US5206627A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Substrate detecting system with edge detection, such as wafer or base material of semiconductor device or LCD
Assignee: Tokyo Electron Ltd
•
Filing: 1991-11-20
•
Granted: 1993-04-27
•
Expires: 2011-11-20
Abstract
Abstract A plurality of light-emitting/receiving sections respectively include light-emitting sections arranged to correspond to substrates to be detected and light-receiving sections for receiving beams from the light-emitting sections. The substrates to be detected are a predetermined number of substrates arranged and accommodated at predetermined intervals in a substrate accommodating section. A moving section relatively moves the plurality of light-emitting/receiving sections and the substrates to be detected in directions cross or perpendicular to each other. A plurality of signal processing sections respectively detect changes in received light amounts caused in accordance with an output signal from each of light-receiving sections, when beams from the light-emitting sections are opposite to edge portions of the substrates to be detected while the plurality of light-emitting/receiving sections and the substrates to be detected are moved relative to each other in the directions cross or perpendicular to each other by the moving section. A detecting section detects the presence/absence of the predetermined number of substrates to be detected which are arranged and accommodated in the substrate accommodating section in accordance with output signals from the plurality of signal processing sections.
Inventors
- 👤 Mitsuo Kato
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 20:02
CPC Classifications
H; H10; H10P; H10P74/00; H10P72/00; H10P72/06; H10P72/0606; H10P72/0608; Y; Y10; Y10S; Y10S269/00; Y10S269/903; Y10S414/00; Y10S414/135; Y10S414/136
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
190 words
A substrate detecting apparatus, comprising: a plurality of light-emitting/receiving means having light-emitting sections arranged to correspond to substrates to be detected and light-receiving sections for receiving beams from the light-emitting sections, said substrates to be detected being a predetermined number of substrates arranged and accommodated at predetermined intervals in a substrate accommodating means; moving means for relatively moving said plurality of light-emitting/receiving means and said substrates to be detected in directions cross or perpendicular to each other; a plurality of signal processing means for detecting changes in amounts of received light in accordance with an output signal from each of said light-receiving sections when beams from said light-emitting sections are opposite to edge portions of said substrates to be detected, respectively, while said plurality of light-emitting/receiving means and said substrates to be detected are moved relative to each other in the directions cross or perpendicular to each other by said moving means; and detecting means for detecting the presence/absence of said predetermined number of substrates to be detected which are arranged and accommodated in said substrate accommodating means in accordance with output signals from said plurality of signal processing means.
Claim 2
Dependent Claim
190 words
A substrate detecting apparatus, comprising: a plurality of light-emitting/receiving means having light-emitting sections arranged to correspond to substrates to be detected and light-receiving sections for receiving beams from the light-emitting sections, said substrates to be detected being a predetermined number of substrates arranged and accommodated at predetermined intervals in a substrate accommodating means; moving means for relatively moving said plurality of light-emitting/receiving means and said substrates to be detected in directions cross or perpendicular to each other; a plurality of signal processing means for detecting changes in amounts of received light in accordance with an output signal from each of said light-receiving sections when beams from said light-emitting sections are opposite to edge portions of said substrates to be detected, respectively, while said plurality of light-emitting/receiving means and said substrates to be detected are moved relative to each other in the directions cross or perpendicular to each other by said moving means; and detecting means for detecting the presence/absence of said predetermined number of substrates to be detected which are arranged and accommodated in said substrate accommodating means in accordance with output signals from said plurality of signal processing means.
Claim 3
Dependent Claim
34 words
An apparatus according to claim 1, wherein each of said plurality of signal processing means includes comparator means for comparing an output signal from each of said light-receiving sections with a predetermined reference value.
Claim 4
Dependent Claim
26 words
An apparatus according to claim 2, wherein each said plurality of signal processing means includes latch means for latching an output signal from said comparing means.
Claim 5
Dependent Claim
29 words
An apparatus according to claim 3, wherein said detecting means includes memory means for prestoring data relating to said substrates to be detected accommodated in said substrate accommodating means.
Claim 6
Dependent Claim
40 words
An apparatus according to claim 4, wherein said detecting means includes checking means for checking whether scheduled detection is performed in accordance with output signals from said plurality of signal processing means and the data stored in said memory means.
