US5554560A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for forming a planar field oxide (fox) on substrates for integrated circuit
Assignee: United Microelectronics Corp
•
Filing: 1994-09-30
•
Granted: 1996-09-10
•
Expires: 2014-09-30
Abstract
Abstract An improved process for fabricating a planar field oxide structure on a silicon substrate was achieved. The process involves forming the field oxide by using the LOCal Oxidation of Silicon (LOCOS) process in which the device area is protected from oxidation by a silicon nitride layer. A sacrificial leveling layer, such as spin-on-glass (SOG) or a anti-reflective coating (ARC) layer is used to fill in the gap between the silicon nitride and the field oxide structure and make more planar the substrate surface. The leveling layer is then etched back non-selectively by plasma etching to planarize the portion of the field oxide extending above the substrate surface. The method does not require a recess to be etched in the silicon substrate and therefore, has certain reliability and cost advantages.
Inventors
- 👤 Chen-Chiu Hsue
- 👤 Sun-Chieh Chien
- 👤 Ming-Hua Liu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 18:43
CPC Classifications
H; H10; H10W; H10W10/00; H10W10/01; H10W10/011; H10W10/012; H10P; H10P95/00; H10P95/06; H10P95/062; H10P95/064; H10W10/10; H10W10/13
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
247 words
A method for fabricating planar field oxide (FOX) isolation areas on a silicon substrate having device areas thereon, comprising the steps of: providing a silicon substrate having a principal surface that is planar; thermally oxidizing said silicon substrate principal surface and thereby forming a silicon oxide pad layer; depositing a first insulating layer on said silicon oxide pad layer and thereby forming a barrier layer to oxidation; patterning said first insulating layer and said silicon oxide pad layer by photoresist masking and anisotropic etching, thereby leaving portions of said first insulating layer and silicon oxide pad layer over said device areas and exposing elsewhere said substrate surface; removing said photoresist masking; thermally oxidizing said silicon substrate forming a Field OXide (FOX) structure composed of silicon oxide on and in said exposed surface areas, a portion of which extends upward above the surface of said substrate and surrounds said device areas; forming on said silicon substrate a leveling layer and thereby filling the gaps between said patterned first insulating layer and raised portion of said field oxide structures, wherein said leveling layer is a spin-on-glass layer having a thickness of between about 300 to 1000 Angstroms; blanket etching back said leveling layer, said field oxide structure and said first insulating layer non-selectively by a timed etch thereby planarizing said field oxide structure; removing said remaining first insulating layer and said silicon oxide pad layer and thereby completing said planar field oxide structure surrounding and isolating said device areas.
Claim 2
Independent Claim
247 words
A method for fabricating planar field oxide (FOX) isolation areas on a silicon substrate having device areas thereon, comprising the steps of: providing a silicon substrate having a principal surface that is planar; thermally oxidizing said silicon substrate principal surface and thereby forming a silicon oxide pad layer; depositing a first insulating layer on said silicon oxide pad layer and thereby forming a barrier layer to oxidation; patterning said first insulating layer and said silicon oxide pad layer by photoresist masking and anisotropic etching, thereby leaving portions of said first insulating layer and silicon oxide pad layer over said device areas and exposing elsewhere said substrate surface; removing said photoresist masking; thermally oxidizing said silicon substrate forming a Field OXide (FOX) structure composed of silicon oxide on and in said exposed surface areas, a portion of which extends upward above the surface of said substrate and surrounds said device areas; forming on said silicon substrate a leveling layer and thereby filling the gaps between said patterned first insulating layer and raised portion of said field oxide structures, wherein said leveling layer is a spin-on-glass layer having a thickness of between about 300 to 1000 Angstroms; blanket etching back said leveling layer, said field oxide structure and said first insulating layer non-selectively by a timed etch thereby planarizing said field oxide structure; removing said remaining first insulating layer and said silicon oxide pad layer and thereby completing said planar field oxide structure surrounding and isolating said device areas.
Claim 3
Dependent Claim
24 words
The method of claim 1, wherein said silicon oxide pad layer is thermally grown to a thickness of between about 100 to 500 Angstroms.
Claim 4
Dependent Claim
30 words
The method of claim 1, wherein the first insulating layer is composed of silicon nitride (Si 3 N 4 ) having a thickness of between about 1000 to 2500 Angstroms.
Claim 5
Dependent Claim
13 words
The method of claim 1, wherein said spin-on-glass is of the siloxane type.
Claim 6
Dependent Claim
31 words
The method of claim 1, wherein said spin-on-glass is cured by annealing at a temperature of between about 400° to 450° C. for a time of between 30 to 60 minutes.
Claim 7
Dependent Claim
29 words
The method of claim 1, wherein said blanket back etching is performed in a reactive ion etcher having an etch selectivity of about 1:1 between silicon oxide and spin-on-glass.
Claim 8
Dependent Claim
38 words
The method of claim 1, wherein said blanket etching of said leveling layer and field oxide structure is to a depth of about between 500 to 1000 Angstroms below the initial top surface of said first insulating layer.
