US5168386A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Flat field telecentric scanner
Assignee: Tencor Instruments Inc
•
Filing: 1990-10-22
•
Granted: 1992-12-01
•
Expires: 2010-10-22
Abstract
Abstract Flat-field telecentric scan systems, each having a planar scanning reflector situated in a light path and mounted for movement about a scan axis, a concave spherical mirror fixed in a position in the light path an effective focal length away from the scanning reflector to provide a telecentric scan of the light beam, and a lens or mirror with spherical surfaces placed in the light path for providing a flat-field scan. The concave mirror and the additional lens or mirror element may be placed off of the symmetry axis to avoid light obstruction problems provided the tilt of the scanning reflector and the positions and orientations of the concave mirror and additional optical element are selected for a straight-line scan. The additional lens can be either before or after the concave mirror in the light path. It can also be positioned in the path of both light incident on and reflected from the concave mirrors. The lens and concave mirror can be integrally formed by providing a reflective coating on one lens surface. In several embodiments, astigmatism and coma can also be eliminated or minimized.
Inventors
- 👤 Lee K. Galbraith
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 05:45
CPC Classifications
G; G02; G02B; G02B13/00; G02B13/22; G02B26/00; G02B26/08; G02B26/10; G02B26/105
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
155 words
An optical system for scanning a light beam comprising: a planar reflector disposed in a path of a focussed light beam for deflecting said light beam incident thereon, said planar reflector being movable about a scan axis; a concave mirror having a spherical reflective surface fixed in a position in the path of said deflected light beam, said spherical reflective surface characterized by a radius of curvature, said concave mirror being spaced from said planar reflector by a distance which is approximately equal to an effective focal length of said concave mirror; and a lens positioned in both the light path between said concave mirror and said reflector and in the path of light reflected by said concave mirror, said lens having at least one spherical optical surface, whereby said lens corrects the path of said deflected light beam such that said light beam scans a target plane with a substantially flat field of focus.
Claim 2
Dependent Claim
155 words
An optical system for scanning a light beam comprising: a planar reflector disposed in a path of a focussed light beam for deflecting said light beam incident thereon, said planar reflector being movable about a scan axis; a concave mirror having a spherical reflective surface fixed in a position in the path of said deflected light beam, said spherical reflective surface characterized by a radius of curvature, said concave mirror being spaced from said planar reflector by a distance which is approximately equal to an effective focal length of said concave mirror; and a lens positioned in both the light path between said concave mirror and said reflector and in the path of light reflected by said concave mirror, said lens having at least one spherical optical surface, whereby said lens corrects the path of said deflected light beam such that said light beam scans a target plane with a substantially flat field of focus.
Claim 3
Dependent Claim
30 words
The system of claim 1 wherein said lens is integrally formed with said concave mirror, said lens having a reflective coating on a rear surface to form said concave mirror.
Claim 4
Dependent Claim
15 words
The system of claim 1 wherein said lens is spaced apart from said concave mirror.
Claim 5
Dependent Claim
215 words
An optical system for scanning a light beam comprising: a planar reflector disposed in a path of a focussed light beam for deflecting said light beam incident thereon, said planar reflector being movable about a scan axis; a concave mirror having a spherical reflective surface fixed in a position in the path of said deflected light beam, said spherical reflective surface characterized by a radius of curvature, said concave mirror being spaced from said planar reflector by a distance which is approximately equal to a focal length of said concave mirror, wherein a symmetry axis is defined through a point of incidence of the chief ray of said light beam on said planar reflector and through a center of curvature of said spherical reflective surface of said concave mirror, said concave mirror being positioned off of said symmetry axis, said planar reflector being tilted with respect to said incident light beam and tilted away from perpendicular to said symmetry axis so as to deflect said light beam toward said off-axis concave mirror; and an optical element in the light path having at least one spherical optical surface, whereby said optical element corrects the path of said deflected light beam such that said light beam scans a target plane with a substantially flat field of focus.
