US5612082A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for making metal oxides
Assignee: Panasonic Holdings Corp
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Filing: 1994-07-26
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Granted: 1997-03-18
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Expires: 2014-07-26
Abstract
Abstract Metals are reacted in a first solvent, such as 2-methoxyethanol, to form an initial precursor comprising metal-oxide compounds dissolved in the first solvent. A second solvent, such as xylene, that does not react with the metal is added to the solution and the solution heated to distill away the first solvent and form a final precursor. The final precursor is spin-coated on an integrated circuit substrate then dried and annealed to form a thin film of a metal oxide. For metal oxides including bismuth, the bismuth precursor is added to a cold initial precursor and the final precursor is not heated after the bismuth precursor is added. The second solvent wets the substrate better than the first solvent and has a better viscosity for spin-coating, thus resulting in a denser thin film with fewer imperfections.
Inventors
- 👤 Masamichi Azuma
- 👤 Michael C. Scott
- 👤 Carlos A. Paz de Araujo
- 👤 Larry D. McMillan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 15:37
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6326; H10P14/6342; C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45561; C23C18/00; C23C18/02; C23C18/12; C23C18/1204; C23C18/1208; C23C18/1216; C23C18/1225; C23C18/125; C23C18/1279; C30; C30B; C30B29/00; C30B29/60; C30B29/68; C30B7/00; H01; H01C; H01C7/00; H01C7/10; H01C7/1013; H10B; H10B12/00; H10B12/30; H10B53/00; H10D; H10D1/00; H10D1/60; H10D1/68; H10D1/682; H10D1/684; H10D1/692; H10P14/66; H10P14/668; H10P14/69; H10P14/692; H10P14/6938; H10P14/69398
Claims Analysis
Total Claims: 47
Claim 1
Independent Claim
133 words
A method of fabricating a metal oxide thin film for use in an integrated circuit comprising the steps of: providing an integrated circuit substrate; providing an initial liquid precursor comprising at least one metal compound dissolved in a first solvent; adding a second solvent to said initial liquid precursor to form an intermediate precursor, said second solvent having a boiling point greater than that of said first solvent; heating said intermediate liquid precursor to distill off said first solvent and form a final liquid precursor that is capable of forming a metal oxide thin film having better electrical properties than the thin films formed by said initial precursor; applying said final liquid precursor to said substrate; and treating said final precursor on said substrate to form a thin film of said metal oxide.
Claim 2
Independent Claim
133 words
A method of fabricating a metal oxide thin film for use in an integrated circuit comprising the steps of: providing an integrated circuit substrate; providing an initial liquid precursor comprising at least one metal compound dissolved in a first solvent; adding a second solvent to said initial liquid precursor to form an intermediate precursor, said second solvent having a boiling point greater than that of said first solvent; heating said intermediate liquid precursor to distill off said first solvent and form a final liquid precursor that is capable of forming a metal oxide thin film having better electrical properties than the thin films formed by said initial precursor; applying said final liquid precursor to said substrate; and treating said final precursor on said substrate to form a thin film of said metal oxide.
Claim 3
Dependent Claim
51 words
A method as in claim 1 wherein said step of providing said initial liquid precursor includes providing said first solvent as a liquid that reacts with said metal and said step of adding said second solvent includes adding said second solvent as a liquid that does not react with said metal.
Claim 4
Dependent Claim
43 words
A method as in claim 1 wherein said step of heating said intermediate liquid precursor yields a final precursor liquid that wets said substrate in said step of applying said final liquid precursor to said substrate better than would said initial precursor liquid.
Claim 5
Dependent Claim
32 words
A method as in claim 1 wherein said step of providing said initial liquid precursor includes providing said metal compound from the group consisting of metal carboxylates, metal alkoxides, and metal alkoxycarboxylates.
Claim 6
Dependent Claim
67 words
A method as in claim 1 wherein said step of providing said initial liquid precursor includes providing said initial liquid precursor to yield, in said step of treating, a material selected from the group consisting of barium strontium titanate, strontium titanate, barium titanate, bismuth titanate, strontium bismuth tantalate, strontium bismuth niobate, strontium bismuth tantalum niobate, barium bismuth tantalate, lead bismuth tantalate, barium bismuth niobate, and mixtures thereof.
Claim 7
Dependent Claim
32 words
A method as in claim 1 wherein said step of adding a second solvent includes adding said second solvent as a liquid selected from the group consisting of xylenes and n-butyl acetate.
Claim 8
Dependent Claim
35 words
A method as in claim 6 wherein said first solvent in said step of providing an initial liquid precursor is 2-methoxyethanol and said second solvent in said step of adding a second solvent is xylene.