Claim 7
Dependent Claim
32 words
An apparatus according to claim 5, wherein said detecting means includes means for supplying a reset signal to said latch means when said checking means checks that the scheduled detection is performed.
Claim 8
Dependent Claim
32 words
An apparatus according to claim 5, wherein said detecting means includes abnormal signal generating means for generating an abnormal signal when said checking means checks that the scheduled detection is not performed.
Claim 9
Dependent Claim
31 words
An apparatus according to claim 7, wherein said detecting means includes alarm generating means for generating an alarm in response to the abnormal signal generating by said abnormal signal generating means.
Claim 10
Dependent Claim
18 words
An apparatus according to claim 8, wherein said alarm generating means includes means for generating an alarm tone.
Claim 11
Dependent Claim
29 words
An apparatus according to claim 1, wherein said plurality of signal processing means include means for detecting the change in received light amount when the light amount is decreased.
Claim 12
Dependent Claim
44 words
An apparatus according to claim 1, wherein said plurality of signal processing means include means for detecting the change in received light amount when the received light amount is increased after the received light amount is decreased as the change in received light amount.
Claim 13
Dependent Claim
52 words
An apparatus according to claim 1, wherein, when said substrate to be detected is a transparent substrate, said plurality of signal processing means detect an abrupt decrease in light amount caused by light diffusion occurring when a beam from said light-emitting section is incident on an edge portion of said transparent substrate.
Claim 14
Dependent Claim
15 words
An apparatus according to claim 12, wherein said transparent substrate is made of quartz glass.
Claim 15
Dependent Claim
25 words
An apparatus according to claim 13, wherein said substrate made of quartz glass includes a wafer used in a process for manufacturing a semiconductor device.
Claim 16
Dependent Claim
27 words
An apparatus according to claim 13, wherein said transparent substrate made of quartz glass includes a substrate used in a process for manufacturing a liquid crystal device.
Claim 17
Dependent Claim
147 words
A substrate detecting method, comprising the steps of: providing a plurality of photointerrupter means in correspondence with a predetermined number of substrates to be detected which are arranged and accommodated in cassette means at predetermined intervals; relatively moving said plurality of photointerrupter means and said substrates to be detected in directions cross or perpendicular to each other; detecting changes in output signals generated by said plurality of photointerrupter means when beams from said plurality of photointerrupter means are opposite to edge portions of said substrates to be detected, respectively, while said plurality of photointerrupting means and said substrates to be detected are moved relative to each other in the directions cross or perpendicular to each other; and detecting the presence/absence of said predetermined number of substrates to be detected which are arranged and accommodated in said cassette means in accordance with the detected changes in output signals.
Claim 18
Dependent Claim
147 words
A substrate detecting method, comprising the steps of: providing a plurality of photointerrupter means in correspondence with a predetermined number of substrates to be detected which are arranged and accommodated in cassette means at predetermined intervals; relatively moving said plurality of photointerrupter means and said substrates to be detected in directions cross or perpendicular to each other; detecting changes in output signals generated by said plurality of photointerrupter means when beams from said plurality of photointerrupter means are opposite to edge portions of said substrates to be detected, respectively, while said plurality of photointerrupting means and said substrates to be detected are moved relative to each other in the directions cross or perpendicular to each other; and detecting the presence/absence of said predetermined number of substrates to be detected which are arranged and accommodated in said cassette means in accordance with the detected changes in output signals.
Claim 19
Dependent Claim
20 words
A method according to claim 16, wherein said substrates to be detected include a transparent substrate made of quartz glass.
Claim 20
Dependent Claim
26 words
A method according to claim 17, wherein said transparent substrate made of quartz glass includes a wafer used in a process for manufacturing a semiconductor device.
Claim 21
Dependent Claim
27 words
A method according to claim 17, wherein said transparent substrate made of quartz glass includes a substrate used in a process for manufacturing a liquid crystal device.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-04-26 | 1996-10-26 | 1997-04-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-04-26 | 2000-10-26 | 2001-04-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-04-26 | 2004-10-26 | 2005-04-27 | $7700.00 | Window Closed / Lapsed |