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US5629246A
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Method for forming fluorine-doped glass having low concentrations of free fluorine
Assignee: Micron Technology Inc
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Filing: 1995-09-27
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Granted: 1997-05-13
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Expires: 2015-09-27
Abstract
Abstract This invention is a method for forming fluorine-doped silicate glass having low concentrations of free fluorine atoms. A first embodiment of the invention provides simultaneous deposition of the fluorine-doped glass and scavenging of free fluorine atoms from the surface of the depositing material. A silicon-containing compound, an oxidizer, a fluorine containing compound and a hydrogen-containing gas are introduced into a plasma chemical vapor deposition chamber. A fluorine-doped glass layer having low concentrations of free fluorine atoms deposits. A second embodiment of the invention provides for scavenging of free fluorine atoms from an already-deposited fluorine-doped glass layer by annealing the layer in a forming gas containing hydrogen. The hydrogen gas diffuses into the deposited film and reacts with free fluorine atoms. The hydrogen fluoride so formed migrates through the matrix to the surface of the deposited film, where it is released into the ambient. A third embodiment of the invention provides a method for decreasing the amount of free fluorine atoms in an already-deposited fluorine-doped glass layer by depositing a capping layer over the glass layer and annealing the resulting stack. Many of the free fluorine atoms in the layer migrate and react with dangling silicon bonds within the layer. A subsequent anneal with the capping layer removed and in the presence of a forming gas containing hydrogen, as heretofore described, further lowers the concentration of free fluorine atoms.
Inventors
- 👤 Ravi Iyer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 21:32
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/692; H10P14/6921; H10P14/6922; H10P14/6924; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; H10P14/6336; H10P14/65; H10P14/6516; H10P14/6529; H10P14/6548; H10P95/00; Y; Y10; Y10S; Y10S438/00; Y10S438/91
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
88 words
A method for reducing concentrations of free fluorine atoms in a fluorine-doped glass layer, said method comprising the steps of: depositing a capping layer on top of the fluorine-doped glass layer in order to form a capped fluorine-doped glass layer, said capping layer being substantially impermeable to free fluorine atoms; placing the capped fluorine-doped glass layer in an anneal furnace chamber; and heating the capped glass layer so as to induce free fluorine atoms within the glass layer to react with dangling silicon bonds within the glass layer.
Claim 2
Independent Claim
88 words
A method for reducing concentrations of free fluorine atoms in a fluorine-doped glass layer, said method comprising the steps of: depositing a capping layer on top of the fluorine-doped glass layer in order to form a capped fluorine-doped glass layer, said capping layer being substantially impermeable to free fluorine atoms; placing the capped fluorine-doped glass layer in an anneal furnace chamber; and heating the capped glass layer so as to induce free fluorine atoms within the glass layer to react with dangling silicon bonds within the glass layer.
Claim 3
Dependent Claim
26 words
The method of claim 1, wherein the capped fluorine-doped glass layer is maintained within a temperature range of 200° to 600° C. during the heating step.
Claim 4
Dependent Claim
12 words
The method of claim 1, wherein the capping layer comprises silicon nitride.
Claim 5
Dependent Claim
21 words
The method of claim 1, wherein the heating step is continued for a period within a range of about 30-90 minutes.
Claim 6
Independent Claim
93 words
A method fix reducing concentrations of free fluorine atoms in a fluorine-doped glass layer having both free fluorine atoms and dangling silicon bonds, said method comprising the steps of: depositing a cupping layer on top of the fluorine-doped glass layer in order to form a capped fluorine-doped glass layer, said capping layer acting to confine free fluorine atoms within the glass layer; and heating the capped glass layer for a period sufficient to induce at least a portion of the dangling silicon bonds to react with free fluorine atoms within the glass layer.
