Patent US5598250A successfully refreshed from Google Patents.
US5598250A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Prefabricated modified illumination apparatus for forming fine patterns in a semiconductor device
Assignee: SK Hynix Inc
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Filing: 1995-03-07
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Granted: 1997-01-28
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Expires: 2015-03-07
Abstract
Abstract A prefabricated modified illumination apparatus for forming fine patterns in a semiconductor device having a copper plate with a transmission hole in the center; a plurality of first blades for intercepting the light which transmits the transmission hole, the blades being controlled by an external power-driven machine so that first blades vary the area of the transmission hole second blades of a cross-bar type, at least one of which intercepts the light transmitting the transmission hole and is controlled by an external power-driven machine, to vary the area of the transmission hole, and third blades of a length-bar type, at least one of which intercepts the light transmitting the transmission hole and is controlled by an external power-driven machine, vary the area of the transmission hole, wherein the second blade is superimposed on the third blade in the area of the transmission hole.
Inventors
- 👤 Sang M. Bae
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 14:38
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70058; G03F7/70091; G03F7/701
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
181 words
A prefabricated modified illumination apparatus for forming fine patterns in a semiconductor device comprising: a plate having a transmission hole in the center; a plurality of first blades for intercepting light which transmits through said transmission hole of said plate, said blades being radially moveable and being controlled by an external power-driven machine so that said plurality of first blades varies the area of said transmission hole; a plurality of second blades of a cross-bar type, which intercept light transmitting through said transmission hole, said second blades being moveable toward and away from one another and being controlled by said external power-driven machine so that said second blades vary the area of said transmission hole; and a plurality of third blades of a length-bar type, which intercept light transmitting through said transmission hole, said third blades being moveable toward and away from one another and being controlled by said external power-driven machine so that said third blades vary the area of said transmission hole, wherein said second blades are superimposed on said third blades in the area of said transmission hole.
Claim 2
Dependent Claim
181 words
A prefabricated modified illumination apparatus for forming fine patterns in a semiconductor device comprising: a plate having a transmission hole in the center; a plurality of first blades for intercepting light which transmits through said transmission hole of said plate, said blades being radially moveable and being controlled by an external power-driven machine so that said plurality of first blades varies the area of said transmission hole; a plurality of second blades of a cross-bar type, which intercept light transmitting through said transmission hole, said second blades being moveable toward and away from one another and being controlled by said external power-driven machine so that said second blades vary the area of said transmission hole; and a plurality of third blades of a length-bar type, which intercept light transmitting through said transmission hole, said third blades being moveable toward and away from one another and being controlled by said external power-driven machine so that said third blades vary the area of said transmission hole, wherein said second blades are superimposed on said third blades in the area of said transmission hole.
Claim 3
Dependent Claim
42 words
A prefabricated modified illumination apparatus in accordance with claim 1, wherein each of said first blades, said second blades of a cross-bar type, and said third blades of a length-bar type are arrayed like the shape of the patterns on a photomask.
Claim 4
Dependent Claim
21 words
A prefabricated modified illumination apparatus in accordance with claim 1, wherein each of said first blades are in a fan shape.
Claim 5
Dependent Claim
21 words
A prefabricated modified illumination apparatus in accordance with claim 1, wherein each of said first blades move in a diagonal direction.
Claim 6
Dependent Claim
19 words
A prefabricated modified illumination apparatus in accordance with claim 1, wherein said second blades move in a cross direction.
Claim 7
Dependent Claim
19 words
A prefabricated modified illumination apparatus in accordance with claim 1, wherein said third blades move in a length direction.
References Cited (Backward Citations)
US5264898A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-01-28 | 2000-07-29 | 2001-01-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-01-28 | 2004-07-29 | 2005-01-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-01-28 | 2008-07-29 | 2009-01-28 | $7700.00 | Window Closed / Lapsed |