US4982694A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Automatic coating system
Assignee: Tokyo Electron Ltd
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Filing: 1989-02-07
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Granted: 1991-01-08
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Expires: 2009-02-07
Abstract
Abstract An automatic coating system includes a coating apparatus for coating a coating material on an object to be coated in accordance with a coating operation including a plurality of steps, a memory for storing operation programs of a series of steps, a step updating key for inputting a signal for operating the series of steps of the coating apparatus one by one, and a CPU for starting one step of the coating apparatus on the basis of the program when the signal is input. After the one step of the coating apparatus is finished, the next step is not started until the step updating key is operated.
Inventors
- 👤 Masashi Moriyama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 09:05
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0448; B; B05; B05C; B05C11/00; B05C11/02; B05C11/08; B05C11/10; B05C11/1002; B05C11/1015; B05C11/1021; H10P72/0402; H10P72/0404; H10P72/0406; H10P72/06; H10P72/0604
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
75 words
An automatic coating system, comprising: coating means for coating a coating material on an object to be coated in accordance with a coating operation which includes a plurality of steps; input means for manually inputting a signal for operating a single step of said plurality of steps; operation starting means for starting said single step when the signal is input; and operation stopping means for automatically stopping the coating operation when the step is finished.
Claim 2
Dependent Claim
75 words
An automatic coating system, comprising: coating means for coating a coating material on an object to be coated in accordance with a coating operation which includes a plurality of steps; input means for manually inputting a signal for operating a single step of said plurality of steps; operation starting means for starting said single step when the signal is input; and operation stopping means for automatically stopping the coating operation when the step is finished.
Claim 3
Dependent Claim
69 words
A system according to claim 1, further comprising memory means for storing processing conditions for various types of objects to be coated, and control means for controlling said coating means so that said coating means is operated at one of said processing conditions appropriate for the object to be coated, and executing the respective steps of said coating means on the basis of said one of said processing conditions.
Claim 4
Dependent Claim
18 words
A system according to claim 1, further comprising memory means for storing operation programs of said coating means.
Claim 5
Dependent Claim
19 words
A system according to claim 3, further comprising editing means for editing the operation programs of said coating means.
Claim 6
Dependent Claim
30 words
A system according to claim 1, further comprising: a chuck for affixing the object to be coated, said chuck having a diameter substantially smaller than the object to be coated.
Claim 7
Dependent Claim
24 words
A system according to claim 5, further comprising: spraying means for washing the circumferential and the lower surface of the object to be coated.
Claim 8
Dependent Claim
30 words
A system according to claim 1, wherein said coating means includes an object conveyor apparatus and a coating apparatus for coating a coating material on said object to be coated.
Claim 9
Dependent Claim
46 words
A system according to claim 7, wherein said coating apparatus includes fixing means for fixing said object to be coated, rotating means for rotating said object to be coated, and supplying means for supplying the coating material on the surface of said object to be coated.
Claim 10
Dependent Claim
21 words
A system according to claim 8, further comprising cleaning means for cleaning a rear surface of said object to be coated.
Claim 11
Dependent Claim
116 words
Automatic coating system, comprising: coating means for coating a coating material on an object to be coated in accordance with a coating operation which includes a plurality of steps; memory means for storing operation programs of a series of steps of said coating means; input means for manually inputting a signal for operating a single step of said plurality of steps; and a CPU for receiving the signal from said input means and allowing said coating means to start said step and to stop the coating operation when the step is finished, said CPU performing the series of steps on the basis of the programs stored in said inputting means by repeatedly operating said inputting means.
Claim 12
Dependent Claim
116 words
Automatic coating system, comprising: coating means for coating a coating material on an object to be coated in accordance with a coating operation which includes a plurality of steps; memory means for storing operation programs of a series of steps of said coating means; input means for manually inputting a signal for operating a single step of said plurality of steps; and a CPU for receiving the signal from said input means and allowing said coating means to start said step and to stop the coating operation when the step is finished, said CPU performing the series of steps on the basis of the programs stored in said inputting means by repeatedly operating said inputting means.
Claim 13
Dependent Claim
112 words
An automatic coating system, comprising: coating means for coating a coating material on an object to be coated in accordance with a coating operation which includes a plurality of steps; input means for manually inputting a signal for operating a single step of said plurality of steps; operation starting means for starting said single step when the signal is input; and operation stopping means for automatically stopping the coating operation when the step is finished; wherein said coating means includes a heating mechanism, coating mechanism, and a conveyor mechanism, said conveyor mechanism conveying said object along a path, and said heating and coating mechanisms being located on one side of said path.
Claim 14
Dependent Claim
112 words
An automatic coating system, comprising: coating means for coating a coating material on an object to be coated in accordance with a coating operation which includes a plurality of steps; input means for manually inputting a signal for operating a single step of said plurality of steps; operation starting means for starting said single step when the signal is input; and operation stopping means for automatically stopping the coating operation when the step is finished; wherein said coating means includes a heating mechanism, coating mechanism, and a conveyor mechanism, said conveyor mechanism conveying said object along a path, and said heating and coating mechanisms being located on one side of said path.
Claim 15
Dependent Claim
17 words
A system according to claim 11, wherein said conveyor mechanism includes a plurality of object holding members.
Claim 16
Dependent Claim
17 words
A system according to claim 11, wherein said conveyor mechanism includes a plurality of object moving members.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-01-07 | 1994-07-09 | 1995-01-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-01-07 | 1998-07-09 | 1999-01-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-01-07 | 2002-07-09 | 2003-01-08 | $7700.00 | Window Closed / Lapsed |