Patent US5636960A successfully refreshed from Google Patents.
US5636960A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for detecting and aligning a substrate
Assignee: Tokyo Electron Ltd
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Filing: 1995-02-15
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Granted: 1997-06-10
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Expires: 2015-02-15
Abstract
Abstract An apparatus according to the present invention includes a cassette in which a plurality of substrates are stored, a contact guide member provided to face a side surface of the cassette, and pressing end surfaces of substrates stored in the cassette, an alignment device for moving the contact guide member to approach the cassette, and pressing the contact guide member against the end surfaces of the substrates in the cassette, thereby aligning the substrates all at one pressing time, and detectors, provided for the alignment device at positions corresponding to spaces of substrates held in the cassette, in the same or multiple number of the spaces for holding substrates, for detecting whether or not a substrate is present in each of the spaces for holding the substrates of the cassette.
Inventors
- 👤 Tutomu Hiroki
- 👤 Shoichi Abe
- 👤 Kiyotaka Akiyama
- 👤 Tsutomu Satoyoshi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 21:01
CPC Classifications
B; B65; B65H; B65H1/00; B65H9/00; B65H9/10; B65H9/101; B65H2511/00; B65H2511/50; B65H2511/51; B65H2553/00; B65H2553/40; B65H2553/41; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/136
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
191 words
An apparatus for detecting and aligning a plurality of substantially transparent and rectangular glass substrates comprising four transverse end surfaces and used for liquid crystal display, the apparatus comprising: a cassette in which said plurality of substrates are stored; a plurality of contact guide members provided to face a side surface of the cassette, and for pressing end surfaces of substrates stored in the cassette; alignment means for moving the contact guide members to approach the cassette, and for pressing the contact guide members against at least two of the end surfaces of the substrates in the cassette such that each of the contact guide members is brought into contact with at least two points, thereby aligning the substrates all at one pressing time; and detectors, provided on the alignment means at positions corresponding to spaces of the substrates held in the cassette, in a same or multiple number of the spaces for holding substrates, for detecting whether or not a substrate is present in each of the spaces for holding the substrates of the cassette, said detectors being optical sensors having a light emitting portion and a light receiving portion.
Claim 2
Independent Claim
191 words
An apparatus for detecting and aligning a plurality of substantially transparent and rectangular glass substrates comprising four transverse end surfaces and used for liquid crystal display, the apparatus comprising: a cassette in which said plurality of substrates are stored; a plurality of contact guide members provided to face a side surface of the cassette, and for pressing end surfaces of substrates stored in the cassette; alignment means for moving the contact guide members to approach the cassette, and for pressing the contact guide members against at least two of the end surfaces of the substrates in the cassette such that each of the contact guide members is brought into contact with at least two points, thereby aligning the substrates all at one pressing time; and detectors, provided on the alignment means at positions corresponding to spaces of the substrates held in the cassette, in a same or multiple number of the spaces for holding substrates, for detecting whether or not a substrate is present in each of the spaces for holding the substrates of the cassette, said detectors being optical sensors having a light emitting portion and a light receiving portion.
Claim 3
Dependent Claim
27 words
An apparatus according to claim 1, wherein said plurality of contact guide members are arranged to be moved towards or away from the cassette from different directions.
Claim 4
Dependent Claim
20 words
An apparatus according to claim 1, wherein said plurality of contact guide members are made of an insulating soft material.
Claim 5
Dependent Claim
25 words
An apparatus according to claim 1, wherein said plurality of contact guide members are made of an insulating soft material surrounding a hard base material.
Claim 6
Dependent Claim
61 words
An apparatus according to claim 1, wherein said cassette includes a support and a reinforcement member, and each of said contact guide members has a U-shaped lateral cross section so that each of said contact guide members can be set in contact with a substrate, with one of the support and the reinforcement members being located inside the contact guide member.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-06-09 | 2000-12-09 | 2001-06-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-06-09 | 2004-12-09 | 2005-06-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-06-09 | 2008-12-09 | 2009-06-10 | $7700.00 | Window Closed / Lapsed |