Claim 9
Dependent Claim
23 words
A method as in claim 6 wherein said second solvent in said step of adding a second solvent comprises xylene and n-butyl acetate.
Claim 10
Dependent Claim
24 words
A method as in claim 1 wherein said step of applying said frinal liquid precursor comprises spin-coating said final precursor liquid onto said substrate.
Claim 11
Independent Claim
126 words
A method of fabricating a metal oxide thin film for use in an integrated circuit comprising the steps of: providing an integrated circuit substrate; providing an initial liquid precursor comprising at least one metal compound dissolved in a first solvent and a second solvent, said second solvent having a boiling point greater than that of said first solvent; heating said initial liquid precursor to distill off said first solvent and form a final liquid precursor that is capable of forming a metal oxide thin film having better electrical properties than the thin films formed by a precursor including said first solvent; applying said final liquid precursor to said substrate; and treating said final precursor on said substrate to form a thin film of said metal oxide.
Claim 12
Independent Claim
126 words
A method of fabricating a metal oxide thin film for use in an integrated circuit comprising the steps of: providing an integrated circuit substrate; providing an initial liquid precursor comprising at least one metal compound dissolved in a first solvent and a second solvent, said second solvent having a boiling point greater than that of said first solvent; heating said initial liquid precursor to distill off said first solvent and form a final liquid precursor that is capable of forming a metal oxide thin film having better electrical properties than the thin films formed by a precursor including said first solvent; applying said final liquid precursor to said substrate; and treating said final precursor on said substrate to form a thin film of said metal oxide.
Claim 13
Dependent Claim
51 words
A method as in claim 10 wherein said step of providing an initial liquid precursor includes providing said first solvent as a liquid that reacts with said metal and said step of adding a second solvent includes adding said second solvent as a liquid that does not react with said metal.
Claim 14
Dependent Claim
35 words
A method as in claim 10 wherein said step of providing an initial liquid precursor includes providing said metal compound as one selected from the group consisting of metal carboxylates, metal alkoxides, and metal alkoxycarboxylates.
Claim 15
Dependent Claim
68 words
A method as in claim 10 wherein said step of providing an initial liquid precursor includes providing said initial liquid precursor to yield, in said step of treating said metal oxide selected from the group consisting of barium strontium titanate, strontium titanate, barium titanate, bismuth titanate, strontium bismuth tantalate, strontium bismuth niobate, strontium bismuth tantalum niobate, barium bismuth tantalate, lead bismuth tantalate, barium bismuth niobate, and mixtures thereof.
Claim 16
Dependent Claim
33 words
A method as in claim 10 wherein said step of providing an initial liquid precursor includes providing said second solvent as a liquid selected from the group consisting of xylenes and n-butyl acetate.
Claim 17
Dependent Claim
27 words
A method as in claim 14 wherein said first solvent in said step of providing an initial liquid precursor is 2-methoxyethanol and said second solvent is xylene.
Claim 18
Dependent Claim
24 words
A method as in claim 10 wherein said step of applying said final liquid precursor comprises spin-coating said final liquid precursor onto said substrate.
Claim 19
Independent Claim
108 words
A method of fabricating a metal oxide thin film for use in an integrated circuit, said method comprising the steps of: providing an integrated circuit substrate and a liquid precursor comprising a metal compound dissolved in an alcohol and a second solvent, said second solvent having a boiling point greater than that of said alcohol; heating said liquid precursor to distill off said alcohol and form a final liquid precursor comprising said metallic compound dissolved in said second solvent; applying said final liquid precursor to said substrate; and treating said precursor on said substrate to evaporate said second solvent and form a thin film of said metal oxide.
Claim 20
Independent Claim
108 words
A method of fabricating a metal oxide thin film for use in an integrated circuit, said method comprising the steps of: providing an integrated circuit substrate and a liquid precursor comprising a metal compound dissolved in an alcohol and a second solvent, said second solvent having a boiling point greater than that of said alcohol; heating said liquid precursor to distill off said alcohol and form a final liquid precursor comprising said metallic compound dissolved in said second solvent; applying said final liquid precursor to said substrate; and treating said precursor on said substrate to evaporate said second solvent and form a thin film of said metal oxide.
Claim 21
Dependent Claim
54 words
A method as in claim 17 wherein said step of providing a liquid precursor comprises the steps of: reacting a metal or a metallic compound with said first solvent to form an initial liquid precursor comprising a reactant dissolved in said first solvent; and adding a said second solvent to said initial liquid precursor.
