US5370741A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Dynamic semiconductor wafer processing using homogeneous chemical vapors
Assignee: Semitool Inc
•
Filing: 1992-11-18
•
Granted: 1994-12-06
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Expires: 2012-11-18
Abstract
Abstract Disclosed are methods and apparatuses for improved processing of semiconductor wafers and the like using processing chemicals, particularly hydrofluoric acid (HF) and water mixtures. Homogeneous vapor mixtures are generated from homogeneous liquid phase mixtures which are preferably recirculated, mixed and agitated. The liquid phase is advantageously circulated through a chemical chamber within the processing bowl. Exposure of wafers to vapors from the chemical chamber can be controlled by a vapor control valve which is advantageously the bottom of the processing chamber. The wafer is rotated or otherwise moved within the processing chamber to provide uniform dispersion of the homogeneous reactant vapors across the wafer surface and to facilitate vapor circulation to the processed surface. A radiative volatilization processor can be utilized to volatilize reaction by-products which form under some conditions. The processes provide efficient uniform etching with low particle count performance.
Inventors
- 👤 Eric J. Bergman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:57
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; H10P72/0418; H10P72/0422; H10P72/0404; G; G11; G11B; G11B7/00; G11B7/24; G11B7/26; Y; Y10; Y10S; Y10S438/00; Y10S438/935; Y10S438/973
Claims Analysis
Total Claims: 98
Claim 1
Independent Claim
188 words
A process for etching semiconductor wafers using hydrofluoric acid vapor, comprising: containing a wafer within a substantially enclosed processing chamber; providing a liquid etchant source within the substantially enclosed processing chamber; said liquid etchant source including at least hydrofluoric acid and water; producing a substantially homogeneous vapor mixture from the liquid etchant source; said substantially homogeneous vapor mixture including at least hydrofluoric acid vapor and water vapor to provide a homogeneous etchant gas; said producing being accomplished within a liquid phase chemical chamber forming a part of the processing chamber; contacting the homogeneous etchant gas against at least one processed surface of the wafer which is to be etched; rotating the wafer in juxtaposition to the liquid etchant source at a desired rotational speed; enhancing circulation and transfer of homogeneous etchant gas from the liquid source to the at least one processed surface of the wafer surface by rotating a member within the processing chamber; terminating fluid communication between said liquid phase chemical chamber and remaining portions of said processing chamber wherein the wafer is held and rotated by partitioning the processing chamber using a movable wall structure.
Claim 2
Dependent Claim
188 words
A process for etching semiconductor wafers using hydrofluoric acid vapor, comprising: containing a wafer within a substantially enclosed processing chamber; providing a liquid etchant source within the substantially enclosed processing chamber; said liquid etchant source including at least hydrofluoric acid and water; producing a substantially homogeneous vapor mixture from the liquid etchant source; said substantially homogeneous vapor mixture including at least hydrofluoric acid vapor and water vapor to provide a homogeneous etchant gas; said producing being accomplished within a liquid phase chemical chamber forming a part of the processing chamber; contacting the homogeneous etchant gas against at least one processed surface of the wafer which is to be etched; rotating the wafer in juxtaposition to the liquid etchant source at a desired rotational speed; enhancing circulation and transfer of homogeneous etchant gas from the liquid source to the at least one processed surface of the wafer surface by rotating a member within the processing chamber; terminating fluid communication between said liquid phase chemical chamber and remaining portions of said processing chamber wherein the wafer is held and rotated by partitioning the processing chamber using a movable wall structure.
Claim 3
Dependent Claim
32 words
A process according to claim 1 and further comprising: exhausting said homogeneous etchant gas from said remaining portions of said processing chamber to retard further etching of the wafer after said terminating.
Claim 4
Dependent Claim
215 words
A process for etching semiconductor wafers using hydrofluoric acid vapor, comprising: containing a wafer within a substantially enclosed processing chamber; providing a liquid etchant source within the substantially enclosed processing chamber; said liquid etchant source including at least hydrofluoric acid and water; producing a substantially homogeneous vapor mixture from the liquid etchant source; said substantially homogeneous vapor mixture including at least hydrofluoric acid vapor and water vapor to provide a homogeneous etchant gas; said producing being accomplished within a liquid phase chemical chamber forming a part of the processing chamber; contacting the homogeneous etchant gas against at least one processed surface of the wafer which is to be etched; rotating the wafer in juxtaposition to the liquid etchant source at a desired rotational speed; enhancing circulation and transfer of homogeneous etchant gas from the liquid source to the at least one processed surface of the wafer surface by rotating a member within the processing chamber; agitating the liquid etchant source to aid in said producing step; controllably placing said liquid phase chemical chamber in fluid communication with remaining portions of said processing chamber in which the wafer is held and rotated to allow vapors from agitated liquid etchant source to pass from the liquid phase chemical chamber to said remaining portions of said processing chamber.
Claim 5
Dependent Claim
215 words
A process for etching semiconductor wafers using hydrofluoric acid vapor, comprising: containing a wafer within a substantially enclosed processing chamber; providing a liquid etchant source within the substantially enclosed processing chamber; said liquid etchant source including at least hydrofluoric acid and water; producing a substantially homogeneous vapor mixture from the liquid etchant source; said substantially homogeneous vapor mixture including at least hydrofluoric acid vapor and water vapor to provide a homogeneous etchant gas; said producing being accomplished within a liquid phase chemical chamber forming a part of the processing chamber; contacting the homogeneous etchant gas against at least one processed surface of the wafer which is to be etched; rotating the wafer in juxtaposition to the liquid etchant source at a desired rotational speed; enhancing circulation and transfer of homogeneous etchant gas from the liquid source to the at least one processed surface of the wafer surface by rotating a member within the processing chamber; agitating the liquid etchant source to aid in said producing step; controllably placing said liquid phase chemical chamber in fluid communication with remaining portions of said processing chamber in which the wafer is held and rotated to allow vapors from agitated liquid etchant source to pass from the liquid phase chemical chamber to said remaining portions of said processing chamber.
Claim 6
Dependent Claim
30 words
A process according to claim 3 wherein said agitating is accomplished at least in part by stirring and mixing liquid etchant source to create turbulence and also maintain homogeneity thereof.
Claim 7
Dependent Claim
34 words
A process according to claim 3 wherein said agitating is accomplished at least in part by recirculating liquid etchant source through the liquid phase chemical chamber to create turbulence and also maintain homogeneity thereof.
Claim 8
Dependent Claim
204 words
A process for etching semiconductor wafers using hydrofluoric acid vapor, comprising: containing a wafer within a substantially enclosed processing chamber; providing a liquid etchant source within the substantially enclosed processing chamber; said liquid etchant source including at least hydrofluoric acid and water; producing a substantially homogeneous vapor mixture from the liquid etchant source; said substantially homogeneous vapor mixture including at least hydrofluoric acid vapor and water vapor to provide a homogeneous etchant gas; said producing being accomplished within an annular liquid phase chemical chamber forming a part of the processing chamber; contacting the homogeneous etchant gas against at least one processed surface of the wafer which is to be etched; rotating the wafer in juxtaposition to the liquid etchant source at a desired rotational speed; enhancing circulation and transfer of homogeneous etchant gas from the liquid source to the at least one processed surface of the wafer surface by rotating a member within the processing chamber; controllably placing said liquid phase chemical chamber in fluid communication with remaining portions of said processing chamber wherein the wafer is held and rotated to allow vapors from a liquid etchant source to pass from the liquid phase chemical chamber to said remaining portions of said processing chamber.
Claim 9
Dependent Claim
204 words
A process for etching semiconductor wafers using hydrofluoric acid vapor, comprising: containing a wafer within a substantially enclosed processing chamber; providing a liquid etchant source within the substantially enclosed processing chamber; said liquid etchant source including at least hydrofluoric acid and water; producing a substantially homogeneous vapor mixture from the liquid etchant source; said substantially homogeneous vapor mixture including at least hydrofluoric acid vapor and water vapor to provide a homogeneous etchant gas; said producing being accomplished within an annular liquid phase chemical chamber forming a part of the processing chamber; contacting the homogeneous etchant gas against at least one processed surface of the wafer which is to be etched; rotating the wafer in juxtaposition to the liquid etchant source at a desired rotational speed; enhancing circulation and transfer of homogeneous etchant gas from the liquid source to the at least one processed surface of the wafer surface by rotating a member within the processing chamber; controllably placing said liquid phase chemical chamber in fluid communication with remaining portions of said processing chamber wherein the wafer is held and rotated to allow vapors from a liquid etchant source to pass from the liquid phase chemical chamber to said remaining portions of said processing chamber.
Claim 10
Dependent Claim
67 words
A process according to claim 6 wherein said controllably placing said liquid phase chemical chamber in fluid communication with remaining portions of said processing chamber wherein the wafer is held and rotated is accomplished by controllably moving a wall of said processing chamber to allow vapors from the liquid etchant source to pass from the liquid phase chemical chamber to said remaining portions of said processing chamber.
