Patent US5627110A successfully refreshed from Google Patents.
US5627110A
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US
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Method for eliminating window mask process in the fabrication of a semiconductor wafer when chemical-mechanical polish planarization is used
Assignee: Advanced Micro Devices Inc
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Filing: 1994-10-24
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Granted: 1997-05-06
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Expires: 2014-10-24
Abstract
Abstract A method of fabricating semiconductor devices which eliminates the need to use additional window mask process to expose topographical marks, such as alignment targets, on a wafer when chemical-mechanical polish planarization technique are used to substantially planarize the surface of the wafer prior to metal deposition. The method comprises (a) depositing a first removable layer on the wafer; (b) removing a portion of the first removable layer to form a large window around the first topographical mark and to retain an area of the first removable layer around the window; (c) forming an island of material within the: window and over the first topographical mark, wherein the island having a top surface of a second topographical mark replicating the first topographical mark; (d) depositing a second removable layer over the wafer including over the area and the island; (e) chemical-mechanical polishing the second removable layer to substantially planarize the second removable layer; and (f) removing the second removable layer deposited over the area and the island to expose the second topographical mark. The outer dimension of the window is large enough so that the upper surface of the second topographical mark and the upper surface of the material located in the remaining area on the wafer are of approximately equal spacing from the substantially planarized second removable layer. Accordingly, additional window mask process can be eliminated because one etch process, such as a contact etch, will be sufficient to expose the second topographical mark.
Inventors
- 👤 Raymond T. Lee
- 👤 Richard K. Klein
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 09:25
CPC Classifications
H; H10; H10P; H10P95/00; H10P95/06; H10P95/062; Y; Y10; Y10S; Y10S438/00; Y10S438/942; Y10S438/975
Claims Analysis
Total Claims: 32
Claim 1
Independent Claim
145 words
A method of replicating a first topographical mark on a wafer, comprising: (a) depositing a first removable insulative layer on the wafer; (b) removing a portion of said first removable insulative layer to form a large window relative to and around said first topographical mark and to retain an area of said first removable insulative layer around said large window; (c) forming an island of conductive material within said window and over said first topographical mark, said island having a top surface of a second topographical mark replicating said first topographical mark; (d) depositing a second removable insulative layer over the wafer including over said area and said island; (e) chemical-mechanical polishing said second removable insulative layer to planarize said second removable insularire layer; and (f) removing said second removable insulative layer deposited over said area and said island to expose said second topographical mark.
Claim 2
Independent Claim
145 words
A method of replicating a first topographical mark on a wafer, comprising: (a) depositing a first removable insulative layer on the wafer; (b) removing a portion of said first removable insulative layer to form a large window relative to and around said first topographical mark and to retain an area of said first removable insulative layer around said large window; (c) forming an island of conductive material within said window and over said first topographical mark, said island having a top surface of a second topographical mark replicating said first topographical mark; (d) depositing a second removable insulative layer over the wafer including over said area and said island; (e) chemical-mechanical polishing said second removable insulative layer to planarize said second removable insularire layer; and (f) removing said second removable insulative layer deposited over said area and said island to expose said second topographical mark.
Claim 3
Dependent Claim
16 words
The method of claim 1 wherein said first removable insulative layer is composed of silicon dioxide.
Claim 4
Dependent Claim
22 words
The method of claim 1 wherein said large window has an outer dimension in the range of approximately 3.5 to 5.0 mm.
Claim 5
Dependent Claim
15 words
The method of claim 1 wherein said conductive material is aluminum or an alloy thereof.
Claim 6
Dependent Claim
16 words
The method of claim 1 wherein said second removable insulative layer is composed of silicon oxide.
