US5608943A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for removing process liquid
Assignee: Tokyo Electron Ltd
•
Filing: 1994-08-22
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Granted: 1997-03-11
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Expires: 2014-08-22
Abstract
Abstract A resist processing apparatus has a washing nozzle inclined outward at a predetermined angle, for jetting a washing liquid to a vicinity of the undersurface of the peripheral portion of an article to be processed, and a collecting device for collecting the washing liquid from a portion above the article. The washing liquid is supplied by the force of the jet and the centrifugal force of the washing liquid from the washing nozzle to the undersurface of the article to remove coated films formed on the peripheral portion of the undersurface of the article. The washing liquid further reaches the upper surface of the article through the peripheral edge of the article. The width of the coated films to be removed is adjusted by properly regulating the amount of flow and the sucked amount of the washing liquid determined by its viscosity. The unnecessary coated films not only on the upper surface and the undersurface of the article but also on the vertical edge of the peripheral portion of the article are removed by supplying the washing liquid from the washing nozzle provided under the undersurface of the article.
Inventors
- 👤 Nobuo Konishi
- 👤 Kenji Sekiguchi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 14:05
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/16; G03F7/168; H; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; H10P72/0406; H10P72/0411; H10P72/0414; B; B08; B08B; B08B3/00; B08B3/02; B08B3/022; B08B3/04; B08B3/041; Y; Y10; Y10S; Y10S134/00; Y10S134/902
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
112 words
An apparatus for an article having a processing liquid thereon comprising: rotating means for holding and rotating one of said article to be processed; a washing nozzle for jetting a washing liquid to a peripheral portion of an undersurface of said article at a first predetermined angle; means for guiding the washing liquid jetted from the nozzle from the peripheral portion of the undersurface of the article through a peripheral edge to a peripheral portion of the upper surface thereof while the washing liquid dissolves the part of the process liquid layer; and collecting means for collecting said washing liquid from the upper surface of said article at a second predetermined angle.
Claim 2
Independent Claim
112 words
An apparatus for an article having a processing liquid thereon comprising: rotating means for holding and rotating one of said article to be processed; a washing nozzle for jetting a washing liquid to a peripheral portion of an undersurface of said article at a first predetermined angle; means for guiding the washing liquid jetted from the nozzle from the peripheral portion of the undersurface of the article through a peripheral edge to a peripheral portion of the upper surface thereof while the washing liquid dissolves the part of the process liquid layer; and collecting means for collecting said washing liquid from the upper surface of said article at a second predetermined angle.
Claim 3
Dependent Claim
28 words
An apparatus according to claim 1, wherein said first predetermined angle is within a range between 60° to 80° with respect to a horizontal plane of said article.
Claim 4
Dependent Claim
28 words
An apparatus according to claim 1, wherein said second predetermined angle is within a range between 45° to 80° with respect to a horizontal plane of said article.
Claim 5
Dependent Claim
40 words
An apparatus according to claim 1, wherein a guide plate is disposed at a predetermined distance from and under said article, for receiving said washing liquid between an upper surface of said guide plate and said undersurface of said article.
Claim 6
Dependent Claim
27 words
An apparatus according to claim 4, wherein a distance between said upper surface of said guide plate and said undersurface of said article is maximum 5 mm.
Claim 7
Dependent Claim
24 words
An apparatus according to claim 1, wherein said washing liquid contains at least one common chemical component as a solvent in said processing liquid.
Claim 8
Dependent Claim
29 words
An apparatus according to claim 1, further comprising a moving mechanism for simultaneously moving said washing nozzle and said collecting means to predetermined positions with respect to said article.
Claim 9
Dependent Claim
24 words
An apparatus according to claim 1, further comprising adjusting means for adjusting the first predetermined angle of said washing liquid from said washing nozzle.
Claim 10
Dependent Claim
29 words
An apparatus according to claim 1, wherein said sucking means is provided with a gas-liquid separator for separating gases and liquids and separately collecting said gases and said liquids.
Claim 11
Dependent Claim
28 words
A resist processing apparatus according to claim 1, wherein said washing nozzle means defines at least one slit-like outlet extending crosswise of said peripheral portion of said article.
Claim 12
Independent Claim
192 words
An apparatus for removing a part of a processing liquid layer attached to a peripheral portion of an upper surface, a peripheral edge, and a peripheral portion of an undersurface of a circular substrate having a substantially circular edge and a cutout linear edge comprising: means for supporting and rotating the substrate; washing nozzle means for jetting a washing liquid to the peripheral portion of the undersurface of the substrate; means for guiding the washing liquid jetted from the nozzle means to the peripheral portion of the upper surface of the substrate from the peripheral portion of the undersurface through the peripheral edge, while the washing liquid dissolves the part of the process liquid layer; means for sucking the washing liquid and dissolved processing liquid from the peripheral portion of the upper surface of the article; and means for keeping the washing nozzle means and sucking means against the rotating substrate so that the washing liquid is jetted to the peripheral portion of the undersurface of the substrate, and the washing liquid and dissolved processing liquid are sucked from the peripheral portion of the undersurface of the substrate during a washing operation.
