Patent US5580112A successfully refreshed from Google Patents.
US5580112A
Expired / Lapsed
US
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Vacuum pencil having a short tip with an abutment means
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1995-05-10
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Granted: 1996-12-03
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Expires: 2015-05-10
Abstract
Abstract The invention provides a vacuum pencil having an abutment pin which limits the distance the tip of the vacuum pencil can extend past the edge of a wafer thus reducing scratches on the device sides of adjacent wafers. The vacuum pencil has a relatively flat tip connected to a body. The tip has a flat top side for engaging a wafer. The top side of the tip has channels for delivering a vacuum to seal against the wafer against the tip. The top side of the tip also has an pin mounted between the channels and the body. A passage for delivering a vacuum runs through the body and the channel is connected to the channel in the tip. The pin can be a pentagon shaped pin which is about 1 mm high.
Inventors
- 👤 Dean E. Lin
- 👤 Chien K. Chou
- 👤 Chih M. Chen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 04:12
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/78; Y; Y10; Y10T; Y10T29/00; Y10T29/53; Y10T29/5313; Y10T29/53191
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
156 words
A vacuum pencil with an abutment means comprising: a flat tip connected to a body, said tip having a back end toward said body, having a front end away from said body and having sides, said tip having a first planar side for engaging a wafer, said first planar side of said tip having a channel means, said channel means comprised of a plurality of parallel channels, said parallel channels parallel to said sides of said tip, said first planar side of said tip having an abutment means mounted between said channel means and said body, the distance between said abutment means and said front end of said tip is between about 30 and 90 mm, said abutment means projecting above the plane of said first planar side a height of between about 0.5 and 1.5 mm, and a passage running through said body and tip, said passage connected to said channel means in said tip.
Claim 2
Dependent Claim
156 words
A vacuum pencil with an abutment means comprising: a flat tip connected to a body, said tip having a back end toward said body, having a front end away from said body and having sides, said tip having a first planar side for engaging a wafer, said first planar side of said tip having a channel means, said channel means comprised of a plurality of parallel channels, said parallel channels parallel to said sides of said tip, said first planar side of said tip having an abutment means mounted between said channel means and said body, the distance between said abutment means and said front end of said tip is between about 30 and 90 mm, said abutment means projecting above the plane of said first planar side a height of between about 0.5 and 1.5 mm, and a passage running through said body and tip, said passage connected to said channel means in said tip.
Claim 3
Dependent Claim
15 words
The vacuum pencil of claim 1 wherein said abutment means is a pentagon shaped pin.
Claim 4
Dependent Claim
15 words
The vacuum pencil of claim 1 wherein said abutment means is a cylindrical shaped pin.
Claim 5
Dependent Claim
22 words
The vacuum pencil of claim 1 wherein the length of said tip and said body is between about 80 and 170 mm.
Claim 6
Dependent Claim
34 words
The vacuum pencil of claim 1 wherein said vacuum pencil is formed of a material selected from the group consisting of poly ether ether ketone, poly ether ether ketone and carbon fibers, and polyimide.
Claim 7
Dependent Claim
19 words
The vacuum pencil of claim 1 wherein the thickness of said tip is between about 1 and 4 mm.
Claim 8
Dependent Claim
19 words
The vacuum pencil of claim 1 wherein the width of said tip is between about 10 and 50 mm.
Claim 9
Dependent Claim
36 words
The vacuum pencil of claim 1 wherein said channel means in said tip is comprised of seven parallel channels that are interconnected by one orthogonal channel, said orthogonal channel perpendicular to said sides of said tip.
Claim 10
Dependent Claim
24 words
The vacuum pencil of claim 1 wherein the distance between said channel means and the abutment means is between about 3 to 60 mm.
Claim 11
Dependent Claim
282 words
A vacuum pencil with an abutment means for handling a semiconductor wafer comprising: a flat tip connected to a body, said tip having a back end toward said body, having a front end away from said body and having sides, the distance between said pin and said front end of said tip is between about 30 and 90 mm, the length of said tip and said body is between about 80 and 170 mm, the thickness of said tip is between about 1 and 4 mm, and the width of said tip is between about 10 and 50 mm, said tip having a width smaller than the diameter of said wafer, said tip having a first planar side for engaging said wafer, said first planar side of said tip having a channel means, said channel means in said tip is comprised of more than two parallel channels that are interconnected by an orthogonal channel, said orthogonal channel perpendicular to said sides of said tip, said first side of said tip having an abutment means mounted between said channel means and said body, the distance between said abutment means and said front end of said tip is between about 30 and 90 mm, said abutment means comprised of a pentagon shaped pin, said abutment means projecting above the plane of said first side, said abutment means protrudes above the plane of the first planar side of said tip a height between about 0.5 and 1.5 mm, and the distance between said channel means and said abutment means is between about 3 to 60 mm, and a passage running through said body and tip, said passage connected to said orthogonal channel in said tip.
