Patent US5610087A successfully refreshed from Google Patents.
US5610087A
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US
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Method for fabricating narrow base width lateral bipolar junction transistor, on SOI layer
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1995-11-09
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Granted: 1997-03-11
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Expires: 2015-11-09
Abstract
Abstract A process has been developed in which narrow base width, lateral bipolar junction transistors, and short channel length MOSFET devices, can be simultaneously fabricated, in a silicon on insulator layer. The narrow base width is defined by the width of an insulator sidewall spacer, formed on the sides of a polysilicon gate structure. The narrow base width, resulting in increased transistor gain and switching speed, along with reductions in parasitic capacitances, due to placing devices in a silicon on insulator layer, result in enhanced device performance.
Inventors
- 👤 Ching-Hsiang Hsu
- 👤 Shyh-Chyi Wong
- 👤 Mong-Song Liang
- 👤 Steve S. Chung
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 21:55
CPC Classifications
H; H10; H10D; H10D10/00; H10D10/01; H10D10/041; H10D10/311; H10D86/00; H10D86/01; Y; Y10; Y10S; Y10S148/00; Y10S148/009
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
385 words
A method for fabricating silicon devices in a layer of silicon on insulator, on a semiconductor substrate, comprising the steps of: providing said semiconductor substrate; providing said silicon on insulator layer, on said semiconductor substrate; growing field oxide regions on specific areas of said silicon on insulator layer; growing a first insulator layer on surface of said silicon on insulator layer, not covered by said field oxide regions; depositing a polysilicon layer on said first insulator layer and on said field oxide regions; ion implanting a first conductivity imparting dopant into said polysilicon layer; patterning of said polysilicon layer to form polysilicon gate structure; first photoresist masking to expose only a first specific region of said silicon on insulator layer; ion implanting a second conductivity imparting dopant into said first specific region of silicon on insulator layer, not covered by said first photoresist masking, not covered by said field oxide regions, and not covered by said polysilicon gate structure; removal of said first photoresist masking; deposition of a second insulator layer; anisotropic etching of said second insulator layer to form insulator sidewall spacer on sides of said polysilicon gate structure; second photoresist masking to expose only the said first specific region of said silicon on insulator layer; ion implanting a third conductivity imparting dopant into said first specific region of silicon on insulator layer, not covered by said second photoresist masking, not covered by said field oxide region, not covered by said polysilicon gate structure, and not covered by said insulator sidewall spacer; removal of said second photoresist masking; third photoresist masking to expose only a second specific region of said silicon on insulator layer; ion implanting a fourth conductivity imparting dopant into said second specific region of said silicon on insulator layer, not covered by said third photoresist masking, not covered by said field oxide regions, not covered by said polysilicon gate structure, and not covered by said insulator sidewall spacer; removal of said third photoresist masking; deposition of a third insulator layer; opening contact holes in said third insulator layer, to said first specific region, and to said second specific region of said silicon on insulator layer; deposition of a metal; and forming metal contact structures to said first specific region, and to said second specific region of said silicon on insulator layer.
Claim 2
Independent Claim
385 words
A method for fabricating silicon devices in a layer of silicon on insulator, on a semiconductor substrate, comprising the steps of: providing said semiconductor substrate; providing said silicon on insulator layer, on said semiconductor substrate; growing field oxide regions on specific areas of said silicon on insulator layer; growing a first insulator layer on surface of said silicon on insulator layer, not covered by said field oxide regions; depositing a polysilicon layer on said first insulator layer and on said field oxide regions; ion implanting a first conductivity imparting dopant into said polysilicon layer; patterning of said polysilicon layer to form polysilicon gate structure; first photoresist masking to expose only a first specific region of said silicon on insulator layer; ion implanting a second conductivity imparting dopant into said first specific region of silicon on insulator layer, not covered by said first photoresist masking, not covered by said field oxide regions, and not covered by said polysilicon gate structure; removal of said first photoresist masking; deposition of a second insulator layer; anisotropic etching of said second insulator layer to form insulator sidewall spacer on sides of said polysilicon gate structure; second photoresist masking to expose only the said first specific region of said silicon on insulator layer; ion implanting a third conductivity imparting dopant into said first specific region of silicon on insulator layer, not covered by said second photoresist masking, not covered by said field oxide region, not covered by said polysilicon gate structure, and not covered by said insulator sidewall spacer; removal of said second photoresist masking; third photoresist masking to expose only a second specific region of said silicon on insulator layer; ion implanting a fourth conductivity imparting dopant into said second specific region of said silicon on insulator layer, not covered by said third photoresist masking, not covered by said field oxide regions, not covered by said polysilicon gate structure, and not covered by said insulator sidewall spacer; removal of said third photoresist masking; deposition of a third insulator layer; opening contact holes in said third insulator layer, to said first specific region, and to said second specific region of said silicon on insulator layer; deposition of a metal; and forming metal contact structures to said first specific region, and to said second specific region of said silicon on insulator layer.