Claim 22
Dependent Claim
28 words
A method as in claim 17 wherein said step of providing an initial liquid precursor includes providing said alcohol selected from the group consisting of 2-methoxyethanol and isopropanol.
Claim 23
Dependent Claim
11 words
A method as in claim 19 wherein said alcohol is 2-methoxyethanol.
Claim 24
Dependent Claim
22 words
A method as in claim 17 wherein said step of providing an initial liquid precursor includes providing said second solvent as xylene.
Claim 25
Dependent Claim
24 words
A method as in claim 17 wherein said step of applying said final liquid precursor comprises spin-coating said final liquid precursor onto said substrate.
Claim 26
Dependent Claim
19 words
A method as in claim 17 wherein said step of treating comprises drying said final precursor on said substrate.
Claim 27
Dependent Claim
16 words
A method as in claim 23 wherein said step of treating comprises annealing said thin film.
Claim 28
Dependent Claim
32 words
A method as in claim 17 wherein said step of providing an initial liquid precursor includes providing said metal compound from the group consisting of metal carboxylates, metal alkoxides, and metal alkoxycarboxylates.
Claim 29
Dependent Claim
69 words
A method as in claim 17 wherein said step of providing an initial liquid precursor includes a step of selecting said liquid precursor to yield, in said treating step, said metal oxide selected from the group consisting of barium strontium titanate, strontium titanate, barium titanate, bismuth titanate, strontium bismuth tantalate, strontium bismuth niobate, strontium bismuth tantalum niobate, barium bismuth tantalate, lead bismuth tantalate, barium bismuth niobate, and mixtures thereof.
Claim 30
Independent Claim
101 words
A method of making a final liquid precursor for use in manufacturing metal oxide thin films for use in integrated circuits, said method comprising the steps of: providing an initial liquid precursor comprising an oxygenated metal moiety dissolved in a first solvent; and performing a solvent exchange step on said initial liquid precursor to form said final precursor, wherein said step of performing a solvent exchange includes adding a second solvent to said initial liquid precursor, said second solvent having a boiling point greater than that of said first solvent and heating said initial liquid precursor to remove said first solvent.
Claim 31
Independent Claim
101 words
A method of making a final liquid precursor for use in manufacturing metal oxide thin films for use in integrated circuits, said method comprising the steps of: providing an initial liquid precursor comprising an oxygenated metal moiety dissolved in a first solvent; and performing a solvent exchange step on said initial liquid precursor to form said final precursor, wherein said step of performing a solvent exchange includes adding a second solvent to said initial liquid precursor, said second solvent having a boiling point greater than that of said first solvent and heating said initial liquid precursor to remove said first solvent.
Claim 32
Dependent Claim
31 words
A method of making a precursor as in claim 27 wherein said solvent exchange step comprises adding a second solvent to said liquid initial precursor and distilling off said first solvent.
Claim 33
Dependent Claim
34 words
A method of making a precursor as in claim 27 wherein said step of providing an initial liquid precursor includes providing said first solvent selected from the group consisting of carboxylic acids and alcohols.
Claim 34
Dependent Claim
38 words
A method of making a precursor as in claim 27 wherein said step of performing a solvent exchange includes adding to said initial liquid precursor a second solvent selected from the group consisting of xylenes and n-butyl acetate.
Claim 35
Dependent Claim
37 words
A method of making a precursor as in claim 27 wherein said step of providing an initial liquid precursor includes providing said initial liquid precursor from the group consisting of metal carboxylates, metal alkoxides, and metal alkoxycarboxylates.
Claim 36
Dependent Claim
71 words
A method of making a precursor as in claim 27 wherein said step of providing an initial liquid precursor includes providing said initial liquid precursor to yield in a subsequent anneal said metal oxide selected from the group consisting of barium strontium titanate, strontium titanate, barium titanate, bismuth titanate, strontium bismuth tantalate, strontium bismuth niobate, strontium bismuth tantalum niobate, barium bismuth tantalate, lead bismuth tantalate, barium bismuth niobate, and mixtures thereof.
Claim 37
Independent Claim
70 words
A method of making a final liquid precursor for use in manufacturing metal oxide thin films for use in integrated circuits, said method comprising the steps of: providing an initial liquid precursor comprising an oxygenated metallic moiety dissolved in a first solvent, said first solvent having a boiling point less than that of xylene; and performing a xylene exchange step on said initial liquid precursor to form said final precursor.
Claim 38
Independent Claim
70 words
A method of making a final liquid precursor for use in manufacturing metal oxide thin films for use in integrated circuits, said method comprising the steps of: providing an initial liquid precursor comprising an oxygenated metallic moiety dissolved in a first solvent, said first solvent having a boiling point less than that of xylene; and performing a xylene exchange step on said initial liquid precursor to form said final precursor.
