Patent US5543946A successfully refreshed from Google Patents.
US5543946A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Liquid crystal device and display apparatus with multilayer electrodes
Assignee: Canon Inc
•
Filing: 1995-02-09
•
Granted: 1996-08-06
•
Expires: 2015-02-09
Abstract
Abstract A liquid crystal device is formed by disposing a liquid crystal between a pair of oppositely disposed electrodes, at least one of which has a laminated structure including a first layer of ITO (indium tin oxide), a second layer of Mo (molybdenum) or its alloy, and a third layer of Al (aluminum) or its alloy, disposed in the order named. Because of the Mo-based second layer, the ITO layer is protected during development of a photoresist layer formed on the Al-based third layer even if some pinholes are present in the Al-based third layer. The Mo-based second layer can be etched by an etchant for the Al-based third layer so that the entire process is not complicated because of the provision of the Mo-based second layer.
Inventors
- 👤 Takashi Enomoto
- 👤 Toshifumi Yoshioka
- 👤 Naoya Nishida
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 10:37
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/1333; G02F1/1343; G02F1/13439
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
192 words
A process for producing an electrode plate comprising a patterned indium tin oxide film having thereon an aluminum-based metal wiring disposed via a molybdenum alloy layer, comprising the steps of: (a) forming an indium tin oxide film on a glass substrate and patterning the film into a prescribed pattern according to a photolithographic process; (b) coating the indium tin oxide film in the prescribed pattern on the glass substrate successively with a first metal film of an alloy of molybdenum with an additive metal selected from the group consisting of Ta, Ti, Si, Cr, V, Nb and W to control the etching speed of said first metal film, and a second metal film of aluminum or an aluminum alloy having a thickness larger than that of said first metal film; (c) coating the second metal film with a photoresist film, exposing the photoresist film in a prescribed pattern, and developing the photoresist film with an alkaline developer to expose a part of the second metal film; and (d) etching the exposed part of the second metal film and the first metal film therebelow with a single etchant at substantially equal etching speeds.
Claim 2
Dependent Claim
192 words
A process for producing an electrode plate comprising a patterned indium tin oxide film having thereon an aluminum-based metal wiring disposed via a molybdenum alloy layer, comprising the steps of: (a) forming an indium tin oxide film on a glass substrate and patterning the film into a prescribed pattern according to a photolithographic process; (b) coating the indium tin oxide film in the prescribed pattern on the glass substrate successively with a first metal film of an alloy of molybdenum with an additive metal selected from the group consisting of Ta, Ti, Si, Cr, V, Nb and W to control the etching speed of said first metal film, and a second metal film of aluminum or an aluminum alloy having a thickness larger than that of said first metal film; (c) coating the second metal film with a photoresist film, exposing the photoresist film in a prescribed pattern, and developing the photoresist film with an alkaline developer to expose a part of the second metal film; and (d) etching the exposed part of the second metal film and the first metal film therebelow with a single etchant at substantially equal etching speeds.
Claim 3
Dependent Claim
18 words
A process according to claim 1, wherein said first metal film comprises an alloy of molybdenum and tantalum.
Claim 4
Dependent Claim
18 words
A process according to claim 1, wherein said first metal film comprises an alloy of molybdenum and titanium.
Claim 5
Dependent Claim
19 words
A process according to claim 1, wherein said additive metal is contained in a proportion of 1-30 wt. %.
Claim 6
Dependent Claim
19 words
A process according to claim 1, wherein said additive metal is contained in a proportion of 5-15 wt. %.
References Cited (Backward Citations)
EP0062289A2
Cited
JPS62263676A
Cited
NL8702508A
Cited
US4853296A
Cited
US4859036A
Cited
JPS63289533A
Cited
US5000545A
Cited
US4937423A
Cited
US5007716A
Cited
US5187601A
Cited
US5161043A
Cited
US5150233A
Cited
US5227899A
Cited
US5361153A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-08-06 | 2000-02-05 | 2000-08-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-08-06 | 2004-02-05 | 2004-08-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-08-06 | 2008-02-05 | 2008-08-06 | $7700.00 | Window Closed / Lapsed |