Patent US5619061A successfully refreshed from Google Patents.
US5619061A
Expired / Lapsed
US
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Micromechanical microwave switching
Assignee: HOEL CARLTON H
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Filing: 1994-10-31
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Granted: 1997-04-08
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Expires: 2014-10-31
Abstract
Abstract Micromechanical microwave switches with both ohmic and capacitive coupling of rf lines and integration in multiple throw switches useful in microwave arrays.
Inventors
- 👤 Charles Goldsmith
- 👤 Bradley M. Kanack
- 👤 Tsen-Hwang Lin
- 👤 Bill R. Norvell
- 👤 Lily Y. Pang
- 👤 Billy Powers, Jr.
- 👤 Charles Rhoads
- 👤 David Seymour
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 17:20
CPC Classifications
H; H01; H01G; H01G5/00; H01G5/16; H01G5/40; H01H; H01H59/00; H01H59/0009; H01P; H01P1/00; H01P1/10; H01P1/12; H01P1/127; H01P1/18; H01P1/184; H01P5/00; H01P5/04; H01P9/00; H01H1/00; H01H1/12; H01H1/14; H01H1/20; H01H1/0036; H01H2001/0042; H01H2001/0084; H01H2059/0018; H01H2059/0036; H01H67/00; H01H67/22
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
77 words
An integrated circuit switch, comprising: (a) a membrane supported over a first conductor on a substrate; (b) a conductive region on said membrane and connecting to a second conductor on said substrate; and (c) a pulldown electrode on said substrate and under said membrane, (d) wherein a voltage greater than a pulldown threshold and applied between said conductive region and said pulldown electrode will pull said membrane down to make a capacitive coupling to said first conductor.
Claim 2
Dependent Claim
77 words
An integrated circuit switch, comprising: (a) a membrane supported over a first conductor on a substrate; (b) a conductive region on said membrane and connecting to a second conductor on said substrate; and (c) a pulldown electrode on said substrate and under said membrane, (d) wherein a voltage greater than a pulldown threshold and applied between said conductive region and said pulldown electrode will pull said membrane down to make a capacitive coupling to said first conductor.
Claim 3
Dependent Claim
63 words
The switch of claim 1, further comprising: (a) a pullup electrode supported over said membrane; (b) wherein a voltage greater than a pullup threshold and applied between said conductive region and said pullup electrode will pull said membrane up to disrupt any electrical coupling of said membrane to said first conductor when no voltage is applied between said membrane and said pulldown electrode.
Claim 4
Dependent Claim
32 words
The switch of claim 2, wherein: (a) said membrane has two stable states with one stable state with the membrane pulled down and the other stable state with the membrane pulled up.
Claim 5
Dependent Claim
16 words
The switch of claim 3, wherein: (a) said membrane includes a layer of a compressive dielectric.
Claim 6
Dependent Claim
67 words
An integrated circuit switch, comprising: (a) a membrane supported over first and second conductors on a substrate; (b) a conductive region on said membrane; and (c) a pulldown electrode on said substrate and under said membrane; (d) wherein a voltage greater than a threshold and applied between said conductive region and said pulldown electrode will pull said membrane down to electrically couple said first and second conductors.
Claim 7
Dependent Claim
67 words
An integrated circuit switch, comprising: (a) a membrane supported over first and second conductors on a substrate; (b) a conductive region on said membrane; and (c) a pulldown electrode on said substrate and under said membrane; (d) wherein a voltage greater than a threshold and applied between said conductive region and said pulldown electrode will pull said membrane down to electrically couple said first and second conductors.
Claim 8
Dependent Claim
14 words
The switch of claim 5, wherein: (a) said electrically couple is a capacitive couple.
Claim 9
Dependent Claim
14 words
The switch of claim 5, wherein: (a) said electrically couple is an ohmic couple.
Claim 10
Dependent Claim
62 words
The switch of claim 5, further comprising: (a) a pullup electrode supported over said membrane; (b) wherein a voltage greater than a pullup threshold and applied between said conductive region and said pullup electrode will pull said membrane up to disrupt any electrical coupling of said first and second conductors when no voltage is applied between said membrane and said pulldown electrode.
Claim 11
Dependent Claim
32 words
The switch of claim 8, wherein: (a) said membrane has two stable states with one stable state with the membrane pulled down and the other stable state with the membrane pulled up.
