US4938655A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Wafer transfer method
Assignee: Tokyo Electron Ltd
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Filing: 1989-02-23
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Granted: 1990-07-03
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Expires: 2009-02-23
Abstract
Abstract A wafer transfer method according to the present invention comprises taking out a plurality of wafers from a cassette while holding the wafers by a chuck mechanism, transporting the held wafers to a region over a boat, transferring all the wafers from the chuck mechanism to the boat so that the wafers are arranged in a predetermined position on the boat, relatively moving the chuck mechanism with respect to the boat for a distance equal to an integral multiple of a distance corresponding to the spacing of each wafer, and holding a required number of wafers, out of the plurality of wafers on the boat, by use of the chuck mechanism to dislocate the wafers on the boat or return the wafers to the cassette, and thereafter transferring a plurality of wafers from another cassette to the boat. According to the present invention, monitor wafers are arranged with predetermined distances between wafers on the boat, and product wafers are transferred from the second cassette to the spaces between the monitor wafers. Thus, the monitor wafers are arranged on the boat for each lot of product wafers. If the wafers in the cassette are subject to an omission, the wafers on the boat are moved for a distance corresponding to an omitted wafer or wafers so that the wafers are continuously arranged at regular pitches on the boat.
Inventors
- 👤 Takanobu Asano
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 15:17
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/30; H10P72/34; H10P72/3411; H10P72/3412; H10P72/50; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/137; Y10S414/138
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
148 words
A wafer transfer method comprising: a first step of taking out a plurality of wafers from a cassette while holding the wafers by means of holding means; a second step of transporting the held wafers to a region over a boat; a third step of transferring all the wafers from the holding means to the boat so that the wafers are arranged in a predetermined position on the boat; a fourth step of moving the holding means relative to the boat by a distance equal to an integral multiple of a spacing between two adjacent wafers, and holding a required number of wafers, out of the plurality of wafers on the boat, by means of the holding means to remove the required number of wafers on the boat; and a fifth step of transferring a plurality of wafers from another cassette to the boat after the fourth step.
Claim 2
Dependent Claim
148 words
A wafer transfer method comprising: a first step of taking out a plurality of wafers from a cassette while holding the wafers by means of holding means; a second step of transporting the held wafers to a region over a boat; a third step of transferring all the wafers from the holding means to the boat so that the wafers are arranged in a predetermined position on the boat; a fourth step of moving the holding means relative to the boat by a distance equal to an integral multiple of a spacing between two adjacent wafers, and holding a required number of wafers, out of the plurality of wafers on the boat, by means of the holding means to remove the required number of wafers on the boat; and a fifth step of transferring a plurality of wafers from another cassette to the boat after the fourth step.
Claim 3
Dependent Claim
36 words
The wafer transfer method according to claim 1, wherein said wafers handled in said first to fourth steps are monitor wafers for product inspection, and said wafers handled in said fifth step are final product wafers.
Claim 4
Dependent Claim
49 words
The wafer transfer method according to claim 2, wherein said fourth step includes moving the holding means relative to the boat for a distance equal to a distance corresponding to a spacing between each monitor wafer, and holding and lifting all the monitor wafers on the boat but one.
Claim 5
Dependent Claim
24 words
The wafer transfer method according to claim 1, wherein all of said wafers handled in said first to fifth steps comprise final product wafers.
Claim 6
Dependent Claim
43 words
The wafer transfer method according to claim 4, wherein said fourth step includes moving the holding means relative to the boat for a distance equal to a distance corresponding to a spacing between omitted wafers out of the product wafers in the cassette.
Claim 7
Dependent Claim
26 words
The wafer transfer method according to claim 1, which comprises controlling movement of said holding means relative to said boat by means of a computer system.
Claim 8
Dependent Claim
188 words
A wafer transfer method comprising: a first step of taking out monitor wafers from a first cassette of a cassette section, while holding the monitor wafers by means of holding means, said cassette section including a first cassette containing monitor wafers only and a second cassette containing product wafers only; a second step of arranging held monitor wafers in a predetermined position on a boat; a third step of moving the holding means relative to the boat for a distance equal to an integral multiple of a distance between each wafer so that the monitor wafers are arranged on the boat, and holding some of the monitor wafers on the boat by means of the holding means and returning the held monitor wafers to the first cassette so that a required number of monitor wafers remain on the boat; and a fourth step of moving the holding means to the position of the second cassette so as to hold all the product wafers in the second cassette by means of the holding means and arranging the product wafers next to a train of monitor wafers on the boat.
Claim 9
Dependent Claim
188 words
A wafer transfer method comprising: a first step of taking out monitor wafers from a first cassette of a cassette section, while holding the monitor wafers by means of holding means, said cassette section including a first cassette containing monitor wafers only and a second cassette containing product wafers only; a second step of arranging held monitor wafers in a predetermined position on a boat; a third step of moving the holding means relative to the boat for a distance equal to an integral multiple of a distance between each wafer so that the monitor wafers are arranged on the boat, and holding some of the monitor wafers on the boat by means of the holding means and returning the held monitor wafers to the first cassette so that a required number of monitor wafers remain on the boat; and a fourth step of moving the holding means to the position of the second cassette so as to hold all the product wafers in the second cassette by means of the holding means and arranging the product wafers next to a train of monitor wafers on the boat.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-07-02 | 1994-01-01 | 1994-07-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-07-02 | 1998-01-01 | 1998-07-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-07-02 | 2002-01-01 | 2002-07-03 | $7700.00 | Window Closed / Lapsed |