US5606251A
Expired / Lapsed
US
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Method and apparatus for detecting a substrate in a substrate processing system
Assignee: Lam Research Corp
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Filing: 1994-07-15
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Granted: 1997-02-25
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Expires: 2014-07-15
Abstract
Abstract An improved substrate processing system. The system may be used for double sided scrubbing of a semiconductor substrate. The wet stations of the system has covers which prevent accumulated liquid from dripping outside of the station and which minimize dripping on the substrates. Transport tunnels are provided between modules to prevent leakage between the modules. A substrate transport mechanism which is moveable along a rail is provided with the stabilizer to provide for stable substrate transfer. The processing system has two brush stations which are placed within a single enclosure. The sensors located throughout the system, which sense the presence of a wafer, are fixedly mounted in a frame so that they are self-aligned to one another. In the sender station, two sensors are used, with the system requiring both sensors to sense the presence of a wafer to increase the reliability. In the dry station, the heating lamp is shielded from the substrate to reduce particulate contamination. Various flow meters are mounted on a transparent panel to provide easy and convenient hook-up. The system is provided with an airflow control bulkhead between the clean and dirty side of the system to prevent intermixing to thereby provide for lower contamination levels in the clean side of the system.
Inventors
- 👤 Lynn S. Ryle
- 👤 Robert M. Ruppell
- 👤 David L. Thrasher
- 👤 Martin J. McGrath
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 19:24
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0451; H10P72/0452; H10P72/0456; H10P72/0402; H10P72/0406; H10P72/0411; H10P72/0412; H10P72/0414; H10P72/0464; H10P72/06; H10P72/0606; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/136; Y10S414/137
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
127 words
A sensor assembly for sensing a substrate in a substrate processing apparatus comprising: a sender, said sender emitting a signal; a receiver, said receiver receiving said signal, wherein said sender and said receiver comprise a sensor; a frame through which a substrate passes, said sender and said receiver mounted in said frame in a fixed relationship with respect to one another and on opposite sides of said frame from one another, said sender substantially aimed at said receiver, said sensor sensing a substrate when said signal between said sender and said receiver is interrupted; and wherein said sensor assembly is attached to an opening of said processing apparatus such that said substrate may be detected upon entering and/or exiting one station of said processing apparatus to another.
Claim 2
Dependent Claim
127 words
A sensor assembly for sensing a substrate in a substrate processing apparatus comprising: a sender, said sender emitting a signal; a receiver, said receiver receiving said signal, wherein said sender and said receiver comprise a sensor; a frame through which a substrate passes, said sender and said receiver mounted in said frame in a fixed relationship with respect to one another and on opposite sides of said frame from one another, said sender substantially aimed at said receiver, said sensor sensing a substrate when said signal between said sender and said receiver is interrupted; and wherein said sensor assembly is attached to an opening of said processing apparatus such that said substrate may be detected upon entering and/or exiting one station of said processing apparatus to another.
Claim 3
Dependent Claim
41 words
The sensor as described in claim 1 wherein said sensor is mounted to sense a substrate in a substrate processing apparatus, wherein said frame is movably mounted to sense a substrate at more than one location in said substrate processing apparatus.
Claim 4
Dependent Claim
59 words
The sensor as described in claim 2 wherein said sensor is adapted to be mounted to said substrate processing apparatus in a first location to sense a substrate of a first size, and adapted to be mounted in a second location different from said first location to sense a substrate of a second size different from said first size.
Claim 5
Dependent Claim
22 words
The sensor as described in claim 1 wherein said sensor is adapted to determine a location of a flat of said substrate.
Claim 6
Dependent Claim
46 words
The sensor as described in claim 3 wherein said sensor is adapted to determine a location of a first flat of said substrate of said first size in said first location and a second flat of said substrate of said second size in said second location.
Claim 7
Independent Claim
142 words
A system for processing a substrate comprising: a sender module to send a substrate through a substrate processing system; a substrate send location; a first sensor disposed in said sender module to detect if said substrate is located at said substrate send location; a second sensor disposed in said sender module to detect if said substrate is located at said substrate send location; a circuit, wherein said circuit determines if said first sensor and said second sensor both detect the presence of said substrate at said substrate send location and wherein said circuit generates a signal indicating that both of said sensors detected said substrate; and wherein said first sensor and said second sensor are attached to an opening of said processing system such that said substrate may be detected upon entering and/or exiting one station of said processing system to another.
Claim 8
Independent Claim
142 words
A system for processing a substrate comprising: a sender module to send a substrate through a substrate processing system; a substrate send location; a first sensor disposed in said sender module to detect if said substrate is located at said substrate send location; a second sensor disposed in said sender module to detect if said substrate is located at said substrate send location; a circuit, wherein said circuit determines if said first sensor and said second sensor both detect the presence of said substrate at said substrate send location and wherein said circuit generates a signal indicating that both of said sensors detected said substrate; and wherein said first sensor and said second sensor are attached to an opening of said processing system such that said substrate may be detected upon entering and/or exiting one station of said processing system to another.
Claim 9
Dependent Claim
23 words
The system as described in claim 6 wherein at least one of said first sensor and said second sensor is a capacitive sensor.
Claim 10
Dependent Claim
21 words
The system as described in claim 6 wherein said first and said second sensors are disposed in a wet processing module.
Claim 11
Dependent Claim
40 words
The system as described in claim 6 wherein said substrate processing system comprises a computer system, said computer system having hardware and/or software adapted to detect when said first sensor and said second sensor detect the presence of said substrate.
Claim 12
Dependent Claim
31 words
The system as described in claim 9 wherein said computer system further comprises hardware and/or software capable of storing incidents of detection and non-detection for said first and said second sensors.
Claim 13
Independent Claim
114 words
A method of detecting a substrate in a substrate processing apparatus comprising: examining a first region of a substrate location for the presence of said substrate with a first sensor; examining a second region of said substrate location for the presence of said substrate with a second sensor; determining if both said first sensor and said second sensor detect said substrate at said substrate location; generating a signal indicating that both of said sensors detect said substrate; and wherein said first sensor and said second sensor are attached to an opening of said processing apparatus such that said substrate may be detected upon entering and/or exiting one station of said processing apparatus to another.
Claim 14
Independent Claim
114 words
A method of detecting a substrate in a substrate processing apparatus comprising: examining a first region of a substrate location for the presence of said substrate with a first sensor; examining a second region of said substrate location for the presence of said substrate with a second sensor; determining if both said first sensor and said second sensor detect said substrate at said substrate location; generating a signal indicating that both of said sensors detect said substrate; and wherein said first sensor and said second sensor are attached to an opening of said processing apparatus such that said substrate may be detected upon entering and/or exiting one station of said processing apparatus to another.
Claim 15
Dependent Claim
22 words
The method as described in claim 11 wherein at least one of said first and said second sensors comprise a capacitive sensor.
Claim 16
Dependent Claim
30 words
The method as described in claim 12 further comprising determining if said first sensor and said second sensor both sense said substrate a plurality of times to detect said substrate.
Claim 17
Dependent Claim
41 words
The method as described in claim 11 further comprising maintaining a record of incidents when one of said first and said second sensors senses said substrate when the other of said first and said second sensors does not sense said substrate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-02-25 | 2000-08-26 | 2001-02-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-02-25 | 2004-08-26 | 2005-02-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-02-25 | 2008-08-26 | 2009-02-25 | $7700.00 | Window Closed / Lapsed |