US4959515A
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Micromechanical electric shunt and encoding devices made therefrom
Assignee: Schneider Electric Systems USA Inc
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Filing: 1987-02-06
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Granted: 1990-09-25
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Expires: 2007-02-06
Abstract
Abstract A micromechanical electric shunt is fabricated by micromachining according to recent IC fabrication procedures. A plurality of such shunts is incorporated on a single substrate to form novel process station or post identification or signature encoding apparatus for use on a telecommunications bus or the equivalent. Such identification of signature encoding apparatus may be configured for conventional binary coding. Both frequency and current derivative mode apparatus are disclosed.
Inventors
- 👤 Paul M. Zavracky
- 👤 Richard H. Morrison, Jr.
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 14:17
CPC Classifications
H; H01; H01H; H01H59/00; H01H59/0009; G; G06; G06K; G06K19/00; G06K19/06; G06K19/067; H01H1/00; H01H1/0036
Claims Analysis
Total Claims: 34
Claim 1
Independent Claim
122 words
Micromechanical shunt exhibiting hysteresis, comprising: (a) an insulating substrate having a planar top surface; (b) a first contact terminal on said planar top surface; (c) a second contact terminal on said planar top surface; (d) a cantilever beam having a free end and a fixed end which is attached to said first contact terminal, said free end being suprajacent said second contact terminal; (e) means for establishing an electrostatic charge attraction between said cantilever beam and said second contact terminal; and (f) a resistance layer intermediate said cantilever beam and said second contact terminal; whereby said free end of said cantilever beam may be deflected toward said second contact terminal by establishing an electrostatic charge between said first and second contact terminals.
Claim 2
Dependent Claim
122 words
Micromechanical shunt exhibiting hysteresis, comprising: (a) an insulating substrate having a planar top surface; (b) a first contact terminal on said planar top surface; (c) a second contact terminal on said planar top surface; (d) a cantilever beam having a free end and a fixed end which is attached to said first contact terminal, said free end being suprajacent said second contact terminal; (e) means for establishing an electrostatic charge attraction between said cantilever beam and said second contact terminal; and (f) a resistance layer intermediate said cantilever beam and said second contact terminal; whereby said free end of said cantilever beam may be deflected toward said second contact terminal by establishing an electrostatic charge between said first and second contact terminals.
Claim 3
Dependent Claim
26 words
Micromechanical shunt as in claim 1, further including a third contact terminal underlying said cantilever beam and adapted to provide electrical contact with said cantilever beam.
Claim 4
Dependent Claim
13 words
Micromechanical shunt as in claim 1, wherein said cantilever beam is primarily gold.
Claim 5
Dependent Claim
23 words
Micromechanical shunt as in claim 1, wherein said cantilever beam has a length of between 2.5×10 -5 meters and about 5.1×10 -3 meters.
Claim 6
Dependent Claim
23 words
Micromechanical shunt as in claim 1, wherein said cantilever beam length is preferably between about 10 -4 meters and about 3.0×10 -3 meters.
Claim 7
Dependent Claim
28 words
Micromechanical shunt as in claim 1, wherein said cantilever beam length is not less than about 7.5×10 -5 meters nor more than about 7.5×10 -4 meters in length.
Claim 8
Dependent Claim
22 words
Micromechanical shunt as in claim 1, wherein said cantilever beam is between about 10 -4 and about 10 -3 meters in width.
Claim 9
Dependent Claim
22 words
Micromechanical shunt as in claim 1, wherein said cantilever beam is between about 10 -7 and about 10 -4 meters in thickness.
Claim 10
Dependent Claim
22 words
Micromechanical shunt as in claim 1, wherein said cantilever beam is between about 10 -7 and about 10 -5 meters in thickness.
Claim 11
Dependent Claim
26 words
Micromechanical shunt as in claim 1, wherein said resistance layer is spaced from said second contact terminal between about 10 -7 and about 10 -4 meters.
Claim 12
Dependent Claim
14 words
Micromechanical shunt as in claim 1, wherein said resistance layer is formed of germanium.
Claim 13
Dependent Claim
17 words
Micromechanical shunt as in claim 1, wherein said resistance layer is formed of an oxide of copper.
Claim 14
Dependent Claim
17 words
Micromechanical shunt as in claim 1, wherein said resistance layer is formed of silicon doped with aluminum.
Claim 15
Dependent Claim
129 words
Micromechanical shunt exhibiting hysteresis, comprising: (a) an insulating substrate having a planar top surface; (b) a first contact terminal on said planar top surface; (c) a second contact terminal on said planar top surface; (d) a cantilever beam formed of a uniform metal material and having a free end and a fixed end which is attached to said first contact terminal, said free end being suprajacent said second contact terminal; (e) means for establishing an electrostatic charge attraction between said cantilever beam and said second contact terminal; whereby said free end of said cantilever beam may be deflected toward said second contact terminal by establishing an electrostatic charge between said first and second contact terminals; and (f) a resistance layer intermediate said cantilever beam and said second contact terminal.
