Patent US5610529A successfully refreshed from Google Patents.
US5610529A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Probe station having conductive coating added to thermal chuck insulator
Assignee: FormFactor Beaverton Inc
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Filing: 1995-04-28
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Granted: 1997-03-11
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Expires: 2015-04-28
Abstract
Abstract A probe station suitable for low noise measurements includes a chuck for supporting a test device and a supporting surface for the test device. The probe station has means for controlling the temperature in the vicinity of the test device by sensing the temperature and, in response to the sensing, alternatively raising or lowering the temperature. At least two layers including a first electrically conductive layer adhered to an insulator layer are disposed between the supporting surface and the chuck. The electrically conductive layer is electrically connected to one of the chuck and supporting surface.
Inventors
- 👤 Randy Schwindt
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 09:27
CPC Classifications
G; G01; G01R; G01R1/00; G01R1/02; G01R1/06; G01R19/00; G01R19/32
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
114 words
A probe station suitable to reduce the level of noise in measurements comprising: (a) a support for supporting a test device; (b) means for controlling the temperature in the vicinity of said test device by sensing said temperature and, in response to said sensing, alternatively raising or lowering said temperature; (c) a supporting surface for said test device, said supporting surface being mounted upon said support; (d) at least two layers including an electrically conductive layer adhered to an electrical insulator layer; and (e) said electrically conductive layer being electrically connected to one of said support and supporting surface and said at least two layers being located between said supporting surface and said support.
Claim 2
Dependent Claim
114 words
A probe station suitable to reduce the level of noise in measurements comprising: (a) a support for supporting a test device; (b) means for controlling the temperature in the vicinity of said test device by sensing said temperature and, in response to said sensing, alternatively raising or lowering said temperature; (c) a supporting surface for said test device, said supporting surface being mounted upon said support; (d) at least two layers including an electrically conductive layer adhered to an electrical insulator layer; and (e) said electrically conductive layer being electrically connected to one of said support and supporting surface and said at least two layers being located between said supporting surface and said support.
Claim 3
Dependent Claim
18 words
The probe station of claim 1 wherein said supporting surface is a surface of said electrically conductive layer.
Claim 4
Dependent Claim
12 words
The probe station of claim 1 wherein said support is electrically conductive.
Claim 5
Dependent Claim
13 words
The probe station of claim 1 wherein said supporting surface is electrically conductive.
Claim 6
Dependent Claim
36 words
The probe station of claim 1 wherein said at least two layers have respective mutually facing areas, said layers being adhered to each other throughout at least a major portion of said respective mutually facing areas.
Claim 7
Dependent Claim
30 words
The probe station of claim 1 including a further electrically conductive layer adhered to said insulator layer and being electrically connected to the other of said support and supporting surface.
Claim 8
Dependent Claim
30 words
The probe station of claim 1 wherein said insulator layer has a peripheral edge and said electrically conductive layer has a peripheral edge, said peripheral edges terminating into free space.
Claim 9
Dependent Claim
16 words
The probe station of claim 7 wherein said peripheral edges are substantially coextensive with each other.
Claim 10
Dependent Claim
125 words
A probe station suitable to reduce the level of noise in measurements comprising: (a) a support for supporting a test device; (b) means for controlling the temperature in the vicinity of said test device by sensing said temperature and, in response to said sensing, alternatively raising or lowering said temperature; (c) a supporting surface for said test device, said supporting surface being mounted upon said support; (d) a sandwich structure of at least three layers including a first electrically conductive layer adhered to one side of an electrical insulator layer and a second electrically conductive layer adhered to an opposite side of said insulator layer; and (e) said sandwich structure of said at least three layers being located between said supporting surface and said support.
Claim 11
Dependent Claim
125 words
A probe station suitable to reduce the level of noise in measurements comprising: (a) a support for supporting a test device; (b) means for controlling the temperature in the vicinity of said test device by sensing said temperature and, in response to said sensing, alternatively raising or lowering said temperature; (c) a supporting surface for said test device, said supporting surface being mounted upon said support; (d) a sandwich structure of at least three layers including a first electrically conductive layer adhered to one side of an electrical insulator layer and a second electrically conductive layer adhered to an opposite side of said insulator layer; and (e) said sandwich structure of said at least three layers being located between said supporting surface and said support.
Claim 12
Dependent Claim
27 words
The probe station of claim 9 wherein said supporting surface is a surface of one of said first electrically conductive layer and said second electrically conductive layer.
Claim 13
Dependent Claim
12 words
The probe station of claim 9 wherein said support is electrically conductive.
Claim 14
Dependent Claim
13 words
The probe station of claim 9 wherein said supporting surface is electrically conductive.
Claim 15
Dependent Claim
42 words
The probe station of claim 9 wherein said at least three layers have respective mutually facing areas, said first and second electrically conductive layers being adhered to said insulator layer throughout at least a major portion of said respective mutually facing areas.
Claim 16
Dependent Claim
36 words
The probe station of claim 9 wherein said insulator layer has a peripheral edge and said first and second electrically conductive layers each have a respective peripheral edge, said peripheral edges all terminating into free space.
Claim 17
Dependent Claim
16 words
The probe station of claim 14 wherein said peripheral edges are substantially coextensive which each other.
Claim 18
Dependent Claim
18 words
The probe station of claim 9 wherein said first electrically conductive layer is electrically connected to said support.
Claim 19
Dependent Claim
19 words
The probe station of claim 9 wherein said first electrically conductive layer is electrically connected to said supporting surface.
Claim 20
Dependent Claim
18 words
The probe station of claim 17 wherein said second electrically conductive layer is electrically connected to said support.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-03-10 | 2000-09-09 | 2001-03-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-03-10 | 2004-09-09 | 2005-03-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-03-10 | 2008-09-09 | 2009-03-11 | $7700.00 | Window Closed / Lapsed |