US5600197A
Expired / Lapsed
US
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Piezoelectric/electrostrictive film element and method of producing the same
Assignee: NGK Insulators Ltd
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Filing: 1994-12-28
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Granted: 1997-02-04
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Expires: 2014-12-28
Abstract
Abstract A piezoelectric/electrostrictive film element which includes a ceramic substrate having at least one window and an integrally formed diaphragm portion for closing each window, and a piezoelectric/electrostrictive unit including a lower electrode, a piezoelectric/electrostrictive layer and an upper electrode, which are formed in this order on the diaphragm portion. The piezoelectric/electrostrictive layer consists of a dense body having a crystal grain size of not smaller than 0.7 mu m, and a porosity (x) of not greater than 15%, and the diaphragm portion has a deflection percentage (y) of 0-8%, which is a percentage of an amount of deflection of a central part of the diaphragm portion, with respect to a length of a shortest line which extends across the corresponding window and passes a center of the window. Further, the porosity (x) and the deflection percentage (y) satisfies the following formula: y</=0.1167x2-3.317x+25.5. Also disclosed are three methods for producing the piezoelectric/electrostrictive film element as described above.
Inventors
- 👤 Yukihisa Takeuchi
- 👤 Tsutomu Nanataki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 15:39
CPC Classifications
B; B41; B41J; B41J2/00; B41J2/005; B41J2/01; B41J2/135; B41J2/16; B41J2/1621; B41J2/1637; B41J2/1607; B41J2/161; B41J2/1623; B41J2/1632; B41J2/164; B41J2/1642; B41J2/1643; B41J2/1646; H; H10; H10N; H10N30/00; H10N30/01; H10N30/07; H10N30/074; H10N30/09; H10N30/093; H10N30/097; H10N30/20; H10N30/204; H10N30/2047; H10N30/2048; B41J2/14; B41J2002/14387; H04; H04R; H04R17/00; H04R17/04; H04R17/08; Y; Y10; Y10T; Y10T29/00; Y10T29/42
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
183 words
A piezoelectric/electrostrictive film element comprising: a ceramic substrate having at least one window, and a diaphragm portion closing each of said at least one window, said diaphragm portion being formed as an integral part of said ceramic substrate; and a piezoelectric/electrostrictive unit including a lower electrode, a piezoelectric/electrostrictive layer and an upper electrode, which are formed in the order of description on an outer surface of said diaphragm portion by a film-forming method, to provide a laminar structure, said piezoelectric/electrostrictive layer consisting of a dense body having a crystal grain size of not smaller than 0.7 μm, and a porosity (x) of not greater than 15%, said diaphragm portion having a deflection percentage (y) of 0-8%, which is a percentage of an amount of deflection of a central part of said diaphragm portion into the window in an unbiased state, with respect to a length of a shortest line which extends across a corresponding one of said at least one window and passes through a center of the window, said porosity (x) and said deflection percentage (y) satisfying the following formula: y≦0.1167x.sup.2 -3.317x+25.5.
Claim 2
Dependent Claim
183 words
A piezoelectric/electrostrictive film element comprising: a ceramic substrate having at least one window, and a diaphragm portion closing each of said at least one window, said diaphragm portion being formed as an integral part of said ceramic substrate; and a piezoelectric/electrostrictive unit including a lower electrode, a piezoelectric/electrostrictive layer and an upper electrode, which are formed in the order of description on an outer surface of said diaphragm portion by a film-forming method, to provide a laminar structure, said piezoelectric/electrostrictive layer consisting of a dense body having a crystal grain size of not smaller than 0.7 μm, and a porosity (x) of not greater than 15%, said diaphragm portion having a deflection percentage (y) of 0-8%, which is a percentage of an amount of deflection of a central part of said diaphragm portion into the window in an unbiased state, with respect to a length of a shortest line which extends across a corresponding one of said at least one window and passes through a center of the window, said porosity (x) and said deflection percentage (y) satisfying the following formula: y≦0.1167x.sup.2 -3.317x+25.5.
Claim 3
Dependent Claim
28 words
A piezoelectric/electrostrictive film element as defined in claim 1, wherein said crystal grain size of said dense body for said piezoelectric/electrostrictive layer is not smaller than 1.5 μm.
Claim 4
Dependent Claim
20 words
A Piezoelectric/electrostrictive film element as defined in claim 2, wherein said crystal grain size is not smaller than 2.0 μm.
Claim 5
Dependent Claim
27 words
A Piezoelectric/electrostrictive film element as defined in claim 1, wherein said porosity (x) and said deflection percentage (y) satisfy the following formula: y≦0.2x.sup.2 -3.9x+20.5 where x≦10, 0≦y≦6.
Claim 6
Dependent Claim
26 words
A Piezoelectric/electrostrictive film element as defined in claim 4, wherein said porosity (x) and said deflection percentage (y) satisfy the following formula: y≦-x+7 where x≦6, 0≦y≦3.
Claim 7
Dependent Claim
24 words
A piezoelectric/electrostrictive film element as defined in claim 1, wherein said diaphragm portion of said ceramic substrate has a thickness of 1 μm-30 μm.
Claim 8
Dependent Claim
24 words
A piezoelectric/electrostrictive film element as defined in claim 6, wherein said diaphragm portion of said ceramic substrate has a thickness of 3 μm-15 μm.
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