US4981315A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Tip for a vacuum pipette
Assignee: Recif SA
•
Filing: 1990-04-24
•
Granted: 1991-01-01
•
Expires: 2010-04-24
Abstract
Abstract A tip having a flattened part (1b) which has a suction gripping (1b2) at the end, which is raised very slightly to reduce the contact surface of the wafer and prevent it from touching the rest of the flattened part.
Inventors
- 👤 Bernard Poli
- 👤 Gerard Chincholle
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 17:55
CPC Classifications
B; B25; B25B; B25B11/00; B25B11/005; B25B11/007; H; H10; H10P; H10P72/00; H10P72/70; H10P72/78; Y; Y10; Y10T; Y10T29/00; Y10T29/53; Y10T29/5313; Y10T29/53191
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
93 words
A tip for a vacuum tool for manipulating semiconductor wafers, comprising: connecting means adapted for coupling the tip to said tool; a wafer gripping area having an opening for applying vacuum to a wafer; internal duct means coupled to said opening and to said connecting means for communicating vacuum to said wafer gripping area; raised boss means formed peripherally about said wafer gripping area for making contact with said wafer; and support means located within said wafer gripping area for preventing deformation of said wafer when in contact with said raised boss means.
Claim 2
Dependent Claim
93 words
A tip for a vacuum tool for manipulating semiconductor wafers, comprising: connecting means adapted for coupling the tip to said tool; a wafer gripping area having an opening for applying vacuum to a wafer; internal duct means coupled to said opening and to said connecting means for communicating vacuum to said wafer gripping area; raised boss means formed peripherally about said wafer gripping area for making contact with said wafer; and support means located within said wafer gripping area for preventing deformation of said wafer when in contact with said raised boss means.
Claim 3
Dependent Claim
16 words
The tip of claim 1 wherein the tip is formed from poly-ether-ether-ketone with imbedded carbon fibers.
Claim 4
Dependent Claim
13 words
The tip of claim 1 wherein said support means comprises elongated rib means.
Claim 5
Dependent Claim
23 words
The tip of claim 3 wherein said rib means comprises a pair of spaced parallel ribs positioned on opposite sides of said opening.
Claim 6
Dependent Claim
30 words
The tip of claim 1 wherein the surface of the raised boss means which contacts the wafer and the surface of the support means which contacts the wafer are coplanar.
Claim 7
Dependent Claim
43 words
The tip of claim 1 including gripping means formed intermediate to said connecting means and said wafer gripping area, said gripping means being adapted to facilitate physical manipulation of the tip without physical contact with said connecting means or said wafer gripping area.
Claim 8
Dependent Claim
17 words
The tip of claim 1 wherein said raised boss means is concentric with said wafer gripping area.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-12-31 | 1994-07-02 | 1995-01-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-12-31 | 1998-07-02 | 1999-01-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-12-31 | 2002-07-02 | 2003-01-01 | $7700.00 | Window Closed / Lapsed |