Image projection method and semiconductor device manufacturing method using the same

Claim 2

In an image projection method wherein a fine pattern of an original is illuminated by illumination light and diffraction light caused by the fine pattern is projected to a pupil of a projection optical system, for projection of an image of the fine pattern, the improvement comprising: providing, as the original, an edge emphasis type phase shift reticle in a path of an illumination light; and illuminating the original obliquely with the illumination light to direct a zeroth order diffraction light and one of two first order diffraction lights to the pupil of the projection optical system, wherein the illumination light defines, on the pupil, a ring-like effective light source having its center coinciding with the center of the pupil and the ring-like effective light source comprises a ring-like effective light source of substantially rectangular shape.

Claim 3

A method according to claim 1, wherein the reticle comprises a light blocking portion and a phase shift film formed on the light blocking portion, and wherein an amount of overhang of the phase shift film beyond the light blocking portion is not greater than 0.2 λ/NA when converted with respect to an image plane of the projection optical system, λ being the wavelength of the illumination light and NA being the numerical aperture of the projection optical system.

Claim 4

A method according to claim 1, wherein the length of each side of an inside rectangular periphery of the effective light source is in a range of 0.3 through 0.9 and the length of each side of an outside rectangular periphery of the effective light source is in a range of 0.6 through 1.8, where the radius of the pupil is taken as 1.

Claim 5

A method according to claim 1, wherein the ring-like effective light source satisfies a relation 0.25 V≦(a+b)/2≦0.6 V where V is the radius of the pupil, a is a half of the length of each side of an inside rectangular periphery, b is a half of the length of each side of an outside rectangular periphery.

Claim 6

A method according to claim 1, wherein the inside and outside rectangular peripheries of the ring-like effective light source extend along the directions of elongation of longitudinal and transverse patterns of the fine pattern, respectively.

Claim 7

In an image projection method wherein a fine pattern of an original is illuminated by illumination light and diffraction light caused by the fine pattern is protected to a pupil of a projection optical system, for projection of an image of the fine pattern, the improvement comprising: providing, as the original, an edge emphasis type phase shift reticle in a path of an illumination light; and illuminating the original obliquely with the illumination light to direct a zeroth order diffraction light and one of two first order diffraction lights to the pupil of the projection optical system, wherein, when an x-y coordinate system has its origin coinciding with the center of the pupil and its x and y axes extending along directions of elongation of longitudinal and transverse patterns of the fine pattern, the original is illuminated with such light that defines an effective light source having light source portions disposed in four quadrants of the x-y coordinate system and having a higher intensity than at the center of the pupil and on the x and y axes.

Claim 8

In an image projection method wherein a fine pattern of an original is illuminated by illumination light and diffraction light caused by the fine pattern is protected to a pupil of a projection optical system, for projection of an image of the fine pattern, the improvement comprising: providing, as the original, an edge emphasis type phase shift reticle in a path of an illumination light; and illuminating the original obliquely with the illumination light to direct a zeroth order diffraction light and one of two first order diffraction lights to the pupil of the projection optical system, wherein, when an x-y coordinate system has its origin coinciding with the center of the pupil and its x and y axes extending along directions of elongation of longitudinal and transverse patterns of the fine pattern, the original is illuminated with such light that defines an effective light source having light source portions disposed in four quadrants of the x-y coordinate system and having a higher intensity than at the center of the pupil and on the x and y axes.

Claim 9

A method according to claim 6, wherein adjacent ones of the light source portions defined in the four quadrants are positioned symmetrically with respect to one of the x and y axes of the x-y coordinate system.

Claim 10

A method according to claim 7, wherein the light source portions in the four quadrants have substantially the same intensity.

Claim 11

A method according to claim 6, wherein the distance of the center of each light source portion from the center of the pupil is within a range of 0.35 through 0.8, where the radius of the pupil is taken as 1.

Claim 12

In a semiconductor device manufacturing method wherein a circuit pattern of an original is illuminated by illumination light and diffraction light caused by the circuit pattern is projected on a pupil of a projection optical system and an image of the circuit pattern is projected on a workpiece, whereby the image of the circuit pattern is transferred to the workpiece, the improvement comprising: providing, as the original, an edge emphasis type phase shift reticle in a path of an illumination light; and illuminating the original obliquely with the illumination light to direct a zeroth order diffraction light and one of two first order diffraction lights to the pupil of the projection optical system, wherein the illumination light defines, on the pupil, a ring-like effective light source having its center coinciding with the center of the pupil and the ring-like effective light source comprises a ring-like effective light source of substantially rectangular shape.