Claim 11
Dependent Claim
64 words
A process according to claim 6 wherein said controllably placing said liquid phase chemical chamber in fluid communication with remaining portions of said processing chamber wherein the wafer is held and rotated is accomplished by controllably moving a partition wall of said processing chamber to allow vapors from a liquid etchant source to pass from the liquid phase chemical chamber to said processing chamber.
Claim 12
Dependent Claim
145 words
A process for etching semiconductor wafers using hydrofluoric acid vapor, comprising: containing a wafer within a substantially enclosed processing chamber; providing a liquid etchant source within the substantially enclosed processing chamber; said liquid etchant source including at least hydrofluoric acid and water; producing a substantially homogeneous vapor mixture from the liquid etchant source; said substantially homogeneous vapor mixture including at least hydrofluoric acid vapor and water vapor to provide a homogeneous etchant gas; contacting the homogeneous etchant gas against at least one processed surface of the wafer which is to be etched; rotating the wafer in juxtaposition to the liquid etchant source at a desired rotational speed; enhancing circulation and transfer of homogeneous etchant gas from the liquid source to the at least one processed surface of the wafer surface by rotating a member within the processing chamber; heating the wafer to remove particulate therefrom.
Claim 13
Dependent Claim
145 words
A process for etching semiconductor wafers using hydrofluoric acid vapor, comprising: containing a wafer within a substantially enclosed processing chamber; providing a liquid etchant source within the substantially enclosed processing chamber; said liquid etchant source including at least hydrofluoric acid and water; producing a substantially homogeneous vapor mixture from the liquid etchant source; said substantially homogeneous vapor mixture including at least hydrofluoric acid vapor and water vapor to provide a homogeneous etchant gas; contacting the homogeneous etchant gas against at least one processed surface of the wafer which is to be etched; rotating the wafer in juxtaposition to the liquid etchant source at a desired rotational speed; enhancing circulation and transfer of homogeneous etchant gas from the liquid source to the at least one processed surface of the wafer surface by rotating a member within the processing chamber; heating the wafer to remove particulate therefrom.
Claim 14
Dependent Claim
24 words
A process according to claim 9 wherein said heating the wafer serves to remove particulate by-products deposited upon the wafer from said contacting step.
Claim 15
Dependent Claim
148 words
A process for etching semiconductor wafers using hydrofluoric acid vapor, comprising: containing a wafer within a substantially enclosed processing chamber; providing a liquid etchant source within the substantially enclosed processing chamber; said liquid etchant source including at least hydrofluoric acid and water; producing a substantially homogeneous vapor mixture from the liquid etchant source; said substantially homogeneous vapor mixture including at least hydrofluoric acid vapor and water vapor to provide a homogeneous etchant gas; contacting the homogeneous etchant gas against at least one processed surface of the wafer which is to be etched; rotating the wafer in juxtaposition to the liquid etchant source at a desired rotational speed; enhancing circulation and transfer of homogeneous etchant gas from the liquid source to the at least one processed surface of the wafer surface by rotating a member within the processing chamber; beaming radiant energy upon the wafer to remove particulate therefrom.
Claim 16
Dependent Claim
148 words
A process for etching semiconductor wafers using hydrofluoric acid vapor, comprising: containing a wafer within a substantially enclosed processing chamber; providing a liquid etchant source within the substantially enclosed processing chamber; said liquid etchant source including at least hydrofluoric acid and water; producing a substantially homogeneous vapor mixture from the liquid etchant source; said substantially homogeneous vapor mixture including at least hydrofluoric acid vapor and water vapor to provide a homogeneous etchant gas; contacting the homogeneous etchant gas against at least one processed surface of the wafer which is to be etched; rotating the wafer in juxtaposition to the liquid etchant source at a desired rotational speed; enhancing circulation and transfer of homogeneous etchant gas from the liquid source to the at least one processed surface of the wafer surface by rotating a member within the processing chamber; beaming radiant energy upon the wafer to remove particulate therefrom.
Claim 17
Dependent Claim
14 words
A process according to claim 11 wherein said beaming is predominantly infrared radiant energy.
Claim 18
Dependent Claim
147 words
A process for etching semiconductor wafers using hydrofluoric acid vapor, comprising: containing a wafer within a substantially enclosed processing chamber; providing a liquid etchant source within the substantially enclosed processing chamber; said liquid etchant source including at least hydrofluoric acid and water; producing a substantially homogeneous vapor mixture from the liquid etchant source; said substantially homogeneous vapor mixture including at least hydrofluoric acid vapor and water vapor to provide a homogeneous etchant gas; contacting the homogeneous etchant gas against at least one processed surface of the wafer which is to be etched; rotating the wafer in juxtaposition to the liquid etchant source at a desired rotational speed; enhancing circulation and transfer of homogeneous etchant gas from the liquid source to the at least one processed surface of the wafer surface by rotating a member within the processing chamber; controlling to effect temperature of the homogeneous etchant gas.
Claim 19
Dependent Claim
147 words
A process for etching semiconductor wafers using hydrofluoric acid vapor, comprising: containing a wafer within a substantially enclosed processing chamber; providing a liquid etchant source within the substantially enclosed processing chamber; said liquid etchant source including at least hydrofluoric acid and water; producing a substantially homogeneous vapor mixture from the liquid etchant source; said substantially homogeneous vapor mixture including at least hydrofluoric acid vapor and water vapor to provide a homogeneous etchant gas; contacting the homogeneous etchant gas against at least one processed surface of the wafer which is to be etched; rotating the wafer in juxtaposition to the liquid etchant source at a desired rotational speed; enhancing circulation and transfer of homogeneous etchant gas from the liquid source to the at least one processed surface of the wafer surface by rotating a member within the processing chamber; controlling to effect temperature of the homogeneous etchant gas.
Claim 20
Dependent Claim
30 words
A process according to claim 13 wherein said controlling to effect temperature of the homogeneous etchant gas is performed so as to maintain temperatures in the approximate range 10°-100° C.
Claim 21
Dependent Claim
223 words
A process for etching semiconductor wafers using hydrofluoric acid vapor, comprising: containing a wafer within a substantially enclosed processing chamber; providing a liquid etchant source within the substantially enclosed processing chamber; said liquid etchant source including at least hydrofluoric acid and water; producing a substantially homogeneous vapor mixture from the liquid etchant source; said substantially homogeneous vapor mixture including at least hydrofluoric acid vapor and water vapor to provide a homogeneous etchant gas; said producing being accomplished within a liquid phase chemical chamber forming a part of the processing chamber; contacting the homogeneous etchant gas against at least one processed surface of the wafer which is to be etched; rotating the wafer in juxtaposition to the liquid etchant source at a desired rotational speed; said rotating being accomplished while orienting the wafer with the processed surface downwardly in proximity to said liquid etchant source; enhancing circulation and transfer of homogeneous etchant gas from the liquid source to the at least one processed surface of the wafer surface by rotating a member within the processing chamber; controllably placing said liquid phase chemical chamber in fluid communication with remaining portions of said processing chamber wherein the wafer is held and rotated to allow vapors from the liquid etchant source to pass from the liquid phase chemical chamber to said remaining portions of said processing chamber.
Claim 22
Dependent Claim
223 words
A process for etching semiconductor wafers using hydrofluoric acid vapor, comprising: containing a wafer within a substantially enclosed processing chamber; providing a liquid etchant source within the substantially enclosed processing chamber; said liquid etchant source including at least hydrofluoric acid and water; producing a substantially homogeneous vapor mixture from the liquid etchant source; said substantially homogeneous vapor mixture including at least hydrofluoric acid vapor and water vapor to provide a homogeneous etchant gas; said producing being accomplished within a liquid phase chemical chamber forming a part of the processing chamber; contacting the homogeneous etchant gas against at least one processed surface of the wafer which is to be etched; rotating the wafer in juxtaposition to the liquid etchant source at a desired rotational speed; said rotating being accomplished while orienting the wafer with the processed surface downwardly in proximity to said liquid etchant source; enhancing circulation and transfer of homogeneous etchant gas from the liquid source to the at least one processed surface of the wafer surface by rotating a member within the processing chamber; controllably placing said liquid phase chemical chamber in fluid communication with remaining portions of said processing chamber wherein the wafer is held and rotated to allow vapors from the liquid etchant source to pass from the liquid phase chemical chamber to said remaining portions of said processing chamber.
Claim 23
Dependent Claim
20 words
A process according to claim 15 and further comprising: agitating the liquid etchant source to aid in said producing step.
Claim 24
Dependent Claim
30 words
A process according to claim 16 wherein said agitating is accomplished at least in part by stirring and mixing liquid etchant source to create turbulence and also maintain homogeneity thereof.
Claim 25
Dependent Claim
34 words
A process according to claim 16 wherein said agitating is accomplished at least in part by recirculating liquid etchant source through the liquid phase chemical chamber to create turbulence and also maintain homogeneity thereof.
