US5626509A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Surface treatment of polishing cloth
Assignee: NEC Corp
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Filing: 1995-02-28
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Granted: 1997-05-06
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Expires: 2015-02-28
Abstract
Abstract An apparatus for surface treatment of polishing cloth includes a rotary cloth mounting section on which a polishing cloth is to be attached, and a rotary surface treatment tool made of an inorganic material other than metal and having at least a protrusion with an irregular surface portion on the surface thereof. The surface treatment tool and the cloth mounting section is rotated and a position of a rotation axis of a first rotating unit is different from that of a rotation axis of a second rotating unit. The rotating surface treatment tool is pressed against the cloth mounting section with a predetermined pressure while the surface treatment and cloth mounting sections are rotated.
Inventors
- 👤 Yoshihiro Hayashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 20:33
CPC Classifications
B; B24; B24B; B24B53/00; B24B53/017; H; H10; H10P; H10P14/00; H10P14/60
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
139 words
An apparatus for surface treatment of a polishing cloth, comprising: a rotary cloth mounting section on which a polishing cloth is attached; a rotary surface treatment tool comprised of a base member made of a material other than metal and having a plurality of protrusions formed integrally thereon by grooves cut in said rotary surface treatment tool, each of said protrusions having an irregular surface; first rotating means for rotating said cloth mounting section; second rotating means for rotating said rotary surface treatment tool, a position of a rotation axis of said first rotating means being different from that of a rotation axis of said second rotating means; and pressing means for pressing said rotary surface treatment tool against said cloth mounting section with a predetermined pressure while said rotary surface treatment tool and cloth mounting section are rotated.
Claim 2
Independent Claim
139 words
An apparatus for surface treatment of a polishing cloth, comprising: a rotary cloth mounting section on which a polishing cloth is attached; a rotary surface treatment tool comprised of a base member made of a material other than metal and having a plurality of protrusions formed integrally thereon by grooves cut in said rotary surface treatment tool, each of said protrusions having an irregular surface; first rotating means for rotating said cloth mounting section; second rotating means for rotating said rotary surface treatment tool, a position of a rotation axis of said first rotating means being different from that of a rotation axis of said second rotating means; and pressing means for pressing said rotary surface treatment tool against said cloth mounting section with a predetermined pressure while said rotary surface treatment tool and cloth mounting section are rotated.
Claim 3
Dependent Claim
21 words
An apparatus for surface treatment according to claim 1, wherein said protrusion is made of a material having a predetermined hardness.
Claim 4
Dependent Claim
30 words
An apparatus for surface treatment according to claim 2, wherein said protrusion is made of a material selected from the group of quartz, sapphire, silicon carbide and alumina sintered body.
Claim 5
Dependent Claim
31 words
An apparatus for surface treatment according to claim 1, wherein a plurality of said protrusions are formed only in a peripheral portion of the surface of said rotary surface treatment tool.
Claim 6
Dependent Claim
25 words
An apparatus for surface treatment according to claim 1, wherein said rotary surface treatment tool further includes at least one protrusion having a flat surface.
Claim 7
Dependent Claim
34 words
An apparatus for surface treatment according to claim 1, further comprising supply means for supplying a process solution containing an abrasive agent to an interface of said surface treatment tool and said polishing cloth.
Claim 8
Dependent Claim
20 words
An apparatus for surface treatment according to claim 6, wherein said process solution is electrolysis ionized water or pure water.
Claim 9
Dependent Claim
23 words
An apparatus for surface treatment according to claim 6, wherein said supply means extends through the center of said rotary surface treatment tool.
Claim 10
Dependent Claim
41 words
An apparatus for surface treatment according to claim 1, said pressing means includes means for pressing said rotary surface treatment tool against said polishing cloth such that said rotary surface treatment tool contacts said polishing cloth in parallel to each other.
Claim 11
Dependent Claim
32 words
An apparatus for surface treatment according to claim 1, wherein said second rotating means further includes a flexible joint for maintaining said rotary surface treatment tool in parallel with said polishing cloth.
Claim 12
Dependent Claim
29 words
An apparatus for surface treatment according to claim 1, wherein a rotation speed of said rotary surface treatment tool is substantially equal to that of said cloth mounting section.
Claim 13
Independent Claim
116 words
An apparatus for surface treatment of a polishing cloth, comprising: a rotary mounting section on which said polishing cloth is attached; a rotary surface treatment section including a surface treatment tool comprised of a base member made of a material other than metal and having a plurality of protrusions formed integrally thereon by grooves cut in a surface of said surface treatment tool, each of said protrusions having an irregular surface; supply means for supplying a process solution containing an abrasive agent to an interface of said surface treatment tool and said polishing cloth to remove shavings from said polishing cloth; and driving means for rotating said rotary mounting section and said rotary surface treatment section.
