US5597737A
Expired / Lapsed
US
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Method for testing and burning-in a semiconductor wafer
Assignee: NXP USA Inc
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Filing: 1995-11-03
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Granted: 1997-01-28
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Expires: 2015-11-03
Abstract
Abstract Flip-chip is fast becoming the mounting method of choice in the semiconductor industry for dice having a high number of contacts. Since many applications require known-good-die, these flip-chip semiconductor dice must be tested and burned-in. By testing and burning-in the semiconductor wafers prior to solder bumping, the probe tips (42, 44, 46 & 48) can contact the hard planar surface of the under-bump-metallurgy (40) on each bonding pad (14) for easier and more reliable contact and hence test results. The probe tips can be either of an array (42 & 44) or cantilevered needle (46 & 48) type. Blunt probe tips (42 & 48) are well-suited to making contact on the shoulder of each bonding pad of each semiconductor die, while sharp probe tips (44 & 46) are preferable for contacting the center of each bonding pad. Solder bumping is performed post-testing.
Inventors
- 👤 Stuart E. Greer
- 👤 Joel P. Dietz
- 👤 Aubrey K. Sparkman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 10:48
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/28; G01R31/282; G01R31/2831; G01R31/2851; G01R31/2886
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
80 words
A method for testing a semiconductor wafer, comprising the steps of: providing a semiconductor wafer containing a plurality of semiconductor dice, each semiconductor die having a plurality of bonding pads, wherein the semiconductor wafer has a top layer of an under-bump-metallurgy overlying the plurality of bonding pads; and contacting the plurality of bonding pads via the top layer of the under-bump-metallurgy with a probe tip of a tester to determine whether each semiconductor die on the semiconductor wafer is functional.
Claim 2
Independent Claim
80 words
A method for testing a semiconductor wafer, comprising the steps of: providing a semiconductor wafer containing a plurality of semiconductor dice, each semiconductor die having a plurality of bonding pads, wherein the semiconductor wafer has a top layer of an under-bump-metallurgy overlying the plurality of bonding pads; and contacting the plurality of bonding pads via the top layer of the under-bump-metallurgy with a probe tip of a tester to determine whether each semiconductor die on the semiconductor wafer is functional.
Claim 3
Dependent Claim
43 words
The method of claim 1, wherein the step of contacting is performed using a probe tip selected from a group consisting of: a blunt array probe tip, a tapered array probe tip, a blunt-tip cantilevered probe needle, and a pointed-tip cantilevered probe needle.
Claim 4
Dependent Claim
25 words
The method of claim 2, wherein the step of contacting contacts the top layer of the under-bump-metallurgy disposed on a shoulder of each bonding pad.
Claim 5
Dependent Claim
26 words
The method of claim 2, wherein the step of contacting contacts the top layer of the under-bump-metallurgy disposed in a central portion of each bonding pad.
Claim 6
Dependent Claim
23 words
The method of claim 1, further comprising the step of dicing the semiconductor wafer into individual semiconductor dice after the step of contacting.
Claim 7
Dependent Claim
18 words
The method of claim 1, further comprising the step of performing an oxygen ash on the semiconductor wafer.
Claim 8
Dependent Claim
31 words
The method of claim 1, further comprising the step of depositing a plurality of solder bumps on the plurality of bonding pads of each semiconductor die after the step of contacting.
Claim 9
Dependent Claim
21 words
The method of claim 1, further comprising the step of burning-in the semiconductor wafer prior to solder bumping said semiconductor wafer.
Claim 10
Independent Claim
104 words
A method for testing a semiconductor wafer, comprising the steps of: providing a semiconductor wafer containing a plurality of semiconductor dice, each semiconductor die having a plurality of bonding pads, wherein the semiconductor wafer has a top layer of an under-bump-metallurgy overlying the plurality of bonding pads; contacting the plurality of bonding pads via the top layer of the under-bump-metallurgy with an array probe tip to determine whether each semiconductor die on the semiconductor wafer is functional; and depositing a plurality of solder bumps on the plurality of bonding pads of each semiconductor die after the step of contacting the plurality of bonding pads.
