Abstract A method of operating an atomic force microscope having a probe tip attached to a free end of a lever which is fixed at its other, wherein the probe tip is scanned in forward and reverse directions in a common scanline across the surface of a sample and either the deflection of the lever or the height of the sample is detected during the forward and reverse scans. The difference between the deflection of the lever or the sample height in the forward and reverse scans is determined as a relative measure of friction. A signal relating to the normal force applied to the sample, can be determined and based thereon, a coefficient of friction of the sample is determined. The signal relating to normal force is derived either from a force curve, or by scanning the probe at different force setpoints. To enhance accuracy of topographical data, the scanning angle is varied in order to minimize differences between the probe deflection (or sample height) during scanning in the forward and reverse directions. Once it is determined which angle results in minimum difference in data obtained during scanning in the forward and reverse directions in a common scanline, topographical data is obtained by scanning the sample at that angle. Frictional data is obtained by scanning at that angle which maximizes the difference between data obtained in forward and reverse scanning directions in a common scanline.
In a method of operating an atomic force microscope having a probe tip attached to a free end of a lever which is fixed at the other end, a sample on which the probe tip is placed, scanning means for producing lateral motion of the tip or sample, and detection means for detecting the bending of the lever, the improvement comprising: a) producing lateral motion of the tip or sample such that during part of the motion, the tip and sample move together because of lateral force between the tip and sample; b) measuring by means of the detection means deflection of the lever during the part of the motion in step a); and c) determining a calibration of the detection means from the known motion in step a) and the deflection measured in step b).
Claim 2
Dependent Claim
136 words
In a method of operating an atomic force microscope having a probe tip attached to a free end of a lever which is fixed at the other end, a sample on which the probe tip is placed, scanning means for producing lateral motion of the tip or sample, and detection means for detecting the bending of the lever, the improvement comprising: a) producing lateral motion of the tip or sample such that during part of the motion, the tip and sample move together because of lateral force between the tip and sample; b) measuring by means of the detection means deflection of the lever during the part of the motion in step a); and c) determining a calibration of the detection means from the known motion in step a) and the deflection measured in step b).
Claim 3
Dependent Claim
40 words
The method according to claim 1, where the lateral motion produced in step a) is produced at an angle to a longitudinal axis of the lever and the deflection of the lever measured in step b) is a torsional deflection.
Claim 4
Dependent Claim
44 words
The method according to claim 1, wherein the detection means comprises a light source and a split photodetector which is sensitive to torsional deflection of the lever, and step b) comprises reflecting light from said light source off said lever to said split photodetector.
Claim 5
Dependent Claim
40 words
A method according to claim 1, wherein the probe tip has a known length and step c) comprises determining an angle of deflection of the lever from the lateral motion produced in step a) and the known probe tip length.
Claim 6
Dependent Claim
32 words
A method according to claim 4, where the spring constant of the arm is used to calibrate the detection means in terms of the lateral force on the tip of the probe.