US5187601A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for making a high contrast liquid crystal display including laser scribing opaque and transparent conductive strips simultaneously
Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 1991-12-17
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Granted: 1993-02-16
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Expires: 2011-12-17
Abstract
Abstract A method for forming a resistance-reducing electrode pattern in an electrooptical device includes the steps of: forming a transparent conductive film on a substrate; forming a plurality of opaque conductive strips on the film; and scribing the combined structure with a laser through the two layers to simultaneously divide the conductive strips into two parts and pattern the transparent film. In this manner, a pattern of transparent electrodes bordered with an opaque electrode pattern is formed. In specific embodiments, the opaque strips may comprise chromium, and the opaque conductive strips may be formed prior to application of the steps above by laser scribing an applied opaque film layer.
Inventors
- 👤 Shunpei Yamazaki
- 👤 Takeshi Fukada
- 👤 Mitsunori Sakama
- 👤 Nobumitsu Amachi
- 👤 Naoya Sakamoto
- 👤 Mitsufumi Codama
- 👤 Takashi Fuki
- 👤 Ichiro Takayama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 23:27
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/1333; G02F1/1343; G02F1/134309; G02F1/134336; G02F1/1335; G02F1/133509; G02F1/133512
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
108 words
A method for forming an electrode pattern for an electro-optical device, said electrode pattern comprising a plurality of transparent conductive strips, on each of which is provided with an opaque conductive material at its edge portions, said method comprising the steps of: forming a transparent conductive film on a substrate; forming a plurality of opaque conductive strips on said transparent conductive film; laser scribing a portion of said opaque conductive strips in order to divide each of the opaque conductive strips into two parts, wherein said transparent conductive film is patterned into said plurality of transparent conductive strips by said laser scribing simultaneously with said opaque conductive strips.
Claim 2
Independent Claim
108 words
A method for forming an electrode pattern for an electro-optical device, said electrode pattern comprising a plurality of transparent conductive strips, on each of which is provided with an opaque conductive material at its edge portions, said method comprising the steps of: forming a transparent conductive film on a substrate; forming a plurality of opaque conductive strips on said transparent conductive film; laser scribing a portion of said opaque conductive strips in order to divide each of the opaque conductive strips into two parts, wherein said transparent conductive film is patterned into said plurality of transparent conductive strips by said laser scribing simultaneously with said opaque conductive strips.
Claim 3
Dependent Claim
15 words
The method of claim 1 wherein said laser scribing is implemented with an excimer laser.
Claim 4
Dependent Claim
27 words
The method of claim 1 wherein said transparent conductive film comprises a material selected from the group consisting of indium tin oxide, tin oxide and zinc oxide.
Claim 5
Dependent Claim
25 words
The method of claim 1 wherein said opaque conductive strips comprises a metal selected from the group consisting of CR, Ti, Al, W and Mo.
Claim 6
Dependent Claim
22 words
The method of claim 1 wherein the width of said opaque conductive strips before the laser scribing step is about 30 μm.
Claim 7
Dependent Claim
16 words
The method of claim 1 wherein said opaque conductive strips are formed by a lift-off method.
Claim 8
Dependent Claim
16 words
The method of claim 1 wherein the thickness of said transparent conductive film is 500-2000 Å.
Claim 9
Independent Claim
107 words
A method for forming an electrode pattern for an electro-optical device, said electrode pattern comprising a plurality of transparent conductive strips, on each of which is provided with chromium at its edge portions, said method comprising the steps of: forming a transparent conductive film on a substrate; forming a plurality of opaque conductive strips comprising chromium on said transparent conductive film; laser scribing a portion of said opaque conductive strips in order to divide each of the opaque conductive strips into two parts, wherein said transparent conductive film is patterned into said plurality of transparent conductive strips by said laser scribing simultaneously with said opaque conductive strips.
Claim 10
Independent Claim
107 words
A method for forming an electrode pattern for an electro-optical device, said electrode pattern comprising a plurality of transparent conductive strips, on each of which is provided with chromium at its edge portions, said method comprising the steps of: forming a transparent conductive film on a substrate; forming a plurality of opaque conductive strips comprising chromium on said transparent conductive film; laser scribing a portion of said opaque conductive strips in order to divide each of the opaque conductive strips into two parts, wherein said transparent conductive film is patterned into said plurality of transparent conductive strips by said laser scribing simultaneously with said opaque conductive strips.
Claim 11
Dependent Claim
15 words
The method of claim 8 wherein said laser scribing is implemented with an excimer laser.
Claim 12
Dependent Claim
27 words
The method of claim 8 wherein said transparent conductive film comprises a material selected from the group consisting of indium tin oxide, tin oxide and zinc oxide.
Claim 13
Dependent Claim
22 words
The method of claim 8 wherein the width of said opaque conductive strips before the laser scribing step is about 30 μm.
Claim 14
Dependent Claim
16 words
The method of claim 8 wherein said opaque conductive strips are formed by a lift-off method.
Claim 15
Independent Claim
117 words
A method for forming an electrode pattern for an electro-optical device, said electrode pattern comprising a plurality of transparent conductive strips, on each of which is provided with an opaque conductive material at its side edges, said method comprising the steps of: forming an opaque conductive film on said transparent conductive film; patterning said opaque conductive film by a first laser scribing into a plurality of opaque conductive strips; patterning said opaque conductive strips by a second laser scribing in order to divide each of the opaque conductive strips into two parts, wherein said transparent conductive film is patterned into said plurality of transparent conductive strips by said second laser scribing simultaneously with said opaque conductive strips.
Claim 16
Independent Claim
117 words
A method for forming an electrode pattern for an electro-optical device, said electrode pattern comprising a plurality of transparent conductive strips, on each of which is provided with an opaque conductive material at its side edges, said method comprising the steps of: forming an opaque conductive film on said transparent conductive film; patterning said opaque conductive film by a first laser scribing into a plurality of opaque conductive strips; patterning said opaque conductive strips by a second laser scribing in order to divide each of the opaque conductive strips into two parts, wherein said transparent conductive film is patterned into said plurality of transparent conductive strips by said second laser scribing simultaneously with said opaque conductive strips.
Claim 17
Dependent Claim
18 words
The method of claim 13 wherein said first and second laser scribing is implemented with an excimer laser.
Claim 18
Dependent Claim
27 words
The method of claim 13 wherein said transparent conductive film comprises a material selected from the group consisting of indium tin oxide, tin oxide and zinc oxide.
Claim 19
Dependent Claim
25 words
The method of claim 13 wherein said opaque conductive strips comprises a metal selected from the group consisting of Cr, Ti, Al, W and Mo.
Claim 20
Dependent Claim
23 words
The method of claim 13 wherein the width of said opaque conductive strips before the second laser scribing step is about 30 μm.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-02-16 | 1996-08-17 | 1997-02-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-02-16 | 2000-08-17 | 2001-02-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-02-16 | 2004-08-17 | 2005-02-16 | $7700.00 | Window Closed / Lapsed |