Patent US5573875A successfully refreshed from Google Patents.
US5573875A
Expired / Lapsed
US
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Laser ablation mask and method of fabrication
Assignee: International Business Machines Corp
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Filing: 1995-12-08
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Granted: 1996-11-12
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Expires: 2015-12-08
Abstract
Abstract A laser ablation mask and a method of fabrication therefor. The mask has a pattern of clear areas and scattering areas. The scattering areas are covered with randomly formed facets. The facets act as scattering centers. Areas clear of facets transmit laser energy. Scattering areas refract laser energy. Laser energy directed at the mask, will pass through the clear mask areas to selectively ablate an organic layer placed opposite the mask. However, laser energy is scattered when striking and passing through the scattering areas such that insufficient laser energy passes directly through the mask to reach the organic layer for ablation to occur. The mask is formed by depositing and patterning a metal mask layer on a quartz plate. The patterned mask layer protects intended clear areas. Scattering areas are formed in unprotected plate areas by subjecting the plate to a polymethacrylic acid/bifluoride solution.
Inventors
- 👤 Leon H. Kaplan
- 👤 Doris P. Pulaski
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:16
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/50; Y; Y10; Y10T; Y10T428/00; Y10T428/24; Y10T428/24355
Claims Analysis
Total Claims: 32
Claim 1
Independent Claim
120 words
A method of forming a laser ablation mask, said method comprising the steps of: a) forming a protective layer on one surface of a plate; b) forming within said protective layer a defining pattern, the defining pattern for selectively defining on the one surface of the plate a plurality of exposed areas and a plurality of protected areas, the exposed areas corresponding to the mask areas intended to scatter laser light, the protected areas corresponding to mask areas intended to pass laser light; c) substantially covering said one surface at said exposed areas with random facets, so as to form scattering areas for scattering laser light projected thereon; and, d) removing said defining pattern, thereby forming the laser ablation mask.
Claim 2
Independent Claim
120 words
A method of forming a laser ablation mask, said method comprising the steps of: a) forming a protective layer on one surface of a plate; b) forming within said protective layer a defining pattern, the defining pattern for selectively defining on the one surface of the plate a plurality of exposed areas and a plurality of protected areas, the exposed areas corresponding to the mask areas intended to scatter laser light, the protected areas corresponding to mask areas intended to pass laser light; c) substantially covering said one surface at said exposed areas with random facets, so as to form scattering areas for scattering laser light projected thereon; and, d) removing said defining pattern, thereby forming the laser ablation mask.
Claim 3
Dependent Claim
35 words
The method of claim 1 wherein the step (c) of substantially covering said one surface at said selectively exposed areas with random facets comprises etching said exposed areas of said surface with an acid solution.
Claim 4
Dependent Claim
12 words
The method of claim 2 wherein said acid solution includes polymethacrylic acid.
Claim 5
Dependent Claim
24 words
The method of claim 3 wherein the acid solution comprises a solution of 300 g/l of ammonium bifluoride and 20 g/l of polymethacrylic acid.
Claim 6
Dependent Claim
24 words
The method of claim 3 wherein said acid solution comprises a solution of 300 g/l of potassium bifluoride and 20 g/l of polymethacrylic acid.
Claim 7
Dependent Claim
21 words
The method of claim 2 wherein the exposed surface is etched in a covered container at a temperature of 150° C.
Claim 8
Dependent Claim
114 words
A laser ablation mask, the laser ablation mask having a first surface and a second opposing surface, the laser ablation mask having a mask pattern comprised of: a plurality of clear areas, said clear areas allowing laser energy transmission sufficient to ablate an organic layer; and a plurality of scattering areas in said first surface, said scattering areas being substantially covered with random facets, said scattering areas refracting sufficient laser energy to impede ablation, whereby, a pulsed laser having a predetermined energy striking said first surface of said mask exits said second opposing mask surface with substantially the same energy in said clear areas and at a substantially reduced energy in said scattering areas.