Claim 26
Dependent Claim
32 words
A process according to claim 15 and further comprising terminating fluid communication between said liquid phase chemical chamber and said processing chamber by partitioning the processing chamber using a movable wall structure.
Claim 27
Dependent Claim
46 words
A process according to claim 15 and further comprising: terminating fluid communication between said liquid phase chemical chamber and said remaining portions of said processing chamber; exhausting said homogeneous etchant gas from said remaining portions of said processing chamber to retard further etching of the wafer.
Claim 28
Dependent Claim
224 words
A process for etching semiconductor wafers using hydrofluoric acid vapor, comprising: containing a wafer within a substantially enclosed processing chamber; providing a liquid etchant source within the substantially enclosed processing chamber; said liquid etchant source including at least hydrofluoric acid and water; producing a substantially homogeneous vapor mixture from the liquid etchant source; said substantially homogeneous vapor mixture including at least hydrofluoric acid vapor and water vapor to provide a homogeneous etchant gas: said producing being accomplished within an annular liquid phase chemical chamber forming a part of the processing chamber; contacting the homogeneous etchant gas against at least one processed surface of the wafer which is to be etched; rotating the wafer in juxtaposition to the liquid etchant source at a desired rotational speed; said rotating being accomplished while orienting the wafer with the processed surface downwardly in proximity to said liquid etchant source; enhancing circulation and transfer of homogeneous etchant gas from the liquid source to the at least one processed surface of the wafer surface by rotating a member within the processing chamber; controllably placing said liquid phase chemical chamber in fluid communication with remaining portions of said processing chamber wherein the wafer is held and rotated to allow vapors from a liquid etchant source to pass from the liquid phase chemical chamber to said remaining portions of said processing chamber.
Claim 29
Dependent Claim
224 words
A process for etching semiconductor wafers using hydrofluoric acid vapor, comprising: containing a wafer within a substantially enclosed processing chamber; providing a liquid etchant source within the substantially enclosed processing chamber; said liquid etchant source including at least hydrofluoric acid and water; producing a substantially homogeneous vapor mixture from the liquid etchant source; said substantially homogeneous vapor mixture including at least hydrofluoric acid vapor and water vapor to provide a homogeneous etchant gas: said producing being accomplished within an annular liquid phase chemical chamber forming a part of the processing chamber; contacting the homogeneous etchant gas against at least one processed surface of the wafer which is to be etched; rotating the wafer in juxtaposition to the liquid etchant source at a desired rotational speed; said rotating being accomplished while orienting the wafer with the processed surface downwardly in proximity to said liquid etchant source; enhancing circulation and transfer of homogeneous etchant gas from the liquid source to the at least one processed surface of the wafer surface by rotating a member within the processing chamber; controllably placing said liquid phase chemical chamber in fluid communication with remaining portions of said processing chamber wherein the wafer is held and rotated to allow vapors from a liquid etchant source to pass from the liquid phase chemical chamber to said remaining portions of said processing chamber.
Claim 30
Dependent Claim
232 words
A process for etching semiconductor wafers using hydrofluoric acid vapor, comprising: containing a wafer within a substantially enclosed processing chamber; providing a liquid etchant source within the substantially enclosed processing chamber; said liquid etchant source including at least hydrofluoric acid and water; producing a substantially homogeneous vapor mixture from the liquid etchant source; said substantially homogeneous vapor mixture including at least hydrofluoric acid vapor and water vapor to provide a homogeneous etchant gas; said producing being accomplished within a liquid phase chemical chamber forming a part of the processing chamber; contacting the homogeneous etchant gas against at least one processed surface of the wafer which is to be etched; rotating the wafer in juxtaposition to the liquid etchant source at a desired rotational speed; said rotating being accomplished while orienting the wafer with the processed surface downwardly in proximity to said liquid etchant source; enhancing circulation and transfer of homogeneous etchant gas from the liquid source to the at least one processed surface of the wafer surface by rotating a member within the processing chamber; controllably placing said liquid phase chemical chamber in fluid communication with remaining portions of said processing chamber wherein the wafer is held and rotated by controllably moving a wall of said processing chamber to allow vapors from the liquid etchant source to pass from the liquid phase chemical chamber to said remaining portions of said processing chamber.
Claim 31
Dependent Claim
232 words
A process for etching semiconductor wafers using hydrofluoric acid vapor, comprising: containing a wafer within a substantially enclosed processing chamber; providing a liquid etchant source within the substantially enclosed processing chamber; said liquid etchant source including at least hydrofluoric acid and water; producing a substantially homogeneous vapor mixture from the liquid etchant source; said substantially homogeneous vapor mixture including at least hydrofluoric acid vapor and water vapor to provide a homogeneous etchant gas; said producing being accomplished within a liquid phase chemical chamber forming a part of the processing chamber; contacting the homogeneous etchant gas against at least one processed surface of the wafer which is to be etched; rotating the wafer in juxtaposition to the liquid etchant source at a desired rotational speed; said rotating being accomplished while orienting the wafer with the processed surface downwardly in proximity to said liquid etchant source; enhancing circulation and transfer of homogeneous etchant gas from the liquid source to the at least one processed surface of the wafer surface by rotating a member within the processing chamber; controllably placing said liquid phase chemical chamber in fluid communication with remaining portions of said processing chamber wherein the wafer is held and rotated by controllably moving a wall of said processing chamber to allow vapors from the liquid etchant source to pass from the liquid phase chemical chamber to said remaining portions of said processing chamber.
Claim 32
Dependent Claim
233 words
A process for etching semiconductor wafers using hydrofluoric acid vapor, comprising: containing a wafer within a substantially enclosed processing chamber; providing a liquid etchant source within the substantially enclosed processing chamber; said liquid etchant source including at least hydrofluoric acid and water; producing a substantially homogeneous vapor mixture from the liquid etchant source; said substantially homogeneous vapor mixture including at least hydrofluoric acid vapor and water vapor to provide a homogeneous etchant gas; said producing being accomplished within a liquid phase chemical chamber forming a part of the processing chamber; contacting the homogeneous etchant gas against at least one processed surface of the wafer which is to be etched; rotating the wafer in juxtaposition to the liquid etchant source at a desired rotational speed; said rotating being accomplished while orienting the wafer with the processed surface downwardly in proximity to said liquid etchant source; enhancing circulation and transfer of homogeneous etchant gas from the liquid source to the at least one processed surface of the wafer surface by rotating a member within the processing chamber; controllably placing said liquid phase chemical chamber in fluid communication with remaining portions of said processing chamber wherein the wafer is held and rotated by controllably moving a bottom wall of said processing chamber to allow vapors from the liquid etchant source to pass from the liquid phase chemical chamber to said remaining portions of said processing chamber.
Claim 33
Dependent Claim
233 words
A process for etching semiconductor wafers using hydrofluoric acid vapor, comprising: containing a wafer within a substantially enclosed processing chamber; providing a liquid etchant source within the substantially enclosed processing chamber; said liquid etchant source including at least hydrofluoric acid and water; producing a substantially homogeneous vapor mixture from the liquid etchant source; said substantially homogeneous vapor mixture including at least hydrofluoric acid vapor and water vapor to provide a homogeneous etchant gas; said producing being accomplished within a liquid phase chemical chamber forming a part of the processing chamber; contacting the homogeneous etchant gas against at least one processed surface of the wafer which is to be etched; rotating the wafer in juxtaposition to the liquid etchant source at a desired rotational speed; said rotating being accomplished while orienting the wafer with the processed surface downwardly in proximity to said liquid etchant source; enhancing circulation and transfer of homogeneous etchant gas from the liquid source to the at least one processed surface of the wafer surface by rotating a member within the processing chamber; controllably placing said liquid phase chemical chamber in fluid communication with remaining portions of said processing chamber wherein the wafer is held and rotated by controllably moving a bottom wall of said processing chamber to allow vapors from the liquid etchant source to pass from the liquid phase chemical chamber to said remaining portions of said processing chamber.
Claim 34
Dependent Claim
165 words
A process for etching semiconductor wafers using hydrofluoric acid vapor, comprising: containing a wafer within a substantially enclosed processing chamber; providing a liquid etchant source within the substantially enclosed processing chamber; said liquid etchant source including at least hydrofluoric acid and water; producing a substantially homogeneous vapor mixture from the liquid etchant source; said substantially homogeneous vapor mixture including at least hydrofluoric acid vapor and water vapor to provide a homogeneous etchant gas; contacting the homogeneous etchant gas against at least one processed surface of the wafer which is to be etched; rotating the wafer in juxtaposition to the liquid etchant source at a desired rotational speed; said rotating being accomplished while orienting the wafer with the processed surface downwardly in proximity to said liquid etchant source; enhancing circulation and transfer of homogeneous etchant gas from the liquid source to the at least one processed surface of the wafer surface by rotating a member within the processing chamber: heating the wafer to remove particulate therefrom.
