US5621499A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Scanning exposure apparatus
Assignee: Canon Inc
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Filing: 1995-06-20
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Granted: 1997-04-15
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Expires: 2015-06-20
Abstract
Abstract A scanning system includes an illuminating device for illuminating an object with coherent illumination light, and a scanning device for relatively and scanningly moving the object relative to the illumination light, along a scan direction, wherein the illuminating device is arranged so that a direction of interference fringe to be produced on the object by the illumination light is inclined with respect to the scan direction.
Inventors
- 👤 Takahisa Shiozawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 11:22
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/7055; G03F7/70583; G03F7/70216; G03F7/70358
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
64 words
A scanning system, comprising: illuminating means for illuminating an object with coherent illumination light; and scanning means for relatively and scanningly moving the object relative to the illumination light, along a scan direction, wherein said illuminating means is arranged so that a direction of interference fringe to be produced on the object by the illumination light is inclined with respect to the scan direction.
Claim 2
Dependent Claim
64 words
A scanning system, comprising: illuminating means for illuminating an object with coherent illumination light; and scanning means for relatively and scanningly moving the object relative to the illumination light, along a scan direction, wherein said illuminating means is arranged so that a direction of interference fringe to be produced on the object by the illumination light is inclined with respect to the scan direction.
Claim 3
Dependent Claim
53 words
A system according to claim 1, wherein, where the angle of inclination of the direction of interference fringe with respect to the scan direction is θ, the pitch of the interference fringe is A and the width of the illumination light in the scan direction is B, the following condition is satisfied: A/B≦sinθ.
Claim 4
Dependent Claim
70 words
A system according to claim 1, wherein said illuminating means includes a light source for providing coherent light, and secondary light source forming means for forming a plurality of light source portions distributed two-dimensionally along different two directions, wherein the illumination light is provided by said light source portions and wherein said light source portions are arrayed so that the interference fringe is inclined with respect to the scan direction.
Claim 5
Dependent Claim
41 words
A system according to claim 3, wherein said secondary light source forming means includes a fly's eye lens for receiving the coherent light, and wherein said fly's eye lens comprises a plurality of lens elements arrayed two-dimensionally along two different directions.
Claim 6
Dependent Claim
42 words
A system according to claim 4, wherein said two directions along which said lens elements are arrayed are perpendicular to each other, and wherein said two directions along which said lens elements are arrayed are inclined with respect to the scan direction.
Claim 7
Dependent Claim
41 words
A system according to claim 4, wherein one of said two directions along which said lens elements are arrayed is orthogonal to the scan direction, and wherein the other of said two directions is inclined with respect to the scan direction.
Claim 8
Dependent Claim
20 words
A system according to claim 4, wherein each lens element of said fly's eye lens has an oblong sectional shape.
Claim 9
Dependent Claim
22 words
A system according to claim 4, wherein each lens element of said fly's eye lens has a sectional shape of a parallelogram.
Claim 10
Dependent Claim
60 words
A system according to claim 3, wherein said secondary light source forming means includes a pair of lenticular lenses for sequentially receiving the coherent light, wherein said pair of lenticular lenses have generating lines extending perpendicular to each other, and wherein the directions of generating lines of said pair of lenticular lenses are inclined with respect to the scan direction.
Claim 11
Dependent Claim
81 words
A scanning exposure apparatus, comprising: illuminating means for illuminating a mask with coherent illumination light and for exposing a substrate with the illumination light coming from the mask; and scanning means for relatively and scanningly moving the mask and the substrate relative to the illumination light, along a scan direction, wherein said illuminating means is arranged so that a direction of interference fringe to be produced on the substrate by the illumination light is inclined with respect to the scan direction.
Claim 12
Dependent Claim
81 words
A scanning exposure apparatus, comprising: illuminating means for illuminating a mask with coherent illumination light and for exposing a substrate with the illumination light coming from the mask; and scanning means for relatively and scanningly moving the mask and the substrate relative to the illumination light, along a scan direction, wherein said illuminating means is arranged so that a direction of interference fringe to be produced on the substrate by the illumination light is inclined with respect to the scan direction.
Claim 13
Dependent Claim
53 words
An apparatus according to claim 10, wherein, where the angle of inclination of the direction of interference fringe with respect to the scan direction is θ, the pitch of the interference fringe is A and the width of the illumination light in the scan direction is B, the following condition is satisfied: A/B≦sinθ.
Claim 14
Dependent Claim
70 words
An apparatus according to claim 10, wherein said illuminating means includes a light source for providing coherent light, and secondary light source forming means for forming a plurality of light source portions distributed two-dimensionally along different two directions, wherein the illumination light is provided by said light source portions and wherein said light source portions are arrayed so that the interference fringe is inclined with respect to the scan direction.
Claim 15
Dependent Claim
41 words
An apparatus according to claim 12, wherein said secondary light source forming means includes a fly's eye lens for receiving the coherent light, and wherein said fly's eye lens comprises a plurality of lens elements arrayed two-dimensionally along two different directions.
Claim 16
Dependent Claim
42 words
An apparatus according to claim 13, wherein said two directions along which said lens elements are arrayed are perpendicular to each other, and wherein said two directions along which said lens elements are arrayed are inclined with respect to the scan direction.
Claim 17
Dependent Claim
41 words
An apparatus according to claim 13, wherein one of said two directions along which said lens elements are arrayed is orthogonal to the scan direction, and wherein the other of said two directions is inclined with respect to the scan direction.
Claim 18
Dependent Claim
20 words
An apparatus according to claim 13, wherein each lens element of said fly's eye lens has an oblong sectional shape.
Claim 19
Dependent Claim
22 words
An apparatus according to claim 13, wherein each lens element of said fly's eye lens has a sectional shape of a parallelogram.
Claim 20
Dependent Claim
60 words
An apparatus according to claim 16, wherein said secondary light source forming means includes a pair of lenticular lenses for sequentially receiving the coherent light, wherein said pair of lenticular lenses have generating lines extending perpendicular to each other, and wherein the directions of generating lines of said pair of lenticular lenses are inclined with respect to the scan direction.
Claim 21
Independent Claim
31 words
A device manufacturing method which includes a step of printing a device pattern on a substrate by use of a scanning exposure apparatus as recited in any one of claims 10-18.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-04-14 | 2000-10-14 | 2001-04-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-04-14 | 2004-10-14 | 2005-04-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-04-14 | 2008-10-14 | 2009-04-15 | $7700.00 | Window Closed / Lapsed |