Claim 3
Dependent Claim
47 words
The method of claim 1, wherein said silicon on insulator layer is produced by the SIMOX process, resulting in a P type silicon layer, having a <100> crystallographic orientation, with a resistivity between about 15 to 25 ohm--cm, and a thickness between about 500 to 2000 Angstroms.
Claim 4
Dependent Claim
37 words
The method of claim 1, wherein said first insulator layer is silicon dioxide, thermally grown, in a oxygen--steam ambient, at a temperature between about 800° to 1000° C., to a thickness between about 40 to 200 Angstroms.
Claim 5
Dependent Claim
33 words
The method of claim 1, wherein said polysilicon layer is deposited intrinsically, using LPCVD processing, at a temperature between about 500° to 650° C., to a thickness between about 1200 to 3000 Angstroms.
Claim 6
Dependent Claim
35 words
The method of claim 1, wherein said first conductivity imparting dopant is phosphorous, ion implanted at an energy between about 50 to 100 Kev., at a dose between about 1E14 to 1E16 atoms/cm 2 .
Claim 7
Dependent Claim
35 words
The method of claim 1, wherein said second conductivity imparting dopant is boron, ion implanted at an energy between about 30 to 80 Kev., at a dose between about 1E12 to 1E14 atoms/cm 2 .
Claim 8
Dependent Claim
37 words
The method of claim 1, wherein said second insulator layer is silicon oxide, deposited using either LPCVD or PECVD processing, at a temperature between about 600° to 800° C., to thickness between about 800 to 2500 Angstroms.
Claim 9
Dependent Claim
22 words
The method of claim 1, wherein said insulator sidewall spacer is formed by anisotropic RIE processing, using CHF 3 as an etchant.
Claim 10
Dependent Claim
35 words
The method of claim 1, wherein said third conductivity imparting dopant is arsenic, ion implanted at an energy between about 30 to 80 Kev., at a dose between about 1E14 to 1E16 atoms/cm 2 .
Claim 11
Dependent Claim
35 words
The method of claim 1, wherein said fourth conductivity imparting dopant is boron, ion implanted at an energy between about 30 to 80 Kev., at a dose between about 1E14 to 1E16 atoms/cm 2 .
Claim 12
Independent Claim
481 words
A method for fabricating lateral bipolar junction transistors and MOSFET devices, in a layer of silicon on insulator, on a semiconductor substrate, comprising the steps of: providing said semiconductor substrate; providing said silicon on insulator layer, on said semiconductor substrate; growing field oxide regions on specific areas of said silicon on insulator layer; growing a first insulator layer on surface of said silicon on insulator layer, not covered by said field oxide regions; depositing a polysilicon layer on said first insulator layer and on said field oxide regions; ion implanting a first conductivity imparting dopant into said polysilicon layer; patterning of said polysilicon layer to form polysilicon gate structure; first photoresist masking to expose a first specific region of said silicon on insulator layer, to be used for said lateral bipolar junction transistor; ion implanting a second conductivity imparting dopant into said first specific region of said silicon on insulator layer, not covered by said first photoresist masking, not covered by said field oxide regions, and not covered by said polysilicon gate structure, to be used for base region of said lateral bipolar junction transistor and simultaneously forming a collector region; removal of said first photoresist masking; deposition of a second insulator layer; anisotropic etching of said second insulator layer to form insulator sidewall spacer on sides of said polysilicon gate structure; second photoresist masking to expose said first specific region of said silicon on insulator layer, to be used for said lateral bipolar junction transistor; ion implanting a third conductivity imparting dopant into said first specific region of said silicon on insulator layer, not covered by said second photoresist masking, not covered by said field oxide regions, not covered by said polysilicon gate structure, and not covered by said insulator sidewall spacer, to form emitter region of said lateral bipolar junction transistor; removal of said second photoresist masking; third photoresist masking to expose a second specific region of said silicon on insulator layer, to be used for said MOSFET device; ion implanting a fourth conductivity imparting dopant into said second specific region of said silicon on insulator layer, not covered by said third photoresist masking, not covered by said field oxide regions, not covered by said polysilicon gate structure, and not covered by said insulator sidewall spacer, to form source and drain regions of said MOSFET device; deposition of a third insulator layer; opening contact holes to said emitter region, to said base region, and to said collector region, of said lateral bipolar junction transistor, and opening contact holes to said source and drain regions, and to said polysilicon gate structure, of said MOSFET device; deposition of a metal; and forming metal contact structures to said emitter region, to said base region, and to said collector region, of said lateral bipolar junction transistor, and to said source and drain regions, and to said polysilicon gate structure, of said MOSFET device.