Claim 35
Dependent Claim
165 words
A process for etching semiconductor wafers using hydrofluoric acid vapor, comprising: containing a wafer within a substantially enclosed processing chamber; providing a liquid etchant source within the substantially enclosed processing chamber; said liquid etchant source including at least hydrofluoric acid and water; producing a substantially homogeneous vapor mixture from the liquid etchant source; said substantially homogeneous vapor mixture including at least hydrofluoric acid vapor and water vapor to provide a homogeneous etchant gas; contacting the homogeneous etchant gas against at least one processed surface of the wafer which is to be etched; rotating the wafer in juxtaposition to the liquid etchant source at a desired rotational speed; said rotating being accomplished while orienting the wafer with the processed surface downwardly in proximity to said liquid etchant source; enhancing circulation and transfer of homogeneous etchant gas from the liquid source to the at least one processed surface of the wafer surface by rotating a member within the processing chamber: heating the wafer to remove particulate therefrom.
Claim 36
Dependent Claim
24 words
A process according to claim 24 wherein said heating the wafer is to remove particulate by-products deposited upon the wafer from said contacting step.
Claim 37
Dependent Claim
168 words
A process for etching semiconductor wafers using hydrofluoric acid vapor, comprising: containing a wafer within a substantially enclosed processing chamber; providing a liquid etchant source within the substantially enclosed processing chamber; said liquid etchant source including at least hydrofluoric acid and water; producing a substantially homogeneous vapor mixture from the liquid etchant source; said substantially homogeneous vapor mixture including at least hydrofluoric acid vapor and water vapor to provide a homogeneous etchant gas; contacting the homogeneous etchant gas against at least one processed surface of the wafer which is to be etched;. rotating the wafer in juxtaposition to the liquid etchant source at a desired rotational speed; said rotating being accomplished while orienting the wafer with the processed surface downwardly in proximity to said liquid etchant source; enhancing circulation and transfer of homogeneous etchant gas from the liquid source to the at least one processed surface of the wafer surface by rotating a member within the processing chamber; beaming radiant energy upon the wafer to remove particulate therefrom.
Claim 38
Dependent Claim
168 words
A process for etching semiconductor wafers using hydrofluoric acid vapor, comprising: containing a wafer within a substantially enclosed processing chamber; providing a liquid etchant source within the substantially enclosed processing chamber; said liquid etchant source including at least hydrofluoric acid and water; producing a substantially homogeneous vapor mixture from the liquid etchant source; said substantially homogeneous vapor mixture including at least hydrofluoric acid vapor and water vapor to provide a homogeneous etchant gas; contacting the homogeneous etchant gas against at least one processed surface of the wafer which is to be etched;. rotating the wafer in juxtaposition to the liquid etchant source at a desired rotational speed; said rotating being accomplished while orienting the wafer with the processed surface downwardly in proximity to said liquid etchant source; enhancing circulation and transfer of homogeneous etchant gas from the liquid source to the at least one processed surface of the wafer surface by rotating a member within the processing chamber; beaming radiant energy upon the wafer to remove particulate therefrom.
Claim 39
Dependent Claim
16 words
A process according to claim 26 wherein said beaming is accomplished using predominantly infrared radiant energy.
Claim 40
Dependent Claim
167 words
A process for etching semiconductor wafers using hydrofluoric acid vapor, comprising: containing a wafer within a substantially enclosed processing chamber; providing a liquid etchant source within the substantially enclosed processing chamber; said liquid etchant source including at least hydrofluoric acid and water; producing a substantially homogeneous vapor mixture from the liquid etchant source; said substantially homogeneous vapor mixture including at least hydrofluoric acid vapor and water vapor to provide a homogeneous etchant gas; contacting the homogeneous etchant gas against at least one processed surface of the wafer which is to be etched; rotating the wafer in juxtaposition to the liquid etchant source at a desired rotational speed; said rotating being accomplished while orienting the wafer with the processed surface downwardly in proximity to said liquid etchant source; enhancing circulation and transfer of homogeneous etchant gas from the liquid source to the at least one processed surface of the wafer surface by rotating a member within the processing chamber; controlling to effect temperature of the homogeneous etchant gas.
Claim 41
Dependent Claim
167 words
A process for etching semiconductor wafers using hydrofluoric acid vapor, comprising: containing a wafer within a substantially enclosed processing chamber; providing a liquid etchant source within the substantially enclosed processing chamber; said liquid etchant source including at least hydrofluoric acid and water; producing a substantially homogeneous vapor mixture from the liquid etchant source; said substantially homogeneous vapor mixture including at least hydrofluoric acid vapor and water vapor to provide a homogeneous etchant gas; contacting the homogeneous etchant gas against at least one processed surface of the wafer which is to be etched; rotating the wafer in juxtaposition to the liquid etchant source at a desired rotational speed; said rotating being accomplished while orienting the wafer with the processed surface downwardly in proximity to said liquid etchant source; enhancing circulation and transfer of homogeneous etchant gas from the liquid source to the at least one processed surface of the wafer surface by rotating a member within the processing chamber; controlling to effect temperature of the homogeneous etchant gas.
Claim 42
Dependent Claim
27 words
A process according to claim 28 wherein said controlling is to effect temperature of the homogeneous etchant gas to maintain temperatures in the approximate range 10°-100° C.
Claim 43
Dependent Claim
168 words
A process for etching semiconductor wafers using hydrofluoric acid vapor, comprising: containing a wafer within a substantially enclosed processing chamber; providing a liquid etchant source within the substantially enclosed processing chamber; said liquid etchant source including at least hydrofluoric acid and water; producing a substantially homogeneous vapor mixture from the liquid etchant source; said substantially homogeneous vapor mixture including at least hydrofluoric acid vapor and water vapor to provide a homogeneous etchant gas; contacting the homogeneous etchant gas against at least one processed surface of the wafer which is to be etched; rotating the wafer in juxtaposition to the liquid etchant source at a desired rotational speed; said rotating being accomplished while orienting the wafer with the processed surface downwardly in proximity to said liquid etchant source; enhancing circulation and transfer of homogeneous etchant gas from the liquid source to the at least one processed surface of the wafer surface by rotating a member within the processing chamber; said homogeneous liquid etchant source being continuously recirculated and filtered.
Claim 44
Dependent Claim
168 words
A process for etching semiconductor wafers using hydrofluoric acid vapor, comprising: containing a wafer within a substantially enclosed processing chamber; providing a liquid etchant source within the substantially enclosed processing chamber; said liquid etchant source including at least hydrofluoric acid and water; producing a substantially homogeneous vapor mixture from the liquid etchant source; said substantially homogeneous vapor mixture including at least hydrofluoric acid vapor and water vapor to provide a homogeneous etchant gas; contacting the homogeneous etchant gas against at least one processed surface of the wafer which is to be etched; rotating the wafer in juxtaposition to the liquid etchant source at a desired rotational speed; said rotating being accomplished while orienting the wafer with the processed surface downwardly in proximity to said liquid etchant source; enhancing circulation and transfer of homogeneous etchant gas from the liquid source to the at least one processed surface of the wafer surface by rotating a member within the processing chamber; said homogeneous liquid etchant source being continuously recirculated and filtered.
Claim 45
Dependent Claim
192 words
A process for etching semiconductor wafers using hydrofluoric acid vapor, comprising: containing a wafer within a substantially enclosed processing chamber; providing a liquid etchant source within the substantially enclosed processing chamber; said liquid etchant source including at least hydrofluoric acid and water; said providing being accomplished by forming a pool of liquid etchant source beneath a wafer being processed; said providing being accomplished by forming a toroidal pool of liquid etchant source adjacent to a wafer being processed; producing a substantially homogeneous vapor mixture from the liquid etchant source; said substantially homogeneous vapor mixture including at least hydrofluoric acid vapor and water vapor to provide a homogeneous etchant gas; contacting the homogeneous etchant gas against at least one processed surface of the wafer which is to be etched; rotating the wafer in juxtaposition to the liquid etchant source at a desired rotational speed; enhancing circulation and transfer of homogeneous etchant gas from the liquid source to the at least one processed surface of the wafer surface by rotating a member within the processing chamber; orienting the wafer with the processed surface downwardly in proximity to the toroidal pool of liquid etchant source.
Claim 46
Dependent Claim
192 words
A process for etching semiconductor wafers using hydrofluoric acid vapor, comprising: containing a wafer within a substantially enclosed processing chamber; providing a liquid etchant source within the substantially enclosed processing chamber; said liquid etchant source including at least hydrofluoric acid and water; said providing being accomplished by forming a pool of liquid etchant source beneath a wafer being processed; said providing being accomplished by forming a toroidal pool of liquid etchant source adjacent to a wafer being processed; producing a substantially homogeneous vapor mixture from the liquid etchant source; said substantially homogeneous vapor mixture including at least hydrofluoric acid vapor and water vapor to provide a homogeneous etchant gas; contacting the homogeneous etchant gas against at least one processed surface of the wafer which is to be etched; rotating the wafer in juxtaposition to the liquid etchant source at a desired rotational speed; enhancing circulation and transfer of homogeneous etchant gas from the liquid source to the at least one processed surface of the wafer surface by rotating a member within the processing chamber; orienting the wafer with the processed surface downwardly in proximity to the toroidal pool of liquid etchant source.
