US4620738A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vacuum pick for semiconductor wafers
Assignee: Varian Semiconductor Equipment Associates Inc
•
Filing: 1985-08-19
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Granted: 1986-11-04
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Expires: 2005-08-19
Abstract
Abstract A vacuum pick suitable for removing semiconductor wafers from and replacing wafers in a cassette holder. The vacuum pick includes a thin profile housing having a wafer support surface with a cavity therein, a resilient, flexible member covering a portion of the cavity to form an enclosure, and a rigid chuck mounted on the flexible member so as to permit movement of the chuck relative to the housing. The chuck includes a wafer-receiving surface connected through a passage to the enclosure. When a vacuum is applied to the enclosure, the wafer and the chuck are retracted against the housing and held firmly in place. The chuck tilts relative to the housing when it contacts a tilted wafer, thereby insuring reliable attachment to the wafer.
Inventors
- 👤 Vladimir Schwartz
- 👤 Avrum Freytsis
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 09:41
CPC Classifications
B; B65; B65G; B65G47/00; B65G47/74; B65G47/90; B65G47/91
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
136 words
A vacuum pick comprising: a housing having a workpiece support surface with a cavity therein; a resilient flexible member covering at least a portion of the cavity to form an enclosure; a rigid chuck mounted on the flexible member to permit movement of the chuck relative to the housing, the chuck having a substantially flat surface portion for receiving a workpiece; vacuum source means connected to the enclosure, the chuck and the flexible member having a passage therethrough providing a fluid connection between the surface portion of the chuck and the enclosure, the chuck having an extended position when vacuum is not applied to the enclosure and a retracted position when vacuum is applied to the enclosure, the workpiece being drawn against the support surface of the housing when the chuck is in the retracted position.
Claim 2
Dependent Claim
136 words
A vacuum pick comprising: a housing having a workpiece support surface with a cavity therein; a resilient flexible member covering at least a portion of the cavity to form an enclosure; a rigid chuck mounted on the flexible member to permit movement of the chuck relative to the housing, the chuck having a substantially flat surface portion for receiving a workpiece; vacuum source means connected to the enclosure, the chuck and the flexible member having a passage therethrough providing a fluid connection between the surface portion of the chuck and the enclosure, the chuck having an extended position when vacuum is not applied to the enclosure and a retracted position when vacuum is applied to the enclosure, the workpiece being drawn against the support surface of the housing when the chuck is in the retracted position.
Claim 3
Dependent Claim
30 words
The vacuum pick as defined in claim 1 wherein the workpiece support surface of the housing and the surface portion of the chuck are substantially coplanar in the retracted position.
Claim 4
Dependent Claim
27 words
The vacuum pick as defined in claim 2 wherein the housing is elongated with the cavity, the flexible member and the chuck positioned near one end thereof.
Claim 5
Dependent Claim
21 words
The vacuum pick as defined in claim 3 wherein the housing has a thin profile adapted for access between closely-spaced workpieces.
Claim 6
Dependent Claim
13 words
The vacuum pick as defined in claim 4 adapted for holding semiconductor wafers.
Claim 7
Dependent Claim
23 words
The vacuum pick as defined in claim 5 wherein the housing includes a fluid passage for connecting a vacuum source to the enclosure.
Claim 8
Dependent Claim
16 words
The vacuum pick as defined in claim 6 wherein the cavity has a shallow cylindrical shape.
Claim 9
Dependent Claim
23 words
The vacuum pick as defined in claim 7 wherein the chuck is generally disk-shaped with a diameter smaller than that of the cavity.
Claim 10
Dependent Claim
19 words
The vacuum pick as defined in claim 8 wherein the surface portion of the chuck has a recessed area.
Claim 11
Dependent Claim
29 words
The vacuum pick as defined in claim 9 wherein the vacuum source means includes control means for applying vacuum to the enclosure when holding of a wafer is desired.
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US3711081A
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Cited
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Cited
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-11-03 | 1990-05-05 | 1990-11-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-11-03 | 1994-05-05 | 1994-11-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-11-03 | 1998-05-05 | 1998-11-04 | $7700.00 | Window Closed / Lapsed |