Claim 13

In a semiconductor device manufacturing method wherein a circuit pattern of an original is illuminated by illumination light and diffraction light caused by the circuit pattern is projected on a pupil of a projection optical system and an image of the circuit pattern is projected on a workpiece, whereby the image of the circuit pattern is transferred to the workpiece, the improvement comprising: providing, as the original, an edge emphasis type phase shift reticle in a path of an illumination light; and illuminating the original obliquely with the illumination light to direct a zeroth order diffraction light and one of two first order diffraction lights to the pupil of the projection optical system, wherein the illumination light defines, on the pupil, a ring-like effective light source having its center coinciding with the center of the pupil and the ring-like effective light source comprises a ring-like effective light source of substantially rectangular shape.

Claim 14

A method according to claim 10, wherein the reticle comprises a light blocking portion and a phase shift film formed on the light blocking portion, and wherein an amount of overhang of the phase shift film beyond the light blocking portion is not greater than 0.2 λ/NA when converted with respect to an image plane of the projection optical system, λ being the wavelength of the illumination light and NA being the numerical aperture of the projection optical system.

Claim 15

A method according to claim 10, wherein the length of each side of an inside rectangular periphery of the effective light source is in a range of 0.3 through 0.9 and the length of each side of an outside rectangular periphery of the effective light source is in a range of 0.6 through 1.8, where the radius of the pupil is taken as 1.

Claim 16

A method according to claim 10, wherein the ring-like effective light source satisfies a relation 0.25 V≦(a+b)/2≦0.6 V where V is the radius of the pupil, a is a half of the length of each side of an inside rectangular periphery, b is a half of the length of each side of an outside rectangular periphery.

Claim 17

A method according to claim 10, wherein the inside and outside rectangular peripheries of the ring-like effective light source extend along the directions of elongation of longitudinal and transverse patterns of the circuit pattern, respectively.

Claim 18

In a semiconductor device manufacturing method wherein a circuit pattern of an original is illuminated by illumination light and diffraction light caused by the circuit pattern is projected on a pupil of a projection optical system and an image of the circuit pattern is projected on a workpiece, whereby the image of the circuit pattern is transferred to the workpiece, the improvement comprising: providing, as the original, an edge emphasis type phase shift reticle in a path of an illumination light; and illuminating the original obliquely with the illumination light to direct a zeroth order diffraction light and one of two first order diffraction lights to the pupil of the projection optical system, wherein, when an x-y coordinate system has its origin coinciding with the center of the pupil and its x and y axes extending along directions of elongation of longitudinal and transverse patterns of the fine pattern, the original is illuminated with such light that defines an effective light source having light source portions disposed in four quadrants of the x-y coordinate system and having a higher intensity than at the center of the pupil and on the x and y axes.

Claim 19

In a semiconductor device manufacturing method wherein a circuit pattern of an original is illuminated by illumination light and diffraction light caused by the circuit pattern is projected on a pupil of a projection optical system and an image of the circuit pattern is projected on a workpiece, whereby the image of the circuit pattern is transferred to the workpiece, the improvement comprising: providing, as the original, an edge emphasis type phase shift reticle in a path of an illumination light; and illuminating the original obliquely with the illumination light to direct a zeroth order diffraction light and one of two first order diffraction lights to the pupil of the projection optical system, wherein, when an x-y coordinate system has its origin coinciding with the center of the pupil and its x and y axes extending along directions of elongation of longitudinal and transverse patterns of the fine pattern, the original is illuminated with such light that defines an effective light source having light source portions disposed in four quadrants of the x-y coordinate system and having a higher intensity than at the center of the pupil and on the x and y axes.

Claim 20

A method according to claim 15, wherein adjacent ones of the light source portions defined in the four quadrants are positioned symmetrically with respect to one of the x and y axes of the x-y coordinate system.

Claim 21

A method according to claim 15, wherein the light source portions in the four quadrants have substantially the same intensity.

Claim 22

A method according to claim 15, wherein the distance of the center of each light source portion from the center of the pupil is within a range of 0.35 through 0.8, where the radius of the pupil is taken as 1.