Claim 47
Dependent Claim
33 words
A process according to claim 31 wherein said wafer is positioned within a proximity range of approximately 2-100 millimeters from the liquid etchant source to portions of the processed surface of the wafer.
Claim 48
Dependent Claim
182 words
A process for vapor processing semiconductor wafers, comprising: containing a wafer within a substantially enclosed processing chamber; producing a substantially homogeneous vapor mixture having a reactant vapor and a diluent vapor to provide a substantially homogeneous processing gas; said producing a substantially homogeneous vapor mixture being accomplished by providing a pool of liquid processing fluid source within a liquid phase chemical chamber forming a part of the processing chamber; contacting the substantially homogeneous processing gas against a processed surface of the wafer which is to be processed; spinning the wafer to provide uniform dispersion of the substantially homogeneous processing gas across the wafer surface and to facilitate circulation and transfer of the substantially homogeneous processing gas to the processed surface; enhancing production of said vapor mixture from said pool of liquid processing fluid source by spinning a member within the enclosed processing chamber to effect circulation of gases therewithin; terminating fluid communication between said liquid phase chemical chamber and remaining portions of said processing chamber wherein the wafer is held and spun by partitioning the processing chamber using a movable wall structure.
Claim 49
Dependent Claim
182 words
A process for vapor processing semiconductor wafers, comprising: containing a wafer within a substantially enclosed processing chamber; producing a substantially homogeneous vapor mixture having a reactant vapor and a diluent vapor to provide a substantially homogeneous processing gas; said producing a substantially homogeneous vapor mixture being accomplished by providing a pool of liquid processing fluid source within a liquid phase chemical chamber forming a part of the processing chamber; contacting the substantially homogeneous processing gas against a processed surface of the wafer which is to be processed; spinning the wafer to provide uniform dispersion of the substantially homogeneous processing gas across the wafer surface and to facilitate circulation and transfer of the substantially homogeneous processing gas to the processed surface; enhancing production of said vapor mixture from said pool of liquid processing fluid source by spinning a member within the enclosed processing chamber to effect circulation of gases therewithin; terminating fluid communication between said liquid phase chemical chamber and remaining portions of said processing chamber wherein the wafer is held and spun by partitioning the processing chamber using a movable wall structure.
Claim 50
Dependent Claim
178 words
A process for vapor processing semiconductor wafers, comprising: containing a wafer within a substantially enclosed processing chamber; producing a substantially homogeneous vapor mixture having a reactant vapor and a diluent vapor to provide a substantially homogeneous processing gas; said producing a substantially homogeneous vapor mixture being accomplished by providing a pool of liquid processing fluid source within a liquid phase chemical chamber forming a part of the processing chamber; contacting the substantially homogeneous processing gas against a processed surface of the wafer which is to be processed; spinning the wafer to provide uniform dispersion of the substantially homogeneous processing gas across the wafer surface and to facilitate circulation and transfer of the substantially homogeneous processing gas to the processed surface; enhancing production of said vapor mixture from said pool of liquid processing fluid source by spinning a member within the enclosed processing chamber to effect circulation of gases therewithin; terminating fluid communication between said liquid phase chemical chamber and said processing chamber; exhausting said homogeneous vapor mixture from said processing chamber to retard further processing of the wafer.
Claim 51
Dependent Claim
178 words
A process for vapor processing semiconductor wafers, comprising: containing a wafer within a substantially enclosed processing chamber; producing a substantially homogeneous vapor mixture having a reactant vapor and a diluent vapor to provide a substantially homogeneous processing gas; said producing a substantially homogeneous vapor mixture being accomplished by providing a pool of liquid processing fluid source within a liquid phase chemical chamber forming a part of the processing chamber; contacting the substantially homogeneous processing gas against a processed surface of the wafer which is to be processed; spinning the wafer to provide uniform dispersion of the substantially homogeneous processing gas across the wafer surface and to facilitate circulation and transfer of the substantially homogeneous processing gas to the processed surface; enhancing production of said vapor mixture from said pool of liquid processing fluid source by spinning a member within the enclosed processing chamber to effect circulation of gases therewithin; terminating fluid communication between said liquid phase chemical chamber and said processing chamber; exhausting said homogeneous vapor mixture from said processing chamber to retard further processing of the wafer.
Claim 52
Dependent Claim
205 words
A process for vapor processing semiconductor wafers, comprising: containing a wafer within a substantially enclosed processing chamber; producing a substantially homogeneous vapor mixture having a reactant vapor and a diluent vapor to provide a substantially homogeneous processing gas; said producing a substantially homogeneous vapor mixture being accomplished by providing a pool of liquid processing fluid source within a liquid phase chemical chamber forming a part of the processing chamber; contacting the substantially homogeneous processing gas against a processed surface of the wafer which is to be processed; spinning the wafer to provide uniform dispersion of the substantially homogeneous processing gas across the wafer surface and to facilitate circulation and transfer of the substantially homogeneous processing gas to the processed surface; enhancing production of said vapor mixture from said pool of liquid processing fluid source by spinning a member within the enclosed processing chamber to effect circulation of gases therewithin; terminating fluid communication between said liquid phase chemical chamber and remaining portions of said processing chamber wherein the wafer is held and spun by partitioning the processing chamber using a movable wall structure; exhausting said homogeneous processing gas from said remaining portions of said processing chamber to retard further processing of the wafer after said terminating.
Claim 53
Dependent Claim
205 words
A process for vapor processing semiconductor wafers, comprising: containing a wafer within a substantially enclosed processing chamber; producing a substantially homogeneous vapor mixture having a reactant vapor and a diluent vapor to provide a substantially homogeneous processing gas; said producing a substantially homogeneous vapor mixture being accomplished by providing a pool of liquid processing fluid source within a liquid phase chemical chamber forming a part of the processing chamber; contacting the substantially homogeneous processing gas against a processed surface of the wafer which is to be processed; spinning the wafer to provide uniform dispersion of the substantially homogeneous processing gas across the wafer surface and to facilitate circulation and transfer of the substantially homogeneous processing gas to the processed surface; enhancing production of said vapor mixture from said pool of liquid processing fluid source by spinning a member within the enclosed processing chamber to effect circulation of gases therewithin; terminating fluid communication between said liquid phase chemical chamber and remaining portions of said processing chamber wherein the wafer is held and spun by partitioning the processing chamber using a movable wall structure; exhausting said homogeneous processing gas from said remaining portions of said processing chamber to retard further processing of the wafer after said terminating.
Claim 54
Dependent Claim
211 words
A process for vapor processing semiconductor wafers, comprising: containing a wafer within a substantially enclosed processing chamber; producing a substantially homogeneous vapor mixture having a reactant vapor and a diluent vapor to provide a substantially homogeneous processing gas; said producing a substantially homogeneous vapor mixture being accomplished by providing a pool of liquid processing fluid source within a liquid phase chemical chamber forming a part of the processing chamber; contacting the substantially homogeneous processing gas against a processed surface of the wafer which is to be processed; spinning the wafer to provide uniform dispersion of the substantially homogeneous processing gas across the wafer surface and to facilitate circulation and transfer of the substantially homogeneous processing gas to the processed surface; enhancing production of said vapor mixture from said pool of liquid processing fluid source by spinning a member within the enclosed processing chamber to effect circulation of gases therewithin; agitating the liquid processing fluid source to aid in said producing step; controllably placing said liquid phase chemical chamber in fluid communication with remaining portions of said processing chamber in which the wafer is held and spun to allow vapors from agitated liquid processing fluid source to pass from the liquid phase chemical chamber to said remaining portions of said processing chamber.
Claim 55
Dependent Claim
211 words
A process for vapor processing semiconductor wafers, comprising: containing a wafer within a substantially enclosed processing chamber; producing a substantially homogeneous vapor mixture having a reactant vapor and a diluent vapor to provide a substantially homogeneous processing gas; said producing a substantially homogeneous vapor mixture being accomplished by providing a pool of liquid processing fluid source within a liquid phase chemical chamber forming a part of the processing chamber; contacting the substantially homogeneous processing gas against a processed surface of the wafer which is to be processed; spinning the wafer to provide uniform dispersion of the substantially homogeneous processing gas across the wafer surface and to facilitate circulation and transfer of the substantially homogeneous processing gas to the processed surface; enhancing production of said vapor mixture from said pool of liquid processing fluid source by spinning a member within the enclosed processing chamber to effect circulation of gases therewithin; agitating the liquid processing fluid source to aid in said producing step; controllably placing said liquid phase chemical chamber in fluid communication with remaining portions of said processing chamber in which the wafer is held and spun to allow vapors from agitated liquid processing fluid source to pass from the liquid phase chemical chamber to said remaining portions of said processing chamber.
