Patent US5545291A successfully refreshed from Google Patents.
US5545291A
Expired / Lapsed
US
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Method for fabricating self-assembling microstructures
Assignee: University of California
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Filing: 1993-12-17
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Granted: 1996-08-13
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Expires: 2013-12-17
Abstract
Abstract A method for assembling microstructures onto a substrate through fluid transport. The microstructures being shaped blocks self-align into recessed regions located on a substrate such that the microstructure becomes integral with the substrate 20, 70, 90, 120, 200. The improved method includes a step of transferring the shaped blocks into a fluid to create a slurry. Such slurry is then poured evenly over the top surface of a substrate having recessed regions thereon. The microstructure via the shape and fluid tumbles onto the surface of the substrate, self-aligns, and engages into a recessed region.
Inventors
- 👤 John S. Smith
- 👤 Hsi-Jen J. Yeh
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 19:45
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/136; G02F1/1362; H; H10; H10D; H10D62/00; H10D62/10; H10D62/117; H10P; H10P54/00; H10P72/00; H10P72/70; H10P72/74; H10P95/00; H10P95/11; H10P95/112; H10W; H10W70/00; H10W70/099; H10W70/60; H10W70/67; H10W70/68; H10W70/69; H10W70/698; H10W72/00; H10W72/30; H10W90/00; G02F1/1368; H01; H01S; H01S5/00; H01S5/02; H01S5/022; H01S5/0225; H01S5/02251; H01S5/023; H01S5/02325; H01S5/02326; H01S5/10; H01S5/18; H01S5/183; H10H; H10H20/00; H10H20/80; H10H20/81; H10H20/819; H10P72/743; H10W70/682; H10W72/01; H10W72/0198; H10W72/071; H10W72/073; H10W72/07321; H10W72/07327; H10W72/07331; H10W72/07337; H10W74/00
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
76 words
A method of assembling a microstructure on a substrate, said substrate comprising a top surface with at least one recessed region thereon, comprising the steps of: providing a plurality of shaped blocks, said shaped block comprising an integrated circuit device thereon; transferring said shaped blocks into a fluid to form a slurry; and dispensing said slurry over said substrate at a rate where at least one of said shaped blocks is disposed into a recessed region.
Claim 2
Independent Claim
76 words
A method of assembling a microstructure on a substrate, said substrate comprising a top surface with at least one recessed region thereon, comprising the steps of: providing a plurality of shaped blocks, said shaped block comprising an integrated circuit device thereon; transferring said shaped blocks into a fluid to form a slurry; and dispensing said slurry over said substrate at a rate where at least one of said shaped blocks is disposed into a recessed region.
Claim 3
Dependent Claim
28 words
The method of claim 1 wherein said substrate is selected from a group consisting of a silicon wafer, plastic sheet, gallium arsenide wafer, glass substrate, and ceramic substrate.
Claim 4
Dependent Claim
26 words
The method of claim 1 wherein said rate is substantially a laminar flow and allows each of said shaped blocks to self-align into said recessed region.
Claim 5
Dependent Claim
13 words
The method of claim 1 Wherein said shaped blocks include a trapezoidal profile.
Claim 6
Dependent Claim
25 words
The method of claim 4 wherein each of said recessed regions in said substrate is shaped substantially trapezoidal to complement each of said shaped blocks.
Claim 7
Dependent Claim
19 words
The method of claim 4 wherein said trapezoidal shaped blocks include a length at about 10 μm and greater.
Claim 8
Dependent Claim
22 words
The method of claim 1 wherein said fluid is an inert fluid selected from a group consisting of water, acetone, and alcohol.
Claim 9
Dependent Claim
21 words
The method of claim 1 wherein said slurry includes enough fluid to allow said shaped blocks to slide across said substrate.
Claim 10
Dependent Claim
94 words
The method of claim 4 wherein said trapezoidal blocks are fabricated by a method comprising the steps of: providing a second substrate having a top surface; growing a sacrificial layer overlying said top surface; forming a block layer overlying said top surface; masking and etching said block layer up to said sacrificial layer forming a plurality of trapezoidal shaped blocks on and in contact with said sacrificial layer; preferential etching said sacrificial layer lifting off each of said trapezoidal shaped blocks; and transferring said trapezoidal shaped blocks into a solution to form said slurry.
Claim 11
Dependent Claim
19 words
The method of claim 9 further comprising a step of rinsing said blocks subsequent to said preferential etching step.
Claim 12
Dependent Claim
16 words
The method of claim 9 wherein said preferential etching step is a step of wet etching.
Claim 13
Dependent Claim
15 words
The method of claim 9 wherein said wet etching step includes a hydrogen fluoride etchant.
Claim 14
Dependent Claim
24 words
The method of claim 9 wherein said second substrate is selected from the group consisting of gallium arsenide, gallium aluminum arsenide, silicon, and diamond.