Claim 23

In a semiconductor device manufacturing method wherein a circuit pattern of an original is illuminated by illumination light and diffraction light caused by the circuit pattern is projected on a pupil of a projection optical system and an image of the circuit pattern is projected on a workpiece, whereby the image of the circuit pattern is transferred to the workpiece, the improvement comprising the steps of: providing an edge emphasis type phase shift reticle as the original; and illuminating the reticle obliquely so that zeroth order diffraction light and one of two first order diffraction lights caused by the pattern of the reticle are distributed on the pupil, symmetrically with respect to a predetermined axis, such that the image of the pattern of the reticle is projected using the zeroth order diffraction light and the one first order diffraction light, wherein the illumination light defines, on the pupil, a ring-like effective light source of substantially rectangular shape.

Claim 24

In a semiconductor device manufacturing method wherein a circuit pattern of an original is illuminated by illumination light and diffraction light caused by the circuit pattern is projected on a pupil of a projection optical system and an image of the circuit pattern is projected on a workpiece, whereby the image of the circuit pattern is transferred to the workpiece, the improvement comprising the steps of: providing an edge emphasis type phase shift reticle as the original; and illuminating the reticle obliquely so that zeroth order diffraction light and one of two first order diffraction lights caused by the pattern of the reticle are distributed on the pupil, symmetrically with respect to a predetermined axis, such that the image of the pattern of the reticle is projected using the zeroth order diffraction light and the one first order diffraction light, wherein the illumination light defines, on the pupil, a ring-like effective light source of substantially rectangular shape.

Claim 25

In an image projection method wherein a fine pattern of an original is illuminated and diffraction light caused by the fine pattern is projected to a pupil of a projection optical system, for projection of an image of the fine pattern, the improvement comprising the steps of: providing an edge emphasis type phase shift reticle as the original; and illuminating the reticle obliquely so that zeroth order diffraction light and one of two first order diffraction lights caused by the pattern of the reticle are distributed on the pupil, symmetrically with respect to a predetermined axis, such that the image of the reticle is projected using the zeroth order diffraction light and the one first order diffraction light, wherein the illumination light defines, on the pupil, a ring-like effective light source of substantially rectangular shape.

Claim 26

In an image projection method wherein a fine pattern of an original is illuminated and diffraction light caused by the fine pattern is projected to a pupil of a projection optical system, for projection of an image of the fine pattern, the improvement comprising the steps of: providing an edge emphasis type phase shift reticle as the original; and illuminating the reticle obliquely so that zeroth order diffraction light and one of two first order diffraction lights caused by the pattern of the reticle are distributed on the pupil, symmetrically with respect to a predetermined axis, such that the image of the reticle is projected using the zeroth order diffraction light and the one first order diffraction light, wherein the illumination light defines, on the pupil, a ring-like effective light source of substantially rectangular shape.

Claim 27

In an image projection method wherein a fine pattern of an original is illuminated by illumination light and diffraction light caused by the fine pattern is projected to a pupil of a projection optical system, for projection of an image of the fine pattern, the improvement comprising: providing a phase shift reticle as the original, wherein the reticle, when illuminated, produces zeroth order diffraction light and two first order diffraction lights, having substantially the same intensity; and illuminating the reticle obliquely so that the zeroth order diffraction light and one of the two first order diffraction lights are distributed on the pupil, such that the image of the reticle is projected using the zeroth order diffraction light and the one first order diffraction light, wherein the illumination light defines, on the pupil, a ring-like effective light source of substantially rectangular shape.

Claim 28

In an image projection method wherein a fine pattern of an original is illuminated by illumination light and diffraction light caused by the fine pattern is projected to a pupil of a projection optical system, for projection of an image of the fine pattern, the improvement comprising: providing a phase shift reticle as the original, wherein the reticle, when illuminated, produces zeroth order diffraction light and two first order diffraction lights, having substantially the same intensity; and illuminating the reticle obliquely so that the zeroth order diffraction light and one of the two first order diffraction lights are distributed on the pupil, such that the image of the reticle is projected using the zeroth order diffraction light and the one first order diffraction light, wherein the illumination light defines, on the pupil, a ring-like effective light source of substantially rectangular shape.