Claim 56
Dependent Claim
166 words
A process for vapor processing semiconductor wafers, comprising: containing a wafer within a substantially enclosed processing chamber; producing a substantially homogeneous vapor mixture having a reactant vapor and a diluent vapor to provide a substantially homogeneous processing gas; said producing a substantially homogeneous vapor mixture being accomplished by providing a pool of liquid processing fluid source within a liquid phase chemical chamber forming a part of the processing chamber; said providing a pool being accomplished by forming a toroidal pool adjacent to a wafer being processed; contacting the substantially homogeneous processing gas against a processed surface of the wafer which is to be processed; spinning the wafer to provide uniform dispersion of the substantially homogeneous processing gas across the wafer surface and to facilitate circulation and transfer of the substantially homogeneous processing gas to the processed surface; enhancing production of said vapor mixture from said pool of liquid processing fluid source by spinning a member within the enclosed processing chamber to effect circulation of gases therewithin.
Claim 57
Dependent Claim
166 words
A process for vapor processing semiconductor wafers, comprising: containing a wafer within a substantially enclosed processing chamber; producing a substantially homogeneous vapor mixture having a reactant vapor and a diluent vapor to provide a substantially homogeneous processing gas; said producing a substantially homogeneous vapor mixture being accomplished by providing a pool of liquid processing fluid source within a liquid phase chemical chamber forming a part of the processing chamber; said providing a pool being accomplished by forming a toroidal pool adjacent to a wafer being processed; contacting the substantially homogeneous processing gas against a processed surface of the wafer which is to be processed; spinning the wafer to provide uniform dispersion of the substantially homogeneous processing gas across the wafer surface and to facilitate circulation and transfer of the substantially homogeneous processing gas to the processed surface; enhancing production of said vapor mixture from said pool of liquid processing fluid source by spinning a member within the enclosed processing chamber to effect circulation of gases therewithin.
Claim 58
Dependent Claim
220 words
A process for vapor processing semiconductor wafers, comprising: containing a wafer within a substantially enclosed processing chamber; producing a substantially homogeneous vapor mixture having a reactant vapor and a diluent vapor to provide a substantially homogeneous processing gas, said producing a substantially homogeneous vapor mixture being accomplished by providing a pool of liquid processing fluid source within a liquid phase chemical chamber forming a part of the processing chamber; contacting the substantially homogeneous processing gas against a processed surface of the wafer which is to be processed; spinning the wafer to provide uniform dispersion of the substantially homogeneous processing .gas across the wafer surface and to facilitate circulation and transfer of the substantially homogeneous processing gas to the processed surface; enhancing production of said vapor mixture from said pool of liquid processing fluid source by spinning a member within the enclosed processing chamber to effect circulation of gases therewithin; wherein said producing is accomplished within an annular liquid phase chemical chamber forming a part of the processing chamber; and further comprising controllably placing said liquid phase chemical chamber in fluid communication with remaining portions of said processing chamber wherein the wafer is held and spun to allow vapors from a liquid processing fluid source to pass from the liquid phase chemical chamber to said remaining portions of said processing chamber.
Claim 59
Dependent Claim
220 words
A process for vapor processing semiconductor wafers, comprising: containing a wafer within a substantially enclosed processing chamber; producing a substantially homogeneous vapor mixture having a reactant vapor and a diluent vapor to provide a substantially homogeneous processing gas, said producing a substantially homogeneous vapor mixture being accomplished by providing a pool of liquid processing fluid source within a liquid phase chemical chamber forming a part of the processing chamber; contacting the substantially homogeneous processing gas against a processed surface of the wafer which is to be processed; spinning the wafer to provide uniform dispersion of the substantially homogeneous processing .gas across the wafer surface and to facilitate circulation and transfer of the substantially homogeneous processing gas to the processed surface; enhancing production of said vapor mixture from said pool of liquid processing fluid source by spinning a member within the enclosed processing chamber to effect circulation of gases therewithin; wherein said producing is accomplished within an annular liquid phase chemical chamber forming a part of the processing chamber; and further comprising controllably placing said liquid phase chemical chamber in fluid communication with remaining portions of said processing chamber wherein the wafer is held and spun to allow vapors from a liquid processing fluid source to pass from the liquid phase chemical chamber to said remaining portions of said processing chamber.
Claim 60
Dependent Claim
228 words
A process for vapor processing semiconductor wafers, comprising: containing a wafer within a substantially enclosed processing chamber; producing a substantially homogeneous vapor mixture having a reactant vapor and a diluent vapor to provide a substantially homogeneous processing gas; said producing a substantially homogeneous vapor mixture being accomplished by providing a pool of liquid processing fluid source within a liquid phase chemical chamber forming a part of the processing chamber; contacting the substantially homogeneous processing gas against a processed surface of the wafer which is to be processed; spinning the wafer to provide uniform dispersion of the substantially homogeneous processing gas across the wafer surface and to facilitate circulation and transfer of the substantially homogeneous processing gas to the processed surface; enhancing production of said vapor mixture from said pool of liquid processing fluid source by spinning a member within the enclosed processing chamber to effect circulation of gases therewithin; wherein said producing is accomplished within a liquid phase chemical chamber forming a part of the processing chamber; and further comprising controllably placing said liquid phase chemical chamber in fluid communication with remaining portions of said processing chamber wherein the wafer is held and spun by controllably moving a wall of said processing chamber to allow vapors from the liquid processing fluid source to pass from the liquid phase chemical chamber to said remaining portions of said processing chamber.
Claim 61
Dependent Claim
228 words
A process for vapor processing semiconductor wafers, comprising: containing a wafer within a substantially enclosed processing chamber; producing a substantially homogeneous vapor mixture having a reactant vapor and a diluent vapor to provide a substantially homogeneous processing gas; said producing a substantially homogeneous vapor mixture being accomplished by providing a pool of liquid processing fluid source within a liquid phase chemical chamber forming a part of the processing chamber; contacting the substantially homogeneous processing gas against a processed surface of the wafer which is to be processed; spinning the wafer to provide uniform dispersion of the substantially homogeneous processing gas across the wafer surface and to facilitate circulation and transfer of the substantially homogeneous processing gas to the processed surface; enhancing production of said vapor mixture from said pool of liquid processing fluid source by spinning a member within the enclosed processing chamber to effect circulation of gases therewithin; wherein said producing is accomplished within a liquid phase chemical chamber forming a part of the processing chamber; and further comprising controllably placing said liquid phase chemical chamber in fluid communication with remaining portions of said processing chamber wherein the wafer is held and spun by controllably moving a wall of said processing chamber to allow vapors from the liquid processing fluid source to pass from the liquid phase chemical chamber to said remaining portions of said processing chamber.
Claim 62
Dependent Claim
204 words
A process for vapor processing semiconductor wafers, comprising: containing a wafer within a substantially enclosed processing chamber; producing a substantially homogeneous vapor mixture having a reactant vapor and a diluent vapor to provide a substantially homogeneous processing gas; said producing a substantially homogeneous vapor mixture being accomplished by providing a pool of liquid processing fluid source within a liquid phase chemical chamber forming a part of the processing chamber; contacting the substantially homogeneous processing gas against a processed surface of the wafer which is to be processed; spinning the wafer to provide uniform dispersion of the substantially homogeneous processing gas across the wafer surface and to facilitate circulation and transfer of the substantially homogeneous processing gas to the processed surface; enhancing production of said vapor mixture from said pool of liquid processing fluid source by spinning a member within the enclosed processing chamber to effect circulation of gases therewithin; controllably placing said liquid phase chemical chamber in fluid communication with remaining portions of said processing chamber wherein the wafer is held and spun by controllably moving a partition wall of said processing chamber to allow vapors from a liquid processing fluid source to pass from the liquid phase chemical chamber to said processing chamber.
Claim 63
Dependent Claim
204 words
A process for vapor processing semiconductor wafers, comprising: containing a wafer within a substantially enclosed processing chamber; producing a substantially homogeneous vapor mixture having a reactant vapor and a diluent vapor to provide a substantially homogeneous processing gas; said producing a substantially homogeneous vapor mixture being accomplished by providing a pool of liquid processing fluid source within a liquid phase chemical chamber forming a part of the processing chamber; contacting the substantially homogeneous processing gas against a processed surface of the wafer which is to be processed; spinning the wafer to provide uniform dispersion of the substantially homogeneous processing gas across the wafer surface and to facilitate circulation and transfer of the substantially homogeneous processing gas to the processed surface; enhancing production of said vapor mixture from said pool of liquid processing fluid source by spinning a member within the enclosed processing chamber to effect circulation of gases therewithin; controllably placing said liquid phase chemical chamber in fluid communication with remaining portions of said processing chamber wherein the wafer is held and spun by controllably moving a partition wall of said processing chamber to allow vapors from a liquid processing fluid source to pass from the liquid phase chemical chamber to said processing chamber.