Claim 9
Dependent Claim
114 words
A laser ablation mask, the laser ablation mask having a first surface and a second opposing surface, the laser ablation mask having a mask pattern comprised of: a plurality of clear areas, said clear areas allowing laser energy transmission sufficient to ablate an organic layer; and a plurality of scattering areas in said first surface, said scattering areas being substantially covered with random facets, said scattering areas refracting sufficient laser energy to impede ablation, whereby, a pulsed laser having a predetermined energy striking said first surface of said mask exits said second opposing mask surface with substantially the same energy in said clear areas and at a substantially reduced energy in said scattering areas.
Claim 10
Dependent Claim
26 words
The laser ablation mask of claim 7 further comprising a plate, said plate being transparent to laser energy, said plate containing said laser ablation mask pattern.
Claim 11
Dependent Claim
80 words
A laser ablation mask comprising: a plate; and a mask pattern on one surface of said plate, said mask pattern comprising a plurality of clear areas and a plurality of scattering areas, said scattering areas being substantially covered with random facets, whereby laser energy passes through said plate at said clear areas sufficient to ablate an organic layer and laser energy is scattered at said scattering areas such that said scattered laser energy is insufficient to ablate an organic layer.
Claim 12
Dependent Claim
80 words
A laser ablation mask comprising: a plate; and a mask pattern on one surface of said plate, said mask pattern comprising a plurality of clear areas and a plurality of scattering areas, said scattering areas being substantially covered with random facets, whereby laser energy passes through said plate at said clear areas sufficient to ablate an organic layer and laser energy is scattered at said scattering areas such that said scattered laser energy is insufficient to ablate an organic layer.
Claim 13
Dependent Claim
14 words
The laser ablation mask of claim 9 wherein said plate comprises a quartz plate.
Claim 14
Dependent Claim
24 words
The laser ablation mask of claim 9 wherein said mask pattern consists of a plurality of clear areas and a plurality of scattering areas.
Claim 15
Independent Claim
139 words
A method of forming a laser ablation mask, said method comprising the steps of: a) forming a protective layer on one surface of a plate; b) forming within said protective layer a defining pattern, the defining pattern for selectively defining on the one surface of the plate a plurality of exposed areas and a plurality of protected areas, the exposed areas corresponding to the mask areas intended to scatter laser light, the protected areas corresponding to mask areas intended to pass laser light; c) substantially covering said one surface at said exposed areas with random facets by etching the exposed areas with an acid solution in a covered container at a temperature of 150° C., so as to form scattering areas for scattering laser light projected thereon; and, d) removing said defining pattern, thereby forming the laser ablation mask.
Claim 16
Independent Claim
139 words
A method of forming a laser ablation mask, said method comprising the steps of: a) forming a protective layer on one surface of a plate; b) forming within said protective layer a defining pattern, the defining pattern for selectively defining on the one surface of the plate a plurality of exposed areas and a plurality of protected areas, the exposed areas corresponding to the mask areas intended to scatter laser light, the protected areas corresponding to mask areas intended to pass laser light; c) substantially covering said one surface at said exposed areas with random facets by etching the exposed areas with an acid solution in a covered container at a temperature of 150° C., so as to form scattering areas for scattering laser light projected thereon; and, d) removing said defining pattern, thereby forming the laser ablation mask.
Claim 17
Dependent Claim
12 words
The method of claim 12 wherein the acid solution includes polymethacrylic acid.
Claim 18
Dependent Claim
24 words
The method of claim 12 wherein the acid solution comprises a solution of 300 g/l of ammonium bifluoride and 20 g/l of polymethacrylic acid.
Claim 19
Independent Claim
130 words
A method of forming a laser ablation mask, said method comprising the steps of: a) forming a protective layer on one surface of a plate; b) forming within said protective layer a defining pattern, the defining pattern for selectively defining on the one surface of the plate a plurality of exposed areas and a plurality of protected areas, the exposed areas corresponding to the mask areas intended to scatter laser light, the protected areas corresponding to mask areas intended to pass laser light; c) substantially covering said one surface at said exposed areas of the one surface with a population of merging or contiguous surface pits, so as to form scattering areas for scattering laser light projected thereon; and, d) removing the defining pattern, thereby forming the laser ablation mask.