Claim 7
Independent Claim
260 words
A method of fabricating semiconductor devices on a top surface of a semiconductor wafer using photolithographic masks and without using a window mask, the semiconductor wafer including a first alignment target having a non-planar upper surface, the method comprising the steps of: (a) forming a first layer of insulative film on the wafer, said first layer of insulative film having an upper surface; (b) forming a first larvae opening relative to and around said first alignment target on said first layer of insulative film; (c) forming and patterning a first layer of conductive film on said first layer of insulative film and in said first large opening, wherein said first layer of conductive film includes a first portion, said first portion residing in the first large opening so that said first portion does not contact either the upper surface of said first layer of insulative film or a portion of said first layer of conductive film that does contact the upper surface of said first layer of insulative film, said first portion having an upper surface which replicates the non-planar upper surface of said first alignment target to form a corresponding second alignment target having a non-planar upper surface; (d) forming a second layer of insulative film on the wafer, said second layer of insulative film having an upper surface; (e) chemical-mechanical polishing said upper surface of said second layer of insulative film to planarize said upper surface of said second layer of insulative film; and (f) removing said second layer of insulative film to expose said second alignment target.
Claim 8
Independent Claim
260 words
A method of fabricating semiconductor devices on a top surface of a semiconductor wafer using photolithographic masks and without using a window mask, the semiconductor wafer including a first alignment target having a non-planar upper surface, the method comprising the steps of: (a) forming a first layer of insulative film on the wafer, said first layer of insulative film having an upper surface; (b) forming a first larvae opening relative to and around said first alignment target on said first layer of insulative film; (c) forming and patterning a first layer of conductive film on said first layer of insulative film and in said first large opening, wherein said first layer of conductive film includes a first portion, said first portion residing in the first large opening so that said first portion does not contact either the upper surface of said first layer of insulative film or a portion of said first layer of conductive film that does contact the upper surface of said first layer of insulative film, said first portion having an upper surface which replicates the non-planar upper surface of said first alignment target to form a corresponding second alignment target having a non-planar upper surface; (d) forming a second layer of insulative film on the wafer, said second layer of insulative film having an upper surface; (e) chemical-mechanical polishing said upper surface of said second layer of insulative film to planarize said upper surface of said second layer of insulative film; and (f) removing said second layer of insulative film to expose said second alignment target.
Claim 9
Dependent Claim
23 words
The method of claim 6 wherein said first large opening has an outer dimension in the range of approximately 3.5 to 5.0 mm.
Claim 10
Dependent Claim
89 words
The method of claim 6 wherein said step of forming and patterning said first layer of conductive film comprises: (a) depositing said first layer of conductive film on said first layer of insulative film and in said first large opening; (b) forming a patterned mask layer over said first layer of conductive film to provide exposed and unexposed portions of said first layer of conductive film; (c) etching exposed portions of said first layer of conductive film through said patterned mask layer; and (d) removing said patterned mask layer.
Claim 11
Dependent Claim
71 words
The method of claim 8 wherein said patterned mask layer has a second opening therein in registry with said first large opening, said second opening having an annular opening with a solid center portion, said solid center portion being positioned to be located directly above said first alignment target so that an island of said first layer of conductive film remains directly above said first alignment target after said etching step.
Claim 12
Dependent Claim
28 words
The method of claim 9 wherein said step of forming said patterned mask layer comprises depositing a patterned layer of photoresist over said first layer of conductive film.
Claim 13
Dependent Claim
18 words
The method of claim 10 wherein said first layer of conductive film is aluminum or an alloy thereof.
Claim 14
Dependent Claim
20 words
The method of claim 8 wherein the step of depositing said first layer of conductive film is achieved by sputtering.
Claim 15
Dependent Claim
16 words
The method of claim 6 wherein said first layer of insulative film is a silicon dioxide.
Claim 16
Dependent Claim
16 words
The method of claim 6 wherein said second layer of insulative film is a silicon oxide.
Claim 17
Dependent Claim
29 words
The method of claim 6 wherein said steps of forming said first layer of insulative film and said second layer of insulative film are achieved by chemical vapor deposition.