Claim 16
Dependent Claim
129 words
Micromechanical shunt exhibiting hysteresis, comprising: (a) an insulating substrate having a planar top surface; (b) a first contact terminal on said planar top surface; (c) a second contact terminal on said planar top surface; (d) a cantilever beam formed of a uniform metal material and having a free end and a fixed end which is attached to said first contact terminal, said free end being suprajacent said second contact terminal; (e) means for establishing an electrostatic charge attraction between said cantilever beam and said second contact terminal; whereby said free end of said cantilever beam may be deflected toward said second contact terminal by establishing an electrostatic charge between said first and second contact terminals; and (f) a resistance layer intermediate said cantilever beam and said second contact terminal.
Claim 17
Dependent Claim
26 words
Micromechanical shunt as in claim 14, further including a third contact terminal underlying said cantilever beam and adapted to provide electrical contact with said cantilever beam.
Claim 18
Dependent Claim
13 words
Micromechanical shunt as in claim 14, wherein said cantilever beam is primarily gold.
Claim 19
Dependent Claim
27 words
Micromechanical shunt as in claim 14, wherein said cantilever beam length is not less than about 7.5×10 -5 meters nor more than 7.5×10 -4 meters in length.
Claim 20
Dependent Claim
22 words
Micromechanical shunt as in claim 14, wherein said cantilever beam is between about 10 -7 and about 10 -4 meters in thickness.
Claim 21
Dependent Claim
125 words
Micromechanical shunt exhibiting hysteresis, comprising: (a) a relatively inflexible fixed insulating substrate having a planar top surface; (b) a first contact terminal on said planar top surface; (c) a second contact terminal on said planar top surface; (d) a cantilever beam having a free end and a fixed end which is attached to said first contact terminal, said free end being suprajacent said second contact terminal; (e) means for establishing an electrostatic charge attraction between said cantilever beam and said second contact terminal; and (f) a resistance layer intermediate said cantilever beam and said second contact terminal; whereby said free end of said cantilever beam may be deflected toward said second contact terminal by establishing an electrostatic charge between said first and second contact terminals.
Claim 22
Dependent Claim
125 words
Micromechanical shunt exhibiting hysteresis, comprising: (a) a relatively inflexible fixed insulating substrate having a planar top surface; (b) a first contact terminal on said planar top surface; (c) a second contact terminal on said planar top surface; (d) a cantilever beam having a free end and a fixed end which is attached to said first contact terminal, said free end being suprajacent said second contact terminal; (e) means for establishing an electrostatic charge attraction between said cantilever beam and said second contact terminal; and (f) a resistance layer intermediate said cantilever beam and said second contact terminal; whereby said free end of said cantilever beam may be deflected toward said second contact terminal by establishing an electrostatic charge between said first and second contact terminals.
Claim 23
Dependent Claim
26 words
Micromechanical shunt as in claim 19, further including a third contact terminal underlying said cantilever beam and adapted to provide electrical contact with said cantilever beam.
Claim 24
Dependent Claim
13 words
Micromechanical shunt as in claim 19, wherein said cantilever beam is primarily gold.
Claim 25
Dependent Claim
24 words
Micromechanical shunt as in claim 19, wherein said cantilever beam has a length of between about 2.5×10 -5 meters and about 5.1×10 -3 meters.
Claim 26
Dependent Claim
25 words
Micromechanical shunt as in claim 19, wherein said cantilever beam length is preferably between about 10 -4 meters and about 3.0×10 -3 meters in thickness.
Claim 27
Dependent Claim
28 words
Micromechanical shunt as in claim 19, wherein said cantilever beam length is not less than about 7.5×10 -5 meters nor more than about 7.5×10 -4 meters in length.
Claim 28
Dependent Claim
22 words
Micromechanical shunt as in claim 19, wherein said cantilever beam is between about 10 -4 and about 10 -3 meters in width.
Claim 29
Dependent Claim
23 words
Micromechanical shunt as in claim 19, wherein said cantilever beam is between about 10 -7 meters and about 10 -4 meters in thickness.
Claim 30
Dependent Claim
22 words
Micromechanical shunt as in claim 19, wherein said cantilever beam is between about 10 -7 and about 10 -5 meters in thickness.
Claim 31
Dependent Claim
26 words
Micromechanical shunt as in claim 19, wherein said resistance layer is spaced from said second contact terminal between about 10 -7 and about 10 -4 meters.
Claim 32
Dependent Claim
14 words
Micromechanical shunt as in claim 19, wherein said resistance layer is formed of germanium.
Claim 33
Dependent Claim
17 words
Micromechanical shunt as in claim 19, wherein said resistance layer is formed of an oxide of copper.
Claim 34
Dependent Claim
17 words
Micromechanical shunt as in claim 19, wherein said resistance layer is formed of silicon doped with aluminum.
References Cited (Backward Citations)
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1993-09-24 | 1994-03-26 | 1994-09-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-09-24 | 1998-03-26 | 1998-09-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-09-24 | 2002-03-26 | 2002-09-25 | $7700.00 | Window Closed / Lapsed |