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US4906491A
Expired / Lapsed
US
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Semiconductor device manufacturing methods
Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 1988-04-25
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Granted: 1990-03-06
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Expires: 2008-04-25
Abstract
Abstract In a photoelectric conversion device manufacturing method which includes at least a step of forming a non-single-crystal semiconductor layer, a transparent or nontransparent layer, or a laminate member composed of transparent and nontransparent layers by patterning with a laser beam, a laser beam which has a short wavelength of 600 nm or less, a spot diameter of 3 to 60 nm and a width of 50 nano-second is used for the patterning.
Inventors
- 👤 Shunpei Yamazaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 01:46
CPC Classifications
H; H10; H10P; H10P34/00; H10P34/40; H10P34/42; C; C23; C23C; C23C14/00; C23C14/04; C23C14/048; H10F; H10F19/00; H10F19/30; H10F19/31; H10F19/33; H10F77/00; H10F77/10; H10F77/16; H10F77/169; H10F77/1692; H10F77/20; H10F77/206; H10F77/211; H10P52/00; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y10; Y10S; Y10S438/00; Y10S438/94
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
99 words
A method for patterning a transparent conductive layer disposed on a transparent insulating substrate comprising the step of irradiating said layer with a laser beam, said method characterized in that said transparent conductive layer is made of a sublimable conductive material selected from the group consisting of indium oxide, tin oxide and indium-tin oxide, that the thickness of said transparent conductive layer is one micron or less, and that said laser beam is emitted from an eximer laser, whereby said transparent conductive layer is formed into a plurality of electrically independent segments without damage to the transparent insulating substrate.
Claim 2
Independent Claim
99 words
A method for patterning a transparent conductive layer disposed on a transparent insulating substrate comprising the step of irradiating said layer with a laser beam, said method characterized in that said transparent conductive layer is made of a sublimable conductive material selected from the group consisting of indium oxide, tin oxide and indium-tin oxide, that the thickness of said transparent conductive layer is one micron or less, and that said laser beam is emitted from an eximer laser, whereby said transparent conductive layer is formed into a plurality of electrically independent segments without damage to the transparent insulating substrate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-03-05 | 1993-09-04 | 1994-03-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-03-05 | 1997-09-04 | 1998-03-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-03-05 | 2001-09-04 | 2002-03-06 | $7700.00 | Window Closed / Lapsed |