Claim 18
Independent Claim
326 words
A method of fabricating semiconductor devices on a top surface of a semiconductor wafer using photolithographic masks and without using a window mask, the semiconductor wafer including a first alignment target having a non-planar upper surface, the method comprising the steps of: (a) forming a first layer of insulative film on the wafer, said first layer of insulative film having an upper surface; (b) forming a first large opening relative to and around said first alignment target on said first layer of insulative film; (c) depositing a first layer of conductive film on said first layer of insulative film and in said first large opening, wherein said first layer of conductive film includes a first portion, said first portion residing in said first large opening, said first portion having an upper surface which replicates the non-planar upper surface of said first alignment target to form a corresponding second alignment target having a non-planar upper surface; (d) forming a patterned mask layer over said first layer of conductive film by depositing a layer of photoresist over said first layer of conductive film to provide exposed and unexposed portions of said first layer of conductive film; (e) etching exposed portions of said first layer of conductive film through said patterned mask layer so that the first portion of said first layer of conductive film does not contact either the upper surface of said first layer of insulative film or a portion of said first layer of conductive film that does contact the upper surface of said first layer of insulative film; (f) removing said patterned mask layer; (g) forming a second layer of insulative film on the wafer, said second layer of insulative film having an upper surface; (h) chemical-mechanical polishing said upper surface of said second layer of insulative film to planarize said upper surface of said second layer of insulative film; and (i) removing said second layer of insulative film to expose said second alignment target.
Claim 19
Independent Claim
326 words
A method of fabricating semiconductor devices on a top surface of a semiconductor wafer using photolithographic masks and without using a window mask, the semiconductor wafer including a first alignment target having a non-planar upper surface, the method comprising the steps of: (a) forming a first layer of insulative film on the wafer, said first layer of insulative film having an upper surface; (b) forming a first large opening relative to and around said first alignment target on said first layer of insulative film; (c) depositing a first layer of conductive film on said first layer of insulative film and in said first large opening, wherein said first layer of conductive film includes a first portion, said first portion residing in said first large opening, said first portion having an upper surface which replicates the non-planar upper surface of said first alignment target to form a corresponding second alignment target having a non-planar upper surface; (d) forming a patterned mask layer over said first layer of conductive film by depositing a layer of photoresist over said first layer of conductive film to provide exposed and unexposed portions of said first layer of conductive film; (e) etching exposed portions of said first layer of conductive film through said patterned mask layer so that the first portion of said first layer of conductive film does not contact either the upper surface of said first layer of insulative film or a portion of said first layer of conductive film that does contact the upper surface of said first layer of insulative film; (f) removing said patterned mask layer; (g) forming a second layer of insulative film on the wafer, said second layer of insulative film having an upper surface; (h) chemical-mechanical polishing said upper surface of said second layer of insulative film to planarize said upper surface of said second layer of insulative film; and (i) removing said second layer of insulative film to expose said second alignment target.
Claim 20
Dependent Claim
23 words
The method of claim 16 wherein said first large opening has an outer dimension in the range of approximately 3.5 to 5.0 mm.
Claim 21
Dependent Claim
71 words
The method of claim 16 wherein said patterned mask layer has a second opening therein in registry with said first large opening, said second opening having an annular opening with a solid center portion, said solid center portion being positioned to be located directly above said first alignment target so that an island of said first layer of conductive film remains directly above said first alignment target after said etching step.
Claim 22
Dependent Claim
18 words
The method of claim 18 wherein said first layer of conductive film is aluminum or an alloy thereof.
Claim 23
Dependent Claim
20 words
The method of claim 16 wherein the step of depositing said first layer of conductive film is achieved by sputtering.
Claim 24
Dependent Claim
22 words
The method of claim 16 wherein said first layer of insulative film and said second layer of insulative film are silicon oxide.
Claim 25
Dependent Claim
29 words
The method of claim 16 wherein said steps of forming said first layer of insulative film and said second layer of insulative film are achieved by chemical vapor deposition.