Claim 64
Dependent Claim
196 words
A process for vapor processing semiconductor wafers, comprising: containing a wafer within a substantially enclosed processing chamber; producing a substantially homogeneous vapor mixture having a reactant vapor and a diluent vapor to provide a substantially homogeneous processing gas; said producing a substantially homogeneous vapor mixture being accomplished by providing a pool of liquid processing fluid source within a liquid phase chemical chamber forming a part of the processing chamber; contacting the substantially homogeneous processing gas against a processed surface of the wafer which is to be processed; spinning the wafer to provide uniform dispersion of the substantially homogeneous processing gas across the wafer surface and to facilitate circulation and transfer of the substantially homogeneous processing gas to the processed surface; enhancing production of said vapor mixture from said pool of liquid processing fluid source by spinning a member within the enclosed processing chamber to effect circulation of gases therewithin; controllably placing said liquid phase chemical chamber in fluid communication with said enclosed processing chamber by controllably moving a bottom wall of said enclosed processing chamber to allow vapors from a liquid processing fluid source to pass from the liquid phase chemical chamber to said processing chamber.
Claim 65
Dependent Claim
196 words
A process for vapor processing semiconductor wafers, comprising: containing a wafer within a substantially enclosed processing chamber; producing a substantially homogeneous vapor mixture having a reactant vapor and a diluent vapor to provide a substantially homogeneous processing gas; said producing a substantially homogeneous vapor mixture being accomplished by providing a pool of liquid processing fluid source within a liquid phase chemical chamber forming a part of the processing chamber; contacting the substantially homogeneous processing gas against a processed surface of the wafer which is to be processed; spinning the wafer to provide uniform dispersion of the substantially homogeneous processing gas across the wafer surface and to facilitate circulation and transfer of the substantially homogeneous processing gas to the processed surface; enhancing production of said vapor mixture from said pool of liquid processing fluid source by spinning a member within the enclosed processing chamber to effect circulation of gases therewithin; controllably placing said liquid phase chemical chamber in fluid communication with said enclosed processing chamber by controllably moving a bottom wall of said enclosed processing chamber to allow vapors from a liquid processing fluid source to pass from the liquid phase chemical chamber to said processing chamber.
Claim 66
Dependent Claim
192 words
A process for vapor processing semiconductor wafers, comprising: containing a wafer within a substantially enclosed processing chamber; producing a substantially homogeneous vapor mixture having a reactant vapor and a diluent vapor to provide a substantially homogeneous processing gas: said producing a substantially homogeneous vapor mixture being accomplished by providing a pool of liquid processing fluid source within a liquid phase chemical chamber forming a part of the processing chamber; contacting the substantially homogeneous processing gas against a processed surface of the wafer which is to be processed; spinning the wafer to provide uniform dispersion of the substantially homogeneous processing gas across the wafer surface and to facilitate circulation and transfer of the substantially homogeneous processing gas to the processed surface; enhancing production of said vapor mixture from said pool of liquid processing fluid source by spinning a member within the enclosed processing chamber to effect circulation of gases therewithin; placing said liquid phase chemical chamber in fluid communication with said enclosed processing chamber by controllably opening a vapor phase control valve to allow vapors from a liquid processing fluid source to pass from the liquid phase chemical chamber to said processing chamber.
Claim 67
Dependent Claim
192 words
A process for vapor processing semiconductor wafers, comprising: containing a wafer within a substantially enclosed processing chamber; producing a substantially homogeneous vapor mixture having a reactant vapor and a diluent vapor to provide a substantially homogeneous processing gas: said producing a substantially homogeneous vapor mixture being accomplished by providing a pool of liquid processing fluid source within a liquid phase chemical chamber forming a part of the processing chamber; contacting the substantially homogeneous processing gas against a processed surface of the wafer which is to be processed; spinning the wafer to provide uniform dispersion of the substantially homogeneous processing gas across the wafer surface and to facilitate circulation and transfer of the substantially homogeneous processing gas to the processed surface; enhancing production of said vapor mixture from said pool of liquid processing fluid source by spinning a member within the enclosed processing chamber to effect circulation of gases therewithin; placing said liquid phase chemical chamber in fluid communication with said enclosed processing chamber by controllably opening a vapor phase control valve to allow vapors from a liquid processing fluid source to pass from the liquid phase chemical chamber to said processing chamber.
Claim 68
Dependent Claim
216 words
A process for vapor processing semiconductor wafers, comprising: containing a wafer within a substantially enclosed processing chamber; producing a substantially homogeneous vapor mixture having a reactant vapor and a diluent vapor to provide a substantially homogeneous processing gas; said producing a substantially homogeneous vapor mixture being accomplished by providing a pool of liquid processing fluid source within a liquid phase chemical chamber forming a part of the processing chamber; contacting the substantially homogeneous processing gas against a processed surface of the wafer which is to be processed; spinning the wafer to provide uniform dispersion of the substantially homogeneous processing gas across the wafer surface and to facilitate circulation and transfer of the substantially homogeneous processing gas to the processed surface; enhancing production of said vapor mixture from said pool of liquid processing fluid source by spinning a member within the enclosed processing chamber to effect circulation of gases therewithin; wherein said producing is accomplished within an annular liquid phase chemical chamber; and further comprising placing said liquid phase chemical chamber in fluid communication with said enclosed processing chamber by controllably opening a vapor phase control valve serving as a wall of the enclosed processing chamber to allow vapors from a liquid processing fluid source to pass from the liquid phase chemical chamber to said processing chamber.
Claim 69
Dependent Claim
216 words
A process for vapor processing semiconductor wafers, comprising: containing a wafer within a substantially enclosed processing chamber; producing a substantially homogeneous vapor mixture having a reactant vapor and a diluent vapor to provide a substantially homogeneous processing gas; said producing a substantially homogeneous vapor mixture being accomplished by providing a pool of liquid processing fluid source within a liquid phase chemical chamber forming a part of the processing chamber; contacting the substantially homogeneous processing gas against a processed surface of the wafer which is to be processed; spinning the wafer to provide uniform dispersion of the substantially homogeneous processing gas across the wafer surface and to facilitate circulation and transfer of the substantially homogeneous processing gas to the processed surface; enhancing production of said vapor mixture from said pool of liquid processing fluid source by spinning a member within the enclosed processing chamber to effect circulation of gases therewithin; wherein said producing is accomplished within an annular liquid phase chemical chamber; and further comprising placing said liquid phase chemical chamber in fluid communication with said enclosed processing chamber by controllably opening a vapor phase control valve serving as a wall of the enclosed processing chamber to allow vapors from a liquid processing fluid source to pass from the liquid phase chemical chamber to said processing chamber.
Claim 70
Dependent Claim
30 words
A process according to claim 43 and further comprising: closing said vapor phase control valve; exhausting homogeneous vapor mixture from said processing chamber to retard further processing of the wafer.
Claim 71
Dependent Claim
156 words
A process for vapor processing semiconductor wafers, comprising: containing a wafer within a substantially enclosed processing chamber; producing a substantially homogeneous vapor mixture having a reactant vapor and a diluent vapor to provide a substantially homogeneous processing gas; said producing a substantially homogeneous vapor mixture being accomplished by providing a pool of liquid processing fluid source within a liquid phase chemical chamber forming, a part of the processing chamber; contacting the substantially homogeneous processing gas against a processed surface of the wafer which is to be processed; spinning the wafer to provide uniform dispersion of the substantially homogeneous processing gas across the wafer surface and to facilitate circulation and transfer of the substantially homogeneous processing gas to the processed surface; enhancing production of said vapor mixture from said pool of liquid processing fluid source by spinning a member within the enclosed processing chamber to effect circulation of gases therewithin; heating the wafer to remove particulate therefrom.
Claim 72
Dependent Claim
156 words
A process for vapor processing semiconductor wafers, comprising: containing a wafer within a substantially enclosed processing chamber; producing a substantially homogeneous vapor mixture having a reactant vapor and a diluent vapor to provide a substantially homogeneous processing gas; said producing a substantially homogeneous vapor mixture being accomplished by providing a pool of liquid processing fluid source within a liquid phase chemical chamber forming, a part of the processing chamber; contacting the substantially homogeneous processing gas against a processed surface of the wafer which is to be processed; spinning the wafer to provide uniform dispersion of the substantially homogeneous processing gas across the wafer surface and to facilitate circulation and transfer of the substantially homogeneous processing gas to the processed surface; enhancing production of said vapor mixture from said pool of liquid processing fluid source by spinning a member within the enclosed processing chamber to effect circulation of gases therewithin; heating the wafer to remove particulate therefrom.