Claim 15
Dependent Claim
28 words
The method of claim 4 wherein said trapezoidal shaped block further comprising a truncated pyramid shape including a top surface with four sides protruding therefrom to a base.
Claim 16
Dependent Claim
46 words
The method of claim 14 wherein said base has a length between about 10 μm and about 50 μm, and a width between 10 μm and about 50 μm, and each of said four sides has a height between about 5 μm and about 15 μm.
Claim 17
Independent Claim
84 words
A method of fabricating shaped blocks comprising an integrated circuit device, comprising the steps of: providing a substrate having a top surface and a backside; growing a sacrificial layer made from a material selected from the group consisting of aluminum arsenide, indium phosphate and silicon dioxide overlying said top surface; forming a block layer overlying said top surface; and masking and etching said block layer up to said sacrificial layer forming a plurality of shaped blocks on and in contact with said sacrificial layer.
Claim 18
Independent Claim
84 words
A method of fabricating shaped blocks comprising an integrated circuit device, comprising the steps of: providing a substrate having a top surface and a backside; growing a sacrificial layer made from a material selected from the group consisting of aluminum arsenide, indium phosphate and silicon dioxide overlying said top surface; forming a block layer overlying said top surface; and masking and etching said block layer up to said sacrificial layer forming a plurality of shaped blocks on and in contact with said sacrificial layer.
Claim 19
Dependent Claim
22 words
The method of claim 16 further comprising a step of preferential etching said sacrificial layer lifting off each of said shaped blocks.
Claim 20
Independent Claim
138 words
A method of fabricating shaped blocks comprising an integrated circuit device, comprising the steps of: providing a substrate having a top surface and a backside; growing a sacrificial layer overlying said top surface; forming a block layer overlying said top surface; and masking and etching said block layer up to said sacrificial layer forming a plurality of shaped blocks on and in contact with said sacrificial layer; depositing a filler layer onto a top surface of said shaped blocks and exposed portions of said sacrificial layer; attaching a top surface of an intermediate substrate onto said top surface of said shaped blocks; removing said substrate from said shaped blocks; processing portions of said shaped blocks, said processing step forming integrated circuit devices on said blocks; and removing said filler layer and said shaped blocks from said intermediate substrate.
Claim 21
Independent Claim
138 words
A method of fabricating shaped blocks comprising an integrated circuit device, comprising the steps of: providing a substrate having a top surface and a backside; growing a sacrificial layer overlying said top surface; forming a block layer overlying said top surface; and masking and etching said block layer up to said sacrificial layer forming a plurality of shaped blocks on and in contact with said sacrificial layer; depositing a filler layer onto a top surface of said shaped blocks and exposed portions of said sacrificial layer; attaching a top surface of an intermediate substrate onto said top surface of said shaped blocks; removing said substrate from said shaped blocks; processing portions of said shaped blocks, said processing step forming integrated circuit devices on said blocks; and removing said filler layer and said shaped blocks from said intermediate substrate.
Claim 22
Independent Claim
53 words
A method of fabricating shaped blocks comprising an integrated circuit device, comprising: providing a substrate including a release layer overlying the substrate, and a block layer overlying the release layer; patterning said block layer to form a plurality of shaped blocks; preferential etching said release layer to release said plurality of shaped blocks.
Claim 23
Independent Claim
53 words
A method of fabricating shaped blocks comprising an integrated circuit device, comprising: providing a substrate including a release layer overlying the substrate, and a block layer overlying the release layer; patterning said block layer to form a plurality of shaped blocks; preferential etching said release layer to release said plurality of shaped blocks.
Claim 24
Dependent Claim
27 words
The method of claim 19 wherein said release layer is made from a material selected from the group consisting of aluminum arsenide, indium phosphate, and silicon dioxide.
Claim 25
Dependent Claim
13 words
The method of claim 19 wherein said patterning step includes reactive ion etching.
Claim 26
Dependent Claim
13 words
The method of claim 19 wherein said patterning step includes potassium hydroxide etching.
Claim 27
Dependent Claim
14 words
The method of claim 19 wherein said preferential etching step comprises hydrofluoric acid etching.
Claim 28
Dependent Claim
17 words
The method of claim 19 wherein each of said plurality of shaped blocks includes a sloped sidewall.
Claim 29
Dependent Claim
11 words
The method of claim 24 wherein said sloped sidewall is negative.
Claim 30
Dependent Claim
11 words
The method of claim 24 wherein said sloped sidewall is positive.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-08-13 | 2000-02-12 | 2000-08-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-08-13 | 2004-02-12 | 2004-08-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-08-13 | 2008-02-12 | 2008-08-13 | $7700.00 | Window Closed / Lapsed |