Claim 12
Dependent Claim
92 words
An integrated circuit multiple-throw switch, comprising: (a) a membrane supported over a plurality of output conductors on a substrate; (b) a conductive region on said membrane and connecting to an input conductor on said substrate; and (c) a plurality of pulldown electrodes on said substrate and under said membrane; (d) wherein a voltage greater than a pulldown threshold and applied between said conductive region and one of said plurality of pulldown electrodes will pull said membrane down to make a capacitive coupling to a corresponding one of said plurality of output conductors.
Claim 13
Dependent Claim
92 words
An integrated circuit multiple-throw switch, comprising: (a) a membrane supported over a plurality of output conductors on a substrate; (b) a conductive region on said membrane and connecting to an input conductor on said substrate; and (c) a plurality of pulldown electrodes on said substrate and under said membrane; (d) wherein a voltage greater than a pulldown threshold and applied between said conductive region and one of said plurality of pulldown electrodes will pull said membrane down to make a capacitive coupling to a corresponding one of said plurality of output conductors.
Claim 14
Dependent Claim
74 words
An integrated circuit switch comprising: a dielectric membrane supported over a first conductor on a substrate; a conductive region on said membrane and connecting to a second conductor on said substrate; and a pulldown electrode on said substrate and under said membrane, wherein a voltage greater than a pulldown threshold and applied between said conductive region and said pulldown electrode will pull said membrane down to make an electrical coupling to said first conductor.
Claim 15
Dependent Claim
74 words
An integrated circuit switch comprising: a dielectric membrane supported over a first conductor on a substrate; a conductive region on said membrane and connecting to a second conductor on said substrate; and a pulldown electrode on said substrate and under said membrane, wherein a voltage greater than a pulldown threshold and applied between said conductive region and said pulldown electrode will pull said membrane down to make an electrical coupling to said first conductor.
Claim 16
Dependent Claim
10 words
The switch of claim 11 wherein said coupling is capacitive.
Claim 17
Dependent Claim
10 words
The switch of claim 11 wherein said coupling is ohmic.
Claim 18
Dependent Claim
61 words
The switch of claim 11 further comprising a pullup electrode supported over said membrane, wherein a voltage greater than a pullup threshold and applied between said conductive region and said pullup electrode will pull said membrane up to disrupt any electrical coupling of said membrane to said first conductor when no voltage is applied between said membrane and said pulldown electrode.
Claim 19
Dependent Claim
31 words
The switch of claim 14 wherein said membrane has two stable states with one stable state with the membrane pulled down and the other stable state with the membrane pulled up.
Claim 20
Dependent Claim
15 words
The switch of claim 15 wherein said membrane includes a layer of a compressive dielectric.
Claim 21
Dependent Claim
128 words
An integrated circuit switch comprising: a membrane supported over a first conductor on a substrate; a conductive region on said membrane and connecting to a second conductor on said substrate; a pulldown electrode on said substrate and under said membrane; and a pullup electrode supported over said membrane, wherein a voltage greater than a pulldown threshold and applied between said conductive region and said pulldown electrode will pull said membrane down to make an electrical coupling to said first conductor, and wherein a voltage greater than a pullup threshold and applied between said conductive region and said pullup electrode will pull said membrane up to disrupt any electrical coupling of said membrane to said first conductor when no voltage is applied between said membrane and said pulldown electrode.
Claim 22
Dependent Claim
128 words
An integrated circuit switch comprising: a membrane supported over a first conductor on a substrate; a conductive region on said membrane and connecting to a second conductor on said substrate; a pulldown electrode on said substrate and under said membrane; and a pullup electrode supported over said membrane, wherein a voltage greater than a pulldown threshold and applied between said conductive region and said pulldown electrode will pull said membrane down to make an electrical coupling to said first conductor, and wherein a voltage greater than a pullup threshold and applied between said conductive region and said pullup electrode will pull said membrane up to disrupt any electrical coupling of said membrane to said first conductor when no voltage is applied between said membrane and said pulldown electrode.
Claim 23
Dependent Claim
31 words
The switch of claim 17 wherein said membrane has two stable states with one stable state with the membrane pulled down and the other stable state with the membrane pulled up.
Claim 24
Dependent Claim
15 words
The switch of claim 18 wherein said membrane includes a layer of a compressive dielectric.
References Cited (Backward Citations)
US4674180A
Cited
US4959515A
Cited
US5061049A
Cited
US5121089A
Cited
US5164688A
Cited
US5175521A
Cited
US5168249A
Cited
US5479042A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-04-07 | 2000-10-07 | 2001-04-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-04-07 | 2004-10-07 | 2005-04-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-04-07 | 2008-10-07 | 2009-04-08 | $7700.00 | Window Closed / Lapsed |