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US4542397A
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Self aligning small scale integrated circuit semiconductor chips to form large area arrays
Assignee: Xerox Corp
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Filing: 1984-04-12
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Granted: 1985-09-17
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Expires: 2004-04-12
Abstract
Abstract Small scale integrated chips are fabricated from a semiconductor wafer and subsequently pretested and formed into large area arrays with self aligning and self locking characteristics due to the axial orientation of the semiconductor wafer and geometries employed for the chips based upon the wafer orientation, whereby the spacing of abutting chip edges in an array may be less than 7 μm. The chips are fabricated from <110> axial wafer, e.g., silicon <110> axial wafer, wherein the chip boundaries are aligned with vertical {111} planes of the crystalline material so that each of the chips formed from the wafer may be defined within parallelogrammatic like geometries defined by these planes and their intersections. The term "parallelogrammatic like geometries" means all geometric shapes capable of being formed with various vertical {111} planes within the crystalline structure of the wafer. Examples of such shapes are parallelograms of various aspect ratios and variations or combinations of planar figures composed of parallelograms. Specific examples of geometries are diamond shaped or chevron shaped configurations.
Inventors
- 👤 David K. Biegelsen
- 👤 Dirk J. Bartelink
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 16:09
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70425; G03F7/70433; H; H10; H10D; H10D62/00; H10D62/40; H10D62/405; H10P; H10P50/00; H10P50/60; H10P50/64; H10P50/642; H10P50/644; H10P54/00; H10W; H10W90/00; H10P72/00; H10P72/70; H10P72/74; H10P72/743; H10W72/00; H10W72/01; H10W72/0198; H10W72/071; H10W72/0711; H10W72/07178; H10W72/072; H10W72/07231; H10W72/07236; H10W72/075; H10W72/07502; H10W72/07504; H10W90/701; H10W90/751; H10W90/753; Y; Y10; Y10S; Y10S148/00; Y10S148/028
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
170 words
A method for self aligning small scale integrated circuit chips to form large area arrays comprising the steps of (a) providing a <110> axial wafer, (b) forming a plurality of small scale integrated circuits on a major surface of said wafer within predetermined latent boundaries on said wafer, said boundaries being aligned with the {111} vertical planes of the wafer whereby each formed circuit is defined within parallelogrammatic like geometries defined by said planes at said predetermined latent boundaries and their plane intersections, (c) selective anisotropically etching along said predetermined boundaries to form a plurality of independent small scale integrated chips comprising said parallelogrammatic like geometries, (d) initially forming said chips into a two dimensional array by placing said chips on a planar support surface in their nearly correct alignment, (e) laterally compacting said chips together in abutting relationship causing said chips to self align and self interlock into a two dimensional array, and (f) maintaining the compacted chips in aligned relation while bounding them to a planar support slab.
Claim 2
Independent Claim
170 words
A method for self aligning small scale integrated circuit chips to form large area arrays comprising the steps of (a) providing a <110> axial wafer, (b) forming a plurality of small scale integrated circuits on a major surface of said wafer within predetermined latent boundaries on said wafer, said boundaries being aligned with the {111} vertical planes of the wafer whereby each formed circuit is defined within parallelogrammatic like geometries defined by said planes at said predetermined latent boundaries and their plane intersections, (c) selective anisotropically etching along said predetermined boundaries to form a plurality of independent small scale integrated chips comprising said parallelogrammatic like geometries, (d) initially forming said chips into a two dimensional array by placing said chips on a planar support surface in their nearly correct alignment, (e) laterally compacting said chips together in abutting relationship causing said chips to self align and self interlock into a two dimensional array, and (f) maintaining the compacted chips in aligned relation while bounding them to a planar support slab.
Claim 3
Dependent Claim
22 words
The method of claim 1 wherein said parallelogrammatic like geometries are selected from the geometric group consisting of parallelograms, diamonds, and chevrons.
Claim 4
Dependent Claim
22 words
The method of claim 1 wherein the step of compacting is achieved by mechanically vibrating said chips on said planar support table.
Claim 5
Dependent Claim
24 words
The method of claim 1 wherein the step of compacting is achieved by supplying pulsating air through apertures provided in said planar support surface.
Claim 6
Independent Claim
42 words
The method of any one of the claims 1-4 wherein there is the additional step of applying lateral pressure along at least one edge of the compacted chips forming an outer perimeter of said array to enhance the compaction and alignment thereof.
Claim 7
Independent Claim
30 words
The method of any one of the claims 1-4 wherein there is the additional step of tilting said planar support surface to enhance the compaction and alignment of said chips.
Claim 8
Dependent Claim
21 words
The method of claim 6 wherein there is the additional step of mechanically vibrating said chips on said planar support table.
Claim 9
Dependent Claim
23 words
The method of claim 6 wherein there is the additional step of supplying pulsating air through apertures provided in said planar support surface.
Claim 10
Dependent Claim
28 words
The method of claim 1 wherein the step of compacting of said chips to form said array achieves spacing of chip abutting edges to less than 7 μm.
Claim 11
Dependent Claim
22 words
The method of claim 1 wherein the spacing of chip abutting edges is within the range of 2 μm to 7 μm.
Claim 12
Dependent Claim
88 words
A large area array formed from a plurality of small scale integrated chips in self aligned and self interlocking abutment in accordance with the method of claim 1 wherein the spacing between adjacent chip edges of said array chips is less than 7 μm, said array chips fabricated from a <110> axial wafer wherein the chip boundaries are aligned with {111} vertical planes of said wafer so that each of said array chips may be defined within parallelogrammatic like geometries defined by said planes and their plane intersections.
Claim 13
Dependent Claim
24 words
The large area array of claim 11 wherein said parallelogrammatic like geometries are selected from the geometric group consisting of parallelograms, diamonds and chevrons.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-09-16 | 1989-03-18 | 1989-09-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-09-16 | 1993-03-18 | 1993-09-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-09-16 | 1997-03-18 | 1997-09-17 | $7700.00 | Window Closed / Lapsed |