US5576076A
Expired / Lapsed
US
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Process for creating a deposit of silicon oxide on a traveling solid substrate
Assignee: Softal Elektronik GmbH
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Filing: 1994-04-28
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Granted: 1996-11-19
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Expires: 2014-04-28
Abstract
Abstract According to the process the substrate (2) is subjected to an electrical discharge with a dielectric barrier, for example a discharge in the presence of an atmosphere containing a silane, an oxidizing gas, NO, N2O, CO2 or O2, in particular, and a neutral carrier gas such as nitrogen or argon. A controlled atmosphere containing the silane and the oxidizing gas is maintained in the immediate vicinity of the electrode, around the electrode (6) employed for the electrical discharge, while avoiding the process being perturbed by atmospheric air entrained, for example, by the substrate (2) as it travels (3).
Inventors
- 👤 Frank Slootman
- 👤 Pascal Bouard
- 👤 François Coeuret
- 👤 Dominique Jouvaud
- 👤 Eckhard Prinz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:34
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/401; C23C16/402; C23C16/44; C23C16/455; C23C16/54; C23C16/545; Y; Y10; Y10S; Y10S422/00; Y10S422/907; Y10T; Y10T428/00; Y10T428/26; Y10T428/263; Y10T428/264; Y10T428/265; Y10T428/266; Y10T428/31504; Y10T428/31507; Y10T428/31721; Y10T428/31855; Y10T428/31935; Y10T428/31938
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
97 words
A process for depositing silicon oxide on a traveling solid substrate comprising the steps of moving the substrate through an electrical discharge region; subjecting the substrate to an electrical discharge in said region in the presence of an atmosphere containing (a) a silane, (b) oxygen or a gaseous compound containing oxygen and (c) a carrier gas; maintaining said atmosphere at a pressure higher than 10,000 Pa; circulating said atmosphere in said region and preventing entrainment of oxygen other than that forming part of said atmosphere in said region, thereby forming silicon oxide on said traveling solid substrate.
Claim 2
Dependent Claim
97 words
A process for depositing silicon oxide on a traveling solid substrate comprising the steps of moving the substrate through an electrical discharge region; subjecting the substrate to an electrical discharge in said region in the presence of an atmosphere containing (a) a silane, (b) oxygen or a gaseous compound containing oxygen and (c) a carrier gas; maintaining said atmosphere at a pressure higher than 10,000 Pa; circulating said atmosphere in said region and preventing entrainment of oxygen other than that forming part of said atmosphere in said region, thereby forming silicon oxide on said traveling solid substrate.
Claim 3
Dependent Claim
29 words
The process as claimed in claim 1, wherein the gaseous compound containing oxygen is selected from the group consisting of N 2 O, NO, CO 2 and mixtures thereof.
Claim 4
Dependent Claim
27 words
The process as claimed in claim 1, wherein the gaseous compound containing oxygen is selected from the group consisting of H 2 O, methanol and mixtures thereof.
Claim 5
Dependent Claim
13 words
The process as claimed in claim 1, wherein the atmosphere contains molecular oxygen.
Claim 6
Dependent Claim
32 words
The process as claimed in claim 1, wherein a mixture containing the silane and the oxygen or the gaseous compound containing oxygen is prepared in advance and is introduced into said region.
Claim 7
Dependent Claim
25 words
The process as claimed in claim 1, wherein the silane and the oxygen or the gaseous compound containing oxygen are introduced separately into said region.
Claim 8
Dependent Claim
13 words
The process as claimed in claim 1, wherein the substrate is a polymer.
Claim 9
Dependent Claim
13 words
The process as claimed in claim 7, wherein the substrate is a polyolefin.
Claim 10
Dependent Claim
17 words
The process as claimed in claim 1, wherein the substrate is made of paper or of cardboard.
Claim 11
Dependent Claim
12 words
The process as claimed in claim 1, wherein the substrate is metallic.
Claim 12
Dependent Claim
17 words
The process as claimed in claim 1, wherein said electrical discharge is created with a dielectric barrier.
Claim 13
Dependent Claim
16 words
The process as claimed in claim 1, wherein said pressure is greater than about 50,000 Pa.
Claim 14
Dependent Claim
25 words
The process as claimed in claim 1, wherein said carrier gas is selected from the group consisting of nitrogen, helium, argon, neon, krypton and xenon.
Claim 15
Dependent Claim
14 words
The process as claimed in claim 1, wherein said silane is a silicon hydride.
Claim 16
Dependent Claim
27 words
The process as claimed in claim 1, wherein said silane is selected from the group consisting of SiH 4 , Si 2 H 6 and mixtures thereof.
Claim 17
Dependent Claim
14 words
The process as claimed in claim 1, wherein said silane comprises SiH 4 .
Claim 18
Dependent Claim
14 words
The process as claimed in claim 1, wherein said traveling solid substrate comprises aluminum.
Claim 19
Dependent Claim
16 words
The process as claimed in claim 1, wherein said traveling solid substrate comprises a thermoplastic material.
Claim 20
Dependent Claim
23 words
The process as claimed in claim 1, wherein said traveling solid substrate is moving at a speed greater than 1 meter per minute.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-11-19 | 2000-05-20 | 2000-11-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-11-19 | 2004-05-20 | 2004-11-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-11-19 | 2008-05-20 | 2008-11-19 | $7700.00 | Window Closed / Lapsed |