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US5555472A
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Method and apparatus for measuring film thickness in multilayer thin film stack by comparison to a reference library of theoretical signatures
Assignee: Integrated Process Equipment Corp
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Filing: 1993-12-22
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Granted: 1996-09-10
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Expires: 2013-12-22
Abstract
Abstract The thicknesses of a first layer and of a second layer on a semiconductor wafer can be measured together by assuming that the second layer has a substantially uniform thickness. The thicknesses are measured by measuring reflectivity as a function of wavelength at a plurality of points on the wafer to provide a plurality of signatures, comparing each signature with signatures from libraries of theoretical signatures by calculating an error value associated with each signature; and determining the minimum error value. Each library is based upon a unique assumed thickness of the second layer. Thus, the thickness of the second layer is determined by identifying the library associated with the minimum error value.
Inventors
- 👤 Paul J. Clapis
- 👤 Keith E. Daniell
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 07:48
CPC Classifications
G; G01; G01B; G01B11/00; G01B11/02; G01B11/06; G01B11/0616; G01B11/0625
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
220 words
A system for measuring the thicknesses of a first layer and a second layer of materials, one of the layers having a substantially uniform thickness, said system comprising: first means for providing a first library of theoretical signatures of reflectivity as a function of wavelength for a range of thicknesses of said first layer on the basis of a first assumed thickness of said second layer; second means for measuring reflectivity as a function of wavelength for said first layer at a plural points on the surface of said first layer to provide a plurality of signatures representing the measured value of reflectivity as a function of wavelength at each point measured; third means for comparing each of said measured signatures to each of said theoretical signatures in said first library to identify an associated optimal correlation for each measured signature; fourth means for calculating an error value associated with each optimal correlation of each signature with one of said theoretical signatures in said first library; and fifth means for analyzing the error value associated with each optimal correlation of each signature with one of said theoretical signatures in said first library to provide a first measure of a quality of a correlation between the actual thickness of said second layer and the first assumed thickness of the second layer.
Claim 2
Independent Claim
220 words
A system for measuring the thicknesses of a first layer and a second layer of materials, one of the layers having a substantially uniform thickness, said system comprising: first means for providing a first library of theoretical signatures of reflectivity as a function of wavelength for a range of thicknesses of said first layer on the basis of a first assumed thickness of said second layer; second means for measuring reflectivity as a function of wavelength for said first layer at a plural points on the surface of said first layer to provide a plurality of signatures representing the measured value of reflectivity as a function of wavelength at each point measured; third means for comparing each of said measured signatures to each of said theoretical signatures in said first library to identify an associated optimal correlation for each measured signature; fourth means for calculating an error value associated with each optimal correlation of each signature with one of said theoretical signatures in said first library; and fifth means for analyzing the error value associated with each optimal correlation of each signature with one of said theoretical signatures in said first library to provide a first measure of a quality of a correlation between the actual thickness of said second layer and the first assumed thickness of the second layer.
Claim 3
Dependent Claim
53 words
The system as set forth in claim 1 wherein said first means provides a set of libraries of theoretical signatures of reflectivity as a function of wavelength for a range of thickness of said first layer, wherein each library in said set is based upon a unique assumed thickness of said second layer.
Claim 4
Dependent Claim
61 words
The system as set forth in claim 2 wherein said fifth means iteratively analyzes the error value associated with each optimal correlation of each signature with one of said theoretical signatures in said each library in said set to provide a measure of the correlation between the actual thickness of said second layer and each assumed thickness of the second layer.
Claim 5
Dependent Claim
28 words
The system as set forth in claim 3 wherein said fifth means identifies the library based upon the most likely estimate of the thickness of the second layer.
Claim 6
Dependent Claim
20 words
The system as set forth in claim 4 wherein said fourth means includes means for calculating a least squares error.
Claim 7
Dependent Claim
23 words
The system as set forth in claim 5 wherein said fifth means includes means for computing the average of said least squares error.
Claim 8
Dependent Claim
49 words
The system as set forth in claim 6 wherein said fifth means includes means for determining the minimum average least squares error and said fifth means identifies the library based upon the most likely estimate of the thickness of the second layer from said minimum average least squares error.
Claim 9
Independent Claim
204 words
A method for measuring the thicknesses of a first layer and a second layer of materials, one of the layers having a substantially uniform thickness, said method including the steps of: providing a first library of theoretical signatures of reflectivity as a function of wavelength for a range of thicknesses of said first layer on the basis of a first assumed thickness of said second layer; measuring reflectivity as a function of wavelength for said first layer at plural points on the surface of said first layer to provide a plurality of signatures representing the measured value of reflectivity as a function of wavelength at each point measured; comparing each of said measured signatures to each of said theoretical signatures in said first library to identify an associated optimal correlation for each measured signature; calculating an error value associated with each optimal correlation of each signature with one of said theoretical signatures in said first library; and analyzing the error value associated with each optimal correlation of each signature with one of said theoretical signatures in said first library to provide a first measure of the correlation between the actual thickness of the second layer and the first assumed thickness of the second layer.
Claim 10
Independent Claim
204 words
A method for measuring the thicknesses of a first layer and a second layer of materials, one of the layers having a substantially uniform thickness, said method including the steps of: providing a first library of theoretical signatures of reflectivity as a function of wavelength for a range of thicknesses of said first layer on the basis of a first assumed thickness of said second layer; measuring reflectivity as a function of wavelength for said first layer at plural points on the surface of said first layer to provide a plurality of signatures representing the measured value of reflectivity as a function of wavelength at each point measured; comparing each of said measured signatures to each of said theoretical signatures in said first library to identify an associated optimal correlation for each measured signature; calculating an error value associated with each optimal correlation of each signature with one of said theoretical signatures in said first library; and analyzing the error value associated with each optimal correlation of each signature with one of said theoretical signatures in said first library to provide a first measure of the correlation between the actual thickness of the second layer and the first assumed thickness of the second layer.
Claim 11
Dependent Claim
32 words
The method as set forth in claim 8 wherein said measuring step is repeated for a plurality of assumed thicknesses of the second layer to provide a plurality of sets of signatures.
Claim 12
Dependent Claim
45 words
The method as set forth in claim 9 wherein said comparing step includes comparing each set of said measured signatures to theoretical signatures in a set of libraries of theoretical signatures, wherein each library is based upon a unique assumed thickness of said second layer.
Claim 13
Dependent Claim
21 words
The method as set forth in claim 10 wherein said calculating step includes calculating an error value associated with each signature.
Claim 14
Dependent Claim
44 words
The method as set forth in claim 11 wherein said analyzing step includes analyzing the error value associated with each signature to provide a measure of the correlation between the actual thickness of the second layer and each assumed thickness of the second layer.
Claim 15
Dependent Claim
21 words
The method as set forth in claim 12 wherein said analyzing step includes the step of calculating a least squares error.
Claim 16
Dependent Claim
31 words
The method as set forth in claim 13 wherein the step of calculating a least squares error is followed by the step of computing the average of said least squares error.
Claim 17
Dependent Claim
57 words
The method as set forth in claim 14 wherein the step of computing the average of said least squares error is followed by the steps of determining the minimum average least squares error and identifying the library based upon the most likely estimate of the thickness of the second layer from said minimum average least squares error.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-09-10 | 2000-03-11 | 2000-09-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-09-10 | 2004-03-11 | 2004-09-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-09-10 | 2008-03-11 | 2008-09-10 | $7700.00 | Window Closed / Lapsed |