Claim 13
Independent Claim
192 words
An apparatus for removing a part of a processing liquid layer attached to a peripheral portion of an upper surface, a peripheral edge, and a peripheral portion of an undersurface of a circular substrate having a substantially circular edge and a cutout linear edge comprising: means for supporting and rotating the substrate; washing nozzle means for jetting a washing liquid to the peripheral portion of the undersurface of the substrate; means for guiding the washing liquid jetted from the nozzle means to the peripheral portion of the upper surface of the substrate from the peripheral portion of the undersurface through the peripheral edge, while the washing liquid dissolves the part of the process liquid layer; means for sucking the washing liquid and dissolved processing liquid from the peripheral portion of the upper surface of the article; and means for keeping the washing nozzle means and sucking means against the rotating substrate so that the washing liquid is jetted to the peripheral portion of the undersurface of the substrate, and the washing liquid and dissolved processing liquid are sucked from the peripheral portion of the undersurface of the substrate during a washing operation.
Claim 14
Dependent Claim
53 words
The apparatus according to claim 11, wherein said keeping means includes means for supporting the washing nozzle means and the sucking means, and means for moving the supporting means when the washing liquid is jetted to the portion near the cut-out linear edge, and for fixing the supporting means in a stationary state.
Claim 15
Dependent Claim
44 words
The apparatus according to claim 12, further comprising means for sensing the substantially circular edge and the cut-out linear edge and outputting an edge-information signal when the substrate is rotated wherein said moving means selectively moves the supporting means according to the edge-information signals.
Claim 16
Independent Claim
119 words
An apparatus for removing a part of a processing liquid layer attached to a peripheral portion of an upper surface, a peripheral edge, and a peripheral portion of an undersurface of an article comprising: washing nozzle means for jetting a washing liquid to the peripheral portion of the undersurface of the article; means for guiding the washing liquid jetted from the nozzle means to the peripheral portion of the upper surface of the article from the peripheral portion of the undersurface through the peripheral edge, while the washing liquid dissolves the part of the process liquid layer; and means for sucking the washing liquid and dissolved processing liquid from the peripheral portion of the upper surface of the article.
Claim 17
Independent Claim
119 words
An apparatus for removing a part of a processing liquid layer attached to a peripheral portion of an upper surface, a peripheral edge, and a peripheral portion of an undersurface of an article comprising: washing nozzle means for jetting a washing liquid to the peripheral portion of the undersurface of the article; means for guiding the washing liquid jetted from the nozzle means to the peripheral portion of the upper surface of the article from the peripheral portion of the undersurface through the peripheral edge, while the washing liquid dissolves the part of the process liquid layer; and means for sucking the washing liquid and dissolved processing liquid from the peripheral portion of the upper surface of the article.
Claim 18
Dependent Claim
80 words
The apparatus according to claim 14, further including sensing means for detecting the thickness of the part of the processing liquid layer attached to the peripheral edge of the substrate to output a detected signal; and means for controlling at least one of the position and/or angle of the washing nozzle means and the sucking means, an amount of the washing liquid jetted from the nozzle means, and a suction force of the sucking means according to the detected signal.
Claim 19
Dependent Claim
38 words
An apparatus according to claim 15, further comprising a guide plate disposed under said article, for receiving said washing liquid in a space defined between an upper surface of said guide plate and said undersurface of said article.
Claim 20
Dependent Claim
31 words
A resist processing apparatus according to claim 16, wherein a distance between said upper surface of said guide plate and said undersurface of said article is less than approximately 5 mm.
Claim 21
Dependent Claim
24 words
An apparatus according to claim 15, wherein said washing liquid contains at least one common chemical component as a solvent in said processing liquid.
Claim 22
Dependent Claim
29 words
An apparatus according to claim 15, further comprising a moving mechanism for simultaneously moving said washing nozzle and said collecting means to predetermined positions with respect to said article.
Claim 23
Dependent Claim
29 words
An apparatus according to claim 15, wherein said sucking means is provided with a gas-liquid separator for separating gases and liquids and separately collecting said gases and said liquids.
Claim 24
Dependent Claim
26 words
An apparatus according to claim 15, wherein said washing nozzle means defines at least one slit-like outlet extending crosswise of said peripheral portion of said article.
Claim 25
Dependent Claim
29 words
The apparatus according to claim 14, wherein said washing nozzle means is inclined at an angle ranging between 60° to 80° with respect to the undersurface of the article.
Claim 26
Dependent Claim
23 words
An apparatus according to claim 22, further comprising adjusting means for adjusting the inclined angle of said washing liquid from said washing nozzle.
Claim 27
Dependent Claim
29 words
The apparatus according to claim 14, wherein said sucking means is inclined at an angle ranging between 45° to 80° with respect to the upper surface of the article.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-03-10 | 2000-09-09 | 2001-03-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-03-10 | 2004-09-09 | 2005-03-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-03-10 | 2008-09-09 | 2009-03-11 | $7700.00 | Window Closed / Lapsed |