Claim 29

In a device manufacturing method wherein a device pattern of an original is illuminated by illumination light and diffraction light caused by the device pattern is projected to a pupil of a projection optical system, for projection of an image of the device pattern, the improvement comprising: providing a phase shift reticle as the original, wherein the reticle, when illuminated, produces zeroth order diffraction light and two first order diffraction lights, having substantially the same intensity; and illuminating the reticle obliquely so that the zeroth order diffraction light and one of the two first order diffraction lights are distributed on the pupil, such that the image of the reticle is projected using the zeroth order diffraction light and the one first order diffraction light, wherein the illumination light defines, on the pupil, a ring-like effective light source of substantially rectangular shape.

Claim 30

In a device manufacturing method wherein a device pattern of an original is illuminated by illumination light and diffraction light caused by the device pattern is projected to a pupil of a projection optical system, for projection of an image of the device pattern, the improvement comprising: providing a phase shift reticle as the original, wherein the reticle, when illuminated, produces zeroth order diffraction light and two first order diffraction lights, having substantially the same intensity; and illuminating the reticle obliquely so that the zeroth order diffraction light and one of the two first order diffraction lights are distributed on the pupil, such that the image of the reticle is projected using the zeroth order diffraction light and the one first order diffraction light, wherein the illumination light defines, on the pupil, a ring-like effective light source of substantially rectangular shape.

Claim 31

In a semiconductor device manufacturing method wherein a circuit pattern of an original is illuminated by illumination light and diffraction light caused by the circuit pattern is projected on a pupil of a projection optical system and an image of the circuit pattern is projected on a workpiece, whereby the image of the circuit pattern is transferred to the workpiece, the improvement comprising the steps of: providing an edge emphasis type phase shift reticle as the original; and illuminating the reticle obliquely so that zeroth order diffraction light and one of two first order diffraction lights caused by the pattern of the reticle are distributed on the pupil, symmetrically with respect to a predetermined axis, such that the image of the pattern of the reticle is projected using the zeroth order diffraction light and the one first order diffraction light, wherein, when an x-y coordinate system has its origin coinciding with the center of the pupil and its x and y axes extending along directions of elongation of longitudinal and transverse patterns of the fine pattern, the original is illuminated with such light that defines an effective light source having light source portions disposed in four quadrants of the x-y coordinate system and having a higher intensity than at the center of the pupil and on the x and y axes.

Claim 32

In a semiconductor device manufacturing method wherein a circuit pattern of an original is illuminated by illumination light and diffraction light caused by the circuit pattern is projected on a pupil of a projection optical system and an image of the circuit pattern is projected on a workpiece, whereby the image of the circuit pattern is transferred to the workpiece, the improvement comprising the steps of: providing an edge emphasis type phase shift reticle as the original; and illuminating the reticle obliquely so that zeroth order diffraction light and one of two first order diffraction lights caused by the pattern of the reticle are distributed on the pupil, symmetrically with respect to a predetermined axis, such that the image of the pattern of the reticle is projected using the zeroth order diffraction light and the one first order diffraction light, wherein, when an x-y coordinate system has its origin coinciding with the center of the pupil and its x and y axes extending along directions of elongation of longitudinal and transverse patterns of the fine pattern, the original is illuminated with such light that defines an effective light source having light source portions disposed in four quadrants of the x-y coordinate system and having a higher intensity than at the center of the pupil and on the x and y axes.

Claim 33

In an image projection method wherein a fine pattern of an original is illuminated and diffraction light caused by the fine pattern is projected to a pupil of a projection optical system, for projection of an image of the fine pattern, the improvement comprising the steps of: providing an edge emphasis type phase shift reticle as the original; and illuminating the reticle obliquely so that zeroth order diffraction light and one of two first order diffraction lights caused by the pattern of the reticle are distributed on the pupil, symmetrically with respect to a predetermined axis, such that the image of the reticle is projected using the zeroth order diffraction light and the one first order diffraction light, wherein, when an x-y coordinate system has its origin coinciding with the center of the pupil and its x and y axes extending along directions of elongation of longitudinal and transverse patterns of the fine pattern, the original is illuminated with such light that defines an effective light source having light source portions disposed in four quadrants of the x-y coordinate system and having a higher intensity than at the center of the pupil and on the x and y axes.