Claim 12
Dependent Claim
282 words
A vacuum pencil with an abutment means for handling a semiconductor wafer comprising: a flat tip connected to a body, said tip having a back end toward said body, having a front end away from said body and having sides, the distance between said pin and said front end of said tip is between about 30 and 90 mm, the length of said tip and said body is between about 80 and 170 mm, the thickness of said tip is between about 1 and 4 mm, and the width of said tip is between about 10 and 50 mm, said tip having a width smaller than the diameter of said wafer, said tip having a first planar side for engaging said wafer, said first planar side of said tip having a channel means, said channel means in said tip is comprised of more than two parallel channels that are interconnected by an orthogonal channel, said orthogonal channel perpendicular to said sides of said tip, said first side of said tip having an abutment means mounted between said channel means and said body, the distance between said abutment means and said front end of said tip is between about 30 and 90 mm, said abutment means comprised of a pentagon shaped pin, said abutment means projecting above the plane of said first side, said abutment means protrudes above the plane of the first planar side of said tip a height between about 0.5 and 1.5 mm, and the distance between said channel means and said abutment means is between about 3 to 60 mm, and a passage running through said body and tip, said passage connected to said orthogonal channel in said tip.
Claim 13
Dependent Claim
34 words
The vacuum pencil of claim 10 wherein said vacuum pencil is formed of a material selected from the group consisting of: poly ether ether ketone, poly ether ether ketone and carbon fibers, and polyimide.
Claim 14
Dependent Claim
307 words
A vacuum pencil with an abutment means for handling a semiconductor wafer comprising: a flat tip connected to a body, said tip having a back end toward said body, having a front end away from said body and having sides, the distance between said pin and said front end of said tip is between about 30 and 90 mm, the length of said tip and said body is between about 80 and 170 mm, the thickness of said tip is between about 1 and 4 mm, and the width of said tip is between about 10 and 50 mm, said tip having a width smaller than the diameter of said wafer, said tip having a first planar side for engaging said wafer, said first planar side of said tip having a channel means, said channel means in said tip is comprised of seven parallel channels that are interconnected by an orthogonal channel, said orthogonal channel perpendicular to said sides of said tip, said first side of said tip having an abutment means mounted between said channel means and said body, the distance between said abutment means and said front end of said tip is between about 30 and 90 mm, said abutment means comprised of a pentagon shaped pin, said abutment means projecting above the plane of said first side, said abutment means protrudes above the plane of the first planar side of said tip a height between about 0.5 and 1.5 mm, and the distance between said channel means and said abutment means is between about 3 to 60 mm, and a passage running through said body and tip, said passage connected to said orthogonal channel in said tip, and said vacuum pencil formed of a material selected from the group consisting of poly ether ether ketone, poly ether ether ketone and carbon fibers, and polyimide.
Claim 15
Dependent Claim
307 words
A vacuum pencil with an abutment means for handling a semiconductor wafer comprising: a flat tip connected to a body, said tip having a back end toward said body, having a front end away from said body and having sides, the distance between said pin and said front end of said tip is between about 30 and 90 mm, the length of said tip and said body is between about 80 and 170 mm, the thickness of said tip is between about 1 and 4 mm, and the width of said tip is between about 10 and 50 mm, said tip having a width smaller than the diameter of said wafer, said tip having a first planar side for engaging said wafer, said first planar side of said tip having a channel means, said channel means in said tip is comprised of seven parallel channels that are interconnected by an orthogonal channel, said orthogonal channel perpendicular to said sides of said tip, said first side of said tip having an abutment means mounted between said channel means and said body, the distance between said abutment means and said front end of said tip is between about 30 and 90 mm, said abutment means comprised of a pentagon shaped pin, said abutment means projecting above the plane of said first side, said abutment means protrudes above the plane of the first planar side of said tip a height between about 0.5 and 1.5 mm, and the distance between said channel means and said abutment means is between about 3 to 60 mm, and a passage running through said body and tip, said passage connected to said orthogonal channel in said tip, and said vacuum pencil formed of a material selected from the group consisting of poly ether ether ketone, poly ether ether ketone and carbon fibers, and polyimide.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-12-03 | 2000-06-03 | 2000-12-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-12-03 | 2004-06-03 | 2004-12-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-12-03 | 2008-06-03 | 2008-12-03 | $7700.00 | Window Closed / Lapsed |