US5622896A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of manufacturing a thin silicon-oxide layer
Assignee: NXP BV
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Filing: 1995-10-16
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Granted: 1997-04-22
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Expires: 2015-10-16
Abstract
Abstract A method of providing an ultra-thin (<1 nm) silicon-oxide layer on a substrate surface, for example, of a metal. A film of a solution of a polyorganosiloxane is applied to the substrate surface. After drying, the polyorganosiloxane is completely converted to said silicon-oxide layer by means of an UV-ozone treatment. Such an ultra-thin silicon-oxide layer sufficiently protects a metal surface against corrosion. In addition, the silicon-oxide layer can be silanized with the customary silane coupling agents to improve the bond with polymers. The method can very suitably be used, for example, to treat metal leadframes for ICs and to provide a bonding layer for indium tin oxide on polyacrylate for a passive plate of LC displays.
Inventors
- 👤 Dirk M. Knotter
- 👤 Jacob Wijdenes
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 10:47
CPC Classifications
H; H10; H10W; H10W70/00; H10W70/40; H10W70/456; H10W70/458; C; C23; C23C; C23C18/00; C23C18/02; C23C18/12; C23C18/1204; C23C18/1208; C23C18/1212; C23C18/122; C23C18/1229; C23C18/1241; C23C18/14; C23C18/143; H10W74/00; H10W74/10; H10W74/111; H10W74/127; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49121
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
64 words
A method of applying a silicon-oxide layer to a substrate, in which method a film of a solution of a polyorganosiloxane in a first solvent is applied to a surface of said substrate, whereafter the film is dried, thereby forming a polyorganosiloxane layer which is subsequently rinsed with a second solvent and then converted to said silicon-oxide layer by means of an UV-ozone treatment.
Claim 2
Independent Claim
64 words
A method of applying a silicon-oxide layer to a substrate, in which method a film of a solution of a polyorganosiloxane in a first solvent is applied to a surface of said substrate, whereafter the film is dried, thereby forming a polyorganosiloxane layer which is subsequently rinsed with a second solvent and then converted to said silicon-oxide layer by means of an UV-ozone treatment.
Claim 3
Dependent Claim
23 words
A method as claimed in claim 1, wherein a concentration of 0.05 to 5 wt. % polyorganosiloxane in the first solvent is used.
Claim 4
Dependent Claim
16 words
A method as claimed in claim 1, wherein a poly(dimethyl siloxane) is used as the polyorganosiloxane.
Claim 5
Dependent Claim
19 words
A method as claimed in claim 1, wherein a mixture comprising poly(methyl phenyl siloxane) is used as the polyorganosiloxane.
Claim 6
Dependent Claim
15 words
A method as claimed in claim 1, wherein the polyorganosiloxane comprises a silanol terminal group.
Claim 7
Dependent Claim
15 words
A method as claimed in claim 1, wherein the film is applied by spin coating.
Claim 8
Dependent Claim
16 words
A method as claimed in claim 1, wherein copper or molybdenum is used as the substrate.
Claim 9
Dependent Claim
18 words
A method as claimed in claim 2, wherein the silicon-oxide layer has a maximum thickness of 1 nm.
Claim 10
Dependent Claim
26 words
A method as claimed in claim 1, wherein the silicon-oxide layer is silanized with a bifunctional organochlorosilane or organoalkoxysilane with an amino group or epoxy group.
Claim 11
Dependent Claim
45 words
A method of manufacturing a semiconductor device comprising an integrated circuit which is encapsulated in a synthetic resin and which is mounted on a metal leadframe, said leadframe being previously provided with a silicon-oxide layer by means of a method as claimed in claim 1.
Claim 12
Dependent Claim
49 words
A method of manufacturing a passive plate of a liquid-crystal display device, in which method a layer of polyacrylate is provided with a silicon-oxide bonding layer and, subsequently, with an electrode layer of indium tin oxide, said silicon-oxide layer being manufactured by a method as claimed in claim 1.
References Cited (Backward Citations)
US3389160A
Cited
GB2081284A
Cited
JPS6456315A
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EP0313095A2
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JPH01194980A
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US5057336A
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US5336532A
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EP0462715B1
Cited
US5385739A
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US5387546A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-04-21 | 2000-10-21 | 2001-04-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-04-21 | 2004-10-21 | 2005-04-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-04-21 | 2008-10-21 | 2009-04-22 | $7700.00 | Window Closed / Lapsed |