Claim 39
Dependent Claim
37 words
A method of making a precursor as in claim 33 wherein said step of providing an initial liquid precursor includes providing said oxygenated metal moiety from the group consisting of metal carboxylates, metal alkoxides, and metal alkoxycarboxylates.
Claim 40
Dependent Claim
67 words
A method as in claim 33 wherein said step of providing an initial liquid precursor includes providing said initial liquid precursor to yield in a subsequent anneal said metal oxide selected from the group consisting of barium strontium titanate, strontium titanate, barium titanate, bismuth titanate, strontium bismuth tantalate, strontium bismuth niobate, strontium bismuth tantalum niobate, barium bismuth tantalate, lead bismuth tantalate, barium bismuth niobate, and mixtures thereof.
Claim 41
Dependent Claim
29 words
A method as in claim 33 wherein said step of providing an initial liquid precursor includes providing said first solvent from the group consisting of carboxylic acids and alcohols.
Claim 42
Independent Claim
146 words
A method of fabricating a metal oxide thin film containing bismuth for use in an integrated circuit, said method comprising the steps of: providing an integrated circuit substrate; providing a non-bismuth metal compound solution comprising a plurality of ingredients selected from a group consisting of non-bismuth metal alkoxides, non-bismuth metal carboxylates, and non-bismuth metal alkoxycarboxylates dissolved in a solvent; heating said non-bismuth metal compound solution to a temperature exceeding 30° C.; providing a bismuth solution comprising a bismuth compound in a second solvent; adding said bismuth solution to said metal compound solution to form said liquid precursor and; thereafter maintaining said bismuth solution and said liquid precursor at a temperature of 30° C. or less until said treating step below; applying said liquid precursor to said integrated circuit substrate; and treating said final precursor on said substrate to form a thin film of said metal oxide.
Claim 43
Independent Claim
146 words
A method of fabricating a metal oxide thin film containing bismuth for use in an integrated circuit, said method comprising the steps of: providing an integrated circuit substrate; providing a non-bismuth metal compound solution comprising a plurality of ingredients selected from a group consisting of non-bismuth metal alkoxides, non-bismuth metal carboxylates, and non-bismuth metal alkoxycarboxylates dissolved in a solvent; heating said non-bismuth metal compound solution to a temperature exceeding 30° C.; providing a bismuth solution comprising a bismuth compound in a second solvent; adding said bismuth solution to said metal compound solution to form said liquid precursor and; thereafter maintaining said bismuth solution and said liquid precursor at a temperature of 30° C. or less until said treating step below; applying said liquid precursor to said integrated circuit substrate; and treating said final precursor on said substrate to form a thin film of said metal oxide.
Claim 44
Dependent Claim
57 words
A method as in claim 37 wherein said step of providing an initial liquid precursor includes providing said non-bismuth metal compound solution to yield, after said step of adding said bismuth compound and in said treating step, said metal oxide selected from the group consisting of strontium bismuth tantalate, strontium bismuth niobate, and strontium bismuth tantalum niobate.
Claim 45
Independent Claim
93 words
A method of making a liquid precursor for use in manufacturing metal oxide thin films containing bismuth for use in integrated circuits, said method comprising the steps of: providing a non-bismuth metal compound solution at a temperature of greater than 30° C., said non-bismuth metal compound solution comprising an oxygenated metallic moiety dissolved in a solvent; cooling said non-bismuth metal compound solution to 30° C. or below; providing a bismuth solution comprising a bismuth compound in a solvent; and adding said bismuth solution to said cooled metal compound solution to form said precursor.
Claim 46
Independent Claim
93 words
A method of making a liquid precursor for use in manufacturing metal oxide thin films containing bismuth for use in integrated circuits, said method comprising the steps of: providing a non-bismuth metal compound solution at a temperature of greater than 30° C., said non-bismuth metal compound solution comprising an oxygenated metallic moiety dissolved in a solvent; cooling said non-bismuth metal compound solution to 30° C. or below; providing a bismuth solution comprising a bismuth compound in a solvent; and adding said bismuth solution to said cooled metal compound solution to form said precursor.
Claim 47
Dependent Claim
23 words
A method as in claim 39 wherein said metallic moiety includes a metal selected from the group consisting of strontium, tantalum, and niobium.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2000-03-17 | 2000-09-16 | 2001-03-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-03-17 | 2004-09-16 | 2005-03-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-03-17 | 2008-09-16 | 2009-03-18 | $7700.00 | Window Closed / Lapsed |