Claim 26
Independent Claim
403 words
A method of fabricating semiconductor devices on a top surface of a semiconductor wafer using photolithographic masks and without using a window mask, the semiconductor wafer including a plurality of first alignment targets, each of the first alignment targets having a non-planar upper surface, the method comprising the steps of: (a) forming a first layer of insulative film on the wafer; (b) forming a plurality of first large openings, wherein each first large opening in the plurality of first large openings is formed relative to and around a corresponding one of the plurality of first alignment targets on said first layer of insulative film; (c) depositing a first layer of conductive film on said first layer of insulative film and in said plurality of first large openings, wherein said first layer of conductive film includes a first portion, said first portion residing in said plurality of first large openings, said first portion having an upper surface which replicates the non-planar upper surface of each of the first alignment targets in said plurality of first alignment targets to form a corresponding plurality of second alignment targets, each second alignment target having a non-planar upper surface; (d) forming a patterned mask layer over said first layer of conductive film by depositing a layer of photoresist over said first layer of conductive film to provide exposed and unexposed portions of said first layer of conductive film, wherein said patterned mask layer has a plurality of second openings therein in registry with said plurality of first large openings, each one of said plurality of second openings having an annular opening with solid center portions, said solid center portions being positioned to be located directly above a corresponding one of said plurality of first alignment targets; (e) etching exposed portions of said first layer of conductive film through said patterned mask layer so that an island of said first layer of conductive film remains directly above each of the first alignment targets in said plurality of first alignment targets; (f) removing said patterned mask layer; (g) forming a second layer of insulative film on the wafer, said second layer of insulative film having an upper surface; (h) chemical-mechanical polishing said upper surface of said second layer of insulative film to planarize said upper surface of said second layer of insulative film; and (i) removing said second layer of insulative film to expose said plurality of second alignment targets.
Claim 27
Independent Claim
403 words
A method of fabricating semiconductor devices on a top surface of a semiconductor wafer using photolithographic masks and without using a window mask, the semiconductor wafer including a plurality of first alignment targets, each of the first alignment targets having a non-planar upper surface, the method comprising the steps of: (a) forming a first layer of insulative film on the wafer; (b) forming a plurality of first large openings, wherein each first large opening in the plurality of first large openings is formed relative to and around a corresponding one of the plurality of first alignment targets on said first layer of insulative film; (c) depositing a first layer of conductive film on said first layer of insulative film and in said plurality of first large openings, wherein said first layer of conductive film includes a first portion, said first portion residing in said plurality of first large openings, said first portion having an upper surface which replicates the non-planar upper surface of each of the first alignment targets in said plurality of first alignment targets to form a corresponding plurality of second alignment targets, each second alignment target having a non-planar upper surface; (d) forming a patterned mask layer over said first layer of conductive film by depositing a layer of photoresist over said first layer of conductive film to provide exposed and unexposed portions of said first layer of conductive film, wherein said patterned mask layer has a plurality of second openings therein in registry with said plurality of first large openings, each one of said plurality of second openings having an annular opening with solid center portions, said solid center portions being positioned to be located directly above a corresponding one of said plurality of first alignment targets; (e) etching exposed portions of said first layer of conductive film through said patterned mask layer so that an island of said first layer of conductive film remains directly above each of the first alignment targets in said plurality of first alignment targets; (f) removing said patterned mask layer; (g) forming a second layer of insulative film on the wafer, said second layer of insulative film having an upper surface; (h) chemical-mechanical polishing said upper surface of said second layer of insulative film to planarize said upper surface of said second layer of insulative film; and (i) removing said second layer of insulative film to expose said plurality of second alignment targets.
Claim 28
Dependent Claim
25 words
The method of claim 23 wherein each of said first large openings has an outer dimension in the range of approximately 3.5 to 5.0 mm.
Claim 29
Dependent Claim
18 words
The method of claim 23 wherein said first layer of conductive film is aluminum or an alloy thereof.
Claim 30
Dependent Claim
20 words
The method of claim 23 wherein the step of depositing said first layer of conductive film is achieved by sputtering.
Claim 31
Dependent Claim
22 words
The method of claim 23 wherein said first layer of insulative film and said second layer of insulative film are silicon oxide.
Claim 32
Dependent Claim
29 words
The method of claim 23 wherein said steps of forming said first layer of insulative film and said second layer of insulative film are achieved by chemical vapor deposition.
References Cited (Backward Citations)
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