EP0313095A2
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EP
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Method for preparing hydroxysilanes and/or their oligomers
Assignee: Resonac Corp
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Filing: 1988-10-21
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Granted: —
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Expires: 2008-10-21
Abstract
Abstract A method for preparing hydroxysilanes and/or their oligomers which comprises reacting an alkoxysilane with water in a solvent by using a solid acid catalyst. The thus-produced alkoxysilanes and/or their oligomers can be suitably used for the preparation of SiO2-film-forming application-liquids.
Inventors
- 👤 Shun-Ichiro Uchimura
- 👤 Hidetaka Sato
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-05 13:35
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/66; H10P14/668; H10P14/6681; H10P14/6684; C; C07; C07F; C07F7/00; C07F7/02; C07F7/08; C07F7/0834; C07F7/0836; C23; C23C; C23C18/00; C23C18/02; C23C18/12; C23C18/1204; C23C18/1208; C23C18/1212; C23C18/122; H10P14/69; H10P14/692; H10P14/6921; H10P14/69215; H10P32/00; H10P32/10; H10P32/14; H10P32/1408; H10P32/141; H10P32/17; H10P32/171; H10P14/63; H10P14/6326; H10P14/6342; H10P14/6922; H10P14/6923
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
30 words
A method for preparing hydoxysilanes and/or their oligomers which comprises reacting an alkoxysilane or an oligomer thereof with water in a solvent in the presence of a solid acid catalyst.
Claim 2
Independent Claim
30 words
A method for preparing hydoxysilanes and/or their oligomers which comprises reacting an alkoxysilane or an oligomer thereof with water in a solvent in the presence of a solid acid catalyst.
Claim 3
Dependent Claim
52 words
The method of claim 1 wherein the alkoxysilane is represented by the following general formulas: Si(OR¹)₄ wherein R¹ is hydrogen or a monovalent hydrocarbon radical, or R n Si(OR²) 4-n wherein each R and R² is independently hydrogen or a monovalent hydrocarbon radical, and n is an integer of 1 - 3.
Claim 4
Dependent Claim
16 words
The method of claim 2 wherein each R¹ and R² is methyl radical or ethyl radical.
Claim 5
Independent Claim
16 words
The method of any of claims 1 to 3, wherein the solid acid catalyst is Y-zeolite.
Claim 6
Independent Claim
20 words
The method of any of claims 1 to 3, wherein the solid acid catalyst is fluorinated sulfonic acid type resin.
Claim 7
Dependent Claim
20 words
A SiO₂-film-forming application-liquid comprising hydroxysilanes and/or their oligomers prepared by the method according to any of claims 1 to 5.
Claim 8
Dependent Claim
22 words
A diffusion source for semiconductors comprising hydroxysilanes and/or their oligomers prepared by the method according to any of claims 1 to 5.
Claim 9
Independent Claim
41 words
A method for preparing SiO₂-films which comprises: applying a SiO₂-film-forming application-liquid comprising hydroxysilanes and/or their oligomers, and heating the applied SiO₂-film-forming application-liquid, wherein the hydroxysilanes and/or their oligomers are prepared by the method according to any of claims 1 to 5.
Claim 10
Independent Claim
55 words
A method for preparing doped layers which comprises applying a diffusion source for semiconductors on a silicon wafer, the diffusion source for semiconductors comprising hydroxysilanes and/or their oligomers, and heating the applied diffusion source for semiconductors, wherein the hydroxysilanes and/or their oligomers are prepared by the method according to any of claims 1 to 5.
References Cited (Backward Citations)
No citation records indexed.
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