Claim 11
Independent Claim
104 words
A method for testing a semiconductor wafer, comprising the steps of: providing a semiconductor wafer containing a plurality of semiconductor dice, each semiconductor die having a plurality of bonding pads, wherein the semiconductor wafer has a top layer of an under-bump-metallurgy overlying the plurality of bonding pads; contacting the plurality of bonding pads via the top layer of the under-bump-metallurgy with an array probe tip to determine whether each semiconductor die on the semiconductor wafer is functional; and depositing a plurality of solder bumps on the plurality of bonding pads of each semiconductor die after the step of contacting the plurality of bonding pads.
Claim 12
Dependent Claim
38 words
The method of claim 9, wherein the step of contacting is performed using a blunt array probe tip which contacts the top layer of the under-bump-metallurgy disposed on a shoulder of each of the plurality of bonding pads.
Claim 13
Dependent Claim
38 words
The method of claim 9, wherein the step of contacting is performed using a sharp array probe tip which contacts the top layer of the under-bump-metallurgy disposed on a shoulder of each of the plurality of bonding pads.
Claim 14
Dependent Claim
39 words
The method of claim 9, wherein the step of contacting is performed using a sharp array probe tip which contacts the top layer of the under-bump-metallurgy disposed on a central portion of each of the plurality of bonding pads.
Claim 15
Dependent Claim
18 words
The method of claim 9, further comprising the step of performing an oxygen ash on the semiconductor wafer.
Claim 16
Independent Claim
107 words
A method for testing a semiconductor wafer, comprising the steps of: providing a semiconductor wafer containing a plurality of semiconductor dice, each semiconductor die having a plurality of bonding pads, wherein the semiconductor wafer has a top layer of an under-bump-metallurgy overlying the plurality of bonding pads; contacting the plurality of bonding pads via the top layer of the under-bump-metallurgy with a tip of a cantilevered probe needle to determine whether each semiconductor die on the semiconductor wafer is functional; and depositing a plurality of solder bumps on the plurality of bonding pads of each semiconductor die after the step of contacting the plurality of bonding pads.
Claim 17
Independent Claim
107 words
A method for testing a semiconductor wafer, comprising the steps of: providing a semiconductor wafer containing a plurality of semiconductor dice, each semiconductor die having a plurality of bonding pads, wherein the semiconductor wafer has a top layer of an under-bump-metallurgy overlying the plurality of bonding pads; contacting the plurality of bonding pads via the top layer of the under-bump-metallurgy with a tip of a cantilevered probe needle to determine whether each semiconductor die on the semiconductor wafer is functional; and depositing a plurality of solder bumps on the plurality of bonding pads of each semiconductor die after the step of contacting the plurality of bonding pads.
Claim 18
Dependent Claim
36 words
The method of claim 14, wherein the step of contacting is performed using a blunt tip which contacts the top layer of the under-bump-metallurgy disposed on a shoulder of each of the plurality of bonding pads.
Claim 19
Dependent Claim
37 words
The method of claim 14, wherein the step of contacting is performed using a blunt tip which contacts the top layer of the under-bump-metallurgy disposed on a central portion of each of the plurality of bonding pads.
Claim 20
Dependent Claim
39 words
The method of claim 14, wherein the step of contacting is performed using a pointed tip, having a radius, which contacts the top layer of the under-bump-metallurgy disposed on a shoulder of each of the plurality of bonding pads.
Claim 21
Dependent Claim
40 words
The method of claim 14, wherein the step of contacting is performed using a pointed tip, having a radius, which contacts the top layer of the under-bump-metallurgy disposed on a central portion of each of the plurality of bonding pads.
Claim 22
Dependent Claim
18 words
The method of claim 14, further comprising the step of performing an oxygen ash on the semiconductor wafer.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-01-28 | 2000-07-29 | 2001-01-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-01-28 | 2004-07-29 | 2005-01-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-01-28 | 2008-07-29 | 2009-01-28 | $7700.00 | Window Closed / Lapsed |