Claim 9
Dependent Claim
22 words
The method of claim 1, wherein said etch rate selectivity of said first insulating layer to silicon oxide is 1 to 1.
Claim 10
Independent Claim
238 words
A method for fabricating planar field oxide (FOX) isolation areas on a silicon substrate having device areas thereon, comprising the steps of: providing a silicon substrate having a principle surface that is planar; thermally oxidizing said silicon substrate principle surface and thereby forming a silicon oxide pad layer; depositing a first insulating layer on said silicon oxide pad layer and thereby forming a barrier layer to oxidation; patterning said first insulating layer and said silicon oxide pad layer by photoresist masking and anisotropic etching, thereby leaving portions of said first insulating layer and silicon oxide pad layer over said device areas and exposing elsewhere said substrate surface; removing said photoresist masking; thermally oxidizing said silicon substrate forming a Field OXide (FOX) structure composed of silicon oxide on and in said exposed surface areas, a portion of which extends upward above the surface of said substrate and surrounds said device areas; forming on said silicon substrate a leveling layer composed of spin-on-glass and thereby filling the gaps between said patterned first insulating layer and raised portion of said field oxide structures; blanket etching back said spin-on-glass layer and field oxide structure to a depth below the original top surface of said first insulating layer by a timed etch thereby planarizing said field oxide structure; removing said first insulating layer and said silicon oxide pad layer and thereby completing said planar field oxide structure surrounding and isolating said device areas.
Claim 11
Independent Claim
238 words
A method for fabricating planar field oxide (FOX) isolation areas on a silicon substrate having device areas thereon, comprising the steps of: providing a silicon substrate having a principle surface that is planar; thermally oxidizing said silicon substrate principle surface and thereby forming a silicon oxide pad layer; depositing a first insulating layer on said silicon oxide pad layer and thereby forming a barrier layer to oxidation; patterning said first insulating layer and said silicon oxide pad layer by photoresist masking and anisotropic etching, thereby leaving portions of said first insulating layer and silicon oxide pad layer over said device areas and exposing elsewhere said substrate surface; removing said photoresist masking; thermally oxidizing said silicon substrate forming a Field OXide (FOX) structure composed of silicon oxide on and in said exposed surface areas, a portion of which extends upward above the surface of said substrate and surrounds said device areas; forming on said silicon substrate a leveling layer composed of spin-on-glass and thereby filling the gaps between said patterned first insulating layer and raised portion of said field oxide structures; blanket etching back said spin-on-glass layer and field oxide structure to a depth below the original top surface of said first insulating layer by a timed etch thereby planarizing said field oxide structure; removing said first insulating layer and said silicon oxide pad layer and thereby completing said planar field oxide structure surrounding and isolating said device areas.
Claim 12
Dependent Claim
26 words
The method of claim 9, wherein said silicon oxide pad layer is formed by thermal oxidation to a thickness of between about 100 to 500 Angstroms.
Claim 13
Dependent Claim
30 words
The method of claim 9, wherein the first insulating layer is composed of silicon nitride (Si 3 N 4 ) having a thickness of between about 1000 to 2500 Angstroms.
Claim 14
Dependent Claim
14 words
The method of claim 9, wherein said spin-on-glass layer is of the siloxane type.
Claim 15
Dependent Claim
14 words
The method of claim 9, wherein said spin-on-glass layer is of the silicate type.
Claim 16
Dependent Claim
31 words
The method of claim 13, wherein said spin-on-glass is cured by annealing at a temperature of between about 400° to 450° C. for a time of between 30 to 60 minutes.
Claim 17
Dependent Claim
29 words
The method of claim 9, wherein said blanket back etching is performed in a reactive ion etcher having an etch selectivity of about 1:1 between silicon oxide and spin-on-glass.
Claim 18
Dependent Claim
34 words
The method of claim 9, wherein said leveling layer is an anti-reflective coating (ARC) composed of a polymer and having an etch selectivity to silicon oxide of about 1:1 in a reactive ion etcher.
Claim 19
Dependent Claim
31 words
The method of claim 16, wherein said anti-reflective coating is baked at a temperature of between about 80° to 200° C. and is between about 300 to 800 Angstroms in thickness.
Claim 20
Dependent Claim
38 words
The method of claim 9, wherein said blanket etching of said leveling layer and field oxide structure is to a depth of about between 500 to 1000 Angstroms below the original top surface of said first insulating layer.
References Cited (Backward Citations)
US4398992A
Cited
US4539744A
Cited
US5169801A
Cited
JPH04209534A
Cited
US5236861A
Cited
US5246537A
Cited
JPH06151418A
Cited
US5324689A
Cited
US5374585A
Cited
US5413953A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-09-10 | 2000-03-11 | 2000-09-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-09-10 | 2004-03-11 | 2004-09-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-09-10 | 2008-03-11 | 2008-09-10 | $7700.00 | Window Closed / Lapsed |