Patent US5572029A successfully refreshed from Google Patents.
US5572029A
Expired / Lapsed
US
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Thermal isolation for hybrid thermal detectors
Assignee: Texas Instruments Inc
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Filing: 1995-06-07
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Granted: 1996-11-05
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Expires: 2015-06-07
Abstract
Abstract A hybrid thermal detector (10, 110) includes a focal plane array (20, 120), a thermal isolation structure (40, 140), and an integrated circuit substrate (60, 160). The focal plane array (20, 120) includes thermal sensors (30, 130). The thermal isolation structure (40, 140) includes untrimmed mesa-type formations (44, 146, 148) and mesa strip conductors (42, 142, 144) that provide thermal isolation, signal transport, and structural support of the focal plane array (20, 120) when mounted on the integrated circuit substrate (60, 160). Hybrid thermal detector (10) includes a common electrode (28) which provides a bias voltage to all thermal sensors (30). Hybrid thermal detector (110) has electrically isolated thermal sensors (130), each thermal sensor (130) is supported by mesa strip conductors (142, 144), which provide a bias voltage to and receive a signal voltage from the thermal sensor (130). To improve both pixel-substrate and inter-pixel thermal isolation, mesa strip conductors (42, 142, 144) and common electrode (28) may be formed from a thermally insulating material, such as cermet or a semiconductive material. Untrimmed mesa-type formations (44, 146, 148) may be anisotropically etched to remove excess mesa material and improve pixel-substrate thermal isolation.
Inventors
- 👤 William K. Walker
- 👤 John P. Long
- 👤 Robert A. Owen
- 👤 Bert T. Runnels
- 👤 Gail D. Shelton
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 10:05
CPC Classifications
G; G01; G01J; G01J5/00; G01J5/10; G01J5/20; H; H10; H10N; H10N15/00; H10N15/10
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
213 words
A hybrid thermal detector comprising: at least three thermal sensors for generating a sensor signal output representative of the thermal radiation incident to the respective thermal sensor, each thermal sensor having an associated pyroelectric element; a substrate having at least three signal contact pads for receiving the sensor signal outputs from the respective thermal sensors and at least three bias contact pads for applying bias inputs to the respective thermal sensors; at least three pairs of mesa-type formations wherein each pair has a first mesa-type formation projecting adjacent to one of the signal contact pads of the substrate and a second mesa-type formation projecting adjacent to one of the bias contact pads; at least three pairs of mesa strip conductors disposed between the thermal sensors and the substrate, each mesa strip conductor extending from the top of an associated mesa-type formation to a corresponding contact pad of the substrate, each mesa strip conductor formed from a single film of thermally insulating material; and the thermal sensors being disposed over the substrate such that each thermal sensor is coupled with the corresponding bias contact pad by the respective mesa strip conductor and the sensor signal output for each thermal sensor is coupled with the corresponding signal contact pad by the respective mesa strip conductor.
Claim 2
Dependent Claim
213 words
A hybrid thermal detector comprising: at least three thermal sensors for generating a sensor signal output representative of the thermal radiation incident to the respective thermal sensor, each thermal sensor having an associated pyroelectric element; a substrate having at least three signal contact pads for receiving the sensor signal outputs from the respective thermal sensors and at least three bias contact pads for applying bias inputs to the respective thermal sensors; at least three pairs of mesa-type formations wherein each pair has a first mesa-type formation projecting adjacent to one of the signal contact pads of the substrate and a second mesa-type formation projecting adjacent to one of the bias contact pads; at least three pairs of mesa strip conductors disposed between the thermal sensors and the substrate, each mesa strip conductor extending from the top of an associated mesa-type formation to a corresponding contact pad of the substrate, each mesa strip conductor formed from a single film of thermally insulating material; and the thermal sensors being disposed over the substrate such that each thermal sensor is coupled with the corresponding bias contact pad by the respective mesa strip conductor and the sensor signal output for each thermal sensor is coupled with the corresponding signal contact pad by the respective mesa strip conductor.
Claim 3
Dependent Claim
38 words
The detector of claim 1, wherein the mesa strip conductors are formed from low thermal conductivity cermet having a metal concentration by weight of 70% to 90% and a corresponding ceramic concentration of weight between 30% and 10%.
Claim 4
Dependent Claim
20 words
The detector of claim 1, wherein the mesa strip conductors are formed from a matrix of silicon monoxide and chromium.
Claim 5
Dependent Claim
25 words
The detector of claim 1, wherein the mesa-type formations are substantially defined by the vertical projections of the associated mesa strip conductors on the substrate.
Claim 6
Dependent Claim
20 words
The detector of claim 1, further comprising: an infrared absorber layer sensitive to infrared radiation coupled to the thermal sensors.
Claim 7
Dependent Claim
29 words
The detector of claim 5, wherein the infrared absorber layer has at least three slots formed therein, the slots formed intermediate the thermal sensors to improve inter-pixel thermal isolation.
Claim 8
Dependent Claim
29 words
The detector of claim 5, wherein the infrared absorber layer has slots disposed around the entire periphery of at least one thermal sensor, thereby improving the inter-pixel thermal isolation.
Claim 9
Dependent Claim
84 words
The detector of claim 1, wherein each thermal sensor further comprises: an infrared absorber and reflective plate assembly having an infrared absorber layer sensitive to infrared radiation disposed on a reflective plate; and the thermal sensor having its associated pyroelectric element formed from barium strontium titanate, the infrared absorber and reflective plate assembly coupled with one side of the pyroelectric element and a sensor signal electrode bonded to at least one mesa strip conductor and coupled with the opposite side of the pyroelectric element.
References Cited (Backward Citations)
DE197806C
Cited
US3676455A
Cited
CA939943A
Cited
US3846820A
Cited
US4018608A
Cited
US4080532A
Cited
US4205227A
Cited
US4143269A
Cited
US4162402A
Cited
US4379232A
Cited
US4142207A
Cited
US4275302A
Cited
US4354109A
Cited
US4594507A
Cited
US4751387A
Cited
US4705361A
Cited
US4740700A
Cited
US5010251A
Cited
US5021663A
Cited
US5021663B1
Cited
US5051591A
Cited
US5264326A
Cited
US5047644A
Cited
US4994672A
Cited
GB2251952A
Cited
US5015858A
Cited
WO1991016607A1
Cited
US5196703A
Cited
US5238530A
Cited
US5426304A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-11-05 | 2000-05-06 | 2000-11-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-11-05 | 2004-05-06 | 2004-11-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-11-05 | 2008-05-06 | 2008-11-05 | $7700.00 | Window Closed / Lapsed |