US5631733A — Large area defect monitor tool for manufacture of…

Claim 1

Independent Claim 147 words

A method for observing defects on a surface by means of optically scattered energy, the method comprising: directing generally collimated illumination from a source at an oblique angle to a surface under inspection (SUS) to produce scattered nonspecular energy substantially normal to said SUS; and observing said scattered nonspecular energy in one of a plurality of fractional windows of a viewed image of the SUS via a plurality of focussing elements at a plurality of remote focal planes having a symmetrical detection arrangement, said focal planes being mounted adjacent one another arranged in a symmetrical array arrangement adjacent one another, said symmetrical detection arrangement corresponding to said symmetrical array arrangement; wherein said observing and directing steps occur simultaneously and are performed substantially without any relative motion between said SUS and said symmetrical detection arrangement to substantially reduce a possibility of any scanning noise and light source fluctuations.

Claim 2

Independent Claim 147 words

A method for observing defects on a surface by means of optically scattered energy, the method comprising: directing generally collimated illumination from a source at an oblique angle to a surface under inspection (SUS) to produce scattered nonspecular energy substantially normal to said SUS; and observing said scattered nonspecular energy in one of a plurality of fractional windows of a viewed image of the SUS via a plurality of focussing elements at a plurality of remote focal planes having a symmetrical detection arrangement, said focal planes being mounted adjacent one another arranged in a symmetrical array arrangement adjacent one another, said symmetrical detection arrangement corresponding to said symmetrical array arrangement; wherein said observing and directing steps occur simultaneously and are performed substantially without any relative motion between said SUS and said symmetrical detection arrangement to substantially reduce a possibility of any scanning noise and light source fluctuations.

Claim 3

Dependent Claim 20 words

The method according to claim 1 wherein said symmetrical detection arrangement and said symmetrical array arrangement are of Cartesian symmetry.

Claim 4

Dependent Claim 20 words

The method according to claim 1 wherein said symmetrical detection arrangement and said symmetrical array arrangement are of Polar symmetry.

Claim 5

Dependent Claim 19 words

The method according to claim 1 wherein said focal plane is in an imaging array of an electronic camera.

Claim 6

Dependent Claim 27 words

The method according to claim 1 wherein said focal plane is an imaging surface, said imaging surface being operative to convert said nonspecular energy into detectable energy.

Claim 7

Dependent Claim 24 words

The method according to claim 1 wherein each of said focusing elements is a high-quality lens having an f-number of about f/1.5 and less.

Claim 8

Dependent Claim 26 words

The method according to claim 1 wherein each of said focusing elements comprises a high-quality lens operative at an effective object f-number of less than f/20.

Claim 9

Dependent Claim 32 words

The method according to claim 7 wherein each of said focussing elements is operative at an effective object f-number of less than f/9, said refractor having a of than f/1.5 and f/0.9.

Claim 10

Dependent Claim 17 words

The method according to claim 1 wherein said source emits in narrow wavelength range of noncoherent light.

Claim 11

Dependent Claim 15 words

The method according to claim 1 wherein said collimated illumination is spectrally filtered noncoherent light.

Claim 12

Dependent Claim 13 words

The method according to claim 1 wherein said collimated illumination is coherent light.

Claim 13

Dependent Claim 30 words

The method according to claim 1 to 11 wherein said observing step is performed without relative motion between-said symmetrical detection arrangement and said symmetrical array arrangement to permit over sampling.

Claim 14

Dependent Claim 29 words

The method according to claim 1 to 11 wherein said observing step is performed without relative motion between said SUS and said symmetrical array arrangement to permit over sampling.

Claim 15

Dependent Claim 14 words

The method of claim 1 is provided in a cluster tool semiconductor processing system.

Claim 16

Dependent Claim 18 words

The method of claim 1 wherein said observing step is provided on an x-y stage to provide over-sampling.

Claim 17

Independent Claim 146 words

A system for observing defects on a surface by means of optically scattered energy, the system comprising: means for directing generally collimated illumination from a source at an oblique angle to a surface under inspection (SUS) to produce scattered nonspecular energy substantially normal to said SUS; and means for observing said scattered nonspecular energy in one of a plurality fractional windows of a viewed image of the SUS via a plurality of focussing elements at a plurality of remote focal planes having a symmetrical detection arrangement, said focal planes being mounted adjacent one another arranged in a symmetrical array arrangement adjacent one another, said symmetrical detection arrangement corresponding to said symmetrical array arrangement, said SUS and said symmetrical array arrangement having substantially no relative motion between said SUS and said symmetrically array arrangement to substantially reduce a possibility of any scanning noise and light source fluctuations.

