Patent US5614795A successfully refreshed from Google Patents.
US5614795A
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US
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Field emission device
Assignee: Samsung SDI Co Ltd
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Filing: 1995-07-31
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Granted: 1997-03-25
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Expires: 2015-07-31
Abstract
Abstract A field emission device has a rear substrate (11), a titanium adhesive layer (12) having a striped pattern and disposed on the inner surface of the substrate (11), a tungsten cathode (13) disposed on the adhesive layer (12), a micro-tip (13') protruding from the cathode (13), an aluminum mask layer (14') having a striped pattern and disposed on the cathode (13), an insulating layer (15) having a striped pattern and disposed on the mask layer (14'), a gate (18) having a striped pattern and disposed on the insulating layer (15), and an anode (16) having a striped pattern perpendicular to the striped of the cathode (13) and disposed on a front substrate (19). The micro-tip (13') is formed by simultaneous etching of the tungsten cathode (13), the titanium adhesive layer (12), and the upper aluminum mask (14') resulting in a large internal stress in the micro-tip (13'). The residual internal stress in the micro-tip (13') results in the micro-tip (13') curving toward the anode (16) which, consequently, facilitates electron emission.
Inventors
- 👤 Jong-min Kim
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:03
CPC Classifications
H; H01; H01J; H01J1/00; H01J1/02; H01J1/30; H01J1/304; H01J1/3042
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
133 words
A field emission device comprising: a rear substrate; an adhesive layer having a striped pattern disposed on said rear substrate; a cathode, having the striped pattern, disposed on said adhesive layer; a micro-tip protruded upwardly at a predetermined protrusion angle by etching a predetermined portion of said cathode in a triangular shape; a mask layer disposed on the portion of said cathode where said micro-tip is not positioned; an insulating layer, having the striped pattern, disposed on said mask layer; a gate, having the striped pattern, disposed on said insulating layer; a front substrate arranged with a surface opposed to said rear substrate, and spaced apart by a predetermined distance; and an anode, having a striped pattern perpendicular to the striped pattern of the cathode, disposed on said surface of said front substrate.
Claim 2
Dependent Claim
133 words
A field emission device comprising: a rear substrate; an adhesive layer having a striped pattern disposed on said rear substrate; a cathode, having the striped pattern, disposed on said adhesive layer; a micro-tip protruded upwardly at a predetermined protrusion angle by etching a predetermined portion of said cathode in a triangular shape; a mask layer disposed on the portion of said cathode where said micro-tip is not positioned; an insulating layer, having the striped pattern, disposed on said mask layer; a gate, having the striped pattern, disposed on said insulating layer; a front substrate arranged with a surface opposed to said rear substrate, and spaced apart by a predetermined distance; and an anode, having a striped pattern perpendicular to the striped pattern of the cathode, disposed on said surface of said front substrate.
Claim 3
Dependent Claim
19 words
A field emission device as claimed in claim 1, wherein said adhesive layer is comprised of titanium or aluminum.
Claim 4
Dependent Claim
16 words
A field emission device as claimed in claim 1, wherein said cathode is comprised of tungsten.
Claim 5
Dependent Claim
17 words
A field emission device as claimed in claim 1, wherein said micro-tip has a predetermined protrusion angle.
Claim 6
Dependent Claim
16 words
A field emission device as claimed in claim 4, wherein said predetermined protrusion angle is 60°˜70°.
Claim 7
Dependent Claim
17 words
A field emission device as claimed in claim 1, wherein said mask layer is comprised of aluminum.
Claim 8
Dependent Claim
17 words
A field emission device as claimed in claim 1, wherein said mask layer is comprised of titanium.
Claim 9
Dependent Claim
16 words
A field emission device as claimed in claim 1, wherein said gate is comprised of chromium.
Claim 10
Dependent Claim
124 words
A field emission device, comprising: a front substrate and a rear substrate, each having inner surfaces disposed opposite to each other at a predetermined distance; an adhesive layer disposed on said inner surface of said rear substrate; an anode and a cathode disposed on the inner surface of said front substrate and on said adhesive layer, respectively; a plurality of micro-tips protruding from said cathode; a mask layer disposed on said cathode; an insulating layer disposed on said mask layer; and a gate disposed on said insulating layer; wherein said adhesive layer, said cathode, said mask layer, said insulating layer, and said gate have a first striped pattern and said anode has a second striped pattern which is perpendicular to the first striped pattern.
Claim 11
Dependent Claim
124 words
A field emission device, comprising: a front substrate and a rear substrate, each having inner surfaces disposed opposite to each other at a predetermined distance; an adhesive layer disposed on said inner surface of said rear substrate; an anode and a cathode disposed on the inner surface of said front substrate and on said adhesive layer, respectively; a plurality of micro-tips protruding from said cathode; a mask layer disposed on said cathode; an insulating layer disposed on said mask layer; and a gate disposed on said insulating layer; wherein said adhesive layer, said cathode, said mask layer, said insulating layer, and said gate have a first striped pattern and said anode has a second striped pattern which is perpendicular to the first striped pattern.
Claim 12
Dependent Claim
29 words
A field emission device according to claim 9, wherein said micro-tips are formed by etching said cathode using said mask layer by means of CF 4 --O 2 plasma.
Claim 13
Dependent Claim
19 words
A field emission device as claimed in claim 9, wherein said adhesive layer is comprised of titanium or aluminum.
Claim 14
Dependent Claim
16 words
A field emission device as claimed in claim 9, wherein said cathode is comprised of tungsten.
Claim 15
Dependent Claim
17 words
A field emission device as claimed in claim 9, wherein said micro-tips have a predetermined protrusion angle.
Claim 16
Dependent Claim
18 words
A field emission device as claimed in claim 13, wherein said predetermined protrusion angle is 60° to 70°.
Claim 17
Dependent Claim
17 words
A field emission device as claimed in claim 9, wherein said mask layer is comprised of aluminum.
Claim 18
Dependent Claim
17 words
A field emission device as claimed in claim 9, wherein said mask layer is comprised of titanium.
Claim 19
Dependent Claim
16 words
A field emission device as claimed in claim 9, wherein said gate is comprised of chromium.
Claim 20
Dependent Claim
20 words
A field emission device as claimed in claim 9, wherein the thickness of said adhesive layer is about 2,000 Å.
Claim 21
Dependent Claim
26 words
A field emission device as claimed in claim 9, wherein the thickness of the mask layer is in a range of 1,500 Å to 2,000 Å.
Claim 22
Dependent Claim
19 words
A field emission device as claimed in claim 9, wherein the thickness of the cathode is about 1 μm.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-03-24 | 2000-09-23 | 2001-03-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-03-24 | 2004-09-23 | 2005-03-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-03-24 | 2008-09-23 | 2009-03-25 | $7700.00 | Window Closed / Lapsed |