Patent US5605602A successfully refreshed from Google Patents.
US5605602A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and device for removing a thin film from a wafer backside surface
Assignee: Advanced Micro Devices Inc
•
Filing: 1994-09-08
•
Granted: 1997-02-25
•
Expires: 2014-09-08
Abstract
Abstract A method and device is provided for removing a thin film from a wafer backside surface. The method and device advantageously removes the thin film without using photoresist masking material or the removal of photoresist material. The thin film at the wafer backside surface is removed without affecting any thin film material on the wafer front surface. As-such, the wafer backside surface is prepared for subsequent dopant ions used for extrinsic gettering of the backside surface. Alternatively, or in addition to dopants used for backside surface gettering, polysilicon can be deposited upon the exposed backside surface to enhance extrinsic gettering properties.
Inventors
- 👤 Damon K. DeBusk
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:48
CPC Classifications
H; H10; H10P; H10P36/00; H10P36/03
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
143 words
A method for removing a thin film from a wafer backside surface comprising the steps of: providing a fumer device having a bowl-shaped receptacle with upwardly directed walls terminating in a rim and a plurality of ports extending through said walls; forming a thin film upon exposed front and backside surfaces of a silicon substrate by inserting said silicon substrate into a wafer boat and introducing said wafer boat into a furnace such that said front and backside surfaces are exposed to a gas flow within said furnace; without any intervening depositing steps after said forming step, sealing the backside surface of said substrate in a downward direction against the rim of said fumer device; and delivering etchant vapors into said fumer device through one of said plurality of ports, whereby said etchant vapors react with and cause removal of said thin film.
Claim 2
Independent Claim
143 words
A method for removing a thin film from a wafer backside surface comprising the steps of: providing a fumer device having a bowl-shaped receptacle with upwardly directed walls terminating in a rim and a plurality of ports extending through said walls; forming a thin film upon exposed front and backside surfaces of a silicon substrate by inserting said silicon substrate into a wafer boat and introducing said wafer boat into a furnace such that said front and backside surfaces are exposed to a gas flow within said furnace; without any intervening depositing steps after said forming step, sealing the backside surface of said substrate in a downward direction against the rim of said fumer device; and delivering etchant vapors into said fumer device through one of said plurality of ports, whereby said etchant vapors react with and cause removal of said thin film.
Claim 3
Dependent Claim
21 words
The method as recited in claim 1, wherein said gas flow comprises oxygen and said thin film consists of silicon dioxide.
Claim 4
Dependent Claim
32 words
The method as recited in claim 1, wherein said gas flow comprises silane and said thin film consists of a layer of polysilicon placed adjacent a layer of thermally grown silicon dioxide.
Claim 5
Dependent Claim
31 words
The method as recited in claim 1, wherein said sealing step comprises latching said silicon substrate against said rim to substantially prevent egress of said etchant vapors from said fumer device.
Claim 6
Dependent Claim
41 words
The method as recited in claim 1, wherein said delivering step comprises bubbling within a sealed chamber an inert gas through a liquid etchant to form etchant vapors, and drawing said etchant vapors from said sealed chamber into said fumer device.
Claim 7
Dependent Claim
20 words
The method as recited in claim 1, wherein said etchant vapors consist of hydrofluoric acid vaporized in an inert gas.
Claim 8
Dependent Claim
20 words
The method as recited in claim 1, wherein said etchant vapors consist of nitric acid vaporized in an inert gas.
Claim 9
Dependent Claim
41 words
The method as recited in claim 1, further comprising, after said delivering step, placing said silicon substrate into a diffusion chamber whereby dopants within said chamber diffuse into the backside surface of said substrate in areas void of said thin film.
Claim 10
Independent Claim
190 words
A method for providing extrinsic gettering sites near the backside surface of a silicon wafer comprising the steps of: providing a fumer device having a bowl-shaped receptacle with upwardly directed walls terminating in a rim and a plurality of ports extending through said walls; forming a thin film upon exposed front and backside surfaces of a silicon substrate by inserting said silicon substrate into a wafer boat and introducing said wafer boat into a furnace such that said front and backside surfaces are exposed to a gas flow within said furnace; immediately after said forming step and without any intervening depositing steps, sealing the backside surface of said substrate in a downward direction against the rim of said fumer device; delivering etchant vapors into said fumer device through one of said plurality of ports, whereby said etchant vapors react with and cause removal of said thin film; placing said silicon substrate into a diffusion chamber whereby dopants within said chamber diffuse into the backside surface of said substrate in areas void of said thin film; and providing an extrinsic gettering sites where the diffused dopants exists near the backside surface.
Claim 11
Independent Claim
190 words
A method for providing extrinsic gettering sites near the backside surface of a silicon wafer comprising the steps of: providing a fumer device having a bowl-shaped receptacle with upwardly directed walls terminating in a rim and a plurality of ports extending through said walls; forming a thin film upon exposed front and backside surfaces of a silicon substrate by inserting said silicon substrate into a wafer boat and introducing said wafer boat into a furnace such that said front and backside surfaces are exposed to a gas flow within said furnace; immediately after said forming step and without any intervening depositing steps, sealing the backside surface of said substrate in a downward direction against the rim of said fumer device; delivering etchant vapors into said fumer device through one of said plurality of ports, whereby said etchant vapors react with and cause removal of said thin film; placing said silicon substrate into a diffusion chamber whereby dopants within said chamber diffuse into the backside surface of said substrate in areas void of said thin film; and providing an extrinsic gettering sites where the diffused dopants exists near the backside surface.
Claim 12
Dependent Claim
21 words
The method as recited in claim 9, wherein said gas flow comprises oxygen and said thin film consists of silicon dioxide.
Claim 13
Dependent Claim
32 words
The method as recited in claim 9, wherein said gas flow comprises silane and said thin film consists of a layer of polysilicon placed adjacent a layer of thermally grown silicon dioxide.
Claim 14
Dependent Claim
31 words
The method as recited in claim 9, wherein said sealing step comprises latching said silicon substrate against said rim to substantially prevent egress of said etchant vapors from said fumer device.
Claim 15
Dependent Claim
41 words
The method as recited in claim 9, wherein said delivering step comprises bubbling within a sealed chamber an inert gas through a liquid etchant to form etchant vapors, and drawing said etchant vapors from said sealed chamber into said fumer device.
Claim 16
Dependent Claim
20 words
The method as recited in claim 9, wherein said etchant vapors consist of hydrofluoric acid vaporized in an inert gas.
Claim 17
Dependent Claim
20 words
The method as recited in claim 1, wherein said etchant vapors consist of nitric acid vaporized in an inert gas.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-02-25 | 2000-08-26 | 2001-02-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-02-25 | 2004-08-26 | 2005-02-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-02-25 | 2008-08-26 | 2009-02-25 | $7700.00 | Window Closed / Lapsed |