Claim 73
Dependent Claim
159 words
A process for vapor processing semiconductor wafers, comprising: containing a wafer within a substantially enclosed processing chamber; producing a substantially homogeneous vapor mixture having a reactant vapor and a diluent vapor to provide a substantially homogeneous processing gas; said producing a substantially homogeneous vapor mixture being accomplished by providing a pool of liquid processing fluid source within a liquid phase chemical chamber forming a part of the processing chamber; contacting the substantially homogeneous processing gas against a processed surface of the wafer which is to be processed; spinning the wafer to provide uniform dispersion of the substantially homogeneous processing gas across the wafer surface and to facilitate circulation and transfer of the substantially homogeneous processing gas to the processed surface; enhancing production of said vapor mixture from said pool of liquid processing fluid source by spinning a member within the enclosed processing chamber to effect circulation of gases therewithin; beaming radiant energy upon the wafer to remove particulate therefrom.
Claim 74
Dependent Claim
159 words
A process for vapor processing semiconductor wafers, comprising: containing a wafer within a substantially enclosed processing chamber; producing a substantially homogeneous vapor mixture having a reactant vapor and a diluent vapor to provide a substantially homogeneous processing gas; said producing a substantially homogeneous vapor mixture being accomplished by providing a pool of liquid processing fluid source within a liquid phase chemical chamber forming a part of the processing chamber; contacting the substantially homogeneous processing gas against a processed surface of the wafer which is to be processed; spinning the wafer to provide uniform dispersion of the substantially homogeneous processing gas across the wafer surface and to facilitate circulation and transfer of the substantially homogeneous processing gas to the processed surface; enhancing production of said vapor mixture from said pool of liquid processing fluid source by spinning a member within the enclosed processing chamber to effect circulation of gases therewithin; beaming radiant energy upon the wafer to remove particulate therefrom.
Claim 75
Dependent Claim
147 words
A process for vapor processing semiconductor wafers, comprising: containing a wafer within a substantially enclosed processing chamber; producing a substantially homogeneous vapor mixture having a reactant vapor and a diluent vapor to provide a substantially homogeneous processing gas; said producing a substantially homogeneous vapor mixture being accomplished by providing a pool of liquid processing fluid source within a liquid phase chemical chamber; contacting the substantially homogeneous processing gas against a processed surface of the wafer which is to be processed; spinning the wafer to provide uniform dispersion of the substantially homogeneous processing gas across the wafer surface and to facilitate circulation and transfer of the substantially homogeneous processing gas to the processed surface; enhancing production of said vapor mixture from said liquid processing fluid source by spinning a member within the enclosed processing chamber to effect circulation of gases therewithin and against the liquid processing fluid source.
Claim 76
Dependent Claim
147 words
A process for vapor processing semiconductor wafers, comprising: containing a wafer within a substantially enclosed processing chamber; producing a substantially homogeneous vapor mixture having a reactant vapor and a diluent vapor to provide a substantially homogeneous processing gas; said producing a substantially homogeneous vapor mixture being accomplished by providing a pool of liquid processing fluid source within a liquid phase chemical chamber; contacting the substantially homogeneous processing gas against a processed surface of the wafer which is to be processed; spinning the wafer to provide uniform dispersion of the substantially homogeneous processing gas across the wafer surface and to facilitate circulation and transfer of the substantially homogeneous processing gas to the processed surface; enhancing production of said vapor mixture from said liquid processing fluid source by spinning a member within the enclosed processing chamber to effect circulation of gases therewithin and against the liquid processing fluid source.
Claim 77
Dependent Claim
34 words
A process according to claim 47 wherein said wafer is positioned within a proximity range of approximately 2-100 millimeters from the liquid processing fluid source to portions of the processed surface of the wafer.
Claim 78
Dependent Claim
41 words
A process according to claim 47 and further comprising terminating fluid communication between said liquid phase chemical chamber and portions of said processing chamber wherein the wafer is held and spun by partitioning the processing chamber using a movable wall structure.
Claim 79
Dependent Claim
38 words
A process according to claim 47 and further comprising: terminating fluid communication between said liquid phase chemical chamber and said processing chamber; exhausting said homogeneous vapor mixture from said processing chamber to retard further processing of the wafer.
Claim 80
Dependent Claim
65 words
A process according to claim 47 and further comprising: terminating fluid communication between said liquid phase chemical chamber and remaining portions of said processing chamber wherein the wafer is held and spun by partitioning the processing chamber using a movable wall structure; exhausting said homogeneous processing gas from said remaining portions of said processing chamber to retard further processing of the wafer after said terminating.
Claim 81
Dependent Claim
71 words
A process according to claim 47 and further comprising: agitating the liquid processing fluid source to aid in said producing step; controllably placing said liquid phase chemical chamber in fluid communication with remaining portions of said processing chamber in which the wafer is held and spun to allow vapors from agitated liquid processing fluid source to pass from the liquid phase chemical chamber to said remaining portions of said processing chamber.
Claim 82
Dependent Claim
23 words
A process according to claim 47 wherein said spinning the wafer is at speeds in the approximate range of 20-1000 revolutions per minute.
Claim 83
Dependent Claim
28 words
A process according to claim 47 wherein said spinning the wafer the wafer is accomplished with said processed surface downwardly in proximity to said liquid processing fluid source.
Claim 84
Dependent Claim
23 words
A process according to claim 54 wherein said spinning the wafer is at speeds in the approximate range of 20-1000 revolutions per minute.
Claim 85
Dependent Claim
24 words
A process according to claim 47 wherein said providing a pool is accomplished by forming a toroidal pool adjacent to a wafer being processed.
Claim 86
Dependent Claim
44 words
A process according to claim 47 wherein said providing a pool is accomplished by forming a toroidal pool adjacent to a wafer being processed; and further defined by orienting said processed surface downwardly in proximity to the toroidal pool of liquid processing fluid source.
Claim 87
Dependent Claim
17 words
A process according to claim 47 and further comprising agitating the pool of liquid processing fluid source.
Claim 88
Dependent Claim
18 words
A process according to claim 47 and further comprising ultrasonically agitating the pool of liquid processing fluid source.
Claim 89
Dependent Claim
16 words
A process according to claim 47 and further comprising drying the wafer within the processing chamber.
Claim 90
Dependent Claim
77 words
A process according to claim 47 wherein said producing is accomplished within an annular liquid phase chemical chamber forming a part of the processing chamber; and further comprising controllably placing said liquid phase chemical chamber in fluid communication with remaining portions of said processing chamber wherein the wafer is held and spun to allow vapors from a liquid processing fluid source to pass from the liquid phase chemical chamber to said remaining portions of said processing chamber.
Claim 91
Dependent Claim
85 words
A process according to claim 47 wherein said producing is accomplished within a liquid phase chemical chamber forming a part of the processing chamber; and further comprising controllably placing said liquid phase chemical chamber in fluid communication with remaining portions of said processing chamber wherein the wafer is held and spun by controllably moving a wall of said processing chamber to allow vapors from the liquid processing fluid source to pass from the liquid phase chemical chamber to said remaining portions of said processing chamber.
Claim 92
Dependent Claim
64 words
A process according to claim 47 and further comprising controllably placing said liquid phase chemical chamber in fluid communication with remaining portions of said processing chamber wherein the wafer is held and spun by controllably moving a partition wall of said processing chamber to allow vapors from a liquid processing fluid source to pass from the liquid phase chemical chamber to said processing chamber.
Claim 93
Dependent Claim
56 words
A princess according to claim 47 and further comprising controllably placing said liquid phase chemical chamber in fluid communication with said enclosed processing chamber by controllably moving a bottom wall of said enclosed processing chamber to allow vapors from a liquid processing fluid source to pass from the liquid phase chemical chamber to said processing chamber.
Claim 94
Dependent Claim
52 words
A process according to claim 47 and further comprising placing said liquid phase chemical chamber in fluid communication with said enclosed processing chamber by controllably opening a vapor phase control valve to allow vapors from a liquid processing fluid source to pass from the liquid phase chemical chamber to said processing chamber.
Claim 95
Dependent Claim
73 words
A process according to claim 47 wherein said producing is accomplished within an annular liquid phase chemical chamber; and further comprising placing said liquid phase chemical chamber in fluid communication with said enclosed processing chamber by controllably opening a vapor phase control valve serving as a wall of the enclosed processing chamber to allow vapors from a liquid processing fluid source to pass from the liquid phase chemical chamber to said processing chamber.
Claim 96
Dependent Claim
30 words
A process according to claim 66 and further comprising: closing said vapor phase control valve; exhausting homogeneous vapor mixture from said processing chamber to retard further processing of the wafer.
Claim 97
Dependent Claim
16 words
A process according to claim 47 and further comprising heating the wafer to remove particulate therefrom.
Claim 98
Dependent Claim
19 words
A process according to claim 47 and further comprising beaming radiant energy upon the wafer to remove particulate therefrom.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-12-05 | 1998-06-06 | 1998-12-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-12-05 | 2002-06-06 | 2002-12-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-12-05 | 2006-06-06 | 2006-12-06 | $7700.00 | Window Closed / Lapsed |