Claim 20
Independent Claim
130 words
A method of forming a laser ablation mask, said method comprising the steps of: a) forming a protective layer on one surface of a plate; b) forming within said protective layer a defining pattern, the defining pattern for selectively defining on the one surface of the plate a plurality of exposed areas and a plurality of protected areas, the exposed areas corresponding to the mask areas intended to scatter laser light, the protected areas corresponding to mask areas intended to pass laser light; c) substantially covering said one surface at said exposed areas of the one surface with a population of merging or contiguous surface pits, so as to form scattering areas for scattering laser light projected thereon; and, d) removing the defining pattern, thereby forming the laser ablation mask.
Claim 21
Dependent Claim
31 words
The method of claim 15 wherein the step (c) of substantially covering said one surface at said exposed areas with random facets comprises etching said one surface with an acid solution.
Claim 22
Dependent Claim
12 words
The method of claim 16 wherein said acid solution includes polymethacrylic acid.
Claim 23
Dependent Claim
24 words
The method of claim 17 wherein the acid solution comprises a solution of 300 g/l of ammonium bifluoride and 20 g/l of polymethacrylic acid.
Claim 24
Dependent Claim
24 words
The method of claim 17 wherein the acid solution comprises a solution of 300 g/l of potassium bifluoride and 20 g/l of polymethacrylic acid.
Claim 25
Dependent Claim
21 words
The method of claim 16 wherein the one surface is etched in a covered container at a temperature of 150° C.
Claim 26
Dependent Claim
117 words
A laser ablation mask, the laser ablation mask having a first surface and a second opposing surface, the laser ablation mask having a mask pattern comprised of: a plurality of clear areas, said clear areas allowing laser energy transmission sufficient to ablate an organic layer; and a plurality of scattering areas in said first surface, said scattering areas characterized by a population of merging or contiguous surface pits, said scattering areas refracting sufficient laser energy to impede ablation, whereby, a pulsed laser having a predetermined energy striking said first surface of said mask exits said second opposing mask surface with substantially the same in said clear areas and at a substantially reduced energy in said scattering areas.
Claim 27
Dependent Claim
117 words
A laser ablation mask, the laser ablation mask having a first surface and a second opposing surface, the laser ablation mask having a mask pattern comprised of: a plurality of clear areas, said clear areas allowing laser energy transmission sufficient to ablate an organic layer; and a plurality of scattering areas in said first surface, said scattering areas characterized by a population of merging or contiguous surface pits, said scattering areas refracting sufficient laser energy to impede ablation, whereby, a pulsed laser having a predetermined energy striking said first surface of said mask exits said second opposing mask surface with substantially the same in said clear areas and at a substantially reduced energy in said scattering areas.
Claim 28
Dependent Claim
19 words
The laser ablation mask of claim 21 further comprising a plate, said plate containing said laser ablation mask pattern.
Claim 29
Dependent Claim
84 words
A laser ablation mask comprising: a plate; and a mask pattern on one surface of said plate, said mask pattern comprising a plurality of clear areas and a plurality of scattering areas, the scattering areas characterized by a population of merging or contiguous surface pits; whereby laser energy passes through said plate at said clear areas sufficient to ablate an organic layer and laser energy is scattered at said scattering areas such that said scattered laser energy is insufficient to ablate an organic layer.
Claim 30
Dependent Claim
84 words
A laser ablation mask comprising: a plate; and a mask pattern on one surface of said plate, said mask pattern comprising a plurality of clear areas and a plurality of scattering areas, the scattering areas characterized by a population of merging or contiguous surface pits; whereby laser energy passes through said plate at said clear areas sufficient to ablate an organic layer and laser energy is scattered at said scattering areas such that said scattered laser energy is insufficient to ablate an organic layer.
Claim 31
Dependent Claim
14 words
The laser ablation mask of claim 23 wherein said plate comprises a quartz plate.
Claim 32
Dependent Claim
24 words
The laser ablation mask of claim 23 wherein said mask pattern consists of a plurality of clear areas and a plurality of scattering areas.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-11-12 | 2000-05-13 | 2000-11-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-11-12 | 2004-05-13 | 2004-11-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-11-12 | 2008-05-13 | 2008-11-12 | $7700.00 | Window Closed / Lapsed |