Claim 6
Dependent Claim
215 words
An optical system for scanning a light beam comprising: a planar reflector disposed in a path of a focussed light beam for deflecting said light beam incident thereon, said planar reflector being movable about a scan axis; a concave mirror having a spherical reflective surface fixed in a position in the path of said deflected light beam, said spherical reflective surface characterized by a radius of curvature, said concave mirror being spaced from said planar reflector by a distance which is approximately equal to a focal length of said concave mirror, wherein a symmetry axis is defined through a point of incidence of the chief ray of said light beam on said planar reflector and through a center of curvature of said spherical reflective surface of said concave mirror, said concave mirror being positioned off of said symmetry axis, said planar reflector being tilted with respect to said incident light beam and tilted away from perpendicular to said symmetry axis so as to deflect said light beam toward said off-axis concave mirror; and an optical element in the light path having at least one spherical optical surface, whereby said optical element corrects the path of said deflected light beam such that said light beam scans a target plane with a substantially flat field of focus.
Claim 7
Dependent Claim
37 words
The system of claim 4 wherein the respective positions and orientations of said planar reflector, said concave mirror and said optical element are selected so as to provide a substantially straight line scan of said light beam.
Claim 8
Dependent Claim
138 words
An optical scanning system comprising: a planar reflector disposed in a path of a light beam and being movable about a scan axis; a single concave mirror fixed in said light path and having a spherical reflective surface; and a single converging lens disposed in said light path having a pair of spherical optical surfaces, said spherical surfaces of said concave mirror and said lens having centers of curvature which are collinear with a symmetry axis through a point of incidence of the chief ray of said light beam on said planar reflector, the respective radii of curvature of said spherical surfaces and the positions of said concave mirror and said lens along said light path being selected so as to provide a straight line, flat image field, telecentric scan of said light beam on a target surface.
Claim 9
Dependent Claim
138 words
An optical scanning system comprising: a planar reflector disposed in a path of a light beam and being movable about a scan axis; a single concave mirror fixed in said light path and having a spherical reflective surface; and a single converging lens disposed in said light path having a pair of spherical optical surfaces, said spherical surfaces of said concave mirror and said lens having centers of curvature which are collinear with a symmetry axis through a point of incidence of the chief ray of said light beam on said planar reflector, the respective radii of curvature of said spherical surfaces and the positions of said concave mirror and said lens along said light path being selected so as to provide a straight line, flat image field, telecentric scan of said light beam on a target surface.
Claim 10
Dependent Claim
18 words
The system of claim 6 wherein said lens is positioned between said planar reflector and said concave mirror.
Claim 11
Dependent Claim
16 words
The system of claim 6 wherein said lens is positioned in series after said concave mirror.
Claim 12
Dependent Claim
36 words
The system of claim 6 wherein said lens is positioned to intercept said light path both before said light beam reaches said concave mirror and after said light beam has been reflected by said concave mirror.
Claim 13
Dependent Claim
30 words
The system of claim 9 wherein said lens and concave mirror are integrally formed, said lens having a reflective mirror coating on a rear surface to form said concave mirror.
Claim 14
Dependent Claim
15 words
The system of claim 9 wherein said lens is spaced apart from said concave mirror.
Claim 15
Dependent Claim
43 words
The system of claim 6 wherein said lens and said concave mirror are positioned off of said symmetry axis, said planar mirror being tilted with respect to said incident light beam so as to deflect said light beam toward said off-axis concave mirror.
Claim 16
Dependent Claim
39 words
The system of claim 6 wherein said position of said lens with respect to said concave mirror and said radii of curvature of said lens for said position are selected to minimize at least one of coma and astigmatism.
References Cited (Backward Citations)
US3360654A
Cited
US3809891A
Cited
US3927940A
Cited
US4017732A
Cited
US4196961A
Cited
US4226500A
Cited
US4690485A
Cited
US4756585A
Cited
US4880299A
Cited
US4941719A
Cited
US4848864A
Cited
US4863250A
Cited
US4852957A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-12-01 | 1996-06-01 | 1996-12-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-12-01 | 2000-06-01 | 2000-12-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-12-01 | 2004-06-01 | 2004-12-01 | $7700.00 | Window Closed / Lapsed |