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US5630880A
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Method and apparatus for a large volume plasma processor that can utilize any feedstock material
Assignee: Individual
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Filing: 1996-03-07
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Granted: 1997-05-20
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Expires: 2016-03-07
Abstract
Abstract This invention utilizes a large volume plasma processor to completely ionize any feedstock material and deposit the ionized and unionized species of elements of the feedstock material on deposition stages. Apparatus is provided for generating a toroidal, high temperature, low density plasma in the large volume plasma processor. Key aspects of the method provide for (a) controlling temperature by rapid heating and (b) maintaining toroidal plasma current by rapid application of increased driving voltages. The invention provides a large surface area source of any desired elements to increase safety and thruput in microchip fabrication. Other applications include nanotechnology fabrication and improvement of surface properties of materials.
Inventors
- 👤 Bernard J. Eastlund
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 22:00
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/32623; C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/32; H01J37/3266
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
243 words
A method of coating deposition stages with the ionized species of elements of any feedstock material comprising: a. filling a containment vessel with a low density gas chosen from a group of low atomic number gases that include hydrogen, helium and neon; b. ionizing the low density gas generating a low temperature process plasma; c. heating said low temperature process plasma to a temperature of at least 5000,000° C. generating a high temperature process plasma; d. confining most of the high temperature process plasma spaced from walls of the containment vessel by a magnetic field; e. injecting pellets of a feedstock material into the high temperature, process plasma forming a combination plasma comprising the high temperature process plasma and a plasma of the feedstock material; f. rapidly increasing power supplied to said combination plasma to balance radiation losses transforming all of the feedstock material into a product plasma comprising principally lower temperature, higher, density ionized and unionized species of the feedstock material; g. confining most of said product plasma spaced from the walls of said containment vessel by magnetic fields generated by applying higher voltage to maintain electric currents in a magnetic coil; h. moving a portion of said product plasma across a space between said product plasma and the walls of the containment vessel to deposit on deposition stages lining the walls of the containment vessel by adjusting magnitude of said magnetic fields; i. removing said deposition stages from said containment vessel.
Claim 2
Independent Claim
243 words
A method of coating deposition stages with the ionized species of elements of any feedstock material comprising: a. filling a containment vessel with a low density gas chosen from a group of low atomic number gases that include hydrogen, helium and neon; b. ionizing the low density gas generating a low temperature process plasma; c. heating said low temperature process plasma to a temperature of at least 5000,000° C. generating a high temperature process plasma; d. confining most of the high temperature process plasma spaced from walls of the containment vessel by a magnetic field; e. injecting pellets of a feedstock material into the high temperature, process plasma forming a combination plasma comprising the high temperature process plasma and a plasma of the feedstock material; f. rapidly increasing power supplied to said combination plasma to balance radiation losses transforming all of the feedstock material into a product plasma comprising principally lower temperature, higher, density ionized and unionized species of the feedstock material; g. confining most of said product plasma spaced from the walls of said containment vessel by magnetic fields generated by applying higher voltage to maintain electric currents in a magnetic coil; h. moving a portion of said product plasma across a space between said product plasma and the walls of the containment vessel to deposit on deposition stages lining the walls of the containment vessel by adjusting magnitude of said magnetic fields; i. removing said deposition stages from said containment vessel.
Claim 3
Dependent Claim
45 words
The method of claim 1 where said high temperature process plasma has an electron number density of at least 5×10 12 /cm 3 , a thermal electron temperature of at least 500,000° C. and a minimum energy flux of at least 20,000 watts/cm 2 .
Claim 4
Dependent Claim
29 words
The method of claim 2 where said minimum energy flux is at least 20 million watts/cm 2 to ensure the feedstock material is completely transformed into the product plasma.
Claim 5
Dependent Claim
29 words
The method of claim 1 where said high temperature process plasma has a total energy that exceeds an energy required to transform said feedstock material into said product plasma.
Claim 6
Dependent Claim
39 words
The method of claim 1 where said high temperature process plasma has a thermal electron temperature component with a temperature of at least 500,000° C. and a non-thermal electron temperature component with a temperature of at least 5,000,000° C.
Claim 7
Dependent Claim
24 words
The method of claim 5 where said non-thermal electron temperature component has a non-thermal electron energy sufficient to penetrate all of said feedstock material.
Claim 8
Dependent Claim
22 words
The method of claim 6 where said non-thermal electron temperature component has an energy flux sufficient to vaporize said feedstock material completely.
Claim 9
Dependent Claim
40 words
The method of claim 6 where said thermal electron temperature component has a thermal electron number density and said non-thermal electron temperature component has a non-thermal electron number density of at least 0.001 percent of the thermal electron number density.
Claim 10
Dependent Claim
25 words
The method of claim 1 where said product plasma is diverted into at least a second containment vessel, which is also lined with deposition stages.
Claim 11
Dependent Claim
8 words
The method of claim 1 is performed repetitively.
