US5632438A
Expired / Lapsed
US
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Direct chip attachment process and apparatus for aluminum wirebonding on copper circuitization
Assignee: International Business Machines Corp
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Filing: 1995-10-12
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Granted: 1997-05-27
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Expires: 2015-10-12
Abstract
Abstract A direct chip attachment process and apparatus for aluminum wirebonding on copper circuitization are provided. After at least one integrated circuit chip is attached to a carrier, an aqueous cleaning solution containing citric and oxalic acid based additives is applied to the carrier and attached integrated circuit chip. Then a deionized water rinse is applied to the carrier and attached integrated circuit chip, followed drying for a set time period. Next wirebonding on copper circuitization carried by the carrier is performed.
Inventors
- 👤 Mark K. Hoffmeyer
- 👤 Gregg A. Knotts
- 👤 Connie J. Mathison
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 19:32
CPC Classifications
H; H10; H10W; H10W70/00; H10W70/01; H10W70/05; H10W70/097; H10W72/00; H10W72/30; H10W72/01; H10W72/015; H10W72/01571; H10W72/071; H10W72/073; H10W72/07331; H10W72/07336; H10W72/075; H10W72/07511; H10W72/351; H10W72/353; H10W72/354; H10W72/381; H10W72/50; H10W72/551; H10W72/552; H10W72/5524; H10W72/851; H10W72/874; H10W72/884; H10W74/00; H10W90/00; H10W90/701; H10W90/751; H10W90/754; H10W90/756
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
65 words
A direct chip attachment process for aluminum wirebonding on copper circuitization comprising the steps of: attaching at least one integrated circuit chip to a carrier; applying to the carrier and attached integrated circuit chip an aqueous cleaning solution containing citric and oxalic acid based additives; applying to the carrier and attached integrated circuit chip a rinse; and wirebonding on copper circuitization carried by the carrier.
Claim 2
Dependent Claim
65 words
A direct chip attachment process for aluminum wirebonding on copper circuitization comprising the steps of: attaching at least one integrated circuit chip to a carrier; applying to the carrier and attached integrated circuit chip an aqueous cleaning solution containing citric and oxalic acid based additives; applying to the carrier and attached integrated circuit chip a rinse; and wirebonding on copper circuitization carried by the carrier.
Claim 3
Dependent Claim
64 words
A direct chip attachment process as recited in claim 1 wherein the step of applying to the carrier and attached integrated circuit chip an aqueous cleaning solution containing citric and oxalic acid based additives includes the step of providing an aqueous spray cleaning solution and exposing the carrier and attached integrated circuit chip to the aqueous spray cleaning solution for a predefined time period.
Claim 4
Dependent Claim
66 words
A direct chip attachment process as recited in claim 1 wherein the step of applying to the carrier and attached integrated circuit chip an aqueous cleaning solution containing citric and oxalic acid based additives includes the step of providing an aqueous immersion bath cleaning solution and immersing the carrier and attached integrated circuit chip in the aqueous immersion bath cleaning solution for a predefined time period.
Claim 5
Dependent Claim
26 words
A direct chip attachment process as recited in claim 2 wherein the predefined time period is selectively provided as a non-zero value less than five minutes.
Claim 6
Dependent Claim
26 words
A direct chip attachment process as recited in claim 3 wherein the predefined time period is selectively provided as a non-zero value less than five minutes.
Claim 7
Dependent Claim
76 words
A direct chip attachment process as recited in claim 1 wherein the step of applying to the carrier and attached integrated circuit chip an aqueous cleaning solution containing citric and oxalic acid based additives includes the step of providing a mixture based upon 1000 ml distilled, deionized water containing 2 g citric acid monohydrate HOC(CDOH) (CH 2 COOH) 2 -H 2 O and 4 g oxalic acid H 2 C 2 O 4 ·2H 2 O.
Claim 8
Dependent Claim
34 words
A direct chip attachment process as recited in claim 1 wherein the step of applying to the carrier and attached integrated circuit chip a rinse includes the step of applying a deionized water rinse.
Claim 9
Dependent Claim
32 words
A direct chip attachment process as recited in claim 1 further includes the step of drying the carrier and attached integrated circuit chip for a predetermined time period before the wirebonding step.
Claim 10
Dependent Claim
22 words
A direct chip attachment process as recited in claim 8 wherein the predetermined time period for drying is less than 24 hours.
Claim 11
Dependent Claim
84 words
Apparatus for cleaning copper circuitization after one or more integrated circuit chips have been attached to a carrier supporting copper circuits comprising: means for applying to the carrier and attached integrated circuit chip an aqueous cleaning solution containing citric and oxalic acid based additives; means for applying to the carrier and attached integrated circuit chip a rinse; means for drying the carrier and attached integrated circuit chip for a predefined time period; and means for wirebonding on the copper circuitization carried by the carrier.
Claim 12
Dependent Claim
84 words
Apparatus for cleaning copper circuitization after one or more integrated circuit chips have been attached to a carrier supporting copper circuits comprising: means for applying to the carrier and attached integrated circuit chip an aqueous cleaning solution containing citric and oxalic acid based additives; means for applying to the carrier and attached integrated circuit chip a rinse; means for drying the carrier and attached integrated circuit chip for a predefined time period; and means for wirebonding on the copper circuitization carried by the carrier.
Claim 13
Dependent Claim
38 words
Apparatus for cleaning copper circuitization as recited in claim 10 wherein said means for applying to the carrier and attached integrated circuit chip an aqueous cleaning solution containing citric and oxalic acid based additives include an immersion bath.
Claim 14
Dependent Claim
38 words
Apparatus for cleaning copper circuitization as recited in claim 10 wherein said means for applying to the carrier and attached integrated circuit chip an aqueous cleaning solution containing citric and oxalic acid based additives include a spray station.
Claim 15
Dependent Claim
48 words
Apparatus for cleaning copper circuitization as recited in claim 10 wherein said means for applying to the carrier and attached integrated circuit chip an aqueous cleaning solution containing citric and oxalic acid based additives include means for identifying a set time period for applying the aqueous cleaning solution.
Claim 16
Dependent Claim
52 words
Apparatus for cleaning copper circuitization as recited in claim 10 wherein said means for applying to the carrier and attached integrated circuit chip an aqueous cleaning solution containing citric and oxalic acid based additives include means for identifying a set time period selectively provided as a non-zero value less than five minutes.
Claim 17
Dependent Claim
43 words
Apparatus for cleaning copper circuitization as recited in claim 10 wherein said means for drying the carrier and attached integrated circuit chip for a predefined time period includes means for identifying a predefined time period of less than or equal to 24 hours.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-05-26 | 2000-11-25 | 2001-05-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-05-26 | 2004-11-25 | 2005-05-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-05-26 | 2008-11-25 | 2009-05-27 | $7700.00 | Window Closed / Lapsed |