Claim 7
Independent Claim
93 words
A method fix reducing concentrations of free fluorine atoms in a fluorine-doped glass layer having both free fluorine atoms and dangling silicon bonds, said method comprising the steps of: depositing a cupping layer on top of the fluorine-doped glass layer in order to form a capped fluorine-doped glass layer, said capping layer acting to confine free fluorine atoms within the glass layer; and heating the capped glass layer for a period sufficient to induce at least a portion of the dangling silicon bonds to react with free fluorine atoms within the glass layer.
Claim 8
Dependent Claim
13 words
The method of claim 5, wherein the period is at least 10 minutes.
Claim 9
Dependent Claim
12 words
The method of claim 5, wherein the capping layer is silicon nitride.
Claim 10
Dependent Claim
12 words
The method of claim 7, wherein the capping layer comprises silicon nitride.
Claim 11
Dependent Claim
26 words
The method of claim 5, wherein the capped glass layer is heated to between 200° and 500° C. for a period of at least 10 minutes.
Claim 12
Independent Claim
46 words
A method for reducing concentrations of free fluorine atoms in a fluorine-doped glass layer, said method comprising the steps of: (a) depositing a capping layer on top of the fluorine-doped glass layer; and (b) annealing the glass layer while it is covered with the capping layer.
Claim 13
Independent Claim
46 words
A method for reducing concentrations of free fluorine atoms in a fluorine-doped glass layer, said method comprising the steps of: (a) depositing a capping layer on top of the fluorine-doped glass layer; and (b) annealing the glass layer while it is covered with the capping layer.
Claim 14
Dependent Claim
12 words
The method of claim 10, wherein the capping layer comprises silicon nitride.
Claim 15
Dependent Claim
32 words
The method of claim 10, wherein the annealing of the glass layer while it is covered with the capping layer is performed at a temperature within a range of about 200°-600° C.
Claim 16
Dependent Claim
30 words
The method of claim 12, wherein the annealing of the glass layer while it is covered with the capping layer is performed for a period of at least 10 minutes.
Claim 17
Dependent Claim
26 words
The method of claim 5, wherein the capped glass layer is maintained within a temperature range of about 400° to 450° C. for about 30 minutes.
Claim 18
Dependent Claim
76 words
The process of claim 7, which further comprises the steps of: removing the capping layer in order to form an uncapped fluorine-doped glass layer; placing the uncapped glass layer in an ambiance containing an electropositive reducer gas; and heating the uncapped glass layer to a temperature sufficient to induce the electropositive reducer gas to react with at least a portion of any remaining free fluorine atoms within the uncapped layer to form a fluoride containing gas.
Claim 19
Dependent Claim
22 words
The process of claim 15, wherein the uncapped glass layer is heated between 100° and 500° C. for at least 10 minutes.
Claim 20
Dependent Claim
23 words
The process of claim 15, wherein the uncapped glass layer is heated to between about 400° and 450° C. for about 30 minutes.
Claim 21
Dependent Claim
20 words
The process of claim 15, wherein the fluoride containing gas diffuses from the uncapped silicon dioxide layer into the ambiance.
Claim 22
Dependent Claim
13 words
The process of claim 15, wherein said electropositive reducer gas is hydrogen gas.
Claim 23
Dependent Claim
41 words
The method of claim 1, which further comprises the steps of: stripping the capping layer following the heating step to expose the fluorine-doped silicon dioxide layer; and annealing the exposed silicon dioxide layer in an ambiance containing an electropositive reducer gas.
Claim 24
Dependent Claim
29 words
The method of claim 20, wherein the exposed fluorine-doped silicon dioxide layer is annealed at temperatures within a range of 100° to 500° C. for at least 10 minutes.
Claim 25
Dependent Claim
29 words
The method of claim 20, wherein the exposed fluorine-doped silicon dioxide layer is annealed at temperatures within a range of about 400° to 450° C. for about 30 minutes.
Claim 26
Dependent Claim
13 words
The method of claim 20, wherein the electropositive reducer gas is hydrogen gas.
References Cited (Backward Citations)
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