Claim 12
Dependent Claim
34 words
The method of claim 1 where said feedstock material is at least one metal and is formed into pellets that have spherical, ellipsoidal or arbitrary shapes that are at least 0.1 milliliters in volume.
Claim 13
Dependent Claim
34 words
The method of claim 1 where said feedstock material is at least one non-metal and is formed into pellets that have spherical, ellipsoidal or arbitrary shapes that are at least 0.1 milliliters in volume.
Claim 14
Dependent Claim
39 words
The method of claim 1 where said feed stock material is a liquid or a gas and is frozen and is formed into pellets that have spherical, ellipsoidal or arbitrary shapes that are at least 0.1 milliliters in volume.
Claim 15
Independent Claim
302 words
An apparatus which is a large volume plasma processor for coating deposition stages with ionized and unionized species of elements of any feedstock material comprising: a. a toroidal containment vessel with walls; b. a gas inlet to supply a generating gas into said toroidal containment vessel; c. means to ionize the generating gas; d. means for generating a toroidal magnetic field substantially parallel to the walls of said toroidal containment vessel and substantially filling said toroidal containment vessel; e. means for generating a toroidal current which is substantially parallel to said toroidal magnetic field and generates a poloidal magnetic field perpendicular to said toroidal magnetic field; f. means for igniting the generating gas to produce a low temperature process plasma; g. means for heating the low temperature process plasma to produce a high temperature process plasma which has a low density and a temperature of at least 500,000° C.; h. means for controlling a space between said high temperature process plasma and the walls of the containment vessel; i. means for injecting pellets of a feedstock material at high velocity into said high temperature process plasma; j. means for rapidly increasing a heating power of the means for heating to balance radiation losses during a transformation of said high temperature process plasma into a product plasma comprising principally lower temperature, higher density ionized and unionized species of the feedstock material; k. means for rapidly stabilizing said product plasma to maintain a space between the product plasma and the walls of the containment vessel; l. means for moving said product plasma across a space between the product plasma and the walls of the containment vessel to deposit the ionized and unionized species of the feedstock material on deposition stages lining the walls of the containment vessel; m. means for removing the deposition stages.
Claim 16
Independent Claim
302 words
An apparatus which is a large volume plasma processor for coating deposition stages with ionized and unionized species of elements of any feedstock material comprising: a. a toroidal containment vessel with walls; b. a gas inlet to supply a generating gas into said toroidal containment vessel; c. means to ionize the generating gas; d. means for generating a toroidal magnetic field substantially parallel to the walls of said toroidal containment vessel and substantially filling said toroidal containment vessel; e. means for generating a toroidal current which is substantially parallel to said toroidal magnetic field and generates a poloidal magnetic field perpendicular to said toroidal magnetic field; f. means for igniting the generating gas to produce a low temperature process plasma; g. means for heating the low temperature process plasma to produce a high temperature process plasma which has a low density and a temperature of at least 500,000° C.; h. means for controlling a space between said high temperature process plasma and the walls of the containment vessel; i. means for injecting pellets of a feedstock material at high velocity into said high temperature process plasma; j. means for rapidly increasing a heating power of the means for heating to balance radiation losses during a transformation of said high temperature process plasma into a product plasma comprising principally lower temperature, higher density ionized and unionized species of the feedstock material; k. means for rapidly stabilizing said product plasma to maintain a space between the product plasma and the walls of the containment vessel; l. means for moving said product plasma across a space between the product plasma and the walls of the containment vessel to deposit the ionized and unionized species of the feedstock material on deposition stages lining the walls of the containment vessel; m. means for removing the deposition stages.
Claim 17
Dependent Claim
33 words
The apparatus of claim 14 further comprising a means for diverting said product plasma out of said containment vessel into at least a second containment vessel which is also lined with deposition stages.
Claim 18
Dependent Claim
55 words
The apparatus of claim 15 said second containment vessel is an elongated evacuated container and is surrounded by magnetic field generating coils which produce magnetic fields that are parallel to a long axis of said elongated evacuated container and substantially guide and confine the product plasma substantially spaced from walls of said elongated evacuated container.
Claim 19
Dependent Claim
30 words
The apparatus of claim 15 further comprising a enhanced diffusion means for moving said product plasma across the space between the product plasma and walls of said elongated evacuated container.
Claim 20
Dependent Claim
12 words
The apparatus of claim 14 further comprising a means of repetitively cycling.
Claim 21
Dependent Claim
31 words
The apparatus of claim 14 where the high temperature process plasma has a temperature of at least 11,000° C. and a number density of at least 5×10 13 /cm 3 .
Claim 22
Dependent Claim
33 words
The method of claim 1 where the containment vessel has a major radius which is between 40 cm and 250 cm and a minor radius which is between 20 cm to 200 cm.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-05-19 | 2000-11-18 | 2001-05-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-05-19 | 2004-11-18 | 2005-05-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-05-19 | 2008-11-18 | 2009-05-20 | $7700.00 | Window Closed / Lapsed |