Claim 13
Independent Claim
481 words
A method for fabricating lateral bipolar junction transistors and MOSFET devices, in a layer of silicon on insulator, on a semiconductor substrate, comprising the steps of: providing said semiconductor substrate; providing said silicon on insulator layer, on said semiconductor substrate; growing field oxide regions on specific areas of said silicon on insulator layer; growing a first insulator layer on surface of said silicon on insulator layer, not covered by said field oxide regions; depositing a polysilicon layer on said first insulator layer and on said field oxide regions; ion implanting a first conductivity imparting dopant into said polysilicon layer; patterning of said polysilicon layer to form polysilicon gate structure; first photoresist masking to expose a first specific region of said silicon on insulator layer, to be used for said lateral bipolar junction transistor; ion implanting a second conductivity imparting dopant into said first specific region of said silicon on insulator layer, not covered by said first photoresist masking, not covered by said field oxide regions, and not covered by said polysilicon gate structure, to be used for base region of said lateral bipolar junction transistor and simultaneously forming a collector region; removal of said first photoresist masking; deposition of a second insulator layer; anisotropic etching of said second insulator layer to form insulator sidewall spacer on sides of said polysilicon gate structure; second photoresist masking to expose said first specific region of said silicon on insulator layer, to be used for said lateral bipolar junction transistor; ion implanting a third conductivity imparting dopant into said first specific region of said silicon on insulator layer, not covered by said second photoresist masking, not covered by said field oxide regions, not covered by said polysilicon gate structure, and not covered by said insulator sidewall spacer, to form emitter region of said lateral bipolar junction transistor; removal of said second photoresist masking; third photoresist masking to expose a second specific region of said silicon on insulator layer, to be used for said MOSFET device; ion implanting a fourth conductivity imparting dopant into said second specific region of said silicon on insulator layer, not covered by said third photoresist masking, not covered by said field oxide regions, not covered by said polysilicon gate structure, and not covered by said insulator sidewall spacer, to form source and drain regions of said MOSFET device; deposition of a third insulator layer; opening contact holes to said emitter region, to said base region, and to said collector region, of said lateral bipolar junction transistor, and opening contact holes to said source and drain regions, and to said polysilicon gate structure, of said MOSFET device; deposition of a metal; and forming metal contact structures to said emitter region, to said base region, and to said collector region, of said lateral bipolar junction transistor, and to said source and drain regions, and to said polysilicon gate structure, of said MOSFET device.
Claim 14
Dependent Claim
46 words
The method of claim 11, wherein said silicon on insulator layer is obtained via the SIMOX process, resulting in a P type silicon layer, having an <100> crystallographic orientation, with a resistivity between about 15 to 25ohm--cm, and a thickness between about 500 to 2000 Angstroms.
Claim 15
Dependent Claim
38 words
The method of claim 11, wherein said first insulator layer is silicon dioxide, thermally grown in an oxygen steam ambient, at a temperature between about 800° to 1000° C., to a thickness between about 40 to 200 Angstroms.
Claim 16
Dependent Claim
32 words
The method of claim 11, wherein said polysilicon layer is deposited using LPCVD processing, at a temperature between about 500° to 650° C., to a thickness between about 1200 to 3000 Angstroms.
Claim 17
Dependent Claim
35 words
The method of claim 11, wherein said first conductivity imparting dopant is phosphorous, ion implanted at an energy between about 50 to 100 Kev., at a dose between about 1E14 to 1E16 atoms/cm 2 .
Claim 18
Dependent Claim
47 words
The method of claim 11, wherein said second conductivity imparting dopant, used to form said base region of said lateral bipolar junction transistor, is boron, ion implanted at an energy between about 30 to 80 Kev., at a dose between about 1E12 to 1E14 atoms/cm 2 .
Claim 19
Dependent Claim
37 words
The method of claim 11, wherein said second insulator layer is silicon oxide, deposited using either LPCVD or PECVD processing, at a temperature between about 600° to 800° C., to thickness between about 800 to 2500 Angstrom.
Claim 20
Dependent Claim
23 words
The method of claim 11, wherein said insulator sidewall spacer is formed via anisotropic, reactive ion etching, using CHF 3 as an etchant.
Claim 21
Dependent Claim
57 words
The method of claim 11, wherein said third conductivity imparting dopant, used to form said emitter region, and used to define final width of said base region, of said lateral bipolar junction transistor, is arsenic, ion implanted at an energy between about 30 to 80 Kev., at a dose between about 1E14 to 1E16 atoms/c 2 .
Claim 22
Dependent Claim
47 words
The method of claim 11, wherein said fourth conductivity imparting dopant, used to form said source and drain regions of said MOSFET device, is boron, ion implanted at an energy between about 30 to 80 Kev., at a dose between about 1E14 to 1E16 atoms/c 2 .
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2000-03-10 | 2000-09-09 | 2001-03-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-03-10 | 2004-09-09 | 2005-03-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-03-10 | 2008-09-09 | 2009-03-11 | $7700.00 | Window Closed / Lapsed |