Patent US5605864A successfully refreshed from Google Patents.
US5605864A
Expired / Lapsed
US
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Method for forming a semiconductor buried contact with a removable spacer
Assignee: Micron Technology Inc
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Filing: 1994-08-02
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Granted: 1997-02-25
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Expires: 2014-08-02
Abstract
Abstract A removable oxide spacer is used to reduce the size of a contact opening in a DRAM cell between polysilicon word lines below a lithographic minimum. The removable spacer is deposited before the buried contact patterning and etching. Since word lines diverge at a cell location, the removable spacer retains a lesser thickness over the divergent area contact opening and a greater thickness elsewhere between word lines due to the more narrow gap therebetween and the spacer being deposited such that if fills the gap. The removable spacer reduces the buried contact size since the actual self-aligned contact area is defined by the spacer sidewall. Etching of the spacer creates a buried contact opening smaller than lithographic minimum because silicon oxide surrounding the buried contact area is protected by the removable spacer. The removable spacer is removed after resist strip leaving a sublithographic buried contact opening.
Inventors
- 👤 Kirk D. Prall
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 17:19
CPC Classifications
H; H10; H10B; H10B12/00; H10B12/01; H10B12/02; H10B12/03; H10B12/033; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/069; H10W20/0698; H10W20/40; Y; Y10; Y10S; Y10S148/00; Y10S148/02; Y10S438/00; Y10S438/942; Y10S438/947
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
206 words
A method of forming a sublithographic buried contact on a semiconductor DRAM comprising: a) forming a plurality of transistor gate structures and word lines adjacent a buried contact area on a substrate; b) depositing an insulator layer over and adjacent the gate structures, word lines, buried contact area, and substrate; c) depositing a removable spacer layer over the insulator layer such that: (i) a narrowest gap width between the word lines outside the buried contact area is essentially filled in by the removable spacer layer; and, (ii) a divergent gap which is wider than said narrowest gap width between the word lines over the buried contact area is not completely filled by the removable spacer layer, whereby a sublithographic dimension is defined between removable spacer walls over the buried contact area, the removable spacer walls being formed by the removable spacer layer adjacent the gate structures; d) patterning the buried contact area in the removable spacer layer; e) anisotropically etching the removable spacer layer and the insulator layer to form the sublithographic buried contact such that the buried contact is sublithographic in at least a dimension parallel to the word lines; and, f) further etching the removable spacer layer to completely remove the removable spacer layer.
Claim 2
Independent Claim
206 words
A method of forming a sublithographic buried contact on a semiconductor DRAM comprising: a) forming a plurality of transistor gate structures and word lines adjacent a buried contact area on a substrate; b) depositing an insulator layer over and adjacent the gate structures, word lines, buried contact area, and substrate; c) depositing a removable spacer layer over the insulator layer such that: (i) a narrowest gap width between the word lines outside the buried contact area is essentially filled in by the removable spacer layer; and, (ii) a divergent gap which is wider than said narrowest gap width between the word lines over the buried contact area is not completely filled by the removable spacer layer, whereby a sublithographic dimension is defined between removable spacer walls over the buried contact area, the removable spacer walls being formed by the removable spacer layer adjacent the gate structures; d) patterning the buried contact area in the removable spacer layer; e) anisotropically etching the removable spacer layer and the insulator layer to form the sublithographic buried contact such that the buried contact is sublithographic in at least a dimension parallel to the word lines; and, f) further etching the removable spacer layer to completely remove the removable spacer layer.
Claim 3
Dependent Claim
21 words
The method as recited in claim 1 wherein the insulator layer is an oxide deposited by a tetraethyl orthosilicate (TEOS) process.
Claim 4
Dependent Claim
29 words
The method as recited in claim 1 wherein the removable spacer layer is selected from the group consisting of ozone tetraethyl orthosilicate (O 3 TEOS), polysilicon, and silicon nitride.
Claim 5
Dependent Claim
24 words
The method as recited in claim 1 wherein the removable spacer layer is deposited at a thickness of substantially one-half the narrowest gap width.
Claim 6
Dependent Claim
28 words
The method as recited in claim 1 wherein the removable spacer layer is of a lesser thickness over the buried contact area than over the narrowest gap width.
Claim 7
Dependent Claim
28 words
The method as recited in claim 1 further including patterning a plurality of buried contact areas defined by a plurality of singular, discrete openings in a mask pattern.
Claim 8
Dependent Claim
26 words
The method as recited in claim 1 further including patterning a plurality of buried contact areas defined by a singular, continuous opening in a mask pattern.
Claim 9
Dependent Claim
41 words
The method as recited in claim 1 wherein said anisotropical etching to form the buried contact is continuous and parallel to the word lines communicating with the buried contact area, and the buried contact forms only at the buried contact area.
Claim 10
Dependent Claim
22 words
The method as recited in claim 1 wherein the further etching to completely remove the removable spacer layer includes an isotropical etch.