Claim 34

In an image projection method wherein a fine pattern of an original is illuminated and diffraction light caused by the fine pattern is projected to a pupil of a projection optical system, for projection of an image of the fine pattern, the improvement comprising the steps of: providing an edge emphasis type phase shift reticle as the original; and illuminating the reticle obliquely so that zeroth order diffraction light and one of two first order diffraction lights caused by the pattern of the reticle are distributed on the pupil, symmetrically with respect to a predetermined axis, such that the image of the reticle is projected using the zeroth order diffraction light and the one first order diffraction light, wherein, when an x-y coordinate system has its origin coinciding with the center of the pupil and its x and y axes extending along directions of elongation of longitudinal and transverse patterns of the fine pattern, the original is illuminated with such light that defines an effective light source having light source portions disposed in four quadrants of the x-y coordinate system and having a higher intensity than at the center of the pupil and on the x and y axes.

Claim 35

In an image projection method wherein a fine pattern of an original is illuminated by illumination light and diffraction light caused by the fine pattern is projected to a pupil of a projection optical system, for projection of an image of the fine pattern, the improvement comprising: providing a phase shift reticle as the original, wherein the reticle, when illuminated, produces zeroth order diffraction light and two first order diffraction lights, having substantially the same intensity; and illuminating the reticle obliquely so that the zeroth order diffraction light and one of the two first order diffraction lights are distributed on the pupil, such that the image of the reticle is projected using the zeroth order diffraction light and the one first order diffraction light, wherein, when an x-y coordinate system has its origin coinciding with the center of the pupil and its x and y axes extending along directions of elongation of longitudinal and transverse patterns of the fine pattern, the original is illuminated with such light that defines an effective light source having light source portions disposed in four quadrants of the x-y coordinate system and having a higher intensity than at the center of the pupil and on the x and y axes.

Claim 36

In an image projection method wherein a fine pattern of an original is illuminated by illumination light and diffraction light caused by the fine pattern is projected to a pupil of a projection optical system, for projection of an image of the fine pattern, the improvement comprising: providing a phase shift reticle as the original, wherein the reticle, when illuminated, produces zeroth order diffraction light and two first order diffraction lights, having substantially the same intensity; and illuminating the reticle obliquely so that the zeroth order diffraction light and one of the two first order diffraction lights are distributed on the pupil, such that the image of the reticle is projected using the zeroth order diffraction light and the one first order diffraction light, wherein, when an x-y coordinate system has its origin coinciding with the center of the pupil and its x and y axes extending along directions of elongation of longitudinal and transverse patterns of the fine pattern, the original is illuminated with such light that defines an effective light source having light source portions disposed in four quadrants of the x-y coordinate system and having a higher intensity than at the center of the pupil and on the x and y axes.

Claim 37

In a device manufacturing method wherein a device pattern of an original is illuminated by illumination light and diffraction light caused by the device pattern is projected to a pupil of a projection optical system, for projection of an image of the device pattern, the improvement comprising: providing a phase shift reticle as the original, wherein the reticle, when illuminated, produces zeroth order diffraction light and two first order diffraction lights, having substantially the same intensity; and illuminating the reticle obliquely so that the zeroth order diffraction light and one of the two first order diffraction lights are distributed on the pupil, such that the image of the reticle is projected using the zeroth order diffraction light and the one first order diffraction light, wherein, when an x-y coordinate system has its origin coinciding with the center of the pupil and its x and y axes extending along directions of elongation of longitudinal and transverse patterns of the fine pattern, the original is illuminated with such light that defines an effective light source having light source portions disposed in four quadrants of the x-y coordinate system and having a higher intensity than at the center of the pupil and on the x and y axes.

Claim 38

In a device manufacturing method wherein a device pattern of an original is illuminated by illumination light and diffraction light caused by the device pattern is projected to a pupil of a projection optical system, for projection of an image of the device pattern, the improvement comprising: providing a phase shift reticle as the original, wherein the reticle, when illuminated, produces zeroth order diffraction light and two first order diffraction lights, having substantially the same intensity; and illuminating the reticle obliquely so that the zeroth order diffraction light and one of the two first order diffraction lights are distributed on the pupil, such that the image of the reticle is projected using the zeroth order diffraction light and the one first order diffraction light, wherein, when an x-y coordinate system has its origin coinciding with the center of the pupil and its x and y axes extending along directions of elongation of longitudinal and transverse patterns of the fine pattern, the original is illuminated with such light that defines an effective light source having light source portions disposed in four quadrants of the x-y coordinate system and having a higher intensity than at the center of the pupil and on the x and y axes.