Claim 18

Independent Claim 146 words

A system for observing defects on a surface by means of optically scattered energy, the system comprising: means for directing generally collimated illumination from a source at an oblique angle to a surface under inspection (SUS) to produce scattered nonspecular energy substantially normal to said SUS; and means for observing said scattered nonspecular energy in one of a plurality fractional windows of a viewed image of the SUS via a plurality of focussing elements at a plurality of remote focal planes having a symmetrical detection arrangement, said focal planes being mounted adjacent one another arranged in a symmetrical array arrangement adjacent one another, said symmetrical detection arrangement corresponding to said symmetrical array arrangement, said SUS and said symmetrical array arrangement having substantially no relative motion between said SUS and said symmetrically array arrangement to substantially reduce a possibility of any scanning noise and light source fluctuations.

Claim 19

Dependent Claim 20 words

The system according to claim 16 wherein said symmetrical detection arrangement and said symmetrical array arrangement are of Cartesian symmetry.

Claim 20

Dependent Claim 20 words

The system according to claim 16 wherein said symmetrical detection arrangement and said symmetrical array arrangement are of Polar symmetry.

Claim 21

Dependent Claim 19 words

The system according to claim 16 wherein said focal plane is in an imaging array of an electronic camera.

Claim 22

Dependent Claim 27 words

The system according to claim 16 wherein said focal plane is an imaging surface, said imaging surface being operative to convert said nonspecular energy into detectable energy.

Claim 23

Dependent Claim 24 words

The system according to claim 16 wherein each of said focusing elements is a high-quality lens having an f-number of about f/1.5 and less.

Claim 24

Dependent Claim 26 words

The system according to claim 16 wherein each of said focusing elements comprises a high-quality lens operative at an effective object f-number of less than f/20.

Claim 25

Dependent Claim 37 words

The system according to claim 22 wherein each of said focussing elements is operative at an effective object f-number of less than f/9, said refractor having a minimum f-number of smaller than f/1.5 and greater than f/0.9.

Claim 26

Dependent Claim 17 words

The system according to claim 16 wherein said source emits in narrow wavelength range of noncoherent light.

Claim 27

Dependent Claim 15 words

The system according to claim 16 wherein said collimated illumination is spectrally filtered noncoherent light.

Claim 28

Dependent Claim 13 words

The system according to claim 16 wherein said collimated illumination is coherent light.

Claim 29

Dependent Claim 17 words

The system according to claim 16 is provided in communication with a cluster tool semiconductor processing system.

Claim 30

Dependent Claim 19 words

The system of claim 16 wherein said means for observing is provided on an x-y stage to provide over-sampling.

Claim 31

Independent Claim 158 words

A method for manufacturing a semiconductor integrated circuit, said method comprising steps of observing defects on a wafer surface by means of optically scattered energy, the method comprising: directing generally collimated illumination from a source at an oblique angle to a surface under inspection (SUS) to produce scattered nonspecular energy substantially normal to said SUS; and observing said scattered nonspecular energy in one of a plurality of fractional windows of a viewed image of the SUS via a plurality of focussing elements at a plurality of remote focal planes having a symmetrical detection arrangement, said focal planes being mounted adjacent one another arranged in a symmetrical array arrangement adjacent one another, said symmetrical detection arrangement corresponding to said symmetrical array arrangement; wherein said observing and directing steps occur simultaneously and are performed substantially without any relative motion between said SUS and said symmetrical detection arrangement to substantially reduce a possibility of any scanning noise and light source fluctuations.

Claim 32

Independent Claim 158 words

A method for manufacturing a semiconductor integrated circuit, said method comprising steps of observing defects on a wafer surface by means of optically scattered energy, the method comprising: directing generally collimated illumination from a source at an oblique angle to a surface under inspection (SUS) to produce scattered nonspecular energy substantially normal to said SUS; and observing said scattered nonspecular energy in one of a plurality of fractional windows of a viewed image of the SUS via a plurality of focussing elements at a plurality of remote focal planes having a symmetrical detection arrangement, said focal planes being mounted adjacent one another arranged in a symmetrical array arrangement adjacent one another, said symmetrical detection arrangement corresponding to said symmetrical array arrangement; wherein said observing and directing steps occur simultaneously and are performed substantially without any relative motion between said SUS and said symmetrical detection arrangement to substantially reduce a possibility of any scanning noise and light source fluctuations.

Claim 33

Dependent Claim 15 words

The method of claim 29 wherein said observing step is provided on an x-y stage.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	2000-05-19	2000-11-18	2001-05-20	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2004-05-19	2004-11-18	2005-05-20	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2008-05-19	2008-11-18	2009-05-20	$7700.00	Window Closed / Lapsed

Large area defect monitor tool for manufacture of clean surfaces

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