Claim 11
Dependent Claim
18 words
The method as recited in claim 9 wherein said isotropical etch comprises dipping the DRAM in hydrofluoric acid.
Claim 12
Independent Claim
156 words
A method of forming a connection to a semiconductor wafer having transistor gate structure formations thereon, the method comprising: a) depositing an insulator over the wafer and gate structure formations; b) depositing a removable spacer over the insulator such that: (i) a first gap between the gate structure formations is essentially filled in by the removable spacer; and, (ii) a second gap between the gate structure formations at a location defined for the connection is not completely filled by the removable spacer, whereby a thickness of the removable spacer in the first gap is greater than a thickness of the removable spacer in the second gap; c) patterning the connection in the removable spacer; d) anisotropically etching the removable spacer and insulator to form the connection such that the connection is sublithographic in at least a dimension parallel to the gate structure formations; and, e) further etching the removable spacer to completely remove the removable spacer.
Claim 13
Independent Claim
156 words
A method of forming a connection to a semiconductor wafer having transistor gate structure formations thereon, the method comprising: a) depositing an insulator over the wafer and gate structure formations; b) depositing a removable spacer over the insulator such that: (i) a first gap between the gate structure formations is essentially filled in by the removable spacer; and, (ii) a second gap between the gate structure formations at a location defined for the connection is not completely filled by the removable spacer, whereby a thickness of the removable spacer in the first gap is greater than a thickness of the removable spacer in the second gap; c) patterning the connection in the removable spacer; d) anisotropically etching the removable spacer and insulator to form the connection such that the connection is sublithographic in at least a dimension parallel to the gate structure formations; and, e) further etching the removable spacer to completely remove the removable spacer.
Claim 14
Independent Claim
223 words
A method of forming a buried contact to a semiconductor DRAM substrate between a capacitor and a MOSFET transistor, the method comprising: a forming a plurality of transistor gate structures and word lines, the word lines having a narrowest gap width between the word lines outside the buried contact, and further having a divergent gap between the word lines over the buried contact, which is wider than said narrowest gap width; b) depositing an insulating oxide by a tetraethyl orthosilicate process over and adjacent to the gate structures and word lines; c) depositing a removable ozone tetraethyl orthosilicate (O 3 TEOS) spacer layer over said insulating oxide, whereby the narrowest gap width is essentially filled in by the removable spacer layer and the divergent gap between the word lines over the buried contact is not completely filled by the removable spacer layer; d) patterning a buried contact area in the removable spacer layer, including patterning with a continuous pattern in a direction parallel to the word lines adjacent the buried contact area; e) anisotropically etching the removable spacer layer and the insulating oxide to form the buried contact such that the buried contact is sublithographic in at least a dimension parallel to the word lines; and, f) isotropically etching remaining portions of the removable spacer layer to completely remove the removable spacer layer.
Claim 15
Independent Claim
223 words
A method of forming a buried contact to a semiconductor DRAM substrate between a capacitor and a MOSFET transistor, the method comprising: a forming a plurality of transistor gate structures and word lines, the word lines having a narrowest gap width between the word lines outside the buried contact, and further having a divergent gap between the word lines over the buried contact, which is wider than said narrowest gap width; b) depositing an insulating oxide by a tetraethyl orthosilicate process over and adjacent to the gate structures and word lines; c) depositing a removable ozone tetraethyl orthosilicate (O 3 TEOS) spacer layer over said insulating oxide, whereby the narrowest gap width is essentially filled in by the removable spacer layer and the divergent gap between the word lines over the buried contact is not completely filled by the removable spacer layer; d) patterning a buried contact area in the removable spacer layer, including patterning with a continuous pattern in a direction parallel to the word lines adjacent the buried contact area; e) anisotropically etching the removable spacer layer and the insulating oxide to form the buried contact such that the buried contact is sublithographic in at least a dimension parallel to the word lines; and, f) isotropically etching remaining portions of the removable spacer layer to completely remove the removable spacer layer.
Claim 16
Dependent Claim
28 words
The method as recited in claim 11 wherein the removable spacer is selected from the group consisting of ozone tetraethyl orthosilicate (O 3 TEOS), polysilicon, and silicon nitride.
Claim 17
Dependent Claim
26 words
The method as recited in claim 11 wherein the removable spacer is deposited at a thickness of substantially one-half of a width of the first gap.
Claim 18
Dependent Claim
26 words
The method as recited in claim 11 further including patterning a plurality of connections defined by a plurality of singular, discrete openings in a mask pattern.
Claim 19
Dependent Claim
24 words
The method as recited in claim 11 further including patterning a plurality of connections defined by a singular, continuous opening in a mask pattern.
Claim 20
Dependent Claim
30 words
The method as recited in claim 11 wherein said anisotropical etching is continuous and parallel to the first and second gaps, and the connection forms only at the second gap.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-02-25 | 2000-08-26 | 2001-02-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-02-25 | 2004-08-26 | 2005-02-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-02-25 | 2008-08-26 | 2009-02-25 | $7700.00 | Window Closed / Lapsed |