angles, displaced above and below the plane of least confusion; (l) measuring a focal plane separation based on the z-dependent resolution for boundaries at the two dominant angles; and (m) applying test criteria to the outcome of the astigmatism measurement.

Claim 23

Dependent Claim 107 words

The method of claim 20 wherein the step of applying test criteria comprises the steps of: (a) comparing the sum of the magnitude of the normalized center of gravity vector computed over the set of images in the z-panning sequence with a threshold, the threshold having been determined empirically as a small fraction of the mean residue values integrated over all boundaries in all images in the z-panning sequence; and (b) comparing the focal plane separation with a threshold, the threshold having been determined empirically from the depth of field of the optical system under test and the particular requirements of the application of the optical system.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	2000-06-23	2000-12-23	2001-06-24	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2004-06-23	2004-12-23	2005-06-24	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2008-06-23	2008-12-23	2009-06-24	$7700.00	Window Closed / Lapsed

Separation apparatus and method for measuring focal plane

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