Claim 14
Independent Claim
116 words
An apparatus for surface treatment of a polishing cloth, comprising: a rotary mounting section on which said polishing cloth is attached; a rotary surface treatment section including a surface treatment tool comprised of a base member made of a material other than metal and having a plurality of protrusions formed integrally thereon by grooves cut in a surface of said surface treatment tool, each of said protrusions having an irregular surface; supply means for supplying a process solution containing an abrasive agent to an interface of said surface treatment tool and said polishing cloth to remove shavings from said polishing cloth; and driving means for rotating said rotary mounting section and said rotary surface treatment section.
Claim 15
Dependent Claim
32 words
An apparatus for surface treatment according to claim 12, wherein said surface treatment tool is made of a material having a hardness equal to or harder than that of the abrasive agent.
Claim 16
Dependent Claim
37 words
An apparatus for surface treatment according to claim 13, wherein said surface treatment tool has a recess portion at a center portion thereof and said grooves are formed in a peripheral portion of said surface treatment tool.
Claim 17
Dependent Claim
37 words
An apparatus for surface treatment according to claim 12, further including means for pressing said surface treatment tool against said polishing cloth such that said surface treatment tool contacts said polishing cloth in parallel to each other.
Claim 18
Independent Claim
120 words
An apparatus for surface treatment of a polishing cloth, comprising: a rotary mounting section on which said polishing cloth is mounted; and a surface treatment tool comprised of a base member having grooves cut in a surface of said surface treatment tool, a plurality of plates disposed within said grooves respectively, each of said plates protruding from said grooves and having a plurality of irregular surfaces formed integrally thereon; a first driving means for relatively pushing said rotary mounting section and said surface treatment tool against each other while said rotary mounting section and said surface treatment tool are being rotated by a second driving means such that said surface treatment tool always contacts said rotary mounting section in parallel.
Claim 19
Independent Claim
120 words
An apparatus for surface treatment of a polishing cloth, comprising: a rotary mounting section on which said polishing cloth is mounted; and a surface treatment tool comprised of a base member having grooves cut in a surface of said surface treatment tool, a plurality of plates disposed within said grooves respectively, each of said plates protruding from said grooves and having a plurality of irregular surfaces formed integrally thereon; a first driving means for relatively pushing said rotary mounting section and said surface treatment tool against each other while said rotary mounting section and said surface treatment tool are being rotated by a second driving means such that said surface treatment tool always contacts said rotary mounting section in parallel.
Claim 20
Dependent Claim
30 words
An apparatus for surface treatment according to claim 16, wherein said protrusion is made of a material having a hardness equal to or harder than that of an abrasive agent.
Claim 21
Dependent Claim
41 words
An apparatus for surface treatment according to claim 17, further comprising supply means for supplying a process solution containing said abrasive agent to an interface of said surface treatment tool and said polishing cloth to remove shavings from said polishing cloth.
Claim 22
Dependent Claim
32 words
An apparatus for surface treatment according to claim 16, wherein at least one of said protrusions on said plates is made of sapphire, and said base is made of quartz or glass.
Claim 23
Dependent Claim
25 words
An apparatus for surface treatment according to claim 16, wherein said rotary surface treatment tool further includes at least one protrusion having a flat surface.
Claim 24
Dependent Claim
20 words
An apparatus for surface treatment according to claim 16, wherein said at least one protrusion has a triangular cross section.
Claim 25
Dependent Claim
51 words
An apparatus for surface treatment according to claim 16, wherein some of said plurality of plates have projections having a quadrangular-cone-shaped cross section formed on a surface of said plates and some of said plurality of plates have projections having a sawtooth-shaped cross section formed on a surface of said plates.
Claim 26
Dependent Claim
35 words
An apparatus for surface treatment according to claim 22, wherein a number of plates with projections having a quadrangular-cone-shaped cross section is greater than a number of plates with projections having a sawtooth-shaped cross section.
Claim 27
Dependent Claim
35 words
An apparatus for surface treatment according to claim 22, wherein a number of plates with projections having a quadrangular-cone-shaped cross section is less than a number of plates with projections having a sawtooth-shaped cross section.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-05-05 | 2000-11-04 | 2001-05-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-05-05 | 2004-11-04 | 2005-05-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-05-05 | 2008-11-04 | 2009-05-06 